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Title: Ex situ metrology and data analysis for optimization of beamline performance of aspherical pre-shaped x-ray mirrors at the advanced light source

Abstract

Super high quality aspherical x-ray mirrors with a residual slope error of ~100 nrad (root-mean-square) and a height error of ~1-2 nm (peak-to-valley), and even lower, are now available from a number of the most advanced vendors utilizing deterministic polishing techniques. The mirror specification for the fabrication is based on the simulations of the desired performance of the mirror in the beamline optical system and is normally given with the acceptable level of deviation of the mirror figure and finish from the desired ideal shape. For example, in the case of aspherical x-ray mirrors designed for the Advanced Light Source (ALS) QERLIN beamline, the ideal shape is defined with the beamline application (conjugate) parameters and their tolerances. Here, we first introduce an original procedure and dedicated software developed at the ALS X-Ray Optics Laboratory (XROL) for optimization of beamline performance of pre-shaped hyperbolic and elliptical mirrors. The optimization is based on results of ex situ surface slope metrology and consists in minimization of the mirror shape error by determining the conjugate parameters of the best-fit ideal shape within the specified tolerances. We describe novel optical metrology instrumentation, measuring techniques, and analytical methods used at the XROL for acquisition of surfacemore » slope data and optimization of the optic’s beamline performance. The high efficacy of the developed experimental methods and data analysis procedures is reflected in results of measurements with and performance optimization of hyperbolic and elliptical cylinder mirrors designed and fabricated for the ALS QERLIN beamline.« less

Authors:
 [1]; ORCiD logo [1];  [1]; ORCiD logo [1];  [1];  [1]
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  1. Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
Publication Date:
Research Org.:
Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
Sponsoring Org.:
USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22). Materials Sciences & Engineering Division
OSTI Identifier:
1542361
Grant/Contract Number:  
AC02-05CH11231
Resource Type:
Accepted Manuscript
Journal Name:
Review of Scientific Instruments
Additional Journal Information:
Journal Volume: 90; Journal Issue: 2; Journal ID: ISSN 0034-6748
Publisher:
American Institute of Physics (AIP)
Country of Publication:
United States
Language:
English
Subject:
47 OTHER INSTRUMENTATION

Citation Formats

Yashchuk, Valeriy V., Lacey, Ian, Gevorkyan, Gevork S., McKinney, Wayne R., Smith, Brian V., and Warwick, Tony. Ex situ metrology and data analysis for optimization of beamline performance of aspherical pre-shaped x-ray mirrors at the advanced light source. United States: N. p., 2019. Web. doi:10.1063/1.5057441.
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Yashchuk, Valeriy V., Lacey, Ian, Gevorkyan, Gevork S., McKinney, Wayne R., Smith, Brian V., & Warwick, Tony. Ex situ metrology and data analysis for optimization of beamline performance of aspherical pre-shaped x-ray mirrors at the advanced light source. United States. https://doi.org/10.1063/1.5057441
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Yashchuk, Valeriy V., Lacey, Ian, Gevorkyan, Gevork S., McKinney, Wayne R., Smith, Brian V., and Warwick, Tony. Fri . "Ex situ metrology and data analysis for optimization of beamline performance of aspherical pre-shaped x-ray mirrors at the advanced light source". United States. https://doi.org/10.1063/1.5057441. https://www.osti.gov/servlets/purl/1542361.
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@article{osti_1542361,
title = {Ex situ metrology and data analysis for optimization of beamline performance of aspherical pre-shaped x-ray mirrors at the advanced light source},
author = {Yashchuk, Valeriy V. and Lacey, Ian and Gevorkyan, Gevork S. and McKinney, Wayne R. and Smith, Brian V. and Warwick, Tony},
abstractNote = {Super high quality aspherical x-ray mirrors with a residual slope error of ~100 nrad (root-mean-square) and a height error of ~1-2 nm (peak-to-valley), and even lower, are now available from a number of the most advanced vendors utilizing deterministic polishing techniques. The mirror specification for the fabrication is based on the simulations of the desired performance of the mirror in the beamline optical system and is normally given with the acceptable level of deviation of the mirror figure and finish from the desired ideal shape. For example, in the case of aspherical x-ray mirrors designed for the Advanced Light Source (ALS) QERLIN beamline, the ideal shape is defined with the beamline application (conjugate) parameters and their tolerances. Here, we first introduce an original procedure and dedicated software developed at the ALS X-Ray Optics Laboratory (XROL) for optimization of beamline performance of pre-shaped hyperbolic and elliptical mirrors. The optimization is based on results of ex situ surface slope metrology and consists in minimization of the mirror shape error by determining the conjugate parameters of the best-fit ideal shape within the specified tolerances. We describe novel optical metrology instrumentation, measuring techniques, and analytical methods used at the XROL for acquisition of surface slope data and optimization of the optic’s beamline performance. The high efficacy of the developed experimental methods and data analysis procedures is reflected in results of measurements with and performance optimization of hyperbolic and elliptical cylinder mirrors designed and fabricated for the ALS QERLIN beamline.},
doi = {10.1063/1.5057441},
journal = {Review of Scientific Instruments},
number = 2,
volume = 90,
place = {United States},
year = {Fri Feb 15 00:00:00 EST 2019},
month = {Fri Feb 15 00:00:00 EST 2019}
}
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https://doi.org/10.1063/1.5057441
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    Works referencing / citing this record:

    The 6th International Workshop on X-ray Optics and Metrology—IWXM 2018
    journal, February 2019

    • Huang, Yu-Shan; Assoufid, Lahsen
    • Review of Scientific Instruments, Vol. 90, Issue 2
    • DOI: 10.1063/1.5092158

    Transfer of autocollimator calibration for use with scanning gantry profilometers for accurate determination of surface slope and curvature of state-of-the-art x-ray mirrors
    conference, October 2019

    • Lacey, Ian; Anderson, Kevan; Dickert, Jeff M.
    • Advances in Metrology for X-Ray and EUV Optics VIII
    • DOI: 10.1117/12.2529519
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