Time-resolved ion energy and charge state distributions in pulsed cathodic arc plasmas of Nb−Al cathodes in high vacuum

Zöhrer, Siegfried; Anders, André; Franz, Robert

doi:10.1088/1361-6595/aabdc7

Title: Time-resolved ion energy and charge state distributions in pulsed cathodic arc plasmas of Nb−Al cathodes in high vacuum

Abstract

Cathodic arcs have been utilized in various applications including the deposition of thin films and coatings, ion implantation, and high current switching. Despite substantial progress in recent decades, the physical mechanisms responsible for the observed plasma properties are still a matter of dispute, particularly for multi-element cathodes, which can play an essential role in applications. The analysis of plasma properties is complicated by the generally occurring neutral background of metal atoms, which perturbs initial ion properties. By using a time-resolved method in combination with pulsed arcs and a comprehensive Nb–Al cathode model system, we investigate the influence of cathode composition on the plasma, while making the influence of neutrals visible for the observed time frame. The results visualize ion detections of 600 μs plasma pulses, extracted 0.27 m from the cathode, resolved in mass-per-charge, energy-per-charge and time. Ion properties are found to be strongly dependent on the cathode material in a way that cannot be deduced by simple linear extrapolation. Subsequently, current hypotheses in cathodic arc physics applying to multi-element cathodes, like the so-called 'velocity rule' or the 'cohesive energy rule', are tested for early and late stages of the pulse. Apart from their fundamental character, the findings could bemore »« less

Authors:

;

Publication Date:: Tue May 01 00:00:00 EDT 2018

Research Org.:: Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)

Sponsoring Org.:: USDOE Office of Science (SC)

OSTI Identifier:: 1437860

Alternate Identifier(s):: OSTI ID: 1492318

Grant/Contract Number:: AC02-05CH11231

Resource Type:: Published Article

Journal Name:: Plasma Sources Science and Technology

Additional Journal Information:: Journal Name: Plasma Sources Science and Technology Journal Volume: 27 Journal Issue: 5; Journal ID: ISSN 1361-6595

Publisher:: IOP Publishing

Country of Publication:: United Kingdom

Language:: English

Subject:: 70 PLASMA PHYSICS AND FUSION TECHNOLOGY; arc discharges; composite cathodes; time-resolved measurements; ion energy distribution; ion charge state distribution

Citation Formats


                    Zöhrer, Siegfried, Anders, André, and Franz, Robert. Time-resolved ion energy and charge state distributions in pulsed cathodic arc plasmas of Nb−Al cathodes in high vacuum.  United Kingdom: N. p., 2018. 
Web.  doi:10.1088/1361-6595/aabdc7.

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                    Zöhrer, Siegfried, Anders, André, & Franz, Robert. Time-resolved ion energy and charge state distributions in pulsed cathodic arc plasmas of Nb−Al cathodes in high vacuum.  United Kingdom.  https://doi.org/10.1088/1361-6595/aabdc7

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                    Zöhrer, Siegfried, Anders, André, and Franz, Robert. Tue .  
"Time-resolved ion energy and charge state distributions in pulsed cathodic arc plasmas of Nb−Al cathodes in high vacuum".  United Kingdom.  https://doi.org/10.1088/1361-6595/aabdc7.

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@article{osti_1437860,

  title        = {Time-resolved ion energy and charge state distributions in pulsed cathodic arc plasmas of Nb−Al cathodes in high vacuum},

  author       = {Zöhrer, Siegfried and Anders, André and Franz, Robert},

  abstractNote = {Cathodic arcs have been utilized in various applications including the deposition of thin films and coatings, ion implantation, and high current switching. Despite substantial progress in recent decades, the physical mechanisms responsible for the observed plasma properties are still a matter of dispute, particularly for multi-element cathodes, which can play an essential role in applications. The analysis of plasma properties is complicated by the generally occurring neutral background of metal atoms, which perturbs initial ion properties. By using a time-resolved method in combination with pulsed arcs and a comprehensive Nb–Al cathode model system, we investigate the influence of cathode composition on the plasma, while making the influence of neutrals visible for the observed time frame. The results visualize ion detections of 600 μs plasma pulses, extracted 0.27 m from the cathode, resolved in mass-per-charge, energy-per-charge and time. Ion properties are found to be strongly dependent on the cathode material in a way that cannot be deduced by simple linear extrapolation. Subsequently, current hypotheses in cathodic arc physics applying to multi-element cathodes, like the so-called 'velocity rule' or the 'cohesive energy rule', are tested for early and late stages of the pulse. Apart from their fundamental character, the findings could be useful in optimizing or designing plasma properties for applications, by actively utilizing effects on ion distributions caused by composite cathode materials and charge exchange with neutrals.},

