Size and structural characterization of Si nanocrystal aggregates from a low pressure nonthermal plasma reactor
Abstract
Si nanocrystals (NCs) are synthesizable in low-pressure plasmas with narrow diameter distributions because of unipolar negative charging in the plasma. However, NCs must pass into a spatial afterglow, where NCs may decharge and aggregate. We use both low-pressure differential mobility analysis and quantitative TEM image analysis to examine Si NCs sampled from a 2 Torr Ar-SiH4 plasma reactor. We find that Si NCs are incorporated into aggregates largely composed of 20 and fewer primary particles with nearly equal concentrations of negatively and positively charged NCs. The projected areas of aggregates scale with aggregate volume in similar manner to the scaling observed for aggregates from atmospheric pressure systems. Higher aggregate concentration is observed with increasing flow rate, while larger aggregate size is found with increasing precursor concentration. Measurements show that the spatial afterglow has a significant influence on the charge and extent of NC aggregation.
- Publication Date:
- Research Org.:
- Univ. of Minnesota, Minneapolis, MN (United States)
- Sponsoring Org.:
- USDOE Office of Science (SC)
- OSTI Identifier:
- 1820658
- Alternate Identifier(s):
- OSTI ID: 1635591
- Grant/Contract Number:
- SC0018202
- Resource Type:
- Accepted Manuscript
- Journal Name:
- Powder Technology
- Additional Journal Information:
- Journal Volume: 373; Journal ID: ISSN 0032-5910
- Publisher:
- Elsevier
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 70 PLASMA PHYSICS AND FUSION TECHNOLOGY; nanocrystal; differential mobility analysis; aggregation; nonthermal plasma; spatial afterglow
Citation Formats
Chen, Xiaoshuang, Seto, Takafumi, Kortshagen, Uwe R., and Hogan, Christopher J. Size and structural characterization of Si nanocrystal aggregates from a low pressure nonthermal plasma reactor. United States: N. p., 2020.
Web. doi:10.1016/j.powtec.2020.06.026.
Chen, Xiaoshuang, Seto, Takafumi, Kortshagen, Uwe R., & Hogan, Christopher J. Size and structural characterization of Si nanocrystal aggregates from a low pressure nonthermal plasma reactor. United States. https://doi.org/10.1016/j.powtec.2020.06.026
Chen, Xiaoshuang, Seto, Takafumi, Kortshagen, Uwe R., and Hogan, Christopher J. Mon .
"Size and structural characterization of Si nanocrystal aggregates from a low pressure nonthermal plasma reactor". United States. https://doi.org/10.1016/j.powtec.2020.06.026. https://www.osti.gov/servlets/purl/1820658.
@article{osti_1820658,
title = {Size and structural characterization of Si nanocrystal aggregates from a low pressure nonthermal plasma reactor},
author = {Chen, Xiaoshuang and Seto, Takafumi and Kortshagen, Uwe R. and Hogan, Christopher J.},
abstractNote = {Si nanocrystals (NCs) are synthesizable in low-pressure plasmas with narrow diameter distributions because of unipolar negative charging in the plasma. However, NCs must pass into a spatial afterglow, where NCs may decharge and aggregate. We use both low-pressure differential mobility analysis and quantitative TEM image analysis to examine Si NCs sampled from a 2 Torr Ar-SiH4 plasma reactor. We find that Si NCs are incorporated into aggregates largely composed of 20 and fewer primary particles with nearly equal concentrations of negatively and positively charged NCs. The projected areas of aggregates scale with aggregate volume in similar manner to the scaling observed for aggregates from atmospheric pressure systems. Higher aggregate concentration is observed with increasing flow rate, while larger aggregate size is found with increasing precursor concentration. Measurements show that the spatial afterglow has a significant influence on the charge and extent of NC aggregation.},
doi = {10.1016/j.powtec.2020.06.026},
journal = {Powder Technology},
number = ,
volume = 373,
place = {United States},
year = {Mon Jun 22 00:00:00 EDT 2020},
month = {Mon Jun 22 00:00:00 EDT 2020}
}
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Works referenced in this record:
Monitoring non-thermal plasma processes for nanoparticle synthesis
journal, August 2017
- Mangolini, Lorenzo
- Journal of Physics D: Applied Physics, Vol. 50, Issue 37
Ejector-based sampling from low-pressure aerosol reactors
journal, September 2018
- Rosenberger, Thore; Münzer, Adrian; Kiesler, Dennis
- Journal of Aerosol Science, Vol. 123
An approximation of the bipolar charge distribution for particles in the submicron size range
journal, June 1988
- Wiedensohler, A.
