Sequential Infiltration Synthesis of Electronic Materials: Group 13 Oxides via Metal Alkyl Precursors

Waldman, Ruben Z.; Jeon, Nari; Mandia, David J.; Heinonen, Olle; Darling, Seth B.; Martinson, Alex B.  F.

doi:10.1021/acs.chemmater.9b01714

Title: Sequential Infiltration Synthesis of Electronic Materials: Group 13 Oxides via Metal Alkyl Precursors

Journal Article · 25 June 2019 · Chemistry of Materials

DOI: https://doi.org/10.1021/acs.chemmater.9b01714 · OSTI ID:1557241

^[1]; Jeon, Nari ^[2];

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Univ. of Chicago, IL (United States), Pritzker School of Molecular Engineering, Advanced Materials for Energy-Water Systems (AMEWS), Energy Frontier Research Center (EFRC)
Univ. of Chicago, IL (United States), Advanced Materials for Energy-Water Systems (AMEWS), Energy Frontier Research Center (EFRC)
Argonne National Lab. (ANL), Argonne, IL (United States). Materials Science Division

The sequential infiltration synthesis (SIS) of group 13 indium and gallium oxides (In₂O₃ and Ga₂O₃) into poly(methyl methacrylate) (PMMA) thin films is demonstrated using trimethylindium (TMIn) and trimethylgallium (TMGa), respectively, with water. In situ Fourier transform infrared (FTIR) spectroscopy reveals that these metal alkyl precursors reversibly associate with the carbonyl groups of PMMA in analogy to trimethylaluminum (TMAl), however, with significantly lower affinity. This is demonstrated to have important kinetic consequences that dramatically alter the synthetic parameters required to achieve material growth. Ab initio density functional theory simulations of the methyl methacrylate monomer with group 13 metal alkyls corroborate association energy that is 3X greater for TMAl than for either TMIn or TMGa. As a consequence, the kinetics of activated diffusion within the film is observed to be far more rapid for TMIn and TMGa than for TMAI. Spectroscopic ellipsometry and scanning electron microscopy, in combination with Hall effect measurements of SIS-derived In₂O₃ films, demonstrate that SIS enables rapid growth of thin films with continuous electrically conductive pathways after postannealing. Notably, SIS with TMIn and water enables the growth of In₂O₃ at 80°C, well below the onset temperature of atomic layer deposition (ALD) using these precursors.

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Research Organization:: Energy Frontier Research Centers (EFRC) (United States). Advanced Materials for Energy-Water Systems (AMEWS); Argonne National Laboratory (ANL), Argonne, IL (United States)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22)

Grant/Contract Number:: AC02-06CH11357

OSTI ID:: 1557241

Journal Information:: Chemistry of Materials, Journal Name: Chemistry of Materials Journal Issue: 14 Vol. 31; ISSN 0897-4756

Publisher:: American Chemical Society (ACS)Copyright Statement

Country of Publication:: United States

Language:: English

References (67)

Fabrication of Nanoporous Alumina Ultrafiltration Membrane with Tunable Pore Size Using Block Copolymer Templates Zhou, Chun; Segal-Peretz, Tamar; Oruc, Muhammed Enes Advanced Functional Materials, Vol. 27, Issue 34 https://doi.org/10.1002/adfm.201701756	journal	July 2017
Nano Spray‐Dried Block Copolymer Nanoparticles and Their Transformation into Hybrid and Inorganic Nanoparticles Weisbord, Inbal; Shomrat, Neta; Moshe, Hen Advanced Functional Materials, Vol. 30, Issue 18 https://doi.org/10.1002/adfm.201808932	journal	March 2019
Nanoscopic Morphologies in Block Copolymer Nanorods as Templates for Atomic-Layer Deposition of Semiconductors Wang, Yong; Qin, Yong; Berger, Andreas Advanced Materials, Vol. 21, Issue 27, p. 2763-2766 https://doi.org/10.1002/adma.200900136	journal	April 2009
Nanoscopic Patterned Materials with Tunable Dimensions via Atomic Layer Deposition on Block Copolymers Peng, Qing; Tseng, Yu-Chih; Darling, Seth B. Advanced Materials, Vol. 22, Issue 45, p. 5129-5133 https://doi.org/10.1002/adma.201002465	journal	September 2010
Enhanced Lithographic Imaging Layer Meets Semiconductor Manufacturing Specification a Decade Early Tseng, Yu-Chih; Mane, Anil U.; Elam, Jeffrey W. Advanced Materials, Vol. 24, Issue 19, p. 2608-2613 https://doi.org/10.1002/adma.201104871	journal	April 2012
Reversible and Irreversible Reactions of Trimethylaluminum with Common Organic Functional Groups as a Model for Molecular Layer Deposition and Vapor Phase Infiltration Yang, Fan; Brede, Jens; Ablat, Hayrensa Advanced Materials Interfaces, Vol. 4, Issue 18 https://doi.org/10.1002/admi.201700237	journal	May 2017
Trimethylaluminum Diffusion in PMMA Thin Films during Sequential Infiltration Synthesis: In Situ Dynamic Spectroscopic Ellipsometric Investigation Cianci, Elena; Nazzari, Daniele; Seguini, Gabriele Advanced Materials Interfaces, Vol. 5, Issue 20 https://doi.org/10.1002/admi.201801016	journal	August 2018
Extreme Carrier Depletion and Superlinear Photoconductivity in Ultrathin Parallel-Aligned ZnO Nanowire Array Photodetectors Fabricated by Infiltration Synthesis Nam, Chang-Yong; Stein, Aaron Advanced Optical Materials, Vol. 5, Issue 24 https://doi.org/10.1002/adom.201700807	journal	November 2017
The Rational Design of a Single-Component Photocatalyst for Gas-Phase CO ₂ Reduction Using Both UV and Visible Light Hoch, Laura B.; Wood, Thomas E.; O'Brien, Paul G. Advanced Science, Vol. 1, Issue 1 https://doi.org/10.1002/advs.201400013	journal	December 2014
XPS O 1s binding energies for polymers containing hydroxyl, ether, ketone and ester groups López, Gabriel P.; Castner, David G.; Ratner, Buddy D. Surface and Interface Analysis, Vol. 17, Issue 5 https://doi.org/10.1002/sia.740170508	journal	May 1991
Review of Recent Advances in Applications of Vapor-Phase Material Infiltration Based on Atomic Layer Deposition Subramanian, Ashwanth; Tiwale, Nikhil; Nam, Chang-Yong JOM, Vol. 71, Issue 1 https://doi.org/10.1007/s11837-018-3141-4	journal	September 2018
Properties and Applications of Vapor Infiltration into Polymeric Substrates Ingram, Wade F.; Jur, Jesse S. JOM, Vol. 71, Issue 1 https://doi.org/10.1007/s11837-018-3157-9	journal	October 2018
Ab initio study on the dimer structures of trimethylaluminum and dimethylaluminumhydride Hiraoka, Yoshiko Someya; Mashita, Masao Journal of Crystal Growth, Vol. 145, Issue 1-4 https://doi.org/10.1016/0022-0248(94)91094-4	journal	December 1994
Characterization of tin doped indium oxide films prepared by electron beam evaporation Banerjee, Ratnabali; Das, Debajyoti; Ray, Swati Solar Energy Materials, Vol. 13, Issue 1 https://doi.org/10.1016/0165-1633(86)90024-9	journal	January 1986
Indium tin oxide films prepared by radio frequency magnetron sputtering method at a low processing temperature Zhang, Keran; Zhu, Furong; Huan, C. H. A. Thin Solid Films, Vol. 376, Issue 1-2, p. 255-263 https://doi.org/10.1016/S0040-6090(00)01418-8	journal	November 2000
Thermal atomic layer deposition of In2O3 thin films using dimethyl(N-ethoxy-2,2-dimethylcarboxylicpropanamide)indium and H2O Agbenyeke, Raphael Edem; Jung, Eun Ae; Park, Bo Keun Applied Surface Science, Vol. 419 https://doi.org/10.1016/j.apsusc.2017.05.066	journal	October 2017
Mechanisms and reactions during atomic layer deposition on polymers Parsons, Gregory N.; Atanasov, Sarah E.; Dandley, Erinn C. Coordination Chemistry Reviews, Vol. 257, Issue 23-24 https://doi.org/10.1016/j.ccr.2013.07.001	journal	December 2013
Atomic layer deposition of highly conductive indium oxide using a liquid precursor and water oxidant Maeng, W. J.; Choi, Dong-won; Park, Jozeph Ceramics International, Vol. 41, Issue 9 https://doi.org/10.1016/j.ceramint.2015.05.015	journal	November 2015
Ab initio molecular simulations with numeric atom-centered orbitals Blum, Volker; Gehrke, Ralf; Hanke, Felix Computer Physics Communications, Vol. 180, Issue 11 https://doi.org/10.1016/j.cpc.2009.06.022	journal	November 2009
Surface modification of thermoplastics by atomic layer deposition of Al2O3 and TiO2 thin films Kemell, Marianna; Färm, Elina; Ritala, Mikko European Polymer Journal, Vol. 44, Issue 11 https://doi.org/10.1016/j.eurpolymj.2008.09.005	journal	November 2008
Effects of Residual Solvent Molecules Facilitating the Infiltration Synthesis of ZnO in a Nonreactive Polymer Ye, Xinyi; Kestell, John; Kisslinger, Kim Chemistry of Materials, Vol. 29, Issue 10 https://doi.org/10.1021/acs.chemmater.7b01222	journal	May 2017
Investigating Sequential Vapor Infiltration Synthesis on Block-Copolymer-Templated Titania Nanoarrays Ishchenko, Olga M.; Krishnamoorthy, Sivashankar; Valle, Nathalie The Journal of Physical Chemistry C, Vol. 120, Issue 13 https://doi.org/10.1021/acs.jpcc.5b10415	journal	March 2016
Indium Oxide Thin Films by Atomic Layer Deposition Using Trimethylindium and Ozone Mane, Anil U.; Allen, Amy J.; Kanjolia, Ravindra K. The Journal of Physical Chemistry C, Vol. 120, Issue 18 https://doi.org/10.1021/acs.jpcc.6b02657	journal	May 2016
Infiltrated Zinc Oxide in Poly(methyl methacrylate): An Atomic Cycle Growth Study Ocola, Leonidas E.; Connolly, Aine; Gosztola, David J. The Journal of Physical Chemistry C, Vol. 121, Issue 3 https://doi.org/10.1021/acs.jpcc.6b08007	journal	December 2016
Insight on the Sequential Vapor Infiltration Mechanisms of Trimethylaluminum with Poly(methyl methacrylate), Poly(vinylpyrrolidone), and Poly(acrylic acid) Hill, Grant T.; Lee, Dennis T.; Williams, Philip S. The Journal of Physical Chemistry C, Vol. 123, Issue 26 https://doi.org/10.1021/acs.jpcc.9b02153	journal	May 2019
Ozone-Based Sequential Infiltration Synthesis of Al ₂ O ₃ Nanostructures in Symmetric Block Copolymer Frascaroli, Jacopo; Cianci, Elena; Spiga, Sabina ACS Applied Materials & Interfaces, Vol. 8, Issue 49 https://doi.org/10.1021/acsami.6b11340	journal	November 2016
Infiltration Synthesis of Diverse Metal Oxide Nanostructures from Epoxidized Diene–Styrene Block Copolymer Templates Yi, Daniel H.; Nam, Chang-Yong; Doerk, Gregory ACS Applied Polymer Materials, Vol. 1, Issue 4 https://doi.org/10.1021/acsapm.8b00138	journal	February 2019
Sequential Infiltration Synthesis for the Design of Low Refractive Index Surface Coatings with Controllable Thickness Berman, Diana; Guha, Supratik; Lee, Byeongdu ACS Nano, Vol. 11, Issue 3 https://doi.org/10.1021/acsnano.6b08361	journal	February 2017
Highly Conducting, Transparent, and Flexible Indium Oxide Thin Film Prepared by Atomic Layer Deposition Using a New Liquid Precursor Et ₂ InN(SiMe ₃ ) ₂ Maeng, Wan Joo; Choi, Dong-won; Chung, Kwun-Bum ACS Applied Materials & Interfaces, Vol. 6, Issue 20 https://doi.org/10.1021/am502085c	journal	October 2014
Low-Temperature Al₂O₃ Atomic Layer Deposition Groner, M. D.; Fabreguette, F. H.; Elam, J. W. Chemistry of Materials, Vol. 16, Issue 4, p. 639-645 https://doi.org/10.1021/cm0304546	journal	February 2004
Synthesis of a Novel Porous Polymer/Ceramic Composite Material by Low-Temperature Atomic Layer Deposition Li, Nai-Hong; George, Steven M.; Weimer, Alan W. Chemistry of Materials, Vol. 19, Issue 22, p. 5388-5394 https://doi.org/10.1021/cm071431k	journal	October 2007
Indium Oxide Atomic Layer Deposition Facilitated by the Synergy between Oxygen and Water Libera, Joseph A.; Hryn, John N.; Elam, Jeffrey W. Chemistry of Materials, Vol. 23, Issue 8 https://doi.org/10.1021/cm103637t	journal	April 2011
New Insight into the Mechanism of Sequential Infiltration Synthesis from Infrared Spectroscopy Biswas, Mahua; Libera, Joseph A.; Darling, Seth B. Chemistry of Materials, Vol. 26, Issue 21 https://doi.org/10.1021/cm502427q	journal	October 2014
Hydrolysis of tri-tert-butylaluminum: the first structural characterization of alkylalumoxanes [(R2Al)2O]n and (RAlO)n Mason, Mark R.; Smith, Janna M.; Bott, Simon G. Journal of the American Chemical Society, Vol. 115, Issue 12 https://doi.org/10.1021/ja00065a005	journal	June 1993
Enhanced Block Copolymer Lithography Using Sequential Infiltration Synthesis Tseng, Yu-Chih; Peng, Qing; Ocola, Leonidas E. The Journal of Physical Chemistry C, Vol. 115, Issue 36, p. 17725-17729 https://doi.org/10.1021/jp205532e	journal	July 2011
Kinetics for the Sequential Infiltration Synthesis of Alumina in Poly(methyl methacrylate): An Infrared Spectroscopic Study Biswas, Mahua; Libera, Joseph A.; Darling, Seth B. The Journal of Physical Chemistry C, Vol. 119, Issue 26 https://doi.org/10.1021/jp511939j	journal	January 2015
Atomic Layer Deposition of Indium Tin Oxide Thin Films Using Nonhalogenated Precursors Elam, Jeffrey W.; Baker, David A.; Martinson, Alex B. F. The Journal of Physical Chemistry C, Vol. 112, Issue 6 https://doi.org/10.1021/jp7097312	journal	February 2008
Temperature-Dependent Subsurface Growth during Atomic Layer Deposition on Polypropylene and Cellulose Fibers Jur, Jesse S.; Spagnola, Joseph C.; Lee, Kyoungmi Langmuir, Vol. 26, Issue 11 https://doi.org/10.1021/la904604z	journal	June 2010
Effect of Composition of Substrate-Modifying Random Copolymers on the Orientation of Symmetric and Asymmetric Diblock Copolymer Domains Han, Eungnak; Stuen, Karl O.; La, Young-Hye Macromolecules, Vol. 41, Issue 23 https://doi.org/10.1021/ma8018393	journal	December 2008
A Route to Nanoscopic Materials via Sequential Infiltration Synthesis on Block Copolymer Templates Peng, Qing; Tseng, Yu-Chih; Darling, Seth B. ACS Nano, Vol. 5, Issue 6, p. 4600-4606 https://doi.org/10.1021/nn2003234	journal	May 2011
Cyclic trimeric hydroxy, amido, phosphido, and arsenido derivatives of aluminum and gallium. X-ray structures of [tert-Bu2Ga(.mu.-OH)]3 and [tert-Bu2Ga(.mu.-NH2)]3 Atwood, David A.; Cowley, Alan H.; Harris, Paul R. Organometallics, Vol. 12, Issue 1 https://doi.org/10.1021/om00025a010	journal	January 1993
Sub-50-nm self-assembled nanotextures for enhanced broadband antireflection in silicon solar cells Rahman, Atikur; Ashraf, Ahsan; Xin, Huolin Nature Communications, Vol. 6, Issue 1 https://doi.org/10.1038/ncomms6963	journal	January 2015
Highly ordered TiO ₂ nanostructures by sequential vapour infiltration of block copolymer micellar films in an atomic layer deposition reactor Yin, Jun; Xu, Qiang; Wang, Zhaogen J. Mater. Chem. C, Vol. 1, Issue 5 https://doi.org/10.1039/C2TC00306F	journal	January 2013
Temperature-dependent reaction between trimethylaluminum and poly(methyl methacrylate) during sequential vapor infiltration: experimental and ab initio analysis Dandley, Erinn C.; Needham, Craig D.; Williams, Philip S. J. Mater. Chem. C, Vol. 2, Issue 44 https://doi.org/10.1039/C4TC01293C	journal	January 2014
Advanced oil sorbents using sequential infiltration synthesis Barry, Edward; Mane, Anil U.; Libera, Joseph A. Journal of Materials Chemistry A, Vol. 5, Issue 6 https://doi.org/10.1039/C6TA09014A	journal	January 2017
Mitigating oil spills in the water column Barry, Edward; Libera, Joseph A.; Mane, Anil U. Environmental Science: Water Research & Technology, Vol. 4, Issue 1 https://doi.org/10.1039/C7EW00265C	journal	January 2018
Vapor phase infiltration (VPI) for transforming polymers into organic–inorganic hybrid materials: a critical review of current progress and future challenges Leng, Collen Z.; Losego, Mark D. Materials Horizons, Vol. 4, Issue 5 https://doi.org/10.1039/C7MH00196G	journal	January 2017
Mechanistic understanding of tungsten oxide in-plane nanostructure growth via sequential infiltration synthesis Kim, Jae Jin; Suh, Hyo Seon; Zhou, Chun Nanoscale, Vol. 10, Issue 7 https://doi.org/10.1039/C7NR07642H	journal	January 2018
A physiochemical processing kinetics model for the vapor phase infiltration of polymers: measuring the energetics of precursor-polymer sorption, diffusion, and reaction Leng, Collen Z.; Losego, Mark D. Physical Chemistry Chemical Physics, Vol. 20, Issue 33 https://doi.org/10.1039/C8CP04135K	journal	January 2018
Three-dimensional electroactive ZnO nanomesh directly derived from hierarchically self-assembled block copolymer thin films Subramanian, Ashwanth; Doerk, Gregory; Kisslinger, Kim Nanoscale, Vol. 11, Issue 19 https://doi.org/10.1039/C9NR00206E	journal	January 2019
Enhanced polymeric lithography resists via sequential infiltration synthesis Tseng, Yu-Chih; Peng, Qing; Ocola, Leonidas E. Journal of Materials Chemistry, Vol. 21, Issue 32, 11722-11725 https://doi.org/10.1039/c1jm12461g	journal	July 2011
Quantitative in situ infrared analysis of reactions between trimethylaluminum and polymers during Al2O3 atomic layer deposition Gong, Bo; Parsons, Gregory N. Journal of Materials Chemistry, Vol. 22, Issue 31 https://doi.org/10.1039/c2jm32343e	journal	January 2012
Interface and surface effects on the glass-transition temperature in thin polymer films Keddie, Joseph L.; Jones, Richard A. L.; Cory, Rachel A. Faraday Discussions, Vol. 98 https://doi.org/10.1039/fd9949800219	journal	January 1994
Electrical, optical, and structural properties of indium–tin–oxide thin films for organic light-emitting devices Kim, H.; Gilmore, C. M.; Piqué, A. Journal of Applied Physics, Vol. 86, Issue 11 https://doi.org/10.1063/1.371708	journal	December 1999
Toward reliable density functional methods without adjustable parameters: The PBE0 model Adamo, Carlo; Barone, Vincenzo The Journal of Chemical Physics, Vol. 110, Issue 13 https://doi.org/10.1063/1.478522	journal	April 1999
Electrical and structural properties of ZnO synthesized via infiltration of lithographically defined polymer templates Nam, Chang-Yong; Stein, Aaron; Kisslinger, Kim Applied Physics Letters, Vol. 107, Issue 20 https://doi.org/10.1063/1.4935793	journal	November 2015
Indium Tin Oxide Films: State-of-the-Art In Synthesis and Properties Kumar, R. Materials Technology, Vol. 10, Issue 9-10 https://doi.org/10.1080/10667857.1995.11752629	journal	January 1995
Role of oxygen vacancies in the high-temperature thermopower of indium oxide and indium tin oxide films Sarath Kumar, S. R.; Kasiviswanathan, S. Semiconductor Science and Technology, Vol. 24, Issue 2 https://doi.org/10.1088/0268-1242/24/2/025028	journal	January 2009
Indium oxide—a transparent, wide-band gap semiconductor for (opto)electronic applications Bierwagen, Oliver Semiconductor Science and Technology, Vol. 30, Issue 2 https://doi.org/10.1088/0268-1242/30/2/024001	journal	January 2015
Conductivity in transparent oxide semiconductors King, P. D. C.; Veal, T. D. Journal of Physics: Condensed Matter, Vol. 23, Issue 33 https://doi.org/10.1088/0953-8984/23/33/334214	journal	August 2011
Generalized Gradient Approximation Made Simple Perdew, John P.; Burke, Kieron; Ernzerhof, Matthias Physical Review Letters, Vol. 77, Issue 18, p. 3865-3868 https://doi.org/10.1103/PhysRevLett.77.3865	journal	October 1996
Analysis of Poly(methyl methacrylate) (PMMA) by XPS Girardeaux, Christophe; Pireaux, Jean-Jacques Surface Science Spectra, Vol. 4, Issue 2 https://doi.org/10.1116/1.1247813	journal	April 1996
Direct fabrication of high aspect-ratio metal oxide nanopatterns via sequential infiltration synthesis in lithographically defined SU-8 templates Nam, Chang-Yong; Stein, Aaron; Kisslinger, Kim Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, Vol. 33, Issue 6 https://doi.org/10.1116/1.4929508	journal	November 2015
Atomic layer deposition of ultrathin indium oxide and indium tin oxide films using a trimethylindium, tetrakis(dimethylamino)tin, and ozone precursor system Salami, Hossein; Uy, Alan; Vadapalli, Aarathi Journal of Vacuum Science & Technology A, Vol. 37, Issue 1 https://doi.org/10.1116/1.5058171	journal	January 2019
New Insights into Sequential Infiltration Synthesis Elam, J. W.; Biswas, M.; Darling, S. ECS Transactions, Vol. 69, Issue 7 https://doi.org/10.1149/06907.0147ecst	journal	September 2015
Vapor phase infiltration: from a bioinspired process to technologic application, a prospective review Azpitarte, Itxasne; Knez, Mato MRS Communications, Vol. 8, Issue 03 https://doi.org/10.1557/mrc.2018.126	journal	July 2018
Elemental depth profiles and plasma etching rates of positive-tone electron beam resists after sequential infiltration synthesis of alumina Ozaki, Yuki; Ito, Shunya; Hiroshiba, Nobuya Japanese Journal of Applied Physics, Vol. 57, Issue 6S1 https://doi.org/10.7567/JJAP.57.06HG01	journal	May 2018

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