Multi-dimensional optical and laser-based diagnostics of low-temperature ionized plasma discharges
Abstract
In this paper, a review of work centered on the utilization of multi-dimensional optical diagnostics to study phenomena arising in radiofrequency plasma discharges is given. The diagnostics range from passive techniques such as optical emission to more active techniques utilizing nanosecond lasers capable of both high temporal and spatial resolution. In this review, emphasis is placed on observations that would have been more difficult, if not impossible, to make without the use of such diagnostic techniques. Examples include the sheath structure around an electrode consisting of two different metals, double layers that arise in magnetized hydrogen discharges, or a large region of depleted argon 1s4 levels around a biased probe in an rf discharge.
- Authors:
-
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Publication Date:
- Research Org.:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Org.:
- USDOE National Nuclear Security Administration (NNSA)
- OSTI Identifier:
- 1426927
- Report Number(s):
- SAND-2009-6857J
Journal ID: ISSN 0963-0252; 498328
- Grant/Contract Number:
- AC04-94AL85000
- Resource Type:
- Accepted Manuscript
- Journal Name:
- Plasma Sources Science and Technology
- Additional Journal Information:
- Journal Volume: 20; Journal Issue: 5; Journal ID: ISSN 0963-0252
- Publisher:
- IOP Publishing
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 70 PLASMA PHYSICS AND FUSION TECHNOLOGY
Citation Formats
Barnat, Edward V. Multi-dimensional optical and laser-based diagnostics of low-temperature ionized plasma discharges. United States: N. p., 2011.
Web. doi:10.1088/0963-0252/20/5/053001.
Barnat, Edward V. Multi-dimensional optical and laser-based diagnostics of low-temperature ionized plasma discharges. United States. https://doi.org/10.1088/0963-0252/20/5/053001
Barnat, Edward V. Thu .
"Multi-dimensional optical and laser-based diagnostics of low-temperature ionized plasma discharges". United States. https://doi.org/10.1088/0963-0252/20/5/053001. https://www.osti.gov/servlets/purl/1426927.
@article{osti_1426927,
title = {Multi-dimensional optical and laser-based diagnostics of low-temperature ionized plasma discharges},
author = {Barnat, Edward V.},
abstractNote = {In this paper, a review of work centered on the utilization of multi-dimensional optical diagnostics to study phenomena arising in radiofrequency plasma discharges is given. The diagnostics range from passive techniques such as optical emission to more active techniques utilizing nanosecond lasers capable of both high temporal and spatial resolution. In this review, emphasis is placed on observations that would have been more difficult, if not impossible, to make without the use of such diagnostic techniques. Examples include the sheath structure around an electrode consisting of two different metals, double layers that arise in magnetized hydrogen discharges, or a large region of depleted argon 1s4 levels around a biased probe in an rf discharge.},
doi = {10.1088/0963-0252/20/5/053001},
journal = {Plasma Sources Science and Technology},
number = 5,
volume = 20,
place = {United States},
year = {Thu Sep 15 00:00:00 EDT 2011},
month = {Thu Sep 15 00:00:00 EDT 2011}
}
Web of Science
Works referenced in this record:
Capacitively coupled glow discharges at frequencies above 13.56 MHz
journal, October 1991
- Surendra, M.; Graves, D. B.
- Applied Physics Letters, Vol. 59, Issue 17
Independent control of ion current and ion impact energy onto electrodes in dual frequency plasma devices
journal, February 2004
- Boyle, P. C.; Ellingboe, A. R.; Turner, M. M.
- Journal of Physics D: Applied Physics, Vol. 37, Issue 5
Electron heating mechanisms in dual-frequency capacitive discharges
journal, March 2007
- Turner, M. M.; Chabert, P.
- Plasma Sources Science and Technology, Vol. 16, Issue 2
Electromagnetic effects in high-frequency capacitive discharges used for plasma processing
journal, January 2007
- Chabert, P.
- Journal of Physics D: Applied Physics, Vol. 40, Issue 3
Stochastic heating in single and dual frequency capacitive discharges
journal, May 2006
- Kawamura, E.; Lieberman, M. A.; Lichtenberg, A. J.
