Investigation of physical properties of F-and-Ga co-doped ZnO thin films grown by RF magnetron sputtering for perovskite solar cells applications

Zheng, Guoxi; Song, Jianmin; Zhang, Jie; Li, Junjie; Han, Bing; Meng, Xudong; Yang, Fu; Zhao, Ying; Wang, Yanfeng

doi:10.1016/j.mssp.2020.105016

Title: Investigation of physical properties of F-and-Ga co-doped ZnO thin films grown by RF magnetron sputtering for perovskite solar cells applications

Authors:: Zheng, Guoxi; Song, Jianmin; Zhang, Jie; Li, Junjie; Han, Bing; Meng, Xudong; Yang, Fu; Zhao, Ying; Wang, Yanfeng

Publication Date:: Mon Jun 01 00:00:00 EDT 2020

Sponsoring Org.:: USDOE Office of Electricity (OE), Advanced Grid Research & Development. Power Systems Engineering Research

OSTI Identifier:: 1694148

Grant/Contract Number:: 19214301D; YB2018014; 01910092010

Resource Type:: Publisher's Accepted Manuscript

Journal Name:: Materials Science in Semiconductor Processing

Additional Journal Information:: Journal Name: Materials Science in Semiconductor Processing Journal Volume: 112 Journal Issue: C; Journal ID: ISSN 1369-8001

Publisher:: Elsevier

Country of Publication:: Netherlands

Language:: English

Citation Formats


                    Zheng, Guoxi, Song, Jianmin, Zhang, Jie, Li, Junjie, Han, Bing, Meng, Xudong, Yang, Fu, Zhao, Ying, and Wang, Yanfeng. Investigation of physical properties of F-and-Ga co-doped ZnO thin films grown by RF magnetron sputtering for perovskite solar cells applications.  Netherlands: N. p., 2020. 
Web.  doi:10.1016/j.mssp.2020.105016.

Copy to clipboard


                    Zheng, Guoxi, Song, Jianmin, Zhang, Jie, Li, Junjie, Han, Bing, Meng, Xudong, Yang, Fu, Zhao, Ying, & Wang, Yanfeng. Investigation of physical properties of F-and-Ga co-doped ZnO thin films grown by RF magnetron sputtering for perovskite solar cells applications.  Netherlands.  https://doi.org/10.1016/j.mssp.2020.105016

Copy to clipboard


                    Zheng, Guoxi, Song, Jianmin, Zhang, Jie, Li, Junjie, Han, Bing, Meng, Xudong, Yang, Fu, Zhao, Ying, and Wang, Yanfeng. Mon .  
"Investigation of physical properties of F-and-Ga co-doped ZnO thin films grown by RF magnetron sputtering for perovskite solar cells applications".  Netherlands.  https://doi.org/10.1016/j.mssp.2020.105016.

Copy to clipboard


                    
@article{osti_1694148,

  title        = {Investigation of physical properties of F-and-Ga co-doped ZnO thin films grown by RF magnetron sputtering for perovskite solar cells applications},

  author       = {Zheng, Guoxi and Song, Jianmin and Zhang, Jie and Li, Junjie and Han, Bing and Meng, Xudong and Yang, Fu and Zhao, Ying and Wang, Yanfeng},

  abstractNote = {},

  doi          = {10.1016/j.mssp.2020.105016},

  journal      = {Materials Science in Semiconductor Processing},

  number       = C,

  volume       = 112,

  place        = {Netherlands},

  year         = {Mon Jun 01 00:00:00 EDT 2020},

  month        = {Mon Jun 01 00:00:00 EDT 2020}

}

Copy to clipboard

Journal Article:

Free Publicly Available Full Text

Accepted Manuscript (Publisher)

Publisher's Version of Record
https://doi.org/10.1016/j.mssp.2020.105016

Other availability

Search WorldCat to find libraries that may hold this journal

Save / Share:

Export Metadata

Save to My Library

Works referenced in this record:

