Ex situ metrology and data analysis for optimization of beamline performance of aspherical pre-shaped x-ray mirrors at the advanced light source

doi:10.1063/1.5057441

This content will become publicly available on February 15, 2020

Title: Ex situ metrology and data analysis for optimization of beamline performance of aspherical pre-shaped x-ray mirrors at the advanced light source

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Abstract

Super high quality aspherical x-ray mirrors with a residual slope error of ~100 nrad (root-mean-square) and a height error of ~1-2 nm (peak-to-valley), and even lower, are now available from a number of the most advanced vendors utilizing deterministic polishing techniques. The mirror specification for the fabrication is based on the simulations of the desired performance of the mirror in the beamline optical system and is normally given with the acceptable level of deviation of the mirror figure and finish from the desired ideal shape. For example, in the case of aspherical x-ray mirrors designed for the Advanced Light Source (ALS) QERLIN beamline, the ideal shape is defined with the beamline application (conjugate) parameters and their tolerances. Here, we first introduce an original procedure and dedicated software developed at the ALS X-Ray Optics Laboratory (XROL) for optimization of beamline performance of pre-shaped hyperbolic and elliptical mirrors. The optimization is based on results of ex situ surface slope metrology and consists in minimization of the mirror shape error by determining the conjugate parameters of the best-fit ideal shape within the specified tolerances. We describe novel optical metrology instrumentation, measuring techniques, and analytical methods used at the XROL for acquisition of surfacemore »« less

Authors:

Yashchuk, Valeriy V. ^[1];

^[1]; Gevorkyan, Gevork S. ^[1];

^[1]; Smith, Brian V. ^[1]; Warwick, Tony ^[1]

Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)

Publication Date:: 2019-02-15

Research Org.:: Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)

Sponsoring Org.:: USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22). Materials Sciences & Engineering Division

OSTI Identifier:: 1542361

Grant/Contract Number:: AC02-05CH11231

Resource Type:: Accepted Manuscript

Journal Name:: Review of Scientific Instruments

Additional Journal Information:: Journal Volume: 90; Journal Issue: 2; Journal ID: ISSN 0034-6748

Publisher:: American Institute of Physics (AIP)

Country of Publication:: United States

Language:: English

Citation Formats


                    Yashchuk, Valeriy V., Lacey, Ian, Gevorkyan, Gevork S., McKinney, Wayne R., Smith, Brian V., and Warwick, Tony. Ex situ metrology and data analysis for optimization of beamline performance of aspherical pre-shaped x-ray mirrors at the advanced light source.  United States: N. p., 2019. 
        Web.  doi:10.1063/1.5057441.

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                    Yashchuk, Valeriy V., Lacey, Ian, Gevorkyan, Gevork S., McKinney, Wayne R., Smith, Brian V., & Warwick, Tony. Ex situ metrology and data analysis for optimization of beamline performance of aspherical pre-shaped x-ray mirrors at the advanced light source.  United States.  doi:10.1063/1.5057441.

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                    Yashchuk, Valeriy V., Lacey, Ian, Gevorkyan, Gevork S., McKinney, Wayne R., Smith, Brian V., and Warwick, Tony. Fri .  
        "Ex situ metrology and data analysis for optimization of beamline performance of aspherical pre-shaped x-ray mirrors at the advanced light source".  United States.  doi:10.1063/1.5057441.

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@article{osti_1542361,

  title        = {Ex situ metrology and data analysis for optimization of beamline performance of aspherical pre-shaped x-ray mirrors at the advanced light source},

  author       = {Yashchuk, Valeriy V. and Lacey, Ian and Gevorkyan, Gevork S. and McKinney, Wayne R. and Smith, Brian V. and Warwick, Tony},

  abstractNote = {Super high quality aspherical x-ray mirrors with a residual slope error of ~100 nrad (root-mean-square) and a height error of ~1-2 nm (peak-to-valley), and even lower, are now available from a number of the most advanced vendors utilizing deterministic polishing techniques. The mirror specification for the fabrication is based on the simulations of the desired performance of the mirror in the beamline optical system and is normally given with the acceptable level of deviation of the mirror figure and finish from the desired ideal shape. For example, in the case of aspherical x-ray mirrors designed for the Advanced Light Source (ALS) QERLIN beamline, the ideal shape is defined with the beamline application (conjugate) parameters and their tolerances. Here, we first introduce an original procedure and dedicated software developed at the ALS X-Ray Optics Laboratory (XROL) for optimization of beamline performance of pre-shaped hyperbolic and elliptical mirrors. The optimization is based on results of ex situ surface slope metrology and consists in minimization of the mirror shape error by determining the conjugate parameters of the best-fit ideal shape within the specified tolerances. We describe novel optical metrology instrumentation, measuring techniques, and analytical methods used at the XROL for acquisition of surface slope data and optimization of the optic’s beamline performance. The high efficacy of the developed experimental methods and data analysis procedures is reflected in results of measurements with and performance optimization of hyperbolic and elliptical cylinder mirrors designed and fabricated for the ALS QERLIN beamline.},

  doi          = {10.1063/1.5057441},

  journal      = {Review of Scientific Instruments},

  number       = 2,

  volume       = 90,

  place        = {United States},

  year         = {2019},

  month        = {2}

}

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