Rough-surface effect on sputtering of Cr bombarded by low-energy He plasma
Abstract
The formation of microscopic cone-like structures on a Cr surface is observed under He plasma exposure at a low incident ion energy of ~106 eV in the PISCES-A linear plasma device. 2D emission profiles of the Cr I line intensity, measured with a hyperspectral imaging camera, are compared with those modeled using the GITR Monte Carlo impurity transport code coupled with the SDTrimSP binary collision code. With the growth of cones, the experimental 2D emission profile becomes axially elongated and the emission intensity significantly drops, and these observations are successfully reproduced in the simulation. The simulation reveals that the deposition of sputtered Cr atoms onto the neighboring cones results in a more over-cosine-like angular distribution, i.e., a narrower distribution with more particles ejected in the surface normal direction, of sputtered Cr atoms with a significant reduction of the sputtering yield.
- Authors:
- Publication Date:
- Research Org.:
- Univ. of California, San Diego, CA (United States)
- Sponsoring Org.:
- USDOE Office of Science (SC); National Science Foundation (NSF)
- OSTI Identifier:
- 1822460
- Alternate Identifier(s):
- OSTI ID: 1977496
- Grant/Contract Number:
- FG02-07ER54912; ECCS-1542148
- Resource Type:
- Published Article
- Journal Name:
- Nuclear Materials and Energy
- Additional Journal Information:
- Journal Name: Nuclear Materials and Energy Journal Volume: 29 Journal Issue: C; Journal ID: ISSN 2352-1791
- Publisher:
- Elsevier
- Country of Publication:
- Netherlands
- Language:
- English
- Subject:
- 70 PLASMA PHYSICS AND FUSION TECHNOLOGY; Surface morphology; Sputtering; GITR; SDTrimSP; Linear plasma device; Hyperspectral imaging
Citation Formats
Chang, F. J., Nishijima, D., and Tynan, G. R. Rough-surface effect on sputtering of Cr bombarded by low-energy He plasma. Netherlands: N. p., 2021.
Web. doi:10.1016/j.nme.2021.101077.
Chang, F. J., Nishijima, D., & Tynan, G. R. Rough-surface effect on sputtering of Cr bombarded by low-energy He plasma. Netherlands. https://doi.org/10.1016/j.nme.2021.101077
Chang, F. J., Nishijima, D., and Tynan, G. R. Wed .
"Rough-surface effect on sputtering of Cr bombarded by low-energy He plasma". Netherlands. https://doi.org/10.1016/j.nme.2021.101077.
@article{osti_1822460,
title = {Rough-surface effect on sputtering of Cr bombarded by low-energy He plasma},
author = {Chang, F. J. and Nishijima, D. and Tynan, G. R.},
abstractNote = {The formation of microscopic cone-like structures on a Cr surface is observed under He plasma exposure at a low incident ion energy of ~106 eV in the PISCES-A linear plasma device. 2D emission profiles of the Cr I line intensity, measured with a hyperspectral imaging camera, are compared with those modeled using the GITR Monte Carlo impurity transport code coupled with the SDTrimSP binary collision code. With the growth of cones, the experimental 2D emission profile becomes axially elongated and the emission intensity significantly drops, and these observations are successfully reproduced in the simulation. The simulation reveals that the deposition of sputtered Cr atoms onto the neighboring cones results in a more over-cosine-like angular distribution, i.e., a narrower distribution with more particles ejected in the surface normal direction, of sputtered Cr atoms with a significant reduction of the sputtering yield.},
doi = {10.1016/j.nme.2021.101077},
journal = {Nuclear Materials and Energy},
number = C,
volume = 29,
place = {Netherlands},
year = {Wed Dec 01 00:00:00 EST 2021},
month = {Wed Dec 01 00:00:00 EST 2021}
}
https://doi.org/10.1016/j.nme.2021.101077
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