  doi          = {10.1088/1361-6595/aabdc7},

  journal      = {Plasma Sources Science and Technology},

  number       = 5,

  volume       = 27,

  place        = {United Kingdom},

  year         = {Tue May 01 00:00:00 EDT 2018},

  month        = {Tue May 01 00:00:00 EDT 2018}

}

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Works referenced in this record:

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Title: Time-resolved ion energy and charge state distributions in pulsed cathodic arc plasmas of Nb−Al cathodes in high vacuum

Abstract

Citation Formats

Transfer Ionization in Slow Multiply Charged Ion-Atom Collisions journal, January 1983

Expansion of a multicomponent current-carrying plasma jet into vacuum journal, March 2017

Ion velocities in direct current arc plasma generated from compound cathodes journal, December 2013

Effect of multiple current spikes on the enhancement of ion charge states of vacuum arc plasmas journal, June 2000

The evolution of ion charge states in cathodic vacuum arc plasmas: a review journal, May 2012

Plasma fluctuations, local partial Saha equilibrium, and the broadening of vacuum-arc ion charge state distributions journal, January 1999

The fractal nature of vacuum arc cathode spots journal, October 2005

Correlation between cathode properties, burning voltage, and plasma parameters of vacuum arcs journal, June 2001

Adding high time resolution to charge-state-specific ion energy measurements for pulsed copper vacuum arc plasmas journal, July 2015

Ion angular distribution in plasma of vacuum arc ion source with composite cathode and elevated gas pressure journal, February 2014

Ion spectra of vacuum arc plasma with compound and alloy cathodes journal, December 1989

Time-dependence of ion charge State distributions of vacuum arcs: an interpretation involving atoms and charge exchange collisions journal, February 2005

Enhanced ion charge states in vacuum arc plasmas using a “current spike” method journal, February 2000

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Generation of multicomponent ion beams by a vacuum arc ion source with compound cathode journal, February 2010

Efficient, compact power supply for repetitively pulsed, “triggerless” cathodic arcs journal, December 1999

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Effect of the pulse repetition rate on the composition and ion charge-state distribution of pulsed vacuum arcs journal, April 1998

Ion Charge State Distributions of Al and Cr in Cathodic Arc Plasmas From Composite Cathodes in Vacuum, Argon, Nitrogen, and Oxygen journal, August 2013

Element- and charge-state-resolved ion energies in the cathodic arc plasma from composite AlCr cathodes in argon, nitrogen and oxygen atmospheres journal, June 2015

`Triggerless' triggering of vacuum arcs journal, March 1998

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Beam intensity fluctuation characteristics of the metal vapor vacuum arc ion source journal, October 1990

Cathodic arcs: Fractal voltage and cohesive energy rule journal, May 2005

Production of neutrals and their effects on the ion charge states in cathodic vacuum arc plasmas journal, August 2007

Springer Handbook of Atomic, Molecular, and Optical Physics book, January 2006

State-selective electron capture in atom-highly charged ion collisions journal, January 1985

Study of directed ion velocities in a vacuum arc by an emission method journal, September 2000

Ecton Mechanism of the Cathode Spot Phenomena in a Vacuum Arc journal, April 2013

Streaming metal plasma generation by vacuum arc plasma guns journal, February 1998

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Charge state distribution studies of the metal vapor vacuum arc ion source journal, January 1990

Multiple‐species ion beams from titanium‐hafnium alloy cathodes in vacuum arc plasmas journal, June 1993

