Direct Optical Lithography of Colloidal Metal Oxide Nanomaterials for Diffractive Optical Elements with 2π Phase Control
Abstract
Spatially patterned dielectric materials are ubiquitous in electronic, photonic, and optoelectronic devices. These patterns are typically made by subtractive or additive approaches utilizing vapor-phase reagents. On the other hand, recent advances in solution-phase synthesis of oxide nanomaterials have unlocked a materials library with greater compositional, microstructural, and interfacial tunability. However, methods to pattern and integrate these nanomaterials in real-world devices are less established. In this work, we directly optically pattern oxide nanoparticles (NPs) by mixing them with photosensitive diazo-2-naphthol-4-sulfonic acid and irradiating with widely available 405 nm light. We demonstrate the direct optical lithography of ZrO2, TiO2, HfO2, and ITO NPs and investigate the chemical and physical changes responsible for this photoinduced decrease in solubility. Micron-thick layers of amorphous ZrO2 NPs were patterned with micron resolution and shown to allow 2 pi phase control of visible light. We also show multilayer patterning and use it to fabricate features with different thicknesses and distinct structural colors. Upon annealing at 400 degrees C, the deposited ZrO2 structures have excellent optical transparency across a wide wavelength range (0.3-10 mu m), a high refractive index (n = 1.84 at 633 nm), and are optically smooth. We then fabricate diffractive optical elements, such as binarymore »
- Authors:
-
[1];
[1];
[2]
- Univ. of Chicago, IL (United States). James Franck Inst.
- Univ. of Chicago, IL (United States). James Franck Inst.; Argonne National Lab. (ANL), Argonne, IL (United States). Center for Nanoscale Materials
- Publication Date:
- Research Org.:
- Argonne National Lab. (ANL), Argonne, IL (United States)
- Sponsoring Org.:
- USDOE Office of Science (SC), Basic Energy Sciences (BES). Scientific User Facilities Division; US Air Force Office of Scientific Research (AFOSR); National Science Foundation (NSF)
- OSTI Identifier:
- 1831137
- Grant/Contract Number:
- AC02-06CH11357; FA9550-18-1-0099; DMR-2011854; ECCS-2025633
- Resource Type:
- Accepted Manuscript
- Journal Name:
- Journal of the American Chemical Society
- Additional Journal Information:
- Journal Volume: 143; Journal Issue: 5; Journal ID: ISSN 0002-7863
- Publisher:
- American Chemical Society (ACS)
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY; Direct optical lithography; patterning; nanoparticles; nanocrystals; sol-gel; oxides; diffractive optical elements; 2𝜋 phase shift; thin films; layers; deposition; optical properties
Citation Formats
Pan, Jia-Ahn, Rong, Zichao, Wang, Yuanyuan, Cho, Himchan, Coropceanu, Igor, Wu, Haoqi, and Talapin, Dmitri V. Direct Optical Lithography of Colloidal Metal Oxide Nanomaterials for Diffractive Optical Elements with 2π Phase Control. United States: N. p., 2021.
Web. doi:10.1021/jacs.0c12447.
Pan, Jia-Ahn, Rong, Zichao, Wang, Yuanyuan, Cho, Himchan, Coropceanu, Igor, Wu, Haoqi, & Talapin, Dmitri V. Direct Optical Lithography of Colloidal Metal Oxide Nanomaterials for Diffractive Optical Elements with 2π Phase Control. United States. https://doi.org/10.1021/jacs.0c12447
Pan, Jia-Ahn, Rong, Zichao, Wang, Yuanyuan, Cho, Himchan, Coropceanu, Igor, Wu, Haoqi, and Talapin, Dmitri V. Thu .
"Direct Optical Lithography of Colloidal Metal Oxide Nanomaterials for Diffractive Optical Elements with 2π Phase Control". United States. https://doi.org/10.1021/jacs.0c12447. https://www.osti.gov/servlets/purl/1831137.
