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Title: Optically read Coriolis vibratory gyroscope based on a silicon tuning fork

Abstract

In this work, we describe the design, fabrication, and characterization of purely mechanical miniature resonating structures that exhibit gyroscopic performance comparable to that of more complex microelectromechanical systems. Compared to previous implementations of Coriolis vibratory gyroscopes, the present approach has the key advantage of using excitation and probing that do not require any on-chip electronics or electrical contacts near the resonating structure. More specifically, our design relies on differential optical readout, each channel of which is similar to the 'optical lever' readout used in atomic force microscopy. The piezoelectrically actuated stage provides highly efficient excitation of millimeter-scale tuning fork structures that were fabricated using widely available high-throughput wafer-level silicon processing. In our experiments, reproducible responses to rotational rates as low as 1.8 × 10 h –1 were demonstrated using a benchtop prototype without any additional processing of the raw signal. The noise-equivalent rate, ΩNER, derived from the Allan deviation plot, was found to be <0.5° h –1 for a time of 10 3 s. Despite the relatively low Q factors (<10 4) of the tuning fork structures operating under ambient pressure and temperature conditions, the measured performance was not limited by thermomechanical noise. In fact, the performance demonstrated inmore » this proof-of-principle study is approximately four orders of magnitude away from the fundamental limit.« less

Authors:
ORCiD logo [1]; ORCiD logo [2]
  1. Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)
  2. National Renewable Energy Lab. (NREL), Golden, CO (United States)
Publication Date:
Research Org.:
National Renewable Energy Lab. (NREL), Golden, CO (United States)
Sponsoring Org.:
USDOE Office of Energy Efficiency and Renewable Energy (EERE), Wind and Water Technologies Office (EE-4W)
OSTI Identifier:
1573199
Report Number(s):
NREL/JA-4A00-73298
Journal ID: ISSN 2055-7434
Grant/Contract Number:  
AC36-08GO28308
Resource Type:
Accepted Manuscript
Journal Name:
Microsystems & Nanoengineering (Online)
Additional Journal Information:
Journal Name: Microsystems & Nanoengineering (Online); Journal Volume: 5; Journal Issue: 1; Journal ID: ISSN 2055-7434
Publisher:
Springer Nature
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; micro-electro-mechanical systems; Coriolis force; Coriolis vibratory gyroscope; resonator; thermal noise; optical readout

Citation Formats

Lavrik, Nickolay V., and Datskos, Panagiotis G. Optically read Coriolis vibratory gyroscope based on a silicon tuning fork. United States: N. p., 2019. Web. doi:10.1038/s41378-019-0087-9.
Lavrik, Nickolay V., & Datskos, Panagiotis G. Optically read Coriolis vibratory gyroscope based on a silicon tuning fork. United States. doi:10.1038/s41378-019-0087-9.
Lavrik, Nickolay V., and Datskos, Panagiotis G. Mon . "Optically read Coriolis vibratory gyroscope based on a silicon tuning fork". United States. doi:10.1038/s41378-019-0087-9. https://www.osti.gov/servlets/purl/1573199.
@article{osti_1573199,
title = {Optically read Coriolis vibratory gyroscope based on a silicon tuning fork},
author = {Lavrik, Nickolay V. and Datskos, Panagiotis G.},
abstractNote = {In this work, we describe the design, fabrication, and characterization of purely mechanical miniature resonating structures that exhibit gyroscopic performance comparable to that of more complex microelectromechanical systems. Compared to previous implementations of Coriolis vibratory gyroscopes, the present approach has the key advantage of using excitation and probing that do not require any on-chip electronics or electrical contacts near the resonating structure. More specifically, our design relies on differential optical readout, each channel of which is similar to the 'optical lever' readout used in atomic force microscopy. The piezoelectrically actuated stage provides highly efficient excitation of millimeter-scale tuning fork structures that were fabricated using widely available high-throughput wafer-level silicon processing. In our experiments, reproducible responses to rotational rates as low as 1.8 × 103° h–1 were demonstrated using a benchtop prototype without any additional processing of the raw signal. The noise-equivalent rate, ΩNER, derived from the Allan deviation plot, was found to be <0.5° h–1 for a time of 103 s. Despite the relatively low Q factors (<104) of the tuning fork structures operating under ambient pressure and temperature conditions, the measured performance was not limited by thermomechanical noise. In fact, the performance demonstrated in this proof-of-principle study is approximately four orders of magnitude away from the fundamental limit.},
doi = {10.1038/s41378-019-0087-9},
journal = {Microsystems & Nanoengineering (Online)},
number = 1,
volume = 5,
place = {United States},
year = {2019},
month = {10}
}

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Works referenced in this record:

Micromachined inertial sensors
journal, January 1998

  • Yazdi, N.; Ayazi, F.; Najafi, K.
  • Proceedings of the IEEE, Vol. 86, Issue 8
  • DOI: 10.1109/5.704269

Tactical grade MEMS vibrating ring gyroscope with high shock reliability
journal, July 2015


Hybrid opto-mechanical gyroscope with injection-interferometer readout
journal, January 2001


Visual Input to the Efferent Control System of a Fly's "Gyroscope"
journal, April 1998


Towards a biomimetic gyroscope inspired by the fly's haltere using microelectromechanical systems technology
journal, October 2014

  • Droogendijk, H.; Brookhuis, R. A.; de Boer, M. J.
  • Journal of The Royal Society Interface, Vol. 11, Issue 99
  • DOI: 10.1098/rsif.2014.0573

