Nanoscale dynamics during self-organized ion beam patterning of Si. II. bombardment
Abstract
Understanding the self-organized ion beam nanopatterning of elemental semiconductors, particularly silicon, is of intrinsic scientific and technological interest. This is the second component of a two-part coherent x-ray scattering and x-ray photon correlation spectroscopy (XPCS) investigation of the kinetics and fluctuation dynamics of nanoscale ripple development on silicon during 1 keV Ar+ (part I) and Kr+ bombardment at 65 degrees polar angle. Here it is found that the ion-enhanced viscous flow relaxation is essentially equal for Kr+-induced patterning as previously found for Ar+ patterning despite the difference in ion masses. However, the magnitude of the surface curvature-dependent roughening rate in the early-stage kinetics is larger for Kr+ than for Ar+, consistent with expectations that the heavier ion gives an increased mass redistributive contribution to the initial surface instability. As with the Ar+ case, fluctuation dynamics in the late stage show a peak in correlation times at the length scale corresponding to the dominant structural feature on the surface-the ripples. Finally, it is shown that speckle motion during the surface evolution can be analyzed to determine spatial inhomogeneities in erosion rate and ripple velocity. This allows the direction and speed of ripple motion to be measured in a real time experiment.more »
- Authors:
-
- Boston Univ., MA (United States)
- Brookhaven National Lab. (BNL), Upton, NY (United States). National Synchrotron Light Source II (NSLS-II)
- Univ. of Vermont, Burlington, VT (United States)
- Publication Date:
- Research Org.:
- Brookhaven National Lab. (BNL), Upton, NY (United States); Argonne National Lab. (ANL), Argonne, IL (United States)
- Sponsoring Org.:
- USDOE Office of Science (SC), Basic Energy Sciences (BES)
- OSTI Identifier:
- 1797366
- Alternate Identifier(s):
- OSTI ID: 1798483; OSTI ID: 1833387
- Report Number(s):
- BNL-221680-2021-JAAM; BNL-221681-2021-JAAM
Journal ID: ISSN 2469-9950; TRN: US2212338
- Grant/Contract Number:
- SC0012704; AC02-06CH11357
- Resource Type:
- Accepted Manuscript
- Journal Name:
- Physical Review B
- Additional Journal Information:
- Journal Volume: 103; Journal Issue: 19; Journal ID: ISSN 2469-9950
- Publisher:
- American Physical Society (APS)
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE
Citation Formats
Myint, Peco, Ludwig, Karl F., Wiegart, Lutz, Zhang, Yugang, Fluerasu, Andrei, Zhang, Xiaozhi, and Headrick, Randall L. Nanoscale dynamics during self-organized ion beam patterning of Si. II. Kr + bombardment. United States: N. p., 2021.
Web. doi:10.1103/physrevb.103.195424.
Myint, Peco, Ludwig, Karl F., Wiegart, Lutz, Zhang, Yugang, Fluerasu, Andrei, Zhang, Xiaozhi, & Headrick, Randall L. Nanoscale dynamics during self-organized ion beam patterning of Si. II. Kr + bombardment. United States. https://doi.org/10.1103/physrevb.103.195424
Myint, Peco, Ludwig, Karl F., Wiegart, Lutz, Zhang, Yugang, Fluerasu, Andrei, Zhang, Xiaozhi, and Headrick, Randall L. Thu .
"Nanoscale dynamics during self-organized ion beam patterning of Si. II. Kr + bombardment". United States. https://doi.org/10.1103/physrevb.103.195424. https://www.osti.gov/servlets/purl/1797366.
@article{osti_1797366,
title = {Nanoscale dynamics during self-organized ion beam patterning of Si. II. Kr + bombardment},
author = {Myint, Peco and Ludwig, Karl F. and Wiegart, Lutz and Zhang, Yugang and Fluerasu, Andrei and Zhang, Xiaozhi and Headrick, Randall L.},
abstractNote = {Understanding the self-organized ion beam nanopatterning of elemental semiconductors, particularly silicon, is of intrinsic scientific and technological interest. This is the second component of a two-part coherent x-ray scattering and x-ray photon correlation spectroscopy (XPCS) investigation of the kinetics and fluctuation dynamics of nanoscale ripple development on silicon during 1 keV Ar+ (part I) and Kr+ bombardment at 65 degrees polar angle. Here it is found that the ion-enhanced viscous flow relaxation is essentially equal for Kr+-induced patterning as previously found for Ar+ patterning despite the difference in ion masses. However, the magnitude of the surface curvature-dependent roughening rate in the early-stage kinetics is larger for Kr+ than for Ar+, consistent with expectations that the heavier ion gives an increased mass redistributive contribution to the initial surface instability. As with the Ar+ case, fluctuation dynamics in the late stage show a peak in correlation times at the length scale corresponding to the dominant structural feature on the surface-the ripples. Finally, it is shown that speckle motion during the surface evolution can be analyzed to determine spatial inhomogeneities in erosion rate and ripple velocity. This allows the direction and speed of ripple motion to be measured in a real time experiment. In the present case, ripple motion is found to be into the projected direction of the ion source, in contrast to expectations from an existing sputter erosion driven model with parameters derived from binary collision approximation simulations.},
doi = {10.1103/physrevb.103.195424},
journal = {Physical Review B},
number = 19,
volume = 103,
place = {United States},
year = {Thu May 20 00:00:00 EDT 2021},
month = {Thu May 20 00:00:00 EDT 2021}
}
Works referenced in this record:
Propulsion of Ripples on Glass by Ion Bombardment
journal, March 2006
- Alkemade, P. F. A.