@article{osti_1831137,
title = {Direct Optical Lithography of Colloidal Metal Oxide Nanomaterials for Diffractive Optical Elements with 2π Phase Control},
author = {Pan, Jia-Ahn and Rong, Zichao and Wang, Yuanyuan and Cho, Himchan and Coropceanu, Igor and Wu, Haoqi and Talapin, Dmitri V.},
abstractNote = {Spatially patterned dielectric materials are ubiquitous in electronic, photonic, and optoelectronic devices. These patterns are typically made by subtractive or additive approaches utilizing vapor-phase reagents. On the other hand, recent advances in solution-phase synthesis of oxide nanomaterials have unlocked a materials library with greater compositional, microstructural, and interfacial tunability. However, methods to pattern and integrate these nanomaterials in real-world devices are less established. In this work, we directly optically pattern oxide nanoparticles (NPs) by mixing them with photosensitive diazo-2-naphthol-4-sulfonic acid and irradiating with widely available 405 nm light. We demonstrate the direct optical lithography of ZrO2, TiO2, HfO2, and ITO NPs and investigate the chemical and physical changes responsible for this photoinduced decrease in solubility. Micron-thick layers of amorphous ZrO2 NPs were patterned with micron resolution and shown to allow 2 pi phase control of visible light. We also show multilayer patterning and use it to fabricate features with different thicknesses and distinct structural colors. Upon annealing at 400 degrees C, the deposited ZrO2 structures have excellent optical transparency across a wide wavelength range (0.3-10 mu m), a high refractive index (n = 1.84 at 633 nm), and are optically smooth. We then fabricate diffractive optical elements, such as binary phase diffraction gratings, that show efficient diffractive behavior and good thermal stability. Different oxide NPs can also be mixed prior to patterning, providing a high level of material tunability. This work demonstrates a general patterning approach that harnesses the processability and diversity of colloidal oxide nanomaterials for use in photonic applications.},
doi = {10.1021/jacs.0c12447},
journal = {Journal of the American Chemical Society},
number = 5,
volume = 143,
place = {United States},
year = {Thu Jan 28 00:00:00 EST 2021},
month = {Thu Jan 28 00:00:00 EST 2021}
}
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Works referenced in this record:
Control of Defects and Magnetic Properties in Colloidal HfO2 Nanorods
journal, September 2007
- Tirosh, E.; Markovich, G.
- Advanced Materials, Vol. 19, Issue 18
Phase-Transfer Ligand Exchange of Lead Chalcogenide Quantum Dots for Direct Deposition of Thick, Highly Conductive Films
journal, May 2017
- Lin, Qianglu; Yun, Hyeong Jin; Liu, Wenyong
- Journal of the American Chemical Society, Vol. 139, Issue 19
Photorefractive waveguides in oxide crystals: fabrication, properties, and applications
journal, August 1998
- Kip, D.
- Applied Physics B: Lasers and Optics, Vol. 67, Issue 2
Moving beyond Molecules: Patterning Solid-State Features via Dip-Pen Nanolithography with Sol-Based Inks
journal, February 2002
- Su, Ming; Liu, Xiaogang; Li, Shu-You
- Journal of the American Chemical Society, Vol. 124, Issue 8
Synthesis of Monodisperse Spherical Nanocrystals
journal, June 2007
- Park, Jongnam; Joo, Jin; Kwon, Soon Gu
- Angewandte Chemie International Edition, Vol. 46, Issue 25
Ultrastrong Translucent Glass Ceramic with Nanocrystalline, Biomimetic Structure
journal, October 2018
- Fu, Le; Xie, Ling; Fu, Wenbo
- Nano Letters, Vol. 18, Issue 11
The molecular mechanism of novolak–diazonaphthoquinone resists
journal, April 2002
- Reiser, A.; Huang, J. P.; He, X.
- European Polymer Journal, Vol. 38, Issue 4
Soluble Precursors for CuInSe 2 , CuIn 1– x Ga x Se 2 , and Cu 2 ZnSn(S,Se) 4 Based on Colloidal Nanocrystals and Molecular Metal Chalcogenide Surface Ligands
journal, March 2012
- Jiang, Chengyang; Lee, Jong-Soo; Talapin, Dmitri V.
- Journal of the American Chemical Society, Vol. 134, Issue 11
Multigram Scale Synthesis and Characterization of Monodisperse Tetragonal Zirconia Nanocrystals
journal, May 2003
- Joo, Jin; Yu, Taekyung; Kim, Young Woon
- Journal of the American Chemical Society, Vol. 125, Issue 21
A Rigorous Test for SPARC's Chemical Reactivity Models: Estimation of More Than 4300 Ionization pK a s
journal, January 1995
- Hilal, S. H.; Karickhoff, S. W.; Carreira, L. A.