- Physics of Plasmas, Vol. 13, Issue 5
Frequency dependent plasma characteristics in a capacitively coupled 300 mm wafer plasma processing chamber
journal, October 2006
- Hebner, Gregory A.; Barnat, Edward V.; Miller, Paul A.
- Plasma Sources Science and Technology, Vol. 15, Issue 4
Spatial and frequency dependence of plasma currents in a 300 mm capacitively coupled plasma reactor
journal, October 2006
- Miller, Paul A.; Barnat, Edward V.; Hebner, Gregory A.
- Plasma Sources Science and Technology, Vol. 15, Issue 4
Electric fields in the sheath formed in a 300 mm, dual frequency capacitive argon discharge
journal, March 2007
- Barnat, E. V.; Miller, P. A.; Hebner, G. A.
- Plasma Sources Science and Technology, Vol. 16, Issue 2
Measured radial dependence of the peak sheath voltages present in very high frequency capacitive discharges
journal, May 2007
- Barnat, E. V.; Miller, P. A.; Hebner, G. A.
- Applied Physics Letters, Vol. 90, Issue 20
Capacitive discharges driven by combined dc/rf sources
journal, January 2007
- Kawamura, E.; Lieberman, M. A.; Lichtenberg, A. J.
- Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 25, Issue 5
Secondary electrons in rf and dc/rf capacitive discharges
journal, August 2008
- Kawamura, E.; Lichtenberg, A. J.; Lieberman, M. A.
- Plasma Sources Science and Technology, Vol. 17, Issue 4
Diagnostics of ballistic electrons in a dc/rf hybrid capacitively coupled discharge
journal, December 2008
- Xu, Lin; Chen, Lee; Funk, Merritt
- Applied Physics Letters, Vol. 93, Issue 26
Test particle simulation of the role of ballistic electrons in hybrid dc/rf capacitively coupled CF4 plasmas
journal, March 2009
- Ventzek, P. L. G.; Denpoh, K.
- Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 27, Issue 2
Microplasma devices fabricated in silicon, ceramic, and metal/polymer structures: arrays, emitters and photodetectors
journal, November 2003
- Eden, J. G.; Park, S-J; Ostrom, N. P.
- Journal of Physics D: Applied Physics, Vol. 36, Issue 23
Arrays of nonequilibrium plasmas confined to microcavities: an emerging frontier in plasma science and its applications
journal, April 2006
- Eden, J. G.; Park, S-J; Kim, K-S
- Plasma Sources Science and Technology, Vol. 15, Issue 2
Current status of microplasma research
journal, January 2006
- Tachibana, Kunihide
- IEEJ Transactions on Electrical and Electronic Engineering, Vol. 1, Issue 2
Evolution of Discharge Structure in Capacitive Radio-Frequency Atmospheric Microplasmas
journal, March 2006
- Shi, J. J.; Kong, M. G.
- Physical Review Letters, Vol. 96, Issue 10
Microplasmas, an emerging field of low-temperature plasma science and technology
journal, February 2006
- Foest, R.; Schmidt, M.; Becker, K.
- International Journal of Mass Spectrometry, Vol. 248, Issue 3
Microplasmas and applications
journal, January 2006
- Becker, K. H.; Schoenbach, K. H.; Eden, J. G.
- Journal of Physics D: Applied Physics, Vol. 39, Issue 3
Ultrasmall radio frequency driven microhollow cathode discharge
journal, July 2008
- Mahony, C. M. O.; Gans, T.; Graham, W. G.
- Applied Physics Letters, Vol. 93, Issue 1
Planar microdischarge device for high-speed infrared thermography: Application of selenium-doped silicon detectors
journal, June 2008
- Astrov, Yu. A.; Portsel, L. M.; Lodygin, A. N.
- Journal of Applied Physics, Vol. 103, Issue 11
Determination of electron temperatures in plasmas by multiple rare gas optical emission, and implications for advanced actinometry
journal, May 1997
- Malyshev, M. V.; Donnelly, V. M.
- Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 15, Issue 3
Trace Rare Gases Optical Emission Spectroscopy for Determination of Electron Temperatures and Species Concentrations in Chlorine-Containing Plasmas
journal, April 1998
- Donnelly, Vincent M.; Malyshev, Mikhail V.; Kornblit, Avi
- Japanese Journal of Applied Physics, Vol. 37, Issue Part 1, No. 4B
Trace rare gases optical emission spectroscopy: Nonintrusive method for measuring electron temperatures in low-pressure, low-temperature plasmas
journal, November 1999
- Malyshev, M. V.; Donnelly, V. M.
