Broad ion energy distributions in helicon wave-coupled helium plasma
Abstract
Helium ion energy distributions were measured in helicon wave-coupled plasmas of the dynamics of ion implantation and sputtering of surface experiment using a retarding field energy analyzer. The shape of the energy distribution is a double-peak, characteristic of radiofrequency plasma potential modulation. The broad distribution is located within a radius of 0.8 cm, while the quartz tube of the plasma source has an inner radius of 2.2 cm. The ion energy distribution rapidly changes from a double-peak to a single peak in the radius range of 0.7–0.9 cm. The average ion energy is approximately uniform across the plasma column including the double-peak and single peak regions. The widths of the broad distribution, ΔE, in the wave-coupled mode are large compared to the time-averaged ion energy, < E >. On the axis (r = 0), ΔE/< E > ≲ 3.4, and at a radius near the edge of the plasma column (r = 2.2 cm), ΔE/< E > ~1.2. In conclusion, the discharge parameter space is scanned to investigate the effects of the magnetic field, input power, and chamber fill pressure on the wave-coupled mode that exhibits the sharp radial variation in the ion energy distribution.
- Publication Date:
- Research Org.:
- Massachusetts Inst. of Technology (MIT), Cambridge, MA (United States)
- Sponsoring Org.:
- USDOE Office of Science (SC)
- OSTI Identifier:
- 1466016
- Alternate Identifier(s):
- OSTI ID: 1361886
- Grant/Contract Number:
- FC02-99ER54512; SC0002060
- Resource Type:
- Accepted Manuscript
- Journal Name:
- Physics of Plasmas
- Additional Journal Information:
- Journal Volume: 24; Journal Issue: 5; Journal ID: ISSN 1070-664X
- Publisher:
- American Institute of Physics (AIP)
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 70 PLASMA PHYSICS AND FUSION TECHNOLOGY
Citation Formats
Woller, K. B., Whyte, D. G., and Wright, G. M. Broad ion energy distributions in helicon wave-coupled helium plasma. United States: N. p., 2017.
Web. doi:10.1063/1.4983315.
Woller, K. B., Whyte, D. G., & Wright, G. M. Broad ion energy distributions in helicon wave-coupled helium plasma. United States. https://doi.org/10.1063/1.4983315
Woller, K. B., Whyte, D. G., and Wright, G. M. Thu .
"Broad ion energy distributions in helicon wave-coupled helium plasma". United States. https://doi.org/10.1063/1.4983315. https://www.osti.gov/servlets/purl/1466016.
@article{osti_1466016,
title = {Broad ion energy distributions in helicon wave-coupled helium plasma},
author = {Woller, K. B. and Whyte, D. G. and Wright, G. M.},
abstractNote = {Helium ion energy distributions were measured in helicon wave-coupled plasmas of the dynamics of ion implantation and sputtering of surface experiment using a retarding field energy analyzer. The shape of the energy distribution is a double-peak, characteristic of radiofrequency plasma potential modulation. The broad distribution is located within a radius of 0.8 cm, while the quartz tube of the plasma source has an inner radius of 2.2 cm. The ion energy distribution rapidly changes from a double-peak to a single peak in the radius range of 0.7–0.9 cm. The average ion energy is approximately uniform across the plasma column including the double-peak and single peak regions. The widths of the broad distribution, ΔE, in the wave-coupled mode are large compared to the time-averaged ion energy, < E >. On the axis (r = 0), ΔE/< E > ≲ 3.4, and at a radius near the edge of the plasma column (r = 2.2 cm), ΔE/< E > ~1.2. In conclusion, the discharge parameter space is scanned to investigate the effects of the magnetic field, input power, and chamber fill pressure on the wave-coupled mode that exhibits the sharp radial variation in the ion energy distribution.},
doi = {10.1063/1.4983315},
journal = {Physics of Plasmas},
number = 5,
volume = 24,
place = {United States},
year = {Thu May 11 00:00:00 EDT 2017},
month = {Thu May 11 00:00:00 EDT 2017}
}
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Works referencing / citing this record:
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