- Quantitative Structure-Activity Relationships, Vol. 14, Issue 4
Avoiding Cracks in Nanoparticle Films
journal, September 2012
- Prosser, Jacob H.; Brugarolas, Teresa; Lee, Steven
- Nano Letters, Vol. 12, Issue 10
The sol-gel process
journal, January 1990
- Hench, Larry L.; West, Jon K.
- Chemical Reviews, Vol. 90, Issue 1
Transparent glass-ceramics
journal, April 1969
- Beall, G. H.; Duke, D. A.
- Journal of Materials Science, Vol. 4, Issue 4
Transparent polymer nanocomposites: An overview on their synthesis and advanced properties
journal, February 2019
- Loste, Julien; Lopez-Cuesta, José-Marie; Billon, Laurent
- Progress in Polymer Science, Vol. 89
Sol-Gel Inks for Direct-Write Assembly of Functional Oxides
journal, November 2007
- Duoss, E. B.; Twardowski, M.; Lewis, J. A.
- Advanced Materials, Vol. 19, Issue 21
Mesoporous ZrO 2 Nanoframes for Biomass Upgrading
journal, August 2017
- Wang, Haiqing; Chen, Hao; Ni, Bing
- ACS Applied Materials & Interfaces, Vol. 9, Issue 32
A Generalized Ligand-Exchange Strategy Enabling Sequential Surface Functionalization of Colloidal Nanocrystals
journal, February 2011
- Dong, Angang; Ye, Xingchen; Chen, Jun
- Journal of the American Chemical Society, Vol. 133, Issue 4, p. 998-1006
Colloidal Nanocrystals with Inorganic Halide, Pseudohalide, and Halometallate Ligands
journal, June 2014
- Zhang, Hao; Jang, Jaeyoung; Liu, Wenyong
- ACS Nano, Vol. 8, Issue 7
Atomic Layer Deposition of Hafnium and Zirconium Oxides Using Metal Amide Precursors
journal, October 2002
- Hausmann, Dennis M.; Kim, Esther; Becker, Jill
- Chemistry of Materials, Vol. 14, Issue 10
Light‐Responsive Colloidal Crystals Engineered with DNA
journal, January 2020
- Zhu, Jinghan; Lin, Haixin; Kim, Youngeun
- Advanced Materials, Vol. 32, Issue 8
High Mobility in Nanocrystal-Based Transparent Conducting Oxide Thin Films
journal, March 2018
- Kim, Byung Hyo; Staller, Corey M.; Cho, Shin Hum
- ACS Nano, Vol. 12, Issue 4
Sub-10 nm Electron Beam Nanolithography Using Spin-Coatable TiO 2 Resists
journal, November 2003
- Saifullah, M. S. M.; Subramanian, K. R. V.; Tapley, E.
- Nano Letters, Vol. 3, Issue 11
Oxide Semiconductor Thin-Film Transistors: A Review of Recent Advances
journal, May 2012
- Fortunato, E.; Barquinha, P.; Martins, R.
- Advanced Materials, Vol. 24, Issue 22
A Facile Solution-Phase Approach to Transparent and Conducting ITO Nanocrystal Assemblies
journal, August 2012
- Lee, Jonghun; Lee, Sunghwan; Li, Guanglai
- Journal of the American Chemical Society, Vol. 134, Issue 32
Sol-gel zirconia diffraction grating using a soft imprinting process
journal, January 2017
- Yamada, Itsunari; Ikeda, Yusuke
- Applied Optics, Vol. 56, Issue 17
Titanium Dioxide Nanomaterials: Synthesis, Properties, Modifications, and Applications
journal, July 2007
- Chen, Xiaobo; Mao, Samuel S.
- Chemical Reviews, Vol. 107, Issue 7
Additive Manufacturing of 3D‐Architected Multifunctional Metal Oxides
journal, June 2019
- Yee, Daryl W.; Lifson, Max L.; Edwards, Bryce W.
