Broadband titanium nitride disordered metasurface absorbers

Chang, Chun-Chieh; Kuo, Shin-Chun; Cheng, Hsyi-En; Chen, Hou-Tong; Yang, Zu-Po

doi:10.1364/OE.445247

Title: Broadband titanium nitride disordered metasurface absorbers

Abstract

We experimentally demonstrate titanium nitride (TiN) broadband metasurface perfect absorbers by conformally coating plasmonic TiN films onto disordered anodic aluminum oxide (AAO) nanotemplates. The disordered metasurface absorbers exhibit polarization-insensitive and weak angle-dependent perfect absorption over the entire visible and near-infrared spectral regions (300 < λ < 2500 nm). We show from experimental results and numerical simulations that the light scattering induced by the strong disorder of the AAO nanopores and the strong absorption of the TiN deposited on their sidewall are of critical importance for achieving broadband perfect absorption. The TiN disordered metasurface perfect absorbers are superior to many other types of broadband perfect absorbers previously reported and are more suitable for practical applications especially in harsh environments. The device concept for broadband perfect absorption based on plasmonic metal-nitride film coated disordered dielectric media could potentially be extended to significantly enhance the efficiency of solar energy harvesting and the performance of hot-carrier based optoelectronics.

Authors:

; Kuo, Shin-Chun; Cheng, Hsyi-En;

; Yang, Zu-Po

Publication Date:: Wed Dec 08 00:00:00 EST 2021

Sponsoring Org.:: USDOE

OSTI Identifier:: 1842558

Grant/Contract Number:: 89233218CNA000001

Resource Type:: Published Article

Journal Name:: Optics Express

Additional Journal Information:: Journal Name: Optics Express Journal Volume: 29 Journal Issue: 26; Journal ID: ISSN 1094-4087

Publisher:: Optical Society of America

Country of Publication:: United States

Language:: English

Citation Formats


                    Chang, Chun-Chieh, Kuo, Shin-Chun, Cheng, Hsyi-En, Chen, Hou-Tong, and Yang, Zu-Po. Broadband titanium nitride disordered metasurface absorbers.  United States: N. p., 2021. 
Web.  doi:10.1364/OE.445247.

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                    Chang, Chun-Chieh, Kuo, Shin-Chun, Cheng, Hsyi-En, Chen, Hou-Tong, & Yang, Zu-Po. Broadband titanium nitride disordered metasurface absorbers.  United States.  https://doi.org/10.1364/OE.445247

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                    Chang, Chun-Chieh, Kuo, Shin-Chun, Cheng, Hsyi-En, Chen, Hou-Tong, and Yang, Zu-Po. Wed .  
"Broadband titanium nitride disordered metasurface absorbers".  United States.  https://doi.org/10.1364/OE.445247.

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@article{osti_1842558,

  title        = {Broadband titanium nitride disordered metasurface absorbers},

  author       = {Chang, Chun-Chieh and Kuo, Shin-Chun and Cheng, Hsyi-En and Chen, Hou-Tong and Yang, Zu-Po},

  abstractNote = {We experimentally demonstrate titanium nitride (TiN) broadband metasurface perfect absorbers by conformally coating plasmonic TiN films onto disordered anodic aluminum oxide (AAO) nanotemplates. The disordered metasurface absorbers exhibit polarization-insensitive and weak angle-dependent perfect absorption over the entire visible and near-infrared spectral regions (300 <  λ < 2500 nm). We show from experimental results and numerical simulations that the light scattering induced by the strong disorder of the AAO nanopores and the strong absorption of the TiN deposited on their sidewall are of critical importance for achieving broadband perfect absorption. The TiN disordered metasurface perfect absorbers are superior to many other types of broadband perfect absorbers previously reported and are more suitable for practical applications especially in harsh environments. The device concept for broadband perfect absorption based on plasmonic metal-nitride film coated disordered dielectric media could potentially be extended to significantly enhance the efficiency of solar energy harvesting and the performance of hot-carrier based optoelectronics.},

  doi          = {10.1364/OE.445247},

  journal      = {Optics Express},

  number       = 26,

  volume       = 29,

  place        = {United States},

  year         = {Wed Dec 08 00:00:00 EST 2021},

  month        = {Wed Dec 08 00:00:00 EST 2021}

}

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Title: Broadband titanium nitride disordered metasurface absorbers

Abstract

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Refractometric and colorimetric index sensing by a plasmon-coupled hybrid AAO nanotemplate journal, January 2015

