Surface science insight note: Optimizing XPS instrument performance for quantification of spectra

Fernandez, Vincent; Renault, Olivier; Fairley, Neal; Baltrusaitis, Jonas

doi:10.1002/sia.7296

Title: Surface science insight note: Optimizing XPS instrument performance for quantification of spectra

Journal Article · Thu Mar 14 00:00:00 UTC 2024 · Surface and Interface Analysis

DOI: https://doi.org/10.1002/sia.7296 · OSTI ID:2575934

Fernandez, Vincent ^[1]; Renault, Olivier ^[2]; Fairley, Neal ^[3];

^[4]

Centre National de la Recherche Scientifique (CNRS) (France); Université de Nantes (France)
Univ. Grenoble Alpes (France)
Casa Software Ltd, Teignmouth, (United Kingdom)
Lehigh Univ., Bethlehem, PA (United States)

X-ray photoelectron spectroscopy (XPS) provides quantitative information from photoemission peaks and shapes observed within the background due to the inelastic scattering of photoelectrons. To quantify the signal, both photoemission peaks and background in spectra must be adjusted for instrumental transmission variations that are a consequence of changes in efficiency when recording electrons with different kinetic energy. While it is generally assumed that correcting spectroscopic data for transmission is a necessary part of quantification by XPS, there are consequences for the quantification of spectra measured using an instrument for which transmission has significant curvature. In this Insight, the implications of curvature in transmission characteristics are discussed and a method based on XPS microscopy is proposed that ensures the transmission response of an instrument is free from significant curvature. An example of an instrument for which a flat transmission response is presented is achieved through collecting spectra using lens modes designed to measure stigmatic images.

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Research Organization:: Georgia Institute of Technology, Atlanta, GA (United States)

Sponsoring Organization:: Centre national de la recherche scientifique (CNRS); USDOE Office of Science (SC), Basic Energy Sciences (BES)

Grant/Contract Number:: SC0012577

OSTI ID:: 2575934

Journal Information:: Surface and Interface Analysis, Journal Name: Surface and Interface Analysis Journal Issue: 7 Vol. 56; ISSN 1096-9918; ISSN 0142-2421

Publisher:: WileyCopyright Statement

Country of Publication:: United States

Language:: English

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37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY
Chemistry
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aberration
imaging
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Title: Surface science insight note: Optimizing XPS instrument performance for quantification of spectra

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References (18)

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