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Deposition and characterization of α-Fe2O3/Pd thin films for neutron reflectometry studies
Abstract
We report deposition of hematite/Pd thin films on silicon wafers via radio frequency (RF) magnetron sputtering and subsequent characterization for future in situ neutron reflectometry studies. Following deposition, the hematite/Pd thin films were characterized as prepared and after annealing in air for 2h at 400, 500, and 600 °C, respectively. Raman spectroscopy, grazing incidence x-ray diffraction, and neutron reflectometry (NR) were used to characterize the structure and chemical compositions of the thin films. The results indicate that pure α-Fe2O3 (hematite) films were produced, free from other iron oxide phases and impurities. NR data reveal that one intermediate layer between the Pd layer and the hematite layer was formed during sputtering deposition processes. The fitted scattering length density (SLD) of the as-deposited hematite layer is 70% of the theoretical SLD value, indicating that the grains are loosely packed in the RF-deposited hematite films. After annealing at elevated temperatures, the hematite films show increased SLD values but remain comparable to that of preannealed.
- Authors:
-
[1];
[1];
[2];
[2];
[1];
[4];
[1]
- Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)
- Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States). Center for Integrated Nanotechnologies (CINT)
- Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States). Center for Nanophase Materials Sciences (CNMS)
- Univ. of Tennessee, Knoxville, TN (United States)
- Publication Date:
- Research Org.:
- Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States). Center for Nanophase Materials Sciences (CNMS); Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Org.:
- USDOE Office of Science (SC), Basic Energy Sciences (BES); USDOE National Nuclear Security Administration (NNSA); USDOE Laboratory Directed Research and Development (LDRD) Program
- OSTI Identifier:
- 1991731
- Alternate Identifier(s):
- OSTI ID: 2311362
- Report Number(s):
- SAND-2024-01339J
Journal ID: ISSN 0734-2101
- Grant/Contract Number:
- AC05-00OR22725; NA0003525
- Resource Type:
- Accepted Manuscript
- Journal Name:
- Journal of Vacuum Science and Technology A
- Additional Journal Information:
- Journal Volume: 41; Journal Issue: 5; Journal ID: ISSN 0734-2101
- Publisher:
- American Vacuum Society / AIP
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE; Neutron reflectometry; Raman spectroscopy; Magnetron sputtering; Thin films; X-ray diffraction
Citation Formats
Wang, Hanyu, Self, Ethan C., Addamane, Sadhvikas J., Rouleau, Christopher M., Wixom, Ryan R., Browning, Katie L., Veith, Gabriel M., Liang, Liyuan, and Browning, James F. Deposition and characterization of α-Fe2O3/Pd thin films for neutron reflectometry studies. United States: N. p., 2023.
Web. doi:10.1116/6.0002717.
Wang, Hanyu, Self, Ethan C., Addamane, Sadhvikas J., Rouleau, Christopher M., Wixom, Ryan R., Browning, Katie L., Veith, Gabriel M., Liang, Liyuan, & Browning, James F. Deposition and characterization of α-Fe2O3/Pd thin films for neutron reflectometry studies. United States. https://doi.org/10.1116/6.0002717
Wang, Hanyu, Self, Ethan C., Addamane, Sadhvikas J., Rouleau, Christopher M., Wixom, Ryan R., Browning, Katie L., Veith, Gabriel M., Liang, Liyuan, and Browning, James F. Fri .
"Deposition and characterization of α-Fe2O3/Pd thin films for neutron reflectometry studies". United States. https://doi.org/10.1116/6.0002717.
@article{osti_1991731,
title = {Deposition and characterization of α-Fe2O3/Pd thin films for neutron reflectometry studies},
author = {Wang, Hanyu and Self, Ethan C. and Addamane, Sadhvikas J. and Rouleau, Christopher M. and Wixom, Ryan R. and Browning, Katie L. and Veith, Gabriel M. and Liang, Liyuan and Browning, James F.},
abstractNote = {We report deposition of hematite/Pd thin films on silicon wafers via radio frequency (RF) magnetron sputtering and subsequent characterization for future in situ neutron reflectometry studies. Following deposition, the hematite/Pd thin films were characterized as prepared and after annealing in air for 2h at 400, 500, and 600 °C, respectively. Raman spectroscopy, grazing incidence x-ray diffraction, and neutron reflectometry (NR) were used to characterize the structure and chemical compositions of the thin films. The results indicate that pure α-Fe2O3 (hematite) films were produced, free from other iron oxide phases and impurities. NR data reveal that one intermediate layer between the Pd layer and the hematite layer was formed during sputtering deposition processes. The fitted scattering length density (SLD) of the as-deposited hematite layer is 70% of the theoretical SLD value, indicating that the grains are loosely packed in the RF-deposited hematite films. After annealing at elevated temperatures, the hematite films show increased SLD values but remain comparable to that of preannealed.},
doi = {10.1116/6.0002717},
journal = {Journal of Vacuum Science and Technology A},
number = 5,
volume = 41,
place = {United States},
year = {Fri Jul 14 00:00:00 EDT 2023},
month = {Fri Jul 14 00:00:00 EDT 2023}
}
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