An ultra-black silicon absorber: An ultra-black silicon absorber journal, January 2014

Ultra-broadband and wide-angle perfect solar absorber based on TiN nanodisk and Ti thin film structure journal, July 2020

Tungsten black absorber for solar light with wide angular operation range journal, May 2008

Alternative Plasmonic Materials: Beyond Gold and Silver journal, May 2013

Solution‐Processed All‐Ceramic Plasmonic Metamaterials for Efficient Solar–Thermal Conversion over 100–727 ° C journal, November 2020

Size-dependent melting point of noble metals journal, September 2003

Polarization insensitive, broadband terahertz metamaterial absorber journal, January 2011

All-Ceramic Solar-Driven Water Purifier Based on Anodized Aluminum Oxide and Plasmonic Titanium Nitride journal, November 2018

Broadband super-Planckian thermal emission from hyperbolic metamaterials journal, September 2012

Ultra-broadband perfect solar absorber by an ultra-thin refractory titanium nitride meta-surface journal, June 2018

Broadband polarization-independent resonant light absorption using ultrathin plasmonic super absorbers journal, November 2011

Conformal Coating on Ultrahigh-Aspect-Ratio Nanopores of Anodic Alumina by Atomic Layer Deposition journal, September 2003

Nanoparticle plasmonics: going practical with transition metal nitrides journal, May 2015

Bandwidth enhancement in disordered metamaterial absorbers journal, August 2014

Substrate-insensitive atomic layer deposition of plasmonic titanium nitride films journal, January 2017

Metamaterial Perfect Absorber Based Hot Electron Photodetection journal, May 2014

Plasmonic and metamaterial structures as electromagnetic absorbers: Plasmonic and metamaterial absorbers journal, June 2014

Titanium nitride as a plasmonic material for visible and near-infrared wavelengths journal, January 2012

Surface Plasmon Resonance and Interference Coenhanced SERS Substrate of AAO/Al-Based Ag Nanostructure Arrays journal, October 2014

Large area and broadband ultra-black absorber using microstructured aluminum doped silicon films journal, February 2017

Highly Plasmonic Titanium Nitride by Room-Temperature Sputtering journal, October 2019

Wide-angle broadband absorber based on uniform-sized hyperbolic metamaterial journal, January 2018

Plasmonic tunable metamaterial absorber as ultraviolet protection film journal, January 2014

Plasmon-induced hot carrier science and technology journal, January 2015

Tailoring nanoporous materials by atomic layer deposition journal, January 2011

Taming the Blackbody with Infrared Metamaterials as Selective Thermal Emitters journal, July 2011

Broadband Metamaterial Absorbers journal, October 2018

Omnidirectional, broadband light absorption using large-area, ultrathin lossy metallic film coatings journal, October 2015

Metamaterial-based integrated plasmonic absorber/emitter for solar thermo-photovoltaic systems journal, January 2012

Absorber and emitter for solar thermo-photovoltaic systems to achieve efficiency exceeding the Shockley-Queisser limit journal, January 2009

Efficient multiband absorber based on one-dimensional periodic metal–dielectric photonic crystal with a reflective substrate journal, January 2014

Refractory Plasmonics with Titanium Nitride: Broadband Metamaterial Absorber journal, October 2014

High-Temperature Refractory Metasurfaces for Solar Thermophotovoltaic Energy Harvesting journal, November 2018

Plasmonic Optical Interference journal, May 2014

Perfect selective metamaterial solar absorbers journal, January 2013

Plasmon-induced hot-electron generation at nanoparticle/metal-oxide interfaces for photovoltaic and photocatalytic devices journal, January 2014

Broadband metamaterial absorber at mid-infrared using multiplexed cross resonators journal, January 2013

Ultra-broadband microwave metamaterial absorber journal, March 2012

Polarization-insensitive and wide-angle broadband nearly perfect absorber by tunable planar metamaterials in the visible regime journal, November 2014

Design, fabrication and measurement of a broadband polarization-insensitive metamaterial absorber based on lumped elements journal, February 2012

3D self-assembly of aluminium nanoparticles for plasmon-enhanced solar desalination journal, April 2016

Unprecedented Thermal Stability of Plasmonic Titanium Nitride Films up to 1400 °C journal, May 2021

Ultra-thin infrared metamaterial detector for multicolor imaging applications journal, January 2017