- Physical Review Letters, Vol. 96, Issue 10
Distinguishing physical mechanisms using GISAXS experiments and linear theory: the importance of high wavenumbers
journal, May 2017
- Norris, Scott A.; Perkinson, Joy C.; Mokhtarzadeh, Mahsa
- Scientific Reports, Vol. 7, Issue 1
Roughening and ripple instabilities on ion-bombarded Si
journal, December 1996
- Carter, G.; Vishnyakov, V.
- Physical Review B, Vol. 54, Issue 24
The measurement of velocity gradients in laminar flow by homodyne light-scattering spectroscopy
journal, October 1980
- Fuller, G. G.; Rallison, J. M.; Schmidt, R. L.
- Journal of Fluid Mechanics, Vol. 100, Issue 03
Nanoscale kinetics and dynamics during patterning of
journal, April 2019
- Mokhtarzadeh, Mahsa; Ulbrandt, Jeffrey G.; Myint, Peco
- Physical Review B, Vol. 99, Issue 16
Propagation of ripples on pyrochlore induced by ion beam bombardment
journal, August 2009
- Wei, Qiangmin; Lian, Jie; Boatner, L. A.
- Physical Review B, Vol. 80, Issue 8
Ion beam induced surface patterns due to mass redistribution and curvature-dependent sputtering
journal, December 2012
- Bobes, Omar; Zhang, Kun; Hofsäss, Hans
- Physical Review B, Vol. 86, Issue 23
Non-symmetrical dielectric relaxation behaviour arising from a simple empirical decay function
journal, January 1970
- Williams, Graham; Watts, David C.
- Transactions of the Faraday Society, Vol. 66
Making waves: Kinetic processes controlling surface evolution during low energy ion sputtering
journal, June 2007
- Chan, Wai Lun; Chason, Eric
- Journal of Applied Physics, Vol. 101, Issue 12
Theory of ripple topography induced by ion bombardment
journal, July 1988
- Bradley, R. Mark; Harper, James M. E.
- Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 6, Issue 4
Slow dynamics in glassy soft matter
journal, January 2005
- Cipelletti, Luca; Ramos, Laurence
- Journal of Physics: Condensed Matter, Vol. 17, Issue 6
Simulation of ion beam sputtering with SDTrimSP, TRIDYN and SRIM
journal, August 2014
- Hofsäss, H.; Zhang, K.; Mutzke, A.
- Applied Surface Science, Vol. 310
Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline Targets
journal, August 1969
- Sigmund, Peter
- Physical Review, Vol. 184, Issue 2
Probing surface and interface morphology with Grazing Incidence Small Angle X-Ray Scattering
journal, August 2009
- Renaud, Gilles; Lazzari, Rémi; Leroy, Frédéric
- Surface Science Reports, Vol. 64, Issue 8
Evolution of ion beam induced patterns on Si(001)
journal, June 2014
- Engler, Martin; Macko, Sven; Frost, Frank
- Physical Review B, Vol. 89, Issue 24
Theory of terraced topographies produced by oblique-incidence ion bombardment of solid surfaces
journal, December 2014
- Pearson, Daniel A.; Bradley, R. Mark
- Journal of Physics: Condensed Matter, Vol. 27, Issue 1
Atomic-Scale Relaxation Dynamics and Aging in a Metallic Glass Probed by X-Ray Photon Correlation Spectroscopy
journal, October 2012
- Ruta, B.; Chushkin, Y.; Monaco, G.
- Physical Review Letters, Vol. 109, Issue 16
Hydrodynamic approach to surface pattern formation by ion beams
journal, February 2012
- Castro, Mario; Cuerno, Rodolfo
- Applied Surface Science, Vol. 258, Issue 9
The Ultrasmoothness of Diamond-like Carbon Surfaces
journal, September 2005
- Moseler, M.