- Physical Review E, Vol. 60, Issue 5
Plasma electron temperatures and electron energy distributions measured by trace rare gases optical emission spectroscopy
journal, September 2004
- Donnelly, V. M.
- Journal of Physics D: Applied Physics, Vol. 37, Issue 19
Nitrogen dissociation in a low pressure cylindrical ICP discharge studied by actinometry and mass spectrometry
journal, December 2005
- Czerwiec, T.; Greer, F.; Graves, D. B.
- Journal of Physics D: Applied Physics, Vol. 38, Issue 24
Application of excitation cross sections to optical plasma diagnostics
journal, May 2004
- Boffard, John B.; Lin, Chun C.; DeJosephJr, Charles A.
- Journal of Physics D: Applied Physics, Vol. 37, Issue 12
Method to determine argon metastable number density and plasma electron temperature from spectral emission originating from four 4p argon levels
journal, November 2006
- Mariotti, Davide; Shimizu, Yoshiki; Sasaki, Takeshi
- Applied Physics Letters, Vol. 89, Issue 20
A simple collisional–radiative model for low-pressure argon–oxygen mixture discharges
journal, August 2007
- Zhu, Xi-Ming; Pu, Yi-Kang
- Journal of Physics D: Applied Physics, Vol. 40, Issue 17
Using OES to determine electron temperature and density in low-pressure nitrogen and argon plasmas
journal, May 2008
- Zhu, Xi-Ming; Pu, Yi-Kang
- Plasma Sources Science and Technology, Vol. 17, Issue 2
Determining the electron temperature and the electron density by a simple collisional–radiative model of argon and xenon in low-pressure discharges
journal, December 2008
- Zhu, Xi-Ming; Chen, Wen-Cong; Li, Jiang
- Journal of Physics D: Applied Physics, Vol. 42, Issue 2
Laser-Based Diagnostics of Reactive Plasmas
book, January 1993
- Preppernau, Bryan L.; Miller, Terry A.
- Glow Discharge Spectroscopies
Electric‐field measurements in 13.56 MHz helium discharges
journal, December 1993
- Greenberg, K. E.; Hebner, G. A.
- Applied Physics Letters, Vol. 63, Issue 24
Electric field measurements in discharges by 2+1 photon laser Stark spectroscopy of atomic hydrogen
journal, August 1994
- Booth, J. P.; Fadlallah, M.; Derouard, J.
- Applied Physics Letters, Vol. 65, Issue 7
Electric field measurements in an argon glow discharge using laser spectroscopy
journal, September 1996
- Choi, Y. W.; Bowden, M. D.; Muraoka, K.
- Applied Physics Letters, Vol. 69, Issue 10
A method to measure electric field strengths in an argon glow discharge plasma using laser spectroscopy
journal, January 1998
- Kim, Jung-Bae; Kawamura, K.; Choi, Young Wook
- IEEE Transactions on Plasma Science, Vol. 26, Issue 5, p. 1556-1561
Studies of a sheath structure in an RF discharge using experimental, analytical, and simulation approaches
journal, January 1999
- Kim, J. -B.; Kawamura, K.; Choi, Y. -W.
- IEEE Transactions on Plasma Science, Vol. 27, Issue 5
Laser-spectroscopic methods for diagnostics of electric fields in plasma (review)
journal, March 2006
- Gavrilenko, V. P.
- Instruments and Experimental Techniques, Vol. 49, Issue 2
Highly excited states of nitric oxide studied by two‐color double resonance spectroscopy
journal, February 1983
- Ebata, Takayuki; Mikami, Naohiko; Ito, Mitsuo
- The Journal of Chemical Physics, Vol. 78, Issue 3
Space and time resolved electric field measurements in helium and hydrogen RF-discharges
journal, January 1999
- Czarnetzki, U.; Luggenhölscher, D.; Döbele, H. F.