Ultra-broadband metamaterial absorbers from long to very long infrared regime journal, July 2021

Omnidirectional, polarization-insensitive and broadband thin absorber in the terahertz regime journal, January 2010

Constructing Metastructures with Broadband Electromagnetic Functionality journal, November 2019

A thin film broadband absorber based on multi-sized nanoantennas journal, December 2011

Plasmonic broadband absorber by stacking multiple metallic nanoparticle layers journal, April 2015

Wavelength-selective mid-infrared metamaterial absorbers with multiple tungsten cross resonators journal, January 2018

Numerical Study of an Efficient Broadband Metamaterial Absorber in Visible Light Region journal, June 2019

Experiment and Theory of the Broadband Absorption by a Tapered Hyperbolic Metamaterial Array journal, June 2014

Self-assembly of highly efficient, broadband plasmonic absorbers for solar steam generation journal, April 2016

Broadband absorption engineering of hyperbolic metafilm patterns journal, March 2014

Metamaterial Electromagnetic Wave Absorbers journal, May 2012

Flexible thin-film black gold membranes with ultrabroadband plasmonic nanofocusing for efficient solar vapour generation journal, December 2015

Automatically Acquired Broadband Plasmonic-Metamaterial Black Absorber during the Metallic Film-Formation journal, February 2015

Ultrabroadband Light Absorption by a Sawtooth Anisotropic Metamaterial Slab
journal, February 2012

Structured graphene metamaterial selective absorbers for high efficiency and omnidirectional solar thermal energy conversion
journal, March 2020

Photonic Metamaterial Absorbers: Morphology Engineering and Interdisciplinary Applications
journal, September 2019

Ultra-broadband terahertz metamaterial absorber
journal, July 2014

Metasurface Broadband Solar Absorber
journal, February 2016

Experimental demonstration of terahertz metamaterial absorbers with a broad and flat high absorption band
journal, January 2012

Quasi‐Ordered Nanoforests with Hybrid Plasmon Resonances for Broadband Absorption and Photodetection
journal, June 2021

On the optical and morphological properties of microstructured Black Silicon obtained by cryogenic-enhanced plasma reactive ion etching
journal, May 2013

Recent developments in solar water-splitting photocatalysis
journal, January 2011

A Metamaterial Emitter for Highly Efficient Radiative Cooling
journal, April 2015

A frequency and bandwidth tunable metamaterial absorber in x-band
journal, May 2015

Tungsten based anisotropic metamaterial as an ultra-broadband absorber
journal, January 2017

Low-Loss Plasmonic Metamaterials
journal, January 2011

Searching for better plasmonic materials
journal, March 2010

Broadband light absorber based on porous alumina structure covered with ultrathin iridium film
journal, April 2017

Solar steam generation through bio-inspired interface heating of broadband-absorbing plasmonic membranes
journal, June 2017

Design of a Perfect Black Absorber at Visible Frequencies Using Plasmonic Metamaterials
journal, October 2011

Refractometric and colorimetric index sensing by a plasmon-coupled hybrid AAO nanotemplate
journal, January 2015

An ultra-black silicon absorber: An ultra-black silicon absorber
journal, January 2014

Ultra-broadband and wide-angle perfect solar absorber based on TiN nanodisk and Ti thin film structure
journal, July 2020

Tungsten black absorber for solar light with wide angular operation range
journal, May 2008

Alternative Plasmonic Materials: Beyond Gold and Silver
journal, May 2013

Solution‐Processed All‐Ceramic Plasmonic Metamaterials for Efficient Solar–Thermal Conversion over 100–727 ° C
journal, November 2020

Size-dependent melting point of noble metals
journal, September 2003

Polarization insensitive, broadband terahertz metamaterial absorber
journal, January 2011

All-Ceramic Solar-Driven Water Purifier Based on Anodized Aluminum Oxide and Plasmonic Titanium Nitride
journal, November 2018

Broadband super-Planckian thermal emission from hyperbolic metamaterials
journal, September 2012

Ultra-broadband perfect solar absorber by an ultra-thin refractory titanium nitride meta-surface
journal, June 2018

Broadband polarization-independent resonant light absorption using ultrathin plasmonic super absorbers
journal, November 2011

Conformal Coating on Ultrahigh-Aspect-Ratio Nanopores of Anodic Alumina by Atomic Layer Deposition
journal, September 2003

Nanoparticle plasmonics: going practical with transition metal nitrides
journal, May 2015

