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Title: Fabrication of Silicon Sensors Based on Low-Gain Avalanche Diodes

Abstract

Low-Gain Avalanche Diodes are a recently-developed class of silicon sensors. Characterized by an internal moderate gain that enhances the signal amplitude and if built on thin silicon substrates of a few tens of microns, they feature fast signals and exhibit excellent timing performance. Thanks to their fast timing they are planned to be exploited in timing detectors in High-Energy Physics experiments, for example for the upgrades of the ATLAS and CMS detectors at the High Luminosity Large Hadron Collider (HL-LHC) at CERN. However, to achieve a spatially uniform multiplication a large pixel pitch is needed, preventing a fine spatial resolution. To overcome this limitation, the AC-coupled LGAD approach was introduced. In this type of device, metal electrodes are placed over an insulator at a fine pitch, and signals are capacitively induced on these electrodes. The fabrication technology is similar for the two LGAD families, although a fine tuning of a few process parameters needs to be carefully studied. Other R&D efforts towards detectors that can simultaneously provide good time and spatial resolution, based on the LGAD concept, are under way. These efforts aim also to mitigate the loss of performance at high irradiation fluences due to the acceptor removal withinmore » the gain layer. In this paper we describe the main points in the fabrication of LGADs and AC-LGADs in a clean-room. We also discuss novel efforts carried on related topics.« less

Authors:
 [1]
+ Show Author Affiliations
  1. Brookhaven National Lab. (BNL), Upton, NY (United States)
Publication Date:
Research Org.:
Brookhaven National Lab. (BNL), Upton, NY (United States)
Sponsoring Org.:
USDOE Office of Science (SC), High Energy Physics (HEP)
OSTI Identifier:
1781500
Report Number(s):
BNL-221313-2021-JAAM
Journal ID: ISSN 2296-424X; TRN: US2209917
Grant/Contract Number:  
SC0012704
Resource Type:
Accepted Manuscript
Journal Name:
Frontiers in Physics
Additional Journal Information:
Journal Volume: 9; Journal ID: ISSN 2296-424X
Publisher:
Frontiers Research Foundation
Country of Publication:
United States
Language:
English
Subject:
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY; silicon detectors; high-energy physics; impact ionization; fabrication process; timing; avalanche photodiodes

Citation Formats

Giacomini, Gabriele. Fabrication of Silicon Sensors Based on Low-Gain Avalanche Diodes. United States: N. p., 2021. Web. doi:10.3389/fphy.2021.618621.
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Giacomini, Gabriele. Fabrication of Silicon Sensors Based on Low-Gain Avalanche Diodes. United States. https://doi.org/10.3389/fphy.2021.618621
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Giacomini, Gabriele. Mon . "Fabrication of Silicon Sensors Based on Low-Gain Avalanche Diodes". United States. https://doi.org/10.3389/fphy.2021.618621. https://www.osti.gov/servlets/purl/1781500.
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@article{osti_1781500,
title = {Fabrication of Silicon Sensors Based on Low-Gain Avalanche Diodes},
author = {Giacomini, Gabriele},
abstractNote = {Low-Gain Avalanche Diodes are a recently-developed class of silicon sensors. Characterized by an internal moderate gain that enhances the signal amplitude and if built on thin silicon substrates of a few tens of microns, they feature fast signals and exhibit excellent timing performance. Thanks to their fast timing they are planned to be exploited in timing detectors in High-Energy Physics experiments, for example for the upgrades of the ATLAS and CMS detectors at the High Luminosity Large Hadron Collider (HL-LHC) at CERN. However, to achieve a spatially uniform multiplication a large pixel pitch is needed, preventing a fine spatial resolution. To overcome this limitation, the AC-coupled LGAD approach was introduced. In this type of device, metal electrodes are placed over an insulator at a fine pitch, and signals are capacitively induced on these electrodes. The fabrication technology is similar for the two LGAD families, although a fine tuning of a few process parameters needs to be carefully studied. Other R&D efforts towards detectors that can simultaneously provide good time and spatial resolution, based on the LGAD concept, are under way. These efforts aim also to mitigate the loss of performance at high irradiation fluences due to the acceptor removal within the gain layer. In this paper we describe the main points in the fabrication of LGADs and AC-LGADs in a clean-room. We also discuss novel efforts carried on related topics.},
doi = {10.3389/fphy.2021.618621},
journal = {Frontiers in Physics},
number = ,
volume = 9,
place = {United States},
year = {Mon Apr 05 00:00:00 EDT 2021},
month = {Mon Apr 05 00:00:00 EDT 2021}
}
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https://doi.org/10.3389/fphy.2021.618621
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Works referenced in this record:

Weightfield2: A fast simulator for silicon and diamond solid state detector
journal, October 2015

  • Cenna, Francesca; Cartiglia, N.; Friedl, M.
  • Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 796
  • DOI: 10.1016/j.nima.2015.04.015

Beam test results of a 16 ps timing system based on ultra-fast silicon detectors
journal, April 2017

  • Cartiglia, N.; Staiano, A.; Sola, V.
  • Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 850
  • DOI: 10.1016/j.nima.2017.01.021