- Science, Vol. 309, Issue 5740
Mass Redistribution Causes the Structural Richness of Ion-Irradiated Surfaces
journal, February 2011
- Madi, Charbel S.; Anzenberg, Eitan; Ludwig, Karl F.
- Physical Review Letters, Vol. 106, Issue 6
de Gennes Narrowing and Relationship between Structure and Dynamics in Self-Organized Ion-Beam Nanopatterning
journal, January 2021
- Myint, Peco; Ludwig, Karl F.; Wiegart, Lutz
- Physical Review Letters, Vol. 126, Issue 1
Stress-induced patterns in ion-irradiated silicon: Model based on anisotropic plastic flow
journal, December 2012
- Norris, Scott A.
- Physical Review B, Vol. 86, Issue 23
Nonuniversality due to inhomogeneous stress in semiconductor surface nanopatterning by low-energy ion-beam irradiation
journal, April 2015
- Moreno-Barrado, A.; Castro, M.; Gago, R.
- Physical Review B, Vol. 91, Issue 15
X-ray and neutron scattering from rough surfaces
journal, August 1988
- Sinha, S. K.; Sirota, E. B.; Garoff, S.
- Physical Review B, Vol. 38, Issue 4
Velocity measurement by coherent x-ray heterodyning
journal, January 2017
- Lhermitte, Julien R. M.; Rogers, Michael C.; Manet, Sabine
- Review of Scientific Instruments, Vol. 88, Issue 1
Propagation of nanoscale ripples on ion-irradiated surfaces
journal, August 2012
- Gnaser, Hubert; Reuscher, Bernhard; Zeuner, Anna
- Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 285
Stress-induced solid flow drives surface nanopatterning of silicon by ion-beam irradiation
journal, December 2012
- Castro, M.; Gago, R.; Vázquez, L.
- Physical Review B, Vol. 86, Issue 21
Ripple propagation and velocity dispersion on ion-beam-eroded silicon surfaces
journal, March 2002
- Habenicht, S.; Lieb, K. P.; Koch, J.
- Physical Review B, Vol. 65, Issue 11
Nanoscale dynamics during self-organized ion beam patterning of Si. I. bombardment
journal, May 2021
- Myint, Peco; Ludwig, Karl F.; Wiegart, Lutz
- Physical Review B, Vol. 103, Issue 19
Sawtooth structure formation under nonlinear-regime ion bombardment
journal, June 2018
- Perkinson, Joy C.; Swenson, Jennifer M.; DeMasi, Alexander
- Journal of Physics: Condensed Matter, Vol. 30, Issue 29
Spontaneous Nanoscale Corrugation of Ion-Eroded : The Role of Ion-Irradiation-Enhanced Viscous Flow
journal, November 2001
- Umbach, Christopher C.; Headrick, Randall L.; Chang, Kee-Chul
- Physical Review Letters, Vol. 87, Issue 24
Si(100) surface morphology evolution during normal-incidence sputtering with 100–500 eV Ar+ ions
journal, October 2002
- Ludwig, F.; Eddy, C. R.; Malis, O.
- Applied Physics Letters, Vol. 81, Issue 15
Propagation of ripple patterns on Si during ion bombardment
journal, August 2013
- Hofsäss, H.; Zhang, K.; Gehrke, H. G.
- Physical Review B, Vol. 88, Issue 7
Stress vs sputtering effects in the propagation of surface ripples produced by ion-beam sputtering
journal, December 2015
- Moreno-Barrado, A.; Castro, M.; Muñoz-García, J.
- Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 365
Effects of Mo seeding on the formation of Si nanodots during low-energy ion bombardment
journal, January 2008
- Ozaydin, Gozde; Ludwig, Karl F.; Zhou, Hua
- Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 26, Issue 2
Self-Assembly of Ordered Semiconductor Nanoholes by Ion Beam Sputtering
journal, July 2009
- Wei, Qiangmin; Zhou, Xiuli; Joshi, Bhuwan
- Advanced Materials, Vol. 21, Issue 28
A mechanism of surface micro-roughening by ion bombardment
journal, November 1973
- Sigmund, Peter
- Journal of Materials Science, Vol. 8, Issue 11
Wavelength-dependent ripple propagation on ion-irradiated prepatterned surfaces driven by viscous flow corroborates two-field continuum model
journal, May 2014
- Kramczynski, Detlef; Reuscher, Bernhard; Gnaser, Hubert
- Physical Review B, Vol. 89, Issue 20