Transparent Conducting Oxides for Photovoltaics
journal, March 2007

Fortunato, Elvira; Ginley, David; Hosono, Hideo
MRS Bulletin, Vol. 32, Issue 03, p. 242-247
DOI: 10.1557/mrs2007.29

A comprehensive review of ZnO materials and devices
journal, August 2005

Özgür, Ü.; Alivov, Ya. I.; Liu, C.
Journal of Applied Physics, Vol. 98, Issue 4
DOI: 10.1063/1.1992666

High efficiency and high open-circuit voltage quadruple-junction silicon thin film solar cells for future electronic applications
journal, January 2017

Liu, Bofei; Bai, Lisha; Li, Tiantian
Energy & Environmental Science, Vol. 10, Issue 5
DOI: 10.1039/C7EE00332C

Copper indium gallium selenide based solar cells – a review
journal, January 2017

Ramanujam, Jeyakumar; Singh, Udai P.
Energy & Environmental Science, Vol. 10, Issue 6
DOI: 10.1039/C7EE00826K

AZO (Al:ZnO) thin films with high figure of merit as stable indium free transparent conducting oxide
journal, June 2019

Sarma, Bikash; Barman, Dipak; Sarma, Bimal K.
Applied Surface Science, Vol. 479
DOI: 10.1016/j.apsusc.2019.02.146

Morphological differences in transparent conductive indium-doped zinc oxide thin films deposited by ultrasonic spray pyrolysis
journal, November 2014

Jongthammanurak, Samerkhae; Cheawkul, Tinnaphob; Witana, Maetapa
Thin Solid Films, Vol. 571
DOI: 10.1016/j.tsf.2014.09.030

Influence of oxygen pressure on the structural, electrical and optical properties of Nb-doped ZnO thin films prepared by pulsed laser deposition
journal, February 2014

Wu, Muying; Yu, Shihui; He, Lin
Applied Surface Science, Vol. 292
DOI: 10.1016/j.apsusc.2013.11.119

Atomic layer deposition of high-mobility hydrogen-doped zinc oxide
journal, December 2017

Macco, Bart; Knoops, Harm C. M.; Verheijen, Marcel A.
Solar Energy Materials and Solar Cells, Vol. 173
DOI: 10.1016/j.solmat.2017.05.040

Thermally stable transparent conducting and highly infrared reflective Ga-doped ZnO thin films by metal organic chemical vapor deposition
journal, April 2011

Zhao, J. L.; Sun, X. W.; Ryu, H.
Optical Materials, Vol. 33, Issue 6
DOI: 10.1016/j.optmat.2010.12.008

Physical and sensing properties of ZnO:F:Al thin films deposited by sol–gel
journal, January 2010

Maldonado, A.; Tirado-Guerra, S.; Cázares, J. M.
Thin Solid Films, Vol. 518, Issue 7
DOI: 10.1016/j.tsf.2009.09.039

Improved physical properties of Al-doped ZnO thin films deposited by unbalanced RF magnetron sputtering
journal, October 2016

Sreedhar, Adem; Kwon, Jin Hyuk; Yi, Jonghoon
Ceramics International, Vol. 42, Issue 13
DOI: 10.1016/j.ceramint.2016.06.048

Transparent conductive Al-doped ZnO thin films grown at room temperature
journal, May 2011

Wang, Yuping; Lu, Jianguo; Bie, Xun
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 29, Issue 3
DOI: 10.1116/1.3565462

Influence of thickness on the structural, optical and electrical properties of Ga-doped ZnO thin films deposited by sputtering magnetron
journal, February 2017

Mahdhi, H.; Alaya, S.; Gauffier, J. L.
Journal of Alloys and Compounds, Vol. 695
DOI: 10.1016/j.jallcom.2016.11.117

Study of working pressure on the optoelectrical properties of Al–Y codoped ZnO thin-film deposited using DC magnetron sputtering for solar cell applications
journal, September 2013

Hsu, Feng-Hao; Wang, Na-Fu; Tsai, Yu-Zen
Applied Surface Science, Vol. 280
DOI: 10.1016/j.apsusc.2013.04.103