- Journal of Aerosol Science, Vol. 19, Issue 3
Induction Plasma Synthesis of Carbide Nano-Powders
journal, May 2005
- Leparoux, M.; Schreuders, C.; Shin, J. -W.
- Advanced Engineering Materials, Vol. 7, Issue 5
Characterization of the state of nanoparticle aggregation in non-equilibrium plasma synthesis systems
journal, July 2018
- Chen, Xiaoshuang; Ghosh, Souvik; Buckley, David T.
- Journal of Physics D: Applied Physics, Vol. 51, Issue 33
Determination of nanoparticle collision cross section distribution functions in low pressure plasma synthesis reactors via ion mobility spectrometry
journal, February 2019
- Chen, Xiaoshuang; Seto, Takafumi; Kortshagen, Uwe R.
- Nano Futures, Vol. 3, Issue 1
The charge of micro-particles in a low pressure spatial plasma afterglow
journal, June 2019
- van Minderhout, B.; Peijnenburg, T.; Blom, P.
- Journal of Physics D: Applied Physics, Vol. 52, Issue 32
Particle charging in low‐pressure plasmas
journal, May 1995
- Matsoukas, Themis; Russell, Marc
- Journal of Applied Physics, Vol. 77, Issue 9
Universality in colloid aggregation
journal, June 1989
- Lin, M. Y.; Lindsay, H. M.; Weitz, D. A.
- Nature, Vol. 339, Issue 6223
High electron mobility in thin films formed via supersonic impact deposition of nanocrystals synthesized in nonthermal plasmas
journal, December 2014
- Thimsen, Elijah; Johnson, Melissa; Zhang, Xin
- Nature Communications, Vol. 5, Issue 1
Ion Beam Charging of Aerosol Nanoparticles
journal, August 2005
- Seto, Takafumi; Orii, Takaaki; Sakurai, Hiromu
- Aerosol Science and Technology, Vol. 39, Issue 8
Light scattering from simulated smoke agglomerates
journal, November 1988
- Mountain, Raymond D.; Mulholland, G. W.
- Langmuir, Vol. 4, Issue 6
Synthesis of High Purity Silicon Nanoparticles in a Low Pressure Microwave Reactor
journal, November 2004
- Knipping, Jörg; Wiggers, Hartmut; Rellinghaus, Bernd
- Journal of Nanoscience and Nanotechnology, Vol. 4, Issue 8
Analytical model of particle charging in plasmas over a wide range of collisionality
journal, October 2008
- Gatti, Marco; Kortshagen, Uwe
- Physical Review E, Vol. 78, Issue 4
Negative hydrogenated silicon ion clusters as particle precursors in RF silane plasma deposition experiments
journal, June 1993
- Howling, A. A.; Sansonnens, L.; Dorier, J. -L
- Journal of Physics D: Applied Physics, Vol. 26, Issue 6
Modeling of particulate coagulation in low pressure plasmas
journal, July 1999
- Kortshagen, U.; Bhandarkar, U.
- Physical Review E, Vol. 60, Issue 1
Synthesis of silicon nanoparticles in a pilot-plant-scale microwave plasma reactor: Impact of flow rates and precursor concentration on the nanoparticle size and aggregation
journal, January 2019
- Kunze, Frederik; Kuns, Stefan; Spree, Mathias
- Powder Technology, Vol. 342
Image-based size analysis of agglomerated and partially sintered particles via convolutional neural networks
journal, January 2020
- Frei, M.; Kruis, F. E.
- Powder Technology, Vol. 360
Automated primary particle sizing of nanoparticle aggregates by TEM image analysis
journal, July 2016
- Dastanpour, Ramin; Boone, Jocelyne M.; Rogak, Steven N.
- Powder Technology, Vol. 295
Aerosol Impaction-Driven Assembly System for the Production of Uniform Nanoparticle Thin Films with Independently Tunable Thickness and Porosity
journal, July 2018
- Firth, Peter; Holman, Zachary C.
- ACS Applied Nano Materials, Vol. 1, Issue 8
Performance of Nano-DMA Operated with Different Gases for Sheath and Aerosol Carrier Flows
journal, October 2005
- Li, Weiling; Chen, Da-Ren
- Aerosol Science and Technology, Vol. 39, Issue 10
The effects of restructuring on the geometry of clusters formed by diffusion‐limited, ballistic, and reaction‐limited cluster–cluster aggregation
journal, July 1988
- Meakin, Paul; Jullien, Remi
- The Journal of Chemical Physics, Vol. 89, Issue 1
Spray deposition of nanostructured metal films using hydrodynamically stabilized, high pressure microplasmas
journal, November 2013
- Koh, Travis L.; Gordon, Michael J.
- Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 31, Issue 6
Ligand-free Ni nanocluster formation at atmospheric pressure via rapid quenching in a microplasma process
journal, September 2014
- Kumar, Ajay; Kang, Seungkoo; Larriba-Andaluz, Carlos
- Nanotechnology, Vol. 25, Issue 38
Self-assembly dynamics and accumulation mechanisms of ultra-fine nanoparticles
journal, January 2015
- Nasiri, Noushin; Elmøe, Tobias D.; Liu, Yun
- Nanoscale, Vol. 7, Issue 21
Preparation of gas sensitive film by deposition of ultrafine tin dioxide particles
journal, April 1988
- Adachi, M.; Okuyama, K.; Kousaka, Y.
- Journal of Aerosol Science, Vol. 19, Issue 2
Nanostructured photoactive films synthesized by a flame aerosol reactor
journal, January 2007
- Thimsen, Elijah; Biswas, Pratim
- AIChE Journal, Vol. 53, Issue 7
The Mobility–Volume Relationship below 3.0 nm Examined by Tandem Mobility–Mass Measurement
journal, March 2011
- Larriba, Carlos; Hogan, Christopher J.; Attoui, Michel
- Aerosol Science and Technology, Vol. 45, Issue 4
Electrostatic enhancement factor for the coagulation of silicon nanoparticles in low-temperature plasmas
journal, April 2019
- Santos, Benjamin; Cacot, Laura; Boucher, Claude
- Plasma Sources Science and Technology, Vol. 28, Issue 4
Nonthermal plasma synthesis of size-controlled, monodisperse, freestanding germanium nanocrystals
journal, August 2007
- Gresback, Ryan; Holman, Zachary; Kortshagen, Uwe
- Applied Physics Letters, Vol. 91, Issue 9
Aerosol-Phase Synthesis and Processing of Luminescent Silicon Nanocrystals
journal, September 2019
- Li, Zhaohan; Kortshagen, Uwe R.
- Chemistry of Materials, Vol. 31, Issue 20
Nonequilibrium Plasma Aerotaxy of InN Nanocrystals and Their Photonic Properties
journal, November 2019
- Uner, Necip B.; Niedzwiedzki, Dariusz M.; Thimsen, Elijah
- The Journal of Physical Chemistry C, Vol. 123, Issue 50
Selective nanoparticle heating: Another form of nonequilibrium in dusty plasmas
journal, February 2009
- Mangolini, Lorenzo; Kortshagen, Uwe
- Physical Review E, Vol. 79, Issue 2
Nonequilibrium plasma aerotaxy of size controlled GaN nanocrystals
journal, December 2019
- Uner, Necip B.; Thimsen, Elijah
- Journal of Physics D: Applied Physics, Vol. 53, Issue 9
Laser ablation of nanoparticles and nanoparticulate, thick Fe 1.92 Tb 0.3 Dy 0.7 films
journal, September 2010
- Ma, J.; Becker, M. F.; Keto, J. W.
- Journal of Materials Research, Vol. 25, Issue 9
Nonthermal Plasma Synthesis of Nanocrystals: Fundamental Principles, Materials, and Applications
journal, August 2016
- Kortshagen, Uwe R.; Sankaran, R. Mohan; Pereira, Rui N.
- Chemical Reviews, Vol. 116, Issue 18
A flexible method for depositing dense nanocrystal thin films: impaction of germanium nanocrystals
journal, July 2010
- Holman, Z. C.; Kortshagen, U. R.
- Nanotechnology, Vol. 21, Issue 33
Modelling of silicon hydride clustering in a low-pressure silane plasma
journal, October 2000
- Bhandarkar, U. V.; Swihart, M. T.; Girshick, S. L.
- Journal of Physics D: Applied Physics, Vol. 33, Issue 21
Detailed characterisation of TiO2 nano-aggregate morphology using TEM image analysis
journal, July 2019
- Manuputty, Manoel Y.; Lindberg, Casper S.; Botero, Maria L.
- Journal of Aerosol Science, Vol. 133
Nanostructured materials production by hypersonic plasma particle deposition
journal, January 1997
- Rao, N. P.; Lee, H. J.; Kelkar, M.
