Synthesis of a Hybrid Nanostructure of ZnO-Decorated MoS2 by Atomic Layer Deposition

Oh, Il-Kwon; Kim, Woo-Hee; Zeng, Li; Singh, Joseph; Bae, Dowon; Mackus, Adriaan J.  M.; Song, Jeong-Gyu; Seo, Seunggi; Shong, Bonggeun; Kim, Hyungjun; Bent, Stacey F.

doi:10.1021/acsnano.9b07467

Title: Synthesis of a Hybrid Nanostructure of ZnO-Decorated MoS₂ by Atomic Layer Deposition

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Abstract

We introduce here the synthesis of hybrid nanostructures comprised of ZnO nanocrystals (NCs) decorating nanosheets and nanowires (NWs) of MoS₂ prepared by atomic layer deposition (ALD). The concentration, size, and surface-to-volume ratio of the ZnO NCs can be systematically engineered by controlling both the number of ZnO ALD cycles and the properties of the MoS₂ substrates, which are prepared by sulfurizing ALD MoO₃. Analysis of the chemical composition combined with electron microscopy and synchrotron X-ray techniques as a function of the number of ZnO ALD cycles, together with the results of quantum chemical calculations, help elucidate the ZnO growth mechanism and its dependence on the properties of the MoS₂ substrate. The defect density and grain size of MoS₂ nanosheets are controlled by the sulfurization temperature of ALD MoO₃, and the ZnO NCs in turn nucleate selectively at defect sites on MoS₂ surface and enlarge with increasing ALD cycle numbers. At higher ALD cycle numbers, the coalescence of ZnO NCs contributes to an increase in areal coverage and NC size. Furthermore, the geometry of the hybrid structures can be tuned by changing the dimensionality of the MoS₂, by employing vertical NWs of MoS₂ as the substrate for ALD ZnO NCs, whichmore »« less

Authors:

^[1];

^[2];

^[3]; Singh, Joseph ^[3];

^[4];

^[3]; Song, Jeong-Gyu ^[5]; Seo, Seunggi ^[5];

^[6];

^[5];

^[3]

Stanford Univ., CA (United States); Yonsei Univ., Seoul (Korea, Republic of)
Stanford Univ., CA (United States); Hanyang Univ., Seoul (Korea, Republic of)
Stanford Univ., CA (United States)
Delft Univ. of Technology (Netherlands)
Yonsei Univ., Seoul (Korea, Republic of)
Hongik Univ., Seoul (Korea, Republic of)

Publication Date:: Wed Jan 22 00:00:00 EST 2020

Research Org.:: Stanford Univ., CA (United States)

Sponsoring Org.:: USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22). Materials Sciences & Engineering Division; National Research Foundation of Korea (NRF); National Science Foundation (NSF)

OSTI Identifier:: 1633762

Grant/Contract Number:: SC0004782; ECCS-1542152

Resource Type:: Accepted Manuscript

Journal Name:: ACS Nano

Additional Journal Information:: Journal Volume: 14; Journal Issue: 2; Journal ID: ISSN 1936-0851

Publisher:: American Chemical Society (ACS)

Country of Publication:: United States

Language:: English

Subject:: 36 MATERIALS SCIENCE; hybrid nanostructure; ZnO-decorated MoS2 nanosheets; ZnO-decorated MoS2 nanowires; atomic layer deposition

Citation Formats


                    Oh, Il-Kwon, Kim, Woo-Hee, Zeng, Li, Singh, Joseph, Bae, Dowon, Mackus, Adriaan J.  M., Song, Jeong-Gyu, Seo, Seunggi, Shong, Bonggeun, Kim, Hyungjun, and Bent, Stacey F. Synthesis of a Hybrid Nanostructure of ZnO-Decorated MoS2 by Atomic Layer Deposition.  United States: N. p., 2020. 
Web.  doi:10.1021/acsnano.9b07467.

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                    Oh, Il-Kwon, Kim, Woo-Hee, Zeng, Li, Singh, Joseph, Bae, Dowon, Mackus, Adriaan J.  M., Song, Jeong-Gyu, Seo, Seunggi, Shong, Bonggeun, Kim, Hyungjun, & Bent, Stacey F. Synthesis of a Hybrid Nanostructure of ZnO-Decorated MoS2 by Atomic Layer Deposition.  United States.  https://doi.org/10.1021/acsnano.9b07467

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                    Oh, Il-Kwon, Kim, Woo-Hee, Zeng, Li, Singh, Joseph, Bae, Dowon, Mackus, Adriaan J.  M., Song, Jeong-Gyu, Seo, Seunggi, Shong, Bonggeun, Kim, Hyungjun, and Bent, Stacey F. Wed .  
"Synthesis of a Hybrid Nanostructure of ZnO-Decorated MoS2 by Atomic Layer Deposition".  United States.  https://doi.org/10.1021/acsnano.9b07467.  https://www.osti.gov/servlets/purl/1633762.

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@article{osti_1633762,

  title        = {Synthesis of a Hybrid Nanostructure of ZnO-Decorated MoS2 by Atomic Layer Deposition},

  author       = {Oh, Il-Kwon and Kim, Woo-Hee and Zeng, Li and Singh, Joseph and Bae, Dowon and Mackus, Adriaan J.  M. and Song, Jeong-Gyu and Seo, Seunggi and Shong, Bonggeun and Kim, Hyungjun and Bent, Stacey F.},

  abstractNote = {We introduce here the synthesis of hybrid nanostructures comprised of ZnO nanocrystals (NCs) decorating nanosheets and nanowires (NWs) of MoS2 prepared by atomic layer deposition (ALD). The concentration, size, and surface-to-volume ratio of the ZnO NCs can be systematically engineered by controlling both the number of ZnO ALD cycles and the properties of the MoS2 substrates, which are prepared by sulfurizing ALD MoO3. Analysis of the chemical composition combined with electron microscopy and synchrotron X-ray techniques as a function of the number of ZnO ALD cycles, together with the results of quantum chemical calculations, help elucidate the ZnO growth mechanism and its dependence on the properties of the MoS2 substrate. The defect density and grain size of MoS2 nanosheets are controlled by the sulfurization temperature of ALD MoO3, and the ZnO NCs in turn nucleate selectively at defect sites on MoS2 surface and enlarge with increasing ALD cycle numbers. At higher ALD cycle numbers, the coalescence of ZnO NCs contributes to an increase in areal coverage and NC size. Furthermore, the geometry of the hybrid structures can be tuned by changing the dimensionality of the MoS2, by employing vertical NWs of MoS2 as the substrate for ALD ZnO NCs, which in turn leads to improvement of the relevant surface-to-volume ratio. Such materials are expected to find use in newly expanded applications, especially those such as sensors or photo-devices based on a p-n heterojunction which relies on coupling transition metal dichalcogenides (TMDCs) with NCs.},

  doi          = {10.1021/acsnano.9b07467},

  journal      = {ACS Nano},

  number       = 2,

  volume       = 14,

  place        = {United States},

  year         = {Wed Jan 22 00:00:00 EST 2020},

  month        = {Wed Jan 22 00:00:00 EST 2020}

}

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Title: Synthesis of a Hybrid Nanostructure of ZnO-Decorated MoS2 by Atomic Layer Deposition

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Title: Synthesis of a Hybrid Nanostructure of ZnO-Decorated MoS₂ by Atomic Layer Deposition