- Plasma Sources Science and Technology, Vol. 8, Issue 2
Observation of Stark Spectra of Argon High Rydberg States in Well-Defined Electric Fields by Laser-Induced Fluorescence-Dip Spectroscopy
journal, November 2002
- Takizawa, Kazuki; Sasaki, Koichi; Kadota, Kiyoshi
- Japanese Journal of Applied Physics, Vol. 41, Issue Part 2, No. 11B
Sensitive measurements of electric field distributions in low-pressure Ar plasmas by laser-induced fluorescence-dip spectroscopy
journal, January 2004
- Takizawa, K.; Sasaki, K.; Kono, A.
- Applied Physics Letters, Vol. 84, Issue 2
Plasma sheath electric field strengths above a grooved electrode in a parallel-plate radio-frequency discharge
journal, January 1999
- Czarnetzki, U.; Hebner, G. A.; Luggenholscher, D.
- IEEE Transactions on Plasma Science, Vol. 27, Issue 1
Electric fields in a sheath near a metal–dielectric interface
journal, October 2004
- Barnat, E. V.; Hebner, G. A.
- Applied Physics Letters, Vol. 85, Issue 16
Radiofrequency sheath fields above a metal-dielectric interface
journal, November 2004
- Barnat, E. V.; Hebner, G. A.
- Journal of Applied Physics, Vol. 96, Issue 9
Radio frequency sheath formation and excitation around a stepped electrode
journal, March 2005
- Barnat, E. V.; Hebner, G. A.
- Journal of Applied Physics, Vol. 97, Issue 6
Plasma nonuniformities induced by dissimilar electrode metals
journal, July 2005
- Barnat, E. V.; Hebner, G. A.
- Journal of Applied Physics, Vol. 98, Issue 1
Electric field profiles around an electrical probe immersed in a plasma
journal, January 2007
- Barnat, E. V.; Hebner, G. A.
- Journal of Applied Physics, Vol. 101, Issue 1
Diagnostics of electric fields in plasma using Stark spectroscopy of krypton and xenon atoms
journal, September 2006
- Jiang, T.; Bowden, M. D.; Wagenaars, E.
- New Journal of Physics, Vol. 8, Issue 9
Laser spectroscopic electric field measurement in krypton
journal, January 2007
- Kampschulte, T.; Schulze, J.; Luggenhölscher, D.
- New Journal of Physics, Vol. 9, Issue 1
Collisional transfer rates between excited levels in helium
journal, November 1978
- Burrell, C. F.; Kunze, H. -J.
- Physical Review A, Vol. 18, Issue 5
Laser diagnostics of a low-pressure hollow-cathode arc
journal, September 1985
- Chall, P.; Souw, E. K.; Uhlenbusch, J.
- Journal of Quantitative Spectroscopy and Radiative Transfer, Vol. 34, Issue 3
He(4 3 P) sublevel quenching by electron collision
journal, January 1995
- Dilecce, G.; Ambrico, P. F.; Benedictis, S. De
- Journal of Physics B: Atomic, Molecular and Optical Physics, Vol. 28, Issue 2
Measurement of rate coefficients for electron-atom collisions in a helium plasma by laser-induced fluorescence
journal, September 1999
- Denkelmann, R.; Maurmann, S.; Lokajczyk, T.
- Journal of Physics B: Atomic, Molecular and Optical Physics, Vol. 32, Issue 19
Measurement o Rate Coefficients or Atom-Atom Collisions in a Pulsed Helium Discharge by Laser-induced Fluorescence
journal, April 2000
- Denkelmann, R.; Freund, S.; Maurmann, S.
- Contributions to Plasma Physics, Vol. 40, Issue 1-2
Plasma electron density measurements by the laser- and collision-induced fluorescence method
journal, September 1983
- Tsuchida, K.; Miyake, S.; Kadota, K.
- Plasma Physics, Vol. 25, Issue 9
Collisional processes induced in the n=3 helium sublevels by electrons in a low-pressure plasma. Application to the electron density measurement
journal, December 1985
- Dubreuil, B.; Prigent, P.
- Journal of Physics B: Atomic and Molecular Physics, Vol. 18, Issue 23
Electron temperature and density diagnostics in a helium glow discharge
journal, March 1989
- DenHartog, E. A.; O’Brian, T. R.; Lawler, J. E.