Structural, electrical and optical properties of Al–Ti codoped ZnO (ZATO) thin films prepared by RF magnetron sputtering
journal, December 2008

Jiang, Minhong; Liu, Xinyu
Applied Surface Science, Vol. 255, Issue 5
DOI: 10.1016/j.apsusc.2008.09.012

Effect of substrate temperature on transparent conducting Al and F co-doped ZnO thin films prepared by rf magnetron sputtering
journal, May 2016

Wang, Fang-Hsing; Chang, Chiao-Lu
Applied Surface Science, Vol. 370
DOI: 10.1016/j.apsusc.2016.02.161

Fabrication of high-performance F and Al co-doped ZnO transparent conductive films for use in perovskite solar cells
journal, February 2019

Ji, Xinzhen; Song, Jianmin; Wu, Tingting
Solar Energy Materials and Solar Cells, Vol. 190
DOI: 10.1016/j.solmat.2018.10.009

Effects of thickness on photoelectric properties and perovskite solar cells application of transparent conductive F and Al co-doped ZnO films
journal, July 2019

Wang, Yanfeng; Song, Jianmin; Song, Weiye
Solar Energy, Vol. 186
DOI: 10.1016/j.solener.2019.04.085

Influence of annealing temperature on the properties of transparent conductive and near-infrared reflective ZnO:Ga films
journal, January 2008

Ma, Quan-Bao; Ye, Zhi-Zhen; He, Hai-Ping
Scripta Materialia, Vol. 58, Issue 1
DOI: 10.1016/j.scriptamat.2007.09.009

The effects of substrate temperature on properties of B and Ga co-doped ZnO thin films grown by RF magnetron sputtering
journal, December 2016

Zhang, Lei; Huang, Jian; Yang, Jin
Surface and Coatings Technology, Vol. 307
DOI: 10.1016/j.surfcoat.2016.03.004

Effect of substrate temperature on the structural and optical properties of ZnO and Al-doped ZnO thin films prepared by dc magnetron sputtering
journal, January 2009

Li, Xue-Yong; Li, Hong-Jian; Wang, Zhi-Jun
Optics Communications, Vol. 282, Issue 2
DOI: 10.1016/j.optcom.2008.10.003

Influence of substrate temperature and oxygen/argon flow ratio on the electrical and optical properties of Ga-doped ZnO thin films prepared by rf magnetron sputtering
journal, December 2006

Kim, Sookjoo; Jeon, Jinho; Kim, Hyoun Woo
Crystal Research and Technology, Vol. 41, Issue 12
DOI: 10.1002/crat.200610748

The Al-doping and post-annealing treatment effects on the structural and optical properties of ZnO:Al thin films deposited on Si substrate
journal, April 2010

Ding, J. J.; Chen, H. X.; Ma, S. Y.
Applied Surface Science, Vol. 256, Issue 13
DOI: 10.1016/j.apsusc.2010.02.021

Influence of apparatus geometry and deposition conditions on the structure and topography of thick sputtered coatings
journal, July 1974

Thornton, John A.
Journal of Vacuum Science and Technology, Vol. 11, Issue 4
DOI: 10.1116/1.1312732

Modified Thornton model for magnetron sputtered zinc oxide: film structure and etching behaviour
journal, October 2003

Kluth, Oliver; Schöpe, Gunnar; Hüpkes, Jürgen
Thin Solid Films, Vol. 442, Issue 1-2
DOI: 10.1016/S0040-6090(03)00949-0

Simulation, fabrication, and application of transparent conductive Mo-doped ZnO film in a solar cell
journal, February 2016

Wang, Yanfeng; Zhang, Xiaodan; Meng, Xudong
Solar Energy Materials and Solar Cells, Vol. 145
DOI: 10.1016/j.solmat.2015.09.015

Transition between grain boundary and intragrain scattering transport mechanisms in boron-doped zinc oxide thin films
journal, April 2007

Steinhauser, J.; Faÿ, S.; Oliveira, N.
Applied Physics Letters, Vol. 90, Issue 14
DOI: 10.1063/1.2719158

