Temperature Measurement by a Nanoscale Electron Probe Using Energy Gain and Loss Spectroscopy

Idrobo, Juan Carlos; Lupini, Andrew R.; Feng, Tianli; Unocic, Raymond R.; Walden, Franklin S.; Gardiner, Daniel S.; Lovejoy, Tracy C.; Dellby, Niklas; Pantelides, Sokrates T.; Krivanek, Ondrej L.

doi:10.1103/PhysRevLett.120.095901

Title: Temperature Measurement by a Nanoscale Electron Probe Using Energy Gain and Loss Spectroscopy

Abstract

Heat dissipation in integrated nanoscale devices is a major issue that requires the development of nanoscale temperature probes. In this paper, we report the implementation of a method that combines electron energy gain and loss spectroscopy to provide a direct measurement of the local temperature in the nanoenvironment. Loss and gain peaks corresponding to an optical-phonon mode in boron nitride were measured from room temperature to ~1600 K. Both loss and gain peaks exhibit a shift towards lower energies as the sample is heated up. First-principles calculations of the temperature-induced phonon frequency shifts provide insights into the origin of this effect and confirm the experimental data. The experiments and theory presented here open the doors to the study of anharmonic effects in materials by directly probing phonons in the electron microscope.

Authors:

Idrobo, Juan Carlos ^[1]; Lupini, Andrew R. ^[2]; Feng, Tianli ^[3]; Unocic, Raymond R. ^[1]; Walden, Franklin S. ^[4]; Gardiner, Daniel S. ^[4]; Lovejoy, Tracy C. ^[5]; Dellby, Niklas ^[5]; Pantelides, Sokrates T. ^[3]; Krivanek, Ondrej L. ^[5]

Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States). Center for Nanophase Materials Sciences (CNMS)
Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)
Vanderbilt Univ., Nashville, TN (United States); Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)
Protochips Company, Morrisville, NC (United States)
Nion Company, Kirkland, WA (United States)

Publication Date:: Fri Mar 02 00:00:00 EST 2018

Research Org.:: Vanderbilt Univ., Nashville, TN (United States); Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States). National Energy Research Scientific Computing Center (NERSC); Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States). Center for Nanophase Materials Sciences (CNMS)

Sponsoring Org.:: USDOE Office of Science (SC), Basic Energy Sciences (BES). Materials Sciences & Engineering Division; McMinn Endowment; USDOE

OSTI Identifier:: 1597878

Alternate Identifier(s):: OSTI ID: 1423505; OSTI ID: 1544311; OSTI ID: 1784204

Grant/Contract Number:: FG02-09ER46554; AC02-05CH11231; AC05-00OR22725

Resource Type:: Accepted Manuscript

Journal Name:: Physical Review Letters

Additional Journal Information:: Journal Volume: 120; Journal Issue: 9; Journal ID: ISSN 0031-9007

Publisher:: American Physical Society (APS)

Country of Publication:: United States

Language:: English

Subject:: 77 NANOSCIENCE AND NANOTECHNOLOGY; 75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; 36 MATERIALS SCIENCE; electron energy loss spectroscopy; thermal properties; temperature

Citation Formats


                    Idrobo, Juan Carlos, Lupini, Andrew R., Feng, Tianli, Unocic, Raymond R., Walden, Franklin S., Gardiner, Daniel S., Lovejoy, Tracy C., Dellby, Niklas, Pantelides, Sokrates T., and Krivanek, Ondrej L. Temperature Measurement by a Nanoscale Electron Probe Using Energy Gain and Loss Spectroscopy.  United States: N. p., 2018. 
Web.  doi:10.1103/PhysRevLett.120.095901.

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                    Idrobo, Juan Carlos, Lupini, Andrew R., Feng, Tianli, Unocic, Raymond R., Walden, Franklin S., Gardiner, Daniel S., Lovejoy, Tracy C., Dellby, Niklas, Pantelides, Sokrates T., & Krivanek, Ondrej L. Temperature Measurement by a Nanoscale Electron Probe Using Energy Gain and Loss Spectroscopy.  United States.  https://doi.org/10.1103/PhysRevLett.120.095901

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                    Idrobo, Juan Carlos, Lupini, Andrew R., Feng, Tianli, Unocic, Raymond R., Walden, Franklin S., Gardiner, Daniel S., Lovejoy, Tracy C., Dellby, Niklas, Pantelides, Sokrates T., and Krivanek, Ondrej L. Fri .  
"Temperature Measurement by a Nanoscale Electron Probe Using Energy Gain and Loss Spectroscopy".  United States.  https://doi.org/10.1103/PhysRevLett.120.095901.  https://www.osti.gov/servlets/purl/1597878.

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@article{osti_1597878,

  title        = {Temperature Measurement by a Nanoscale Electron Probe Using Energy Gain and Loss Spectroscopy},

  author       = {Idrobo, Juan Carlos and Lupini, Andrew R. and Feng, Tianli and Unocic, Raymond R. and Walden, Franklin S. and Gardiner, Daniel S. and Lovejoy, Tracy C. and Dellby, Niklas and Pantelides, Sokrates T. and Krivanek, Ondrej L.},

  abstractNote = {Heat dissipation in integrated nanoscale devices is a major issue that requires the development of nanoscale temperature probes. In this paper, we report the implementation of a method that combines electron energy gain and loss spectroscopy to provide a direct measurement of the local temperature in the nanoenvironment. Loss and gain peaks corresponding to an optical-phonon mode in boron nitride were measured from room temperature to ~1600 K. Both loss and gain peaks exhibit a shift towards lower energies as the sample is heated up. First-principles calculations of the temperature-induced phonon frequency shifts provide insights into the origin of this effect and confirm the experimental data. The experiments and theory presented here open the doors to the study of anharmonic effects in materials by directly probing phonons in the electron microscope.},

  doi          = {10.1103/PhysRevLett.120.095901},

  journal      = {Physical Review Letters},

  number       = 9,

  volume       = 120,

  place        = {United States},

  year         = {Fri Mar 02 00:00:00 EST 2018},

  month        = {Fri Mar 02 00:00:00 EST 2018}

}

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Title: Temperature Measurement by a Nanoscale Electron Probe Using Energy Gain and Loss Spectroscopy

Abstract

Citation Formats

Heat Generation and Transport in Nanometer-Scale Transistors journal, August 2006

Efficiency of ab-initio total energy calculations for metals and semiconductors using a plane-wave basis set journal, July 1996

Vibrational spectroscopy in the electron microscope journal, October 2014

Interaction of 25-keV Electrons with Lattice Vibrations in LiF. Experimental Evidence for Surface Modes of Lattice Vibration journal, August 1966

Introduction to the Theory of Thermal Neutron Scattering book, May 2012

Local temperature measurement in TEM by parallel beam electron diffraction journal, May 2017

Efficient iterative schemes for ab initio total-energy calculations using a plane-wave basis set journal, October 1996

First principles phonon calculations in materials science journal, November 2015

Temperature dependence of Raman-active phonons and anharmonic interactions in layered hexagonal BN journal, October 2016

Monochromated STEM with a 30 meV-wide, atom-sized electron probe journal, January 2013

Temperature-dependent high-angle electron scattering from a phase-separated amorphous GeTe thin film journal, June 1996

Thermal Conductivity of MgO Periclase from Equilibrium First Principles Molecular Dynamics journal, September 2009

Experimental Evidence for the Collective Nature of the Characteristic Energy Loss of Electrons in Solids–Studies on the Dispersion Relation of Plasma Frequency– journal, February 1956

Anharmonicity and necessity of phonon eigenvectors in the phonon normal mode analysis journal, May 2015

High-resolution X-ray luminescence extension imaging journal, February 2021

Nanoscale temperature mapping in operating microelectronic devices journal, February 2015

Ab initiomolecular dynamics for liquid metals journal, January 1993

The anisotropic thermal expansion of boron nitride: I. experimental results and their analysis journal, October 1975

Electron energy-gain spectroscopy journal, July 2008

Mapping vibrational surface and bulk modes in a single nanocube journal, March 2017

Damage-free vibrational spectroscopy of biological materials in the electron microscope journal, March 2016

Electron-Beam Mapping of Vibrational Modes with Nanometer Spatial Resolution journal, December 2016

Raman scattering from boron nitride coatings at high temperatures journal, February 1991

Ab initio study of the phononic origin of negative thermal expansion journal, November 2016

Introduction to the Theory of Thermal Neutron Scattering journal, December 1979

First principles phonon calculations in materials science preprint, January 2015

Identification of site-specific isotopic labels by vibrational spectroscopy in the electron microscope journal, January 2019

Measuring nanoscale thermal gradients in suspended MoS 2 with STEM-EELS journal, October 2019

Measuring temperature-dependent thermal diffuse scattering using scanning transmission electron microscopy journal, December 2018

Modeling ballistic phonon transport from a cylindrical electron beam heat source journal, September 2019

Electron-beam spectroscopy for nanophotonics journal, July 2019

Methods for Calibration of Specimen Temperature During In Situ Transmission Electron Microscopy Experiments journal, January 2020

Vibrational spectroscopy at atomic resolution with electron impact scattering journal, October 2019

Electron Beam Spectroscopy for Nanophotonics text, January 2019

Time-of-flight electron energy loss spectroscopy by longitudinal phase space manipulation with microwave cavities journal, September 2018

Heat Generation and Transport in Nanometer-Scale Transistors
journal, August 2006

Efficiency of ab-initio total energy calculations for metals and semiconductors using a plane-wave basis set
journal, July 1996

Vibrational spectroscopy in the electron microscope
journal, October 2014

Interaction of 25-keV Electrons with Lattice Vibrations in LiF. Experimental Evidence for Surface Modes of Lattice Vibration
journal, August 1966

Introduction to the Theory of Thermal Neutron Scattering
book, May 2012

Local temperature measurement in TEM by parallel beam electron diffraction
journal, May 2017

Efficient iterative schemes for ab initio total-energy calculations using a plane-wave basis set
journal, October 1996

First principles phonon calculations in materials science
journal, November 2015

Temperature dependence of Raman-active phonons and anharmonic interactions in layered hexagonal BN
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Monochromated STEM with a 30 meV-wide, atom-sized electron probe
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Temperature-dependent high-angle electron scattering from a phase-separated amorphous GeTe thin film
journal, June 1996

Thermal Conductivity of MgO Periclase from Equilibrium First Principles Molecular Dynamics
journal, September 2009

Experimental Evidence for the Collective Nature of the Characteristic Energy Loss of Electrons in Solids–Studies on the Dispersion Relation of Plasma Frequency–
journal, February 1956

Anharmonicity and necessity of phonon eigenvectors in the phonon normal mode analysis
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High-resolution X-ray luminescence extension imaging
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Nanoscale temperature mapping in operating microelectronic devices
journal, February 2015

Ab initiomolecular dynamics for liquid metals
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The anisotropic thermal expansion of boron nitride: I. experimental results and their analysis
journal, October 1975

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Mapping vibrational surface and bulk modes in a single nanocube
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Damage-free vibrational spectroscopy of biological materials in the electron microscope
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Electron-Beam Mapping of Vibrational Modes with Nanometer Spatial Resolution
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Raman scattering from boron nitride coatings at high temperatures
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Ab initio study of the phononic origin of negative thermal expansion
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Introduction to the Theory of Thermal Neutron Scattering
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Identification of site-specific isotopic labels by vibrational spectroscopy in the electron microscope
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Measuring nanoscale thermal gradients in suspended MoS ₂ with STEM-EELS
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Measuring temperature-dependent thermal diffuse scattering using scanning transmission electron microscopy
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Modeling ballistic phonon transport from a cylindrical electron beam heat source
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Methods for Calibration of Specimen Temperature During In Situ Transmission Electron Microscopy Experiments
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