- Physical Review Letters, Vol. 62, Issue 13
Electron density measurement in a rf helium plasma by laser‐collision induced fluorescence method
journal, September 1996
- Dzierżȩga, K.; Musiol/, K.; Benck, E. C.
- Journal of Applied Physics, Vol. 80, Issue 6
The influence of Hg(6 3 P 2 ) population on emission processes in a low‐pressure mercury‐argon discharge
journal, September 1990
- Maleki, L.; Blasenheim, B. J.; Janik, G. R.
- Journal of Applied Physics, Vol. 68, Issue 6
Model for cw laser collisionally induced fluorescence in low-temperature discharges
journal, August 2000
- Stewart, R. S.; Smith, D. J.; Borthwick, I. S.
- Physical Review E, Vol. 62, Issue 2
Complementary optical diagnostic modelling of the argon positive column
journal, July 2002
- Stewart, R. S.; Smith, D. J.
- Journal of Physics D: Applied Physics, Vol. 35, Issue 14
Testing of the collisonal-radiative model by laser-induced perturbation of a supersonic He beam in TJ-II plasmas
journal, March 2006
- Hidalgo, A.; Tabarés, F. L.; Tafalla, D.
- Plasma Physics and Controlled Fusion, Vol. 48, Issue 5
Laser spectroscopy for measuring the parameters of a plasma containing helium and argon
journal, February 2006
- Shcheglov, D. A.; Vetrov, S. I.; Moskalenko, I. V.
- Plasma Physics Reports, Vol. 32, Issue 2
LIF measurements on an atomic helium beam in the edge of a fusion plasma
journal, April 2008
- Krychowiak, M.; Mertens, Ph; König, R.
- Plasma Physics and Controlled Fusion, Vol. 50, Issue 6
Measurement of Density Distribution of Metastable He Atom in a Plane-Parallel Hollow Cathode He Plasma
journal, September 1994
- Takiyama, Ken; Sakai, Hisashi; Yamasaki, Motokuni
- Japanese Journal of Applied Physics, Vol. 33, Issue Part 1, No. 9A
Two-Dimensional Measurement of He Metastable Atom Density Profile in Front of Substrate in Electron Cyclotron Resonance Plasma Flow by Laser-Induced Fluorescence Spectroscopy
journal, July 1999
- Watanabe, Mahiko; Takiyama, Ken; Toyota, Hiroshi
- Japanese Journal of Applied Physics, Vol. 38, Issue Part 1, No. 7B
Measurements of helium metastable density in an atmospheric pressure glow discharge
journal, August 2004
- Nersisyan, G.; Morrow, T.; Graham, W. G.
- Applied Physics Letters, Vol. 85, Issue 9
The Gaseous Electronics Conference radio‐frequency reference cell: A defined parallel‐plate radio‐frequency system for experimental and theoretical studies of plasma‐processing discharges
journal, January 1994
- Hargis, P. J.; Greenberg, K. E.; Miller, P. A.
- Review of Scientific Instruments, Vol. 65, Issue 1
An Inductively-Coupled Plasma Source for the Gaseous Electronics Conference Rf Reference Cell
journal, July 1995
- Miller, P. A.; Hebner, G. A.; Greenberg, K. E.
- Journal of Research of the National Institute of Standards and Technology, Vol. 100, Issue 4
Dynamics of collisionless rf plasma sheaths
journal, October 1997
- Miller, Paul A.; Riley, Merle E.
- Journal of Applied Physics, Vol. 82, Issue 8
RF discharge under the influence of a transverse magnetic field
journal, August 2008
- Barnat, E. V.; Miller, P. A.; Paterson, A. M.
- Plasma Sources Science and Technology, Vol. 17, Issue 4
Magnetic field optimization in a dielectric magnetically enhanced reactive ion etch reactor to produce an instantaneously uniform plasma
journal, May 1998
- Lindley, R. A.; Björkman, C. H.; Shan, H.
- Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 16, Issue 3
Characterization of the etch rate non-uniformity in a magnetically enhanced reactive ion etcher
journal, May 1998
- Buie, M. J.; Pender, J. T. P.; Dahimene, M.
- Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 16, Issue 3
Optimization of plasma density and radial uniformity of a point-cusp magnetic field applied capacitive plasma
journal, May 2000
- Wickramanayaka, Sunil; Nakagawa, Yukito; Sago, Yasumi
- Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 18, Issue 3
Influence of Excitation Frequency on the Electron Distribution Function in Capacitively Coupled Discharges in Argon and Helium
journal, October 2003
- Abdel-Fattah, Essam; Sugai, Hideo
- Japanese Journal of Applied Physics, Vol. 42, Issue Part 1, No. 10
Electron heating mode transition observed in a very high frequency capacitive discharge
journal, August 2003
- Abdel-Fattah, E.; Sugai, H.
- Applied Physics Letters, Vol. 83, Issue 8
Suppression of the standing wave effect in high frequency capacitive discharges using a shaped electrode and a dielectric lens: Self-consistent approach
journal, August 2004
- Chabert, P.; Raimbault, J. -L.; Rax, J. -M.
- Physics of Plasmas, Vol. 11, Issue 8
Uniformity of radio frequency bias voltages along conducting surfaces in a plasma
journal, January 1996
- Stevens, J. E.; Sowa, M. J.; Cecchi, J. L.
- Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 14, Issue 1
A voltage uniformity study in large-area reactors for RF plasma deposition
journal, May 1997
- Sansonnens, L.; Pletzer, A.; Magni, D.
- Plasma Sources Science and Technology, Vol. 6, Issue 2
Simulation of plasma molding over a ring on a flat surface
journal, September 2003
- Kim, Doosik; Economou, Demetre J.
- Journal of Applied Physics, Vol. 94, Issue 6
Simulation of a two-dimensional sheath over a flat insulator–conductor interface on a radio-frequency biased electrode in a high-density plasma
journal, April 2004
- Kim, Doosik; Economou, Demetre J.
- Journal of Applied Physics, Vol. 95, Issue 7
The Townsend Discharge in a Coaxial Diode with Axial Magnetic Field
journal, March 1958
- Redhead, P. A.
- Canadian Journal of Physics, Vol. 36, Issue 3
OPERATION OF AN INVERTED-MAGNETRON GAUGE IN THE PRESSURE RANGE 10 −3 TO 10 −12 MM. Hg
journal, March 1958
- Hobson, J. P.; Redhead, P. A.
- Canadian Journal of Physics, Vol. 36, Issue 3
Ionized physical vapor deposition (IPVD): A review of technology and applications
journal, August 2006
- Helmersson, Ulf; Lattemann, Martina; Bohlmark, Johan
- Thin Solid Films, Vol. 513, Issue 1-2
Cylindrical magnetron discharges. I. Current‐voltage characteristics for dc‐ and rf‐driven discharge sources
journal, May 1989
- Yeom, G. Y.; Thornton, John A.; Kushner, Mark J.
- Journal of Applied Physics, Vol. 65, Issue 10
Cylindrical magnetron discharges. II. The formation of dc bias in rf‐driven discharge sources
journal, May 1989
- Yeom, G. Y.; Thornton, John A.; Kushner, Mark J.
- Journal of Applied Physics, Vol. 65, Issue 10
Modelling electron transport in magnetized low-temperature discharge plasmas
journal, January 2007
- Hagelaar, G. J. M.
- Plasma Sources Science and Technology, Vol. 16, Issue 1
Model of magnetically enhanced, capacitive RF discharges
journal, April 1991
- Lieberman, M. A.; Lichtenberg, A. J.; Savas, S. E.
- IEEE Transactions on Plasma Science, Vol. 19, Issue 2
The effects of a small transverse magnetic field upon a capacitively coupled RF discharge
journal, January 1995
- Hutchinson, D. A. W.; Turner, M. M.; Doyle, R. A.
- IEEE Transactions on Plasma Science, Vol. 23, Issue 4
Reactor modeling of magnetically enhanced capacitive RF discharge
journal, June 1997
- Jong-Chul Park,
- IEEE Transactions on Plasma Science, Vol. 25, Issue 3
Modeling of magnetically enhanced capacitively coupled plasma sources: Ar discharges
journal, August 2003
- Kushner, Mark J.