MEMS inertial sensors: A tutorial overview
journal, April 2013


Performance of uncooled microcantilever thermal detectors
journal, April 2004

  • Datskos, P. G.; Lavrik, N. V.; Rajic, S.
  • Review of Scientific Instruments, Vol. 75, Issue 4
  • DOI: 10.1063/1.1667257

Noise processes in nanomechanical resonators
journal, September 2002

  • Cleland, A. N.; Roukes, M. L.
  • Journal of Applied Physics, Vol. 92, Issue 5
  • DOI: 10.1063/1.1499745

Mechanical-thermal noise in micromachined acoustic and vibration sensors
journal, May 1993

  • Gabrielson, T. B.
  • IEEE Transactions on Electron Devices, Vol. 40, Issue 5
  • DOI: 10.1109/16.210197

Mechanical–thermal noise in micromachined gyros
journal, December 1999


Research development of silicon MEMS gyroscopes: a review
journal, August 2015


Controlling the fly's gyroscopes
journal, April 1998

  • Hengstenberg, Roland
  • Nature, Vol. 392, Issue 6678
  • DOI: 10.1038/33796

Metal additive manufacturing for microelectromechanical systems: Titanium alloy (Ti-6Al-4V)-based nanopositioning flexure fabricated by electron beam melting
journal, October 2016

  • Fiaz, Hasan S.; Settle, Casey R.; Hoshino, Kazunori
  • Sensors and Actuators A: Physical, Vol. 249
  • DOI: 10.1016/j.sna.2016.08.029

Ultrasensitive measurement of microcantilever displacement below the shot-noise limit
journal, January 2015


Cantilever transducers as a platform for chemical and biological sensors
journal, July 2004

  • Lavrik, Nickolay V.; Sepaniak, Michael J.; Datskos, Panos G.
  • Review of Scientific Instruments, Vol. 75, Issue 7
  • DOI: 10.1063/1.1763252

Applications of Kalman Filtering in Aerospace 1960 to the Present [Historical Perspectives]
journal, June 2010


Spectral Analysis of Vibratory Gyro Noise
journal, November 2013


Multifrequency excitation of a clamped–clamped microbeam: Analytical and experimental investigation
journal, March 2016

  • Jaber, Nizar; Ramini, Abdallah; Younis, Mohammad I.
  • Microsystems & Nanoengineering, Vol. 2, Issue 1
  • DOI: 10.1038/micronano.2016.2

Acceleration sensitivity of tuning fork gyroscopes: theoretical model, simulation and experimental verification
journal, May 2014


Mechanical-thermal noise in MEMS gyroscopes
journal, June 2005


A Z-axis Quartz Cross-fork Micromachined Gyroscope Based on Shear Stress Detection
journal, March 2010

  • Xie, Liqiang; Wu, Xuezhong; Li, Shengyi
  • Sensors, Vol. 10, Issue 3
  • DOI: 10.3390/s100301573

Analysis and Modeling of Inertial Sensors Using Allan Variance
journal, January 2008

  • El-Sheimy, Naser; Hou, Haiying; Niu, Xiaoji
  • IEEE Transactions on Instrumentation and Measurement, Vol. 57, Issue 1
  • DOI: 10.1109/TIM.2007.908635

Uncooled infrared imaging using bimaterial microcantilever arrays
journal, August 2006

  • Grbovic, D.; Lavrik, N. V.; Datskos, P. G.
  • Applied Physics Letters, Vol. 89, Issue 7
  • DOI: 10.1063/1.2337083

Development of liquid-environment frequency modulation atomic force microscope with low noise deflection sensor for cantilevers of various dimensions
journal, April 2006

  • Fukuma, Takeshi; Jarvis, Suzanne P.
  • Review of Scientific Instruments, Vol. 77, Issue 4
  • DOI: 10.1063/1.2188867

0.04 degree-per-hour MEMS disk resonator gyroscope with high-quality factor (510 k) and long decaying time constant (74.9 s)
journal, November 2018


On-chip read-out of picomechanical motion under ambient conditions
journal, January 2015

  • Putrino, Gino; Martyniuk, Mariusz; Keating, Adrian
  • Nanoscale, Vol. 7, Issue 5
  • DOI: 10.1039/C4NR05419A

Toward On-Chip MEMS-Based Optical Autocorrelator
journal, October 2018

  • Othman, Ahmed M.; Kotb, Hussein E.; Sabry, Yasser M.
  • Journal of Lightwave Technology, Vol. 36, Issue 20
  • DOI: 10.1109/JLT.2018.2867473

Interferometric photodetection in silicon photonics for phase diffusion quantum entropy sources
journal, January 2018

  • Rudé, Miquel; Abellán, Carlos; Capdevila, Albert
  • Optics Express, Vol. 26, Issue 24
  • DOI: 10.1364/OE.26.031957

On-chip light sources for silicon photonics
journal, November 2015

  • Zhou, Zhiping; Yin, Bing; Michel, Jurgen
  • Light: Science & Applications, Vol. 4, Issue 11
  • DOI: 10.1038/lsa.2015.131

Nano-opto-electro-mechanical systems
journal, January 2018


Infrared imaging using arrays of SiO_2micromechanical detectors
journal, January 2012

  • Datskos, P. G.; Lavrik, N. V.; Hunter, S. R.
  • Optics Letters, Vol. 37, Issue 19
  • DOI: 10.1364/OL.37.003966

Erratum: Novel optical approach to atomic force microscopy [Appl. Phys. Lett. 5 3 , 1045 (1988)]
journal, December 1988

  • Meyer, Gerhard; Amer, Nabil M.
  • Applied Physics Letters, Vol. 53, Issue 24
  • DOI: 10.1063/1.100425