The chemical physics of sequential infiltration synthesis—A thermodynamic and kinetic perspective

Waldman, Ruben Z.; Mandia, David J.; Yanguas-Gil, Angel; Martinson, Alex B. F.; Elam, Jeffrey W.; Darling, Seth B.

doi:10.1063/1.5128108

Title: The chemical physics of sequential infiltration synthesis—A thermodynamic and kinetic perspective

Journal Article · 19 November 2019 · Journal of Chemical Physics

DOI: https://doi.org/10.1063/1.5128108 · OSTI ID:1592570

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Univ. of Chicago, IL (United States); Argonne National Lab. (ANL), Lemont, IL (United States); Energy Frontier Research Center (EFRC), Lemont, IL (United States)
Argonne National Lab. (ANL), Lemont, IL (United States)
Energy Frontier Research Center (EFRC), Lemont, IL (United States); Argonne National Lab. (ANL), Lemont, IL (United States)

Sequential infiltration synthesis (SIS) is an emerging materials growth method by which inorganic metal oxides are nucleated and grown within the free volume of polymers in association with chemical functional groups in the polymer. SIS enables the growth of novel polymer-inorganic hybrid materials, porous inorganic materials, and spatially templated nanoscale devices of relevance to a host of technological applications. Although SIS borrows from the precursors and equipment of atomic layer deposition (ALD), the chemistry and physics of SIS differ in important ways. These differences arise from the permeable three-dimensional distribution of functional groups in polymers in SIS, which contrast to the typically impermeable two-dimensional distribution of active sites on solid surfaces in ALD. In SIS, metal-organic vapor-phase precursors dissolve and diffuse into polymers and interact with these functional groups through reversible complex formation and/or irreversible chemical reactions. In this perspective, we describe the thermodynamics and kinetics of SIS and attempt to disentangle the tightly coupled physical and chemical processes that underlie this method. Here, we discuss the various experimental, computational, and theoretical efforts that provide insight into SIS mechanisms and identify approaches that may fill out current gaps in knowledge and expand the utilization of SIS.

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Research Organization:: Argonne National Laboratory (ANL), Argonne, IL (United States); Energy Frontier Research Centers (EFRC) (United States). Advanced Materials for Energy-Water Systems (AMEWS)

Sponsoring Organization:: USDOE; USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22). Scientific User Facilities Division

Grant/Contract Number:: AC02-06CH11357

OSTI ID:: 1592570

Journal Information:: Journal of Chemical Physics, Journal Name: Journal of Chemical Physics Journal Issue: 19 Vol. 151; ISSN 0021-9606

Publisher:: American Institute of Physics (AIP)Copyright Statement

Country of Publication:: United States

Language:: English

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Temperature-dependent reaction between trimethylaluminum and poly(methyl methacrylate) during sequential vapor infiltration: experimental and ab initio analysis Dandley, Erinn C.; Needham, Craig D.; Williams, Philip S. J. Mater. Chem. C, Vol. 2, Issue 44 https://doi.org/10.1039/c4tc01293c	journal	January 2014
Atomic layer deposition of zinc oxide onto and into P3HT for hybrid photovoltaics Obuchovsky, S.; Deckman, I.; Moshonov, M. J. Mater. Chem. C, Vol. 2, Issue 42 https://doi.org/10.1039/c4tc01629g	journal	January 2014
Patterning at the 10 nanometer length scale using a strongly segregating block copolymer thin film and vapor phase infiltration of inorganic precursors Choi, Jonathan W.; Li, Zhaodong; Black, Charles T. Nanoscale, Vol. 8, Issue 22 https://doi.org/10.1039/c6nr01409g	journal	January 2016
Advanced oil sorbents using sequential infiltration synthesis Barry, Edward; Mane, Anil U.; Libera, Joseph A. Journal of Materials Chemistry A, Vol. 5, Issue 6 https://doi.org/10.1039/c6ta09014a	journal	January 2017
Efficient and controllable vapor to solid doping of the polythiophene P3HT by low temperature vapor phase infiltration Wang, Weike; Chen, Chaoqiu; Tollan, Christopher Journal of Materials Chemistry C, Vol. 5, Issue 10 https://doi.org/10.1039/c6tc05544c	journal	January 2017
Mitigating oil spills in the water column Barry, Edward; Libera, Joseph A.; Mane, Anil U. Environmental Science: Water Research & Technology, Vol. 4, Issue 1 https://doi.org/10.1039/c7ew00265c	journal	January 2018
Vapor phase infiltration (VPI) for transforming polymers into organic–inorganic hybrid materials: a critical review of current progress and future challenges Leng, Collen Z.; Losego, Mark D. Materials Horizons, Vol. 4, Issue 5 https://doi.org/10.1039/c7mh00196g	journal	January 2017
Mechanistic understanding of tungsten oxide in-plane nanostructure growth via sequential infiltration synthesis Kim, Jae Jin; Suh, Hyo Seon; Zhou, Chun Nanoscale, Vol. 10, Issue 7 https://doi.org/10.1039/c7nr07642h	journal	January 2018
A physiochemical processing kinetics model for the vapor phase infiltration of polymers: measuring the energetics of precursor-polymer sorption, diffusion, and reaction Leng, Collen Z.; Losego, Mark D. Physical Chemistry Chemical Physics, Vol. 20, Issue 33 https://doi.org/10.1039/c8cp04135k	journal	January 2018
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Sequential Infiltration Synthesis for Line Edge Roughness Mitigation of EUV Resist Baryshnikova, Marina; De Simone, Danilo; Knaepen, Werner Journal of Photopolymer Science and Technology, Vol. 30, Issue 6 https://doi.org/10.2494/photopolymer.30.667	journal	January 2017
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Elemental depth profiles and plasma etching rates of positive-tone electron beam resists after sequential infiltration synthesis of alumina Ozaki, Yuki; Ito, Shunya; Hiroshiba, Nobuya Japanese Journal of Applied Physics, Vol. 57, Issue 6S1 https://doi.org/10.7567/jjap.57.06hg01	journal	May 2018

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Effect of Polymer Removal on the Morphology and Phase of the Nanoparticles in All-Inorganic Heterostructures Synthesized via Two-Step Polymer Infiltration Berman, Diana; Sha, Yuchen; Shevchenko, Elena V. Molecules, Vol. 26, Issue 3 https://doi.org/10.3390/molecules26030679	journal	January 2021

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