- Journal of Applied Physics, Vol. 94, Issue 3
Modeling of magnetically enhanced capacitively coupled plasma sources: Ar/C4F8/O2 discharges
journal, February 2004
- Vasenkov, Alex V.; Kushner, Mark J.
- Journal of Applied Physics, Vol. 95, Issue 3
Simulations of magnetized capacitively coupled plasmas operating at constant power and voltage
journal, April 2005
- Rauf, Shahid
- Plasma Sources Science and Technology, Vol. 14, Issue 2
Combined rf and transport effects in magnetized capacitive discharges
journal, October 2006
- Carter, M. D.; Ryan, P. M.; Hoffman, D.
- Journal of Applied Physics, Vol. 100, Issue 7
Diagnostics of magnetically enhanced RF discharges in methane, argon and methane - argon mixtures
journal, November 1997
- Avtaeva, S. V.; Mamytbekov, M. Z.; Otorbaev, D. K.
- Journal of Physics D: Applied Physics, Vol. 30, Issue 21
Structure in RF Hydrogen Plasma Induced by Magnetic Field
journal, August 2008
- Barnat, E. V.
- IEEE Transactions on Plasma Science, Vol. 36, Issue 4
The Theory of Collectors in Gaseous Discharges
journal, October 1926
- Mott-Smith, H. M.; Langmuir, Irving
- Physical Review, Vol. 28, Issue 4
The Collection of Positive Ions by a Probe Immersed in a Plasma
journal, March 1957
- Allen, J. E.; Boyd, R. L. F.; Reynolds, P.
- Proceedings of the Physical Society. Section B, Vol. 70, Issue 3
Unified Theory for the Langmuir Probe in a Collisionless Plasma
journal, January 1965
- Lam, S. H.
- Physics of Fluids, Vol. 8, Issue 1
Kinetic Theory of a Spherical Electrostatic Probe in a Stationary Plasma
journal, January 1966
- Chou, Y. S.
- Physics of Fluids, Vol. 9, Issue 11
Effect of Collisions on Cold Ion Collection by Means of Langmuir Probes
journal, September 1971
- Shih, C. H.; Levi, E.
- AIAA Journal, Vol. 9, Issue 9
Electric Probes in Stationary and Flowing Plasmas: Part 1. Collisionless and Transitional Probes
journal, February 1974
- Chung, P. M.; Talbot, L.; Touryan, K. J.
- AIAA Journal, Vol. 12, Issue 2
Theory of cylindrical and spherical Langmuir probes in the limit of vanishing Debye number
journal, January 1982
- Parrot, M. J. M.
- Physics of Fluids, Vol. 25, Issue 12
Characteristics of a cylindrical Langmuir probe of finite length
journal, May 1991
- Jaeger, E. F.; Berry, L. A.; Batchelor, D. B.
- Journal of Applied Physics, Vol. 69, Issue 10
A new method for analyzing Langmuir probe data and the determination of ion densities and etch yields in an etching plasma
journal, May 1990
- Steinbrüchel, Christoph
- Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 8, Issue 3
How big is a small Langmuir probe?
journal, July 2000
- Sheridan, T. E.
- Physics of Plasmas, Vol. 7, Issue 7
Langmuir probe analysis for high density plasmas
journal, June 2001
- Chen, Francis F.
- Physics of Plasmas, Vol. 8, Issue 6
Monte Carlo Simulations of the Influence of Ion-Neutral Collisions on the Ion Currents Collected by Electrostatic Probes
journal, January 2002
- Trunec, D.; Španěl, P.; Smith, D.
- Contributions to Plasma Physics, Vol. 42, Issue 1
Effect of charge exchange ions upon Langmuir probe current
journal, September 2002
- Sternovsky, Zoltan; Robertson, Scott
- Applied Physics Letters, Vol. 81, Issue 11
The contribution of charge exchange ions to cylindrical Langmuir probe current
journal, January 2003
- Sternovsky, Z.; Robertson, S.; Lampe, M.
- Physics of Plasmas, Vol. 10, Issue 1
Ion collection by cylindrical probes in weakly collisional plasmas: Theory and experiment
journal, August 2003
- Sternovsky, Z.; Robertson, S.; Lampe, M.
- Journal of Applied Physics, Vol. 94, Issue 3
Comparison of electron‐density measurements made using a Langmuir probe and microwave interferometