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Title: Strain Relaxation and Relative Defect Density with Thickness in MBE-Grown Ge0.85Sn0.15 on Ge(001)

Journal Article · · Crystal Growth and Design

Germanium–tin (GeSn) alloys are emerging as promising materials for mid-infrared optoelectronics and silicon-compatible photonic devices, owing to their tunable direct bandgap. However, the growth of high-quality GeSn films with high Sn content remains challenging due to strain-induced defect formation. In this study, we investigate the role of film thickness on strain-induced relaxation, defect density, and Sn segregation. A series of five samples with varying thicknesses and ∼15% Sn-containing GeSn layers were grown, ranging from the critical thickness for strain relaxation to the onset of Sn segregation. All GeSn samples were analyzed using X-ray diffraction reciprocal space mapping (XRD-RSM) to explore the evolution of strain-induced relaxation as a function of thickness. Photoluminescence measurements reveal that increasing the GeSn thickness enhances strain relaxation while reducing defect-related emission, indicating a decrease in effective defect density prior to reaching the threshold thickness of GeSn layer. At a thickness of ∼150 nm, the GeSn layer shows the onset of Sn segregation, evident in the XRD-RSM spectrum, marking the threshold thickness for Sn segregation. This work defines an effective growth window in terms of thickness (35 to 150 nm) for fabricating relaxed, defect-suppressed GeSn layers with 15% Sn content. These findings emphasize the crucial role of thickness control in balancing strain relaxation and defect suppression, advancing the fabrication of high-quality, high Sn-content relaxed GeSn using molecular beam epitaxy.

Research Organization:
Energy Frontier Research Centers (EFRC) (United States). μ-ATOMS; Univ. of Arkansas, Fayetteville, AR (United States)
Sponsoring Organization:
Office of Naval Research; USDOE Office of Science (SC), Basic Energy Sciences (BES)
Grant/Contract Number:
SC0023412
OSTI ID:
3376577
Journal Information:
Crystal Growth and Design, Journal Name: Crystal Growth and Design Journal Issue: 13 Vol. 26; ISSN 1528-7505; ISSN 1528-7483
Publisher:
American Chemical SocietyCopyright Statement
Country of Publication:
United States
Language:
English

References (40)

Radiative recombination in germanium with high dislocation densities journal November 1970
Photoluminescence and splitting of dislocations in germanium journal March 1992
Photovoltage spectroscopy of direct and indirect bandgaps of strained Ge1-Sn thin films on a Ge/Si(001) substrate journal June 2019
MBE growth of ultra-thin GeSn film with high Sn content and its infrared/terahertz properties journal April 2016
MBE-based growth of Sn-rich quantum wells and dots at low Sn deposition rates journal October 2023
Dislocation-Related Photoluminescence Emission in MBE-Grown GeSn journal July 2025
Direct Bandgap Group IV Epitaxy on Si for Laser Applications journal June 2015
Carrier Dynamics in Thin Germanium–Tin Epilayers journal January 2021
Lasing in direct-bandgap GeSn alloy grown on Si journal January 2015
Investigation of GeSn Strain Relaxation and Spontaneous Composition Gradient for Low-Defect and High-Sn Alloy Growth journal April 2018
Direct-gap group IV semiconductors based on tin journal January 1982
Epitaxial growth of ultrahigh density Ge1−xSnx quantum dots on Si (111) substrates by codeposition of Ge and Sn on ultrathin SiO2 films journal December 2007
Achieving direct band gap in germanium through integration of Sn alloying and external strain journal February 2013
Lattice constant and substitutional composition of GeSn alloys grown by molecular beam epitaxy journal July 2013
Si based GeSn photoconductors with a 1.63 A/W peak responsivity and a 2.4  μ m long-wavelength cutoff journal December 2014
Critical thickness for strain relaxation of Ge1−xSnx (x ≤ 0.17) grown by molecular beam epitaxy on Ge(001) journal June 2015
Systematic study of GeSn heterostructure-based light-emitting diodes towards mid-infrared applications journal July 2016
Electrical properties of extended defects in strain relaxed GeSn journal July 2018
Calculation of critical layer thickness versus lattice mismatch for Ge x Si 1− x /Si strained‐layer heterostructures journal August 1985
Erratum: Calculation of critical layer thickness versus lattice mismatch for GexSi1−x/Si strained-layer heterostructures [Appl. Phys. Lett. 4 7, 322 (1985)] journal July 1986
Monolithic infrared silicon photonics: The rise of (Si)GeSn semiconductors journal March 2021
Defects in Ge and GeSn and their impact on optoelectronic properties journal December 2024
Determination of composition, strain, and layer thickness of germanium-tin superlattices using x-ray diffraction journal March 2026
X-ray analysis of thin films and multilayers journal November 1996
Compositional dependence of the direct and indirect band gaps in Ge 1− y Sn y alloys from room temperature photoluminescence: implications for the indirect to direct gap crossover in intrinsic and n -type materials journal October 2014
MBE growth and characterization of strained GeSn/Ge multiple quantum well structures journal May 2025
Impact of defects on photoexcited carrier relaxation dynamics in GeSn thin films journal February 2020
Indirect-to-direct gap transition in strained and unstrained Sn x Ge 1 − x alloys journal April 2014
Silicon Based GeSn p-i-n Photodetector for SWIR Detection journal October 2016
Germanium-Tin on Si Avalanche Photodiode: Device Design and Technology Demonstration journal January 2015
STM and ARPES characterization of quality of GeSn grown on Ge(001) for atomic ordering investigations journal April 2026
Si based GeSn light emitter: mid-infrared devices in Si photonics conference February 2015
GeSn/Ge quantum well photodetectors for short-wave infrared photodetection: experiments and modeling conference May 2017
Crystalline Properties and Strain Relaxation Mechanism of CVD Grown GeSn journal January 2013
Quantum-confined photoluminescence from Ge_1−xSn_x/Ge superlattices on Ge-buffered Si(001) substrates journal September 2013
Optical suppression of defect-related photoluminescence in GeSn journal April 2026
Group IV Direct Band Gap Photonics: Methods, Challenges, and Opportunities journal July 2015
The Epitaxial Growth of Ge and GeSn Semiconductor Thin Films on C-Plane Sapphire journal April 2024
The Construction of a Lattice Image and Dislocation Analysis in High-Resolution Characterizations Based on Diffraction Extinctions journal January 2024
Polycrystalline GeSn thin films on Si formed by alloy evaporation journal May 2015

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