Rapid feedback of chemical vapor deposition growth mechanisms by operando X-ray diffraction

Martin, Aiden A.; Depond, Philip J.; Bagge-Hansen, Michael; Lee, Jonathan R.  I.; Yoo, Jae-Hyuck; Elhadj, Selim; Matthews, Manyalibo J.; van Buuren, Tony

doi:10.1116/1.5019742

Title: Rapid feedback of chemical vapor deposition growth mechanisms by operando X-ray diffraction

Abstract

An operando x-ray diffraction system is presented for elucidating optimal laser assisted chemical vapor deposition growth conditions. The technique is utilized to investigate deposition dynamics of boron-carbon materials using trimethyl borate precursor. Trimethyl borate exhibits vastly reduced toxicological and flammability hazards compared to existing precursors, but has previously not been applied to boron carbide growth. Crystalline boron-rich carbide material is produced in a narrow growth regime on addition of hydrogen during the growth phase at high temperature. Finally, the use of the operando x-ray diffraction system allows for the exploration of highly nonequilibrium conditions and rapid process control, which are not possible using ex situ diagnostics.

Authors:

Martin, Aiden A. ^[1]; Depond, Philip J. ^[1]; Bagge-Hansen, Michael ^[1]; Lee, Jonathan R. I. ^[1]; Yoo, Jae-Hyuck ^[1]; Elhadj, Selim ^[1]; Matthews, Manyalibo J. ^[1]; van Buuren, Tony ^[1]

Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States). Physical and Life Sciences Directorate

Publication Date:: Wed Mar 14 00:00:00 EDT 2018

Research Org.:: Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)

Sponsoring Org.:: USDOE Office of Science (SC)

OSTI Identifier:: 1430996

Alternate Identifier(s):: OSTI ID: 1426005

Report Number(s):: LLNL-JRNL-717099
Journal ID: ISSN 2166-2746

Grant/Contract Number:: AC52-07NA27344; AC02-06CH11357

Resource Type:: Accepted Manuscript

Journal Name:: Journal of Vacuum Science and Technology B

Additional Journal Information:: Journal Volume: 36; Journal Issue: 2; Journal ID: ISSN 2166-2746

Publisher:: American Vacuum Society/AIP

Country of Publication:: United States

Language:: English

Subject:: 36 MATERIALS SCIENCE

Citation Formats


                    Martin, Aiden A., Depond, Philip J., Bagge-Hansen, Michael, Lee, Jonathan R.  I., Yoo, Jae-Hyuck, Elhadj, Selim, Matthews, Manyalibo J., and van Buuren, Tony. Rapid feedback of chemical vapor deposition growth mechanisms by operando X-ray diffraction.  United States: N. p., 2018. 
Web.  doi:10.1116/1.5019742.

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                    Martin, Aiden A., Depond, Philip J., Bagge-Hansen, Michael, Lee, Jonathan R.  I., Yoo, Jae-Hyuck, Elhadj, Selim, Matthews, Manyalibo J., & van Buuren, Tony. Rapid feedback of chemical vapor deposition growth mechanisms by operando X-ray diffraction.  United States.  https://doi.org/10.1116/1.5019742

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                    Martin, Aiden A., Depond, Philip J., Bagge-Hansen, Michael, Lee, Jonathan R.  I., Yoo, Jae-Hyuck, Elhadj, Selim, Matthews, Manyalibo J., and van Buuren, Tony. Wed .  
"Rapid feedback of chemical vapor deposition growth mechanisms by operando X-ray diffraction".  United States.  https://doi.org/10.1116/1.5019742.  https://www.osti.gov/servlets/purl/1430996.

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@article{osti_1430996,

  title        = {Rapid feedback of chemical vapor deposition growth mechanisms by operando X-ray diffraction},

  author       = {Martin, Aiden A. and Depond, Philip J. and Bagge-Hansen, Michael and Lee, Jonathan R.  I. and Yoo, Jae-Hyuck and Elhadj, Selim and Matthews, Manyalibo J. and van Buuren, Tony},

  abstractNote = {An operando x-ray diffraction system is presented for elucidating optimal laser assisted chemical vapor deposition growth conditions. The technique is utilized to investigate deposition dynamics of boron-carbon materials using trimethyl borate precursor. Trimethyl borate exhibits vastly reduced toxicological and flammability hazards compared to existing precursors, but has previously not been applied to boron carbide growth. Crystalline boron-rich carbide material is produced in a narrow growth regime on addition of hydrogen during the growth phase at high temperature. Finally, the use of the operando x-ray diffraction system allows for the exploration of highly nonequilibrium conditions and rapid process control, which are not possible using ex situ diagnostics.},

  doi          = {10.1116/1.5019742},

  journal      = {Journal of Vacuum Science and Technology B},

  number       = 2,

  volume       = 36,

  place        = {United States},

  year         = {Wed Mar 14 00:00:00 EDT 2018},

  month        = {Wed Mar 14 00:00:00 EDT 2018}

}

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Journal Article:

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https://doi.org/10.1116/1.5019742

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Cited by: 4 works

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Figures / Tables:

FIG. 1: (Color online) (a) Top and (b) side view schematic illustrations of the L-CVD growth and operando XRD measurement system. The system consists of a 532 nm laser and focusing optics, pumping system (not shown), gas inlet, specimen stage, beryllium X-ray windows and quartz optical window. (a) The lasermore »

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