- Advanced Materials, Vol. 31, Issue 33
Surface Engineered Colloidal Quantum Dots for Complete Green Process
journal, February 2020
- Hahm, Donghyo; Park, Jisoo; Jeong, Inho
- ACS Applied Materials & Interfaces, Vol. 12, Issue 9
Solution‐Based Micro‐ and Nanoscale Metal Oxide Structures Formed by Direct Patterning for Electro‐Optical Applications
journal, August 2018
- Yeh, Chun‐Cheng; Zan, Hsiao‐Wen; Soppera, Olivier
- Advanced Materials, Vol. 30, Issue 50
High-power laser interference lithography process on photoresist: Effect of laser fluence and polarisation
journal, March 2009
- Ellman, M.; Rodríguez, A.; Pérez, N.
- Applied Surface Science, Vol. 255, Issue 10
All-Glass, Large Metalens at Visible Wavelength Using Deep-Ultraviolet Projection Lithography
journal, October 2019
- Park, Joon-Suh; Zhang, Shuyan; She, Alan
- Nano Letters, Vol. 19, Issue 12
Metal Oxide Nanoparticle Photoresists for EUV Patterning
journal, January 2014
- Jiang, Jing; Chakrabarty, Souvik; Yu, Mufei
- Journal of Photopolymer Science and Technology, Vol. 27, Issue 5
Three-dimensional printing of transparent fused silica glass
journal, April 2017
- Kotz, Frederik; Arnold, Karl; Bauer, Werner
- Nature, Vol. 544, Issue 7650
Surface Functionalization of Semiconductor and Oxide Nanocrystals with Small Inorganic Oxoanions (PO 4 3– , MoO 4 2– ) and Polyoxometalate Ligands
journal, August 2014
- Huang, Jing; Liu, Wenyong; Dolzhnikov, Dmitriy S.
- ACS Nano, Vol. 8, Issue 9
Direct optical lithography of functional inorganic nanomaterials
journal, July 2017
- Wang, Yuanyuan; Fedin, Igor; Zhang, Hao
- Science, Vol. 357, Issue 6349
Influence of Dopant Distribution on the Plasmonic Properties of Indium Tin Oxide Nanocrystals
journal, April 2014
- Lounis, Sebastien D.; Runnerstrom, Evan L.; Bergerud, Amy
- Journal of the American Chemical Society, Vol. 136, Issue 19
Diffraction efficiencies of thin phase gratings with arbitrary grating shape
journal, January 1978
- Magnusson, R.; Gaylord, T. K.
- Journal of the Optical Society of America, Vol. 68, Issue 6
One-Step Index-Tunable Antireflection Coatings from Aggregated Silica Nanoparticles
journal, December 2012
- Cook, Kevin T.; Tettey, Kwadwo E.; Bunch, Robert M.
- ACS Applied Materials & Interfaces, Vol. 4, Issue 12
In Situ Light-Initiated Ligands Cross-Linking Enables Efficient All-Solution-Processed Perovskite Light-Emitting Diodes
journal, January 2020
- Wei, Yi; Li, Xuefei; Chen, Yeqing
- The Journal of Physical Chemistry Letters, Vol. 11, Issue 3
Metalenses: Versatile multifunctional photonic components
journal, October 2017
- Khorasaninejad, Mohammadreza; Capasso, Federico
- Science, Vol. 358, Issue 6367
Plasmonic Oxygen‐Deficient TiO 2‐ x Nanocrystals for Dual‐Band Electrochromic Smart Windows with Efficient Energy Recycling
journal, September 2020
- Zhang, Shengliang; Cao, Sheng; Zhang, Tianran
- Advanced Materials, Vol. 32, Issue 43
Extreme ultraviolet resist materials for sub-7 nm patterning
journal, January 2017
- Li, Li; Liu, Xuan; Pal, Shyam
- Chemical Society Reviews, Vol. 46, Issue 16
Indium Tin Oxide Nanoparticles with Compositionally Tunable Surface Plasmon Resonance Frequencies in the Near-IR Region
journal, December 2009
- Kanehara, Masayuki; Koike, Hayato; Yoshinaga, Taizo
- Journal of the American Chemical Society, Vol. 131, Issue 49
Low-Temperature Solution-Processed ZrO2 Gate Insulators for Thin-Film Transistors Using High-Pressure Annealing
journal, January 2011
- Kim, Si Joon; Yoon, Doo Hyun; Rim, You Seung
- Electrochemical and Solid-State Letters, Vol. 14, Issue 11
Photopatterned Semiconductor Nanocrystals and Their Electroluminescence from Hybrid Light-Emitting Devices
journal, February 2006
- Jun, Shinae; Jang, Eunjoo; Park, Jongjin
- Langmuir, Vol. 22, Issue 6
Localized Surface Plasmon Resonance in Semiconductor Nanocrystals
journal, February 2018
- Agrawal, Ankit; Cho, Shin Hum; Zandi, Omid
- Chemical Reviews, Vol. 118, Issue 6
Quantitative Analysis of Extinction Coefficients of Tin-Doped Indium Oxide Nanocrystal Ensembles
journal, October 2019
- Staller, Corey M.; Gibbs, Stephen L.; Saez Cabezas, Camila A.
- Nano Letters, Vol. 19, Issue 11
Robust Microstructures Using UV Photopatternable Semiconductor Nanocrystals
journal, September 2008
- Kim, Won Jin; Kim, Sung Jin; Lee, Kwang-Sup
- Nano Letters, Vol. 8, Issue 10
Direct Wavelength-Selective Optical and Electron-Beam Lithography of Functional Inorganic Nanomaterials
journal, October 2019
- Wang, Yuanyuan; Pan, Jia-Ahn; Wu, Haoqi
- ACS Nano, Vol. 13, Issue 12
Metal-free Inorganic Ligands for Colloidal Nanocrystals: S2–, HS–, Se2–, HSe–, Te2–, HTe–, TeS32–, OH–, and NH2– as Surface Ligands
journal, July 2011
- Nag, Angshuman; Kovalenko, Maksym V.; Lee, Jong-Soo
- Journal of the American Chemical Society, Vol. 133, Issue 27, p. 10612-10620
Broadband high-efficiency dielectric metasurfaces for the visible spectrum
journal, September 2016
- Devlin, Robert C.; Khorasaninejad, Mohammadreza; Chen, Wei Ting
- Proceedings of the National Academy of Sciences, Vol. 113, Issue 38
Dumbbell-like Bifunctional Au−Fe 3 O 4 Nanoparticles
journal, February 2005
- Yu, Heng; Chen, Min; Rice, Philip M.
- Nano Letters, Vol. 5, Issue 2
Synthesis and Characterization of Strongly Luminescing ZnS-Capped CdSe Nanocrystals
journal, January 1996
- Hines, Margaret A.; Guyot-Sionnest, Philippe
- The Journal of Physical Chemistry, Vol. 100, Issue 2, p. 468-471
Direct Patterning of Robust One-Dimensional, Two-Dimensional, and Three-Dimensional Crystalline Metal Oxide Nanostructures Using Imprint Lithography and Nanoparticle Dispersion Inks
journal, April 2017
- Kothari, Rohit; Beaulieu, Michael R.; Hendricks, Nicholas R.
- Chemistry of Materials, Vol. 29, Issue 9
Absorption spectra and structures of some o-naphthoquinone diazides
journal, October 1989
- Rodionova, G. N.; Yablokova, V. K.; Tuchin, Yu. G.
- Journal of Applied Spectroscopy, Vol. 51, Issue 4
Prospects of Colloidal Nanocrystals for Electronic and Optoelectronic Applications
journal, January 2010
- Talapin, Dmitri V.; Lee, Jong-Soo; Kovalenko, Maksym V.
- Chemical Reviews, Vol. 110, Issue 1
Optically Transparent Sulfur-Containing Polyimide−TiO 2 Nanocomposite Films with High Refractive Index and Negative Pattern Formation from Poly(amic acid)−TiO 2 Nanocomposite Film
journal, December 2007
- Liu, Jin-gang; Nakamura, Yasuhiro; Ogura, Tomohito
- Chemistry of Materials, Vol. 20, Issue 1
Printed gas sensors
journal, January 2020
- Dai, Jie; Ogbeide, Osarenkhoe; Macadam, Nasiruddin
- Chemical Society Reviews, Vol. 49, Issue 6