- Nanostructured Materials, Vol. 9, Issue 1-8
The mobilities of flame synthesized aggregates/agglomerates in the transition regime
journal, February 2015
- Thajudeen, Thaseem; Jeon, Seongho; Hogan, Christopher J.
- Journal of Aerosol Science, Vol. 80
Ion mobility spectrometry-mass spectrometry examination of the structures, stabilities, and extents of hydration of dimethylamine–sulfuric acid clusters
journal, January 2016
- Thomas, Jikku M.; He, Siqin; Larriba-Andaluz, Carlos
- Physical Chemistry Chemical Physics, Vol. 18, Issue 33
Size analysis in low-pressure nanoparticle reactors: comparison of particle mass spectrometry with in situ probing transmission electron microscopy
journal, June 2002
- Janzen, C.; Kleinwechter, H.; Knipping, J.
- Journal of Aerosol Science, Vol. 33, Issue 6
Nanocrystal size distribution analysis from transmission electron microscopy images
journal, January 2015
- van Sebille, Martijn; van der Maaten, Laurens J. P.; Xie, Ling
- Nanoscale, Vol. 7, Issue 48
Serpentine Ultralong Path with Extended Routing (SUPER) High Resolution Traveling Wave Ion Mobility-MS using Structures for Lossless Ion Manipulations
journal, April 2017
- Deng, Liulin; Webb, Ian K.; Garimella, Sandilya V. B.
- Analytical Chemistry, Vol. 89, Issue 8
Nonthermal Plasma Synthesis of Nanocrystals: Fundamentals, Applications, and Future Research Needs
journal, September 2015
- Kortshagen, Uwe
- Plasma Chemistry and Plasma Processing, Vol. 36, Issue 1
One-step aerosol synthesis of nanoparticle agglomerate films: simulation of film porosity and thickness
journal, September 2006
- Mädler, Lutz; Lall, Anshuman A.; Friedlander, Sheldon K.
- Nanotechnology, Vol. 17, Issue 19
Improving Twomey's Algorithm for Inversion of Aerosol Measurement Data
journal, January 1987
- Markowski, Gregory R.
- Aerosol Science and Technology, Vol. 7, Issue 2
Langevin Simulation of Aggregate Formation in the Transition Regime
journal, February 2015
- Thajudeen, Thaseem; Deshmukh, Suhrid; Hogan, Christopher J.
- Aerosol Science and Technology, Vol. 49, Issue 2
Comparison of the predictions of Langevin Dynamics-based diffusion charging collision kernel models with canonical experiments
journal, February 2020
- Li, Li; Chahl, Harjindar Singh; Gopalakrishnan, Ranganathan
- Journal of Aerosol Science, Vol. 140
Particle nucleation and growth in dusty plasmas: On the importance of charged-neutral interactions
journal, January 2020
- Girshick, Steven L.
- Journal of Vacuum Science & Technology A, Vol. 38, Issue 1
Porous particulate film deposition in the transition regime
journal, August 2014
- Lindquist, Gustaf J.; Pui, David Y. H.; Hogan, Christopher J.
- Journal of Aerosol Science, Vol. 74
Atmospheric-pressure dielectric barrier discharge with capillary injection for gas-phase nanoparticle synthesis
journal, July 2015
- Ghosh, Souvik; Liu, Tianqi; Bilici, Mihai
- Journal of Physics D: Applied Physics, Vol. 48, Issue 31
Determination of the Scalar Friction Factor for Nonspherical Particles and Aggregates Across the Entire Knudsen Number Range by Direct Simulation Monte Carlo (DSMC)
journal, October 2012
- Zhang, Chonglin; Thajudeen, Thaseem; Larriba, Carlos
- Aerosol Science and Technology, Vol. 46, Issue 10
High resolution Varying Field Drift Tube Ion Mobility Spectrometer with diffusion autocorrection
journal, February 2020
- Chen, Xi; Gandhi, Viraj; Coots, Joshua
- Journal of Aerosol Science, Vol. 140
Surface Chemistry of Aerosolized Silicon Nanoparticles: Evolution and Desorption of Hydrogen from 6-nm Diameter Particles
journal, March 2007
- Holm, Jason; Roberts, Jeffrey T.
- Journal of the American Chemical Society, Vol. 129, Issue 9
Fractal-like Aggregates: Relation between Morphology and Physical Properties
journal, September 2000
- Filippov, A. V.; Zurita, M.; Rosner, D. E.
- Journal of Colloid and Interface Science, Vol. 229, Issue 1
The role of negative ions in the formation of particles in low‐pressure plasmas
journal, July 1993
- Choi, Seung J.; Kushner, Mark J.