Large-area APDs and monolithic APD arrays
journal, December 2001

  • Shah, K. S.; Farrell, R.; Grazioso, R.
  • IEEE Transactions on Nuclear Science, Vol. 48, Issue 6
  • DOI: 10.1109/23.983267

Radiation hardness of the low gain avalanche diodes developed by NDL and IHEP in China
journal, December 2020

  • Fan, Y. Y.; Alderweireldt, S.; Agapopoulou, C.
  • Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 984
  • DOI: 10.1016/j.nima.2020.164608

Characterization of avalanche photodiodes for calorimetry applications
journal, June 1999

  • Karar, A.; Musienko, Y.; Vanel, J. Ch.
  • Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 428, Issue 2-3
  • DOI: 10.1016/s0168-9002(99)00177-1

Analysis and numerical design of Resistive AC-Coupled Silicon Detectors (RSD) for 4D particle tracking
journal, April 2020

  • Mandurrino, M.; Arcidiacono, R.; Boscardin, M.
  • Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 959
  • DOI: 10.1016/j.nima.2020.163479

Technology developments and first measurements of Low Gain Avalanche Detectors (LGAD) for high energy physics applications
journal, November 2014

  • Pellegrini, G.; Fernández-Martínez, P.; Baselga, M.
  • Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 765
  • DOI: 10.1016/j.nima.2014.06.008

Design and fabrication of an optimum peripheral region for low gain avalanche detectors
journal, June 2016

  • Fernández-Martínez, Pablo; Flores, D.; Hidalgo, S.
  • Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 821
  • DOI: 10.1016/j.nima.2016.03.049

LGAD designs for Future Particle Trackers
journal, November 2020

  • Cartiglia, N.; Arcidiacono, R.; Borghi, G.
  • Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 979
  • DOI: 10.1016/j.nima.2020.164383

First FBK production of 50 μ m ultra-fast silicon detectors
journal, April 2019

  • Sola, V.; Arcidiacono, R.; Boscardin, M.
  • Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 924
  • DOI: 10.1016/j.nima.2018.07.060

Trench-Isolated Low Gain Avalanche Diodes (TI-LGADs)
journal, June 2020

  • Paternoster, G.; Borghi, G.; Boscardin, M.
  • IEEE Electron Device Letters, Vol. 41, Issue 6
  • DOI: 10.1109/led.2020.2991351

Tracking in 4 dimensions
journal, February 2017

  • Cartiglia, N.; Arcidiacono, R.; Baldassarri, B.
  • Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 845
  • DOI: 10.1016/j.nima.2016.05.078

Radiation resistant LGAD design
journal, March 2019

  • Ferrero, M.; Arcidiacono, R.; Barozzi, M.
  • Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 919
  • DOI: 10.1016/j.nima.2018.11.121

Deep diffused Avalanche photodiodes for charged particles timing
journal, April 2020

  • Centis Vignali, M.; Dias De Almeida, P.; Franconi, L.
  • Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 958
  • DOI: 10.1016/j.nima.2019.162405

Timing performance of small cell 3D silicon detectors
journal, August 2019

  • Kramberger, G.; Cindro, V.; Flores, D.
  • Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 934
  • DOI: 10.1016/j.nima.2019.04.088

Fabrication and performance of AC-coupled LGADs
journal, September 2019

Ultra-fast silicon detectors
journal, December 2013

  • Sadrozinski, H. F. -W.; Ely, S.; Fadeyev, V.
  • Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 730
  • DOI: 10.1016/j.nima.2013.06.033

Development of a technology for the fabrication of Low-Gain Avalanche Diodes at BNL
journal, August 2019

  • Giacomini, Gabriele; Chen, Wei; Lanni, Francesco
  • Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 934
  • DOI: 10.1016/j.nima.2019.04.073

Layout and performance of HPK prototype LGAD sensors for the High-Granularity Timing Detector
journal, November 2020

  • Yang, X.; Alderweireldt, S.; Atanov, N.
  • Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 980
  • DOI: 10.1016/j.nima.2020.164379

Acceptor removal - Displacement damage effects involving the shallow acceptor doping of p-type silicon devices
conference, September 2020

  • Moll, Michael
  • Proceedings of The 28th International Workshop on Vertex Detectors — PoS(Vertex2019)
  • DOI: 10.22323/1.373.0027

The ATLAS Experiment at the CERN Large Hadron Collider
journal, August 2008

The CMS experiment at the CERN LHC
journal, August 2008

Design and TCAD simulation of double-sided pixelated low gain avalanche detectors
journal, October 2015

  • Dalla Betta, Gian-Franco; Pancheri, Lucio; Boscardin, Maurizio
  • Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 796
  • DOI: 10.1016/j.nima.2015.03.039

Recent technological developments on LGAD and iLGAD detectors for tracking and timing applications
journal, September 2016

  • Pellegrini, G.; Baselga, M.; Carulla, M.
  • Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 831
  • DOI: 10.1016/j.nima.2016.05.066

Simulation of signal generation for silicon avalanche photodiodes (APDs)
journal, November 2000

  • Tapan, I.; Gilmore, R. S.
  • Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 454, Issue 1
  • DOI: 10.1016/S0168-9002(00)00835-4
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