Growth of high-quality Ga–F codoped ZnO thin films by mid-frequency sputtering
journal, January 2014

Shi, Qian; Zhou, Kesong; Dai, Mingjiang
Ceramics International, Vol. 40, Issue 1
DOI: 10.1016/j.ceramint.2013.05.125

Study on properties of Ga/F-co-doped ZnO thin films prepared using atomic layer deposition
journal, August 2018

Kang, Kyung-Mun; Wang, Yue; Kim, Minjae
Thin Solid Films, Vol. 660
DOI: 10.1016/j.tsf.2018.02.030

Similar Records in DOE PAGES and OSTI.GOV collections:

Effect of Ar ion-beam-assistance and substrate temperature on physical properties of Al-doped ZnO thin films deposited by RF magnetron sputtering

Journal Article Sreedhar, Adem ; Kwon, Jin Hyuk ; Yi, Jonghoon ; ... - Materials Research Bulletin

Highlights: • AZO and IAZO (303–473 K) films were grown by RF magnetron sputtering technique. • Ar ion-beam converts its kinetic energy as diffusion energy to the deposited atoms. • Structural evolution relies on diffusion energy imparted to the deposited atoms. • Surface texture densify under the aid of ion-beam and substrate temperature. - Abstract: In this study, pronounced effects of ion-beam-assistance and substrate temperature were revealed by exploring the physical properties of Al-doped ZnO thin films deposited by the RF magnetron sputtering technique. Herein, two measurable parameters, ion-beam discharge current (0.1 A) and substrate temperature (303–473 K) were adoptedmore »« less
https://doi.org/10.1016/J.MATERRESBULL.2017.07.034
Comparative investigation on cation-cation (Al-Sn) and cation-anion (Al-F) co-doping in RF sputtered ZnO thin films: Mechanistic insight

Journal Article Mallick, Arindam ; Basak, Durga - Applied Surface Science
Cited by 26
https://doi.org/10.1016/j.apsusc.2017.03.092
Effects of low-temperature-buffer, rf-power, and annealing on structural and optical properties of ZnO/Al{sub 2}O{sub 3}(0001) thin films grown by rf-magnetron sputtering

Journal Article Liu, H F ; Chua, S J - Journal of Applied Physics

ZnO thin films were epitaxially grown on Al{sub 2}O{sub 3} (0001) substrates in a radio-frequency (rf) magnetron sputtering chamber. The surface morphology of ZnO was remarkably affected by the incorporation of a low-temperature grown ZnO buffer as well as the changes in rf-power. X-ray diffractions, combined with the surface micropits, revealed strain relaxations in the ZnO epilayers grown with higher rf-powers, which in turn caused a redshift to the intrinsic exciton absorption peak. Strain relaxations were also observed in the ZnO epilayers upon thermal annealing, which led to a redshift in the E{sub 2}{sup high} Raman mode. A factor ofmore »« less
https://doi.org/10.1063/1.3176497
Properties of double-layered Ga-doped Al-zinc-oxide/titanium-doped indium-tin-oxide thin films prepared by dc magnetron sputtering applied for Si-based thin film solar cells

Journal Article Wang, Chao-Chun ; Wuu, Dong-Sing ; Lin, Yang-Shih ; ... - Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films

In this article, Ga-doped Al-zinc-oxide (GAZO)/titanium-doped indium-tin-oxide (ITIO) bi-layer films were deposited onto glass substrates by direct current (dc) magnetron sputtering. The bottom ITIO film, with a thickness of 200 nm, was sputtered onto the glass substrate. The ITIO film was post-annealed at 350 deg. C for 10-120 min as a seed layer. The effect of post-annealing conditions on the morphologies, electrical, and optical properties of ITIO films was investigated. A GAZO layer with a thickness of 1200 nm was continuously sputtered onto the ITIO bottom layer. The results show that the properties of the GAZO/ITIO films were strongly dependentmore »« less
https://doi.org/10.1116/1.3651099
Effect of pressure on the properties of phosphorus-doped p-type ZnO thin films grown by radio frequency-magnetron sputtering

Journal Article Hwang, Dae-Kue ; Oh, Min-Suk ; Choi, Yong-Seok ; ... - Applied Physics Letters

We report the effect of pressure on the surface morphology, electrical and optical properties of phosphorus (P)-doped p-type ZnO grown by radio frequency magnetron sputtering. The nanorod structures of P-doped ZnO films became dense and flat with decreasing pressure. The Hall effect measurement of the films grown at a pressure of 5-20 mTorr showed an n-type conductivity after rapid thermal annealing. However, the films grown at a low pressure of 1 mTorr showed a p-type conductivity with a hole concentration of 4.71x18{sup 18}/cm{sup 3}. This result showed that the pressure of rf-magnetron sputtering plays a critical role in the growthmore » of P-doped p-type ZnO.« less
https://doi.org/10.1063/1.2913011

Similar Records

Title: Investigation of physical properties of F-and-Ga co-doped ZnO thin films grown by RF magnetron sputtering for perovskite solar cells applications

Citation Formats

Transparent Conducting Oxides for Photovoltaics journal, March 2007

A comprehensive review of ZnO materials and devices journal, August 2005

High efficiency and high open-circuit voltage quadruple-junction silicon thin film solar cells for future electronic applications journal, January 2017

Copper indium gallium selenide based solar cells – a review journal, January 2017

AZO (Al:ZnO) thin films with high figure of merit as stable indium free transparent conducting oxide journal, June 2019

Morphological differences in transparent conductive indium-doped zinc oxide thin films deposited by ultrasonic spray pyrolysis journal, November 2014

Influence of oxygen pressure on the structural, electrical and optical properties of Nb-doped ZnO thin films prepared by pulsed laser deposition journal, February 2014

Atomic layer deposition of high-mobility hydrogen-doped zinc oxide journal, December 2017

Thermally stable transparent conducting and highly infrared reflective Ga-doped ZnO thin films by metal organic chemical vapor deposition journal, April 2011

Physical and sensing properties of ZnO:F:Al thin films deposited by sol–gel journal, January 2010

Improved physical properties of Al-doped ZnO thin films deposited by unbalanced RF magnetron sputtering journal, October 2016

Transparent conductive Al-doped ZnO thin films grown at room temperature journal, May 2011

Influence of thickness on the structural, optical and electrical properties of Ga-doped ZnO thin films deposited by sputtering magnetron journal, February 2017

Study of working pressure on the optoelectrical properties of Al–Y codoped ZnO thin-film deposited using DC magnetron sputtering for solar cell applications journal, September 2013

Structural, electrical and optical properties of Al–Ti codoped ZnO (ZATO) thin films prepared by RF magnetron sputtering journal, December 2008

Effect of substrate temperature on transparent conducting Al and F co-doped ZnO thin films prepared by rf magnetron sputtering journal, May 2016

Fabrication of high-performance F and Al co-doped ZnO transparent conductive films for use in perovskite solar cells journal, February 2019

Effects of thickness on photoelectric properties and perovskite solar cells application of transparent conductive F and Al co-doped ZnO films journal, July 2019

Influence of annealing temperature on the properties of transparent conductive and near-infrared reflective ZnO:Ga films journal, January 2008

The effects of substrate temperature on properties of B and Ga co-doped ZnO thin films grown by RF magnetron sputtering journal, December 2016

Effect of substrate temperature on the structural and optical properties of ZnO and Al-doped ZnO thin films prepared by dc magnetron sputtering journal, January 2009

Influence of substrate temperature and oxygen/argon flow ratio on the electrical and optical properties of Ga-doped ZnO thin films prepared by rf magnetron sputtering journal, December 2006

The Al-doping and post-annealing treatment effects on the structural and optical properties of ZnO:Al thin films deposited on Si substrate journal, April 2010

Influence of apparatus geometry and deposition conditions on the structure and topography of thick sputtered coatings journal, July 1974