Cathode ions from microsecond aluminum vacuum arcs journal, August 1989

Ion charge state distributions of vacuum arc plasmas: The origin of species journal, January 1997

Ion velocities in vacuum arc plasmas journal, November 2000

Puzzling differences in bismuth and lead plasmas: Evidence for the significant role of neutrals in cathodic vacuum arcs journal, August 2007

Temporal evolution of ion energy distribution functions and ion charge states of Cr and Cr-Al pulsed arc plasmas journal, July 2015

A periodic table of ion charge-state distributions observed in the transition region between vacuum sparks and vacuum arcs journal, April 2001

Transfer Ionization in Slow Multiply Charged Ion-Atom Collisions
journal, January 1983

Expansion of a multicomponent current-carrying plasma jet into vacuum
journal, March 2017

Ion velocities in direct current arc plasma generated from compound cathodes
journal, December 2013

Effect of multiple current spikes on the enhancement of ion charge states of vacuum arc plasmas
journal, June 2000

The evolution of ion charge states in cathodic vacuum arc plasmas: a review
journal, May 2012

Plasma fluctuations, local partial Saha equilibrium, and the broadening of vacuum-arc ion charge state distributions
journal, January 1999

The fractal nature of vacuum arc cathode spots
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Correlation between cathode properties, burning voltage, and plasma parameters of vacuum arcs
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Adding high time resolution to charge-state-specific ion energy measurements for pulsed copper vacuum arc plasmas
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journal, February 2014

Ion spectra of vacuum arc plasma with compound and alloy cathodes
journal, December 1989

Time-dependence of ion charge State distributions of vacuum arcs: an interpretation involving atoms and charge exchange collisions
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journal, December 1999

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journal, February 2000

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journal, May 2001

Effect of the pulse repetition rate on the composition and ion charge-state distribution of pulsed vacuum arcs
journal, April 1998

Ion Charge State Distributions of Al and Cr in Cathodic Arc Plasmas From Composite Cathodes in Vacuum, Argon, Nitrogen, and Oxygen
journal, August 2013

Element- and charge-state-resolved ion energies in the cathodic arc plasma from composite AlCr cathodes in argon, nitrogen and oxygen atmospheres
journal, June 2015

`Triggerless' triggering of vacuum arcs
journal, March 1998

Analysis of the Electrode Products Emitted by dc Arcs in a Vacuum Ambient
journal, April 1969

Beam intensity fluctuation characteristics of the metal vapor vacuum arc ion source
journal, October 1990

Cathodic arcs: Fractal voltage and cohesive energy rule
journal, May 2005

Production of neutrals and their effects on the ion charge states in cathodic vacuum arc plasmas
journal, August 2007

Springer Handbook of Atomic, Molecular, and Optical Physics
book, January 2006

State-selective electron capture in atom-highly charged ion collisions
journal, January 1985

Study of directed ion velocities in a vacuum arc by an emission method
journal, September 2000

Ecton Mechanism of the Cathode Spot Phenomena in a Vacuum Arc
journal, April 2013

Streaming metal plasma generation by vacuum arc plasma guns
journal, February 1998

Charge state dependence of cathodic vacuum arc ion energy and velocity distributions
journal, October 2006

Charge-state-resolved ion energy distribution functions of cathodic vacuum arcs: A study involving the plasma potential and biased plasmas
journal, February 2007

Charge state distribution studies of the metal vapor vacuum arc ion source
journal, January 1990

Multiple‐species ion beams from titanium‐hafnium alloy cathodes in vacuum arc plasmas
journal, June 1993

Cathode ions from microsecond aluminum vacuum arcs
journal, August 1989

Ion charge state distributions of vacuum arc plasmas: The origin of species
journal, January 1997

Ion velocities in vacuum arc plasmas
journal, November 2000

Puzzling differences in bismuth and lead plasmas: Evidence for the significant role of neutrals in cathodic vacuum arcs
journal, August 2007

Temporal evolution of ion energy distribution functions and ion charge states of Cr and Cr-Al pulsed arc plasmas
journal, July 2015

A periodic table of ion charge-state distributions observed in the transition region between vacuum sparks and vacuum arcs
journal, April 2001