Bandwidth enhancement in disordered metamaterial absorbers
journal, August 2014

Substrate-insensitive atomic layer deposition of plasmonic titanium nitride films
journal, January 2017

Metamaterial Perfect Absorber Based Hot Electron Photodetection
journal, May 2014

Plasmonic and metamaterial structures as electromagnetic absorbers: Plasmonic and metamaterial absorbers
journal, June 2014

Titanium nitride as a plasmonic material for visible and near-infrared wavelengths
journal, January 2012

Surface Plasmon Resonance and Interference Coenhanced SERS Substrate of AAO/Al-Based Ag Nanostructure Arrays
journal, October 2014

Large area and broadband ultra-black absorber using microstructured aluminum doped silicon films
journal, February 2017

Highly Plasmonic Titanium Nitride by Room-Temperature Sputtering
journal, October 2019

Wide-angle broadband absorber based on uniform-sized hyperbolic metamaterial
journal, January 2018

Plasmonic tunable metamaterial absorber as ultraviolet protection film
journal, January 2014

Plasmon-induced hot carrier science and technology
journal, January 2015

Tailoring nanoporous materials by atomic layer deposition
journal, January 2011

Taming the Blackbody with Infrared Metamaterials as Selective Thermal Emitters
journal, July 2011

Broadband Metamaterial Absorbers
journal, October 2018

Omnidirectional, broadband light absorption using large-area, ultrathin lossy metallic film coatings
journal, October 2015

Metamaterial-based integrated plasmonic absorber/emitter for solar thermo-photovoltaic systems
journal, January 2012

Absorber and emitter for solar thermo-photovoltaic systems to achieve efficiency exceeding the Shockley-Queisser limit
journal, January 2009

Efficient multiband absorber based on one-dimensional periodic metal–dielectric photonic crystal with a reflective substrate
journal, January 2014

Refractory Plasmonics with Titanium Nitride: Broadband Metamaterial Absorber
journal, October 2014

High-Temperature Refractory Metasurfaces for Solar Thermophotovoltaic Energy Harvesting
journal, November 2018

Plasmonic Optical Interference
journal, May 2014

Perfect selective metamaterial solar absorbers
journal, January 2013

Plasmon-induced hot-electron generation at nanoparticle/metal-oxide interfaces for photovoltaic and photocatalytic devices
journal, January 2014

Broadband metamaterial absorber at mid-infrared using multiplexed cross resonators
journal, January 2013

Ultra-broadband microwave metamaterial absorber
journal, March 2012

Polarization-insensitive and wide-angle broadband nearly perfect absorber by tunable planar metamaterials in the visible regime
journal, November 2014

Design, fabrication and measurement of a broadband polarization-insensitive metamaterial absorber based on lumped elements
journal, February 2012

3D self-assembly of aluminium nanoparticles for plasmon-enhanced solar desalination
journal, April 2016

Unprecedented Thermal Stability of Plasmonic Titanium Nitride Films up to 1400 °C
journal, May 2021

Ultra-thin infrared metamaterial detector for multicolor imaging applications
journal, January 2017

Ultra-broadband metamaterial absorbers from long to very long infrared regime
journal, July 2021

Omnidirectional, polarization-insensitive and broadband thin absorber in the terahertz regime
journal, January 2010

Constructing Metastructures with Broadband Electromagnetic Functionality
journal, November 2019

A thin film broadband absorber based on multi-sized nanoantennas
journal, December 2011

Plasmonic broadband absorber by stacking multiple metallic nanoparticle layers
journal, April 2015

Wavelength-selective mid-infrared metamaterial absorbers with multiple tungsten cross resonators
journal, January 2018

Numerical Study of an Efficient Broadband Metamaterial Absorber in Visible Light Region
journal, June 2019

Experiment and Theory of the Broadband Absorption by a Tapered Hyperbolic Metamaterial Array
journal, June 2014

Self-assembly of highly efficient, broadband plasmonic absorbers for solar steam generation
journal, April 2016

Broadband absorption engineering of hyperbolic metafilm patterns
journal, March 2014

Metamaterial Electromagnetic Wave Absorbers
journal, May 2012

Flexible thin-film black gold membranes with ultrabroadband plasmonic nanofocusing for efficient solar vapour generation
journal, December 2015

Automatically Acquired Broadband Plasmonic-Metamaterial Black Absorber during the Metallic Film-Formation
journal, February 2015