- Journal of Applied Physics, Vol. 74, Issue 2
Aerosol classification by electric mobility: apparatus, theory, and applications
journal, November 1975
- Knutson, E. O.; Whitby, K. T.
- Journal of Aerosol Science, Vol. 6, Issue 6
Collision limited reaction rates for arbitrarily shaped particles across the entire diffusive Knudsen number range
journal, August 2011
- Gopalakrishnan, Ranganathan; Thajudeen, Thaseem; Hogan, Christopher J.
- The Journal of Chemical Physics, Vol. 135, Issue 5
A Non-Thermal Plasma Route to Plasmonic TiN Nanoparticles
journal, January 2017
- Alvarez Barragan, Alejandro; Ilawe, Niranjan V.; Zhong, Lanlan
- The Journal of Physical Chemistry C, Vol. 121, Issue 4
Fractal Structures Formed by Kinetic Aggregation of Aqueous Gold Colloids
journal, April 1984
- Weitz, D. A.; Oliveria, M.
- Physical Review Letters, Vol. 52, Issue 16
Chainlike Formation of Particle Deposits in Fluid-Particle Separation
journal, May 1977
- Tien, C.; Wang, C. -S.; Barot, D. T.
- Science, Vol. 196, Issue 4293
Measurement of sub-2 nm stable clusters during silane pyrolysis in a furnace aerosol reactor
journal, January 2020
- Vazquez-Pufleau, Miguel; Wang, Yang; Biswas, Pratim
- The Journal of Chemical Physics, Vol. 152, Issue 2
Ion beam charging of silicon nanoparticles in helium background gas: Design of the ion beam aerosol charger
journal, June 2003
- Seto, Takafumi; Orii, Takaaki; Hirasawa, Makoto
- Review of Scientific Instruments, Vol. 74, Issue 6
Contact behavior of size fractionated TiO2 nanoparticle agglomerates and aggregates
journal, April 2014
- Salameh, Samir; Scholz, Rebecca; Seo, Jin Won
- Powder Technology, Vol. 256
Definitive equations for the fluid resistance of spheres
journal, July 1945
- Davies, C. N.
- Proceedings of the Physical Society, Vol. 57, Issue 4
Mobility size distributions of soot in premixed propene flames
journal, October 2016
- Lin, He; Gu, Chen; Camacho, Joaquin
- Combustion and Flame, Vol. 172
Visualizing Current Flow at the Mesoscale in Disordered Assemblies of Touching Semiconductor Nanocrystals
journal, July 2017
- Chen, Qinyi; Guest, Jeffrey R.; Thimsen, Elijah
- The Journal of Physical Chemistry C, Vol. 121, Issue 29
Size distribution measurement of nanometer-sized aerosol particles using dma under low-pressure conditions
journal, March 1997
- Seto, Takafumi; Nakamoto, Tatsuya; Okuyama, Kikuo
- Journal of Aerosol Science, Vol. 28, Issue 2
Analysis of ultrafine metal oxide particles in aerosols using mobility-resolved time-of-flight mass spectrometry
journal, November 2019
- Domaschke, Maximilian; Lübbert, Christian; Peukert, Wolfgang
- Journal of Aerosol Science, Vol. 137
The Mobility and Structure of Aerosol Agglomerates
journal, January 1993
- Rogak, Steven N.; Flagan, Richard C.; Nguyen, Hung V.
- Aerosol Science and Technology, Vol. 18, Issue 1
Quantifying intra- and extracellular aggregation of iron oxide nanoparticles and its influence on specific absorption rate
journal, January 2016
- Jeon, Seongho; Hurley, Katie R.; Bischof, John C.
- Nanoscale, Vol. 8, Issue 35
The Collision Cross Sections of Iodide Salt Cluster Ions in Air via Differential Mobility Analysis-Mass Spectrometry
journal, September 2013
- Ouyang, Hui; Larriba-Andaluz, Carlos; Oberreit, Derek R.
- Journal of The American Society for Mass Spectrometry, Vol. 24, Issue 12
High-Yield Plasma Synthesis of Luminescent Silicon Nanocrystals
journal, April 2005
- Mangolini, L.; Thimsen, E.; Kortshagen, U.
- Nano Letters, Vol. 5, Issue 4
Influence of the ambipolar-to-free diffusion transition on dust particle charge in a complex plasma afterglow
journal, June 2008
- Couëdel, L.; Samarian, A. A.; Mikikian, M.
- Physics of Plasmas, Vol. 15, Issue 6