Modified Thornton model for magnetron sputtered zinc oxide: film structure and etching behaviour journal, October 2003

Simulation, fabrication, and application of transparent conductive Mo-doped ZnO film in a solar cell journal, February 2016

Transition between grain boundary and intragrain scattering transport mechanisms in boron-doped zinc oxide thin films journal, April 2007

Growth of high-quality Ga–F codoped ZnO thin films by mid-frequency sputtering journal, January 2014

Study on properties of Ga/F-co-doped ZnO thin films prepared using atomic layer deposition journal, August 2018

Transparent Conducting Oxides for Photovoltaics
journal, March 2007

A comprehensive review of ZnO materials and devices
journal, August 2005

High efficiency and high open-circuit voltage quadruple-junction silicon thin film solar cells for future electronic applications
journal, January 2017

Copper indium gallium selenide based solar cells – a review
journal, January 2017

AZO (Al:ZnO) thin films with high figure of merit as stable indium free transparent conducting oxide
journal, June 2019

Morphological differences in transparent conductive indium-doped zinc oxide thin films deposited by ultrasonic spray pyrolysis
journal, November 2014

Influence of oxygen pressure on the structural, electrical and optical properties of Nb-doped ZnO thin films prepared by pulsed laser deposition
journal, February 2014

Atomic layer deposition of high-mobility hydrogen-doped zinc oxide
journal, December 2017

Thermally stable transparent conducting and highly infrared reflective Ga-doped ZnO thin films by metal organic chemical vapor deposition
journal, April 2011

Physical and sensing properties of ZnO:F:Al thin films deposited by sol–gel
journal, January 2010

Improved physical properties of Al-doped ZnO thin films deposited by unbalanced RF magnetron sputtering
journal, October 2016

Transparent conductive Al-doped ZnO thin films grown at room temperature
journal, May 2011

Influence of thickness on the structural, optical and electrical properties of Ga-doped ZnO thin films deposited by sputtering magnetron
journal, February 2017

Study of working pressure on the optoelectrical properties of Al–Y codoped ZnO thin-film deposited using DC magnetron sputtering for solar cell applications
journal, September 2013

Structural, electrical and optical properties of Al–Ti codoped ZnO (ZATO) thin films prepared by RF magnetron sputtering
journal, December 2008

Effect of substrate temperature on transparent conducting Al and F co-doped ZnO thin films prepared by rf magnetron sputtering
journal, May 2016

Fabrication of high-performance F and Al co-doped ZnO transparent conductive films for use in perovskite solar cells
journal, February 2019

Effects of thickness on photoelectric properties and perovskite solar cells application of transparent conductive F and Al co-doped ZnO films
journal, July 2019

Influence of annealing temperature on the properties of transparent conductive and near-infrared reflective ZnO:Ga films
journal, January 2008

The effects of substrate temperature on properties of B and Ga co-doped ZnO thin films grown by RF magnetron sputtering
journal, December 2016

Effect of substrate temperature on the structural and optical properties of ZnO and Al-doped ZnO thin films prepared by dc magnetron sputtering
journal, January 2009

Influence of substrate temperature and oxygen/argon flow ratio on the electrical and optical properties of Ga-doped ZnO thin films prepared by rf magnetron sputtering
journal, December 2006

The Al-doping and post-annealing treatment effects on the structural and optical properties of ZnO:Al thin films deposited on Si substrate
journal, April 2010

Influence of apparatus geometry and deposition conditions on the structure and topography of thick sputtered coatings
journal, July 1974

Modified Thornton model for magnetron sputtered zinc oxide: film structure and etching behaviour
journal, October 2003

Simulation, fabrication, and application of transparent conductive Mo-doped ZnO film in a solar cell
journal, February 2016

Transition between grain boundary and intragrain scattering transport mechanisms in boron-doped zinc oxide thin films
journal, April 2007

Growth of high-quality Ga–F codoped ZnO thin films by mid-frequency sputtering
journal, January 2014

Study on properties of Ga/F-co-doped ZnO thin films prepared using atomic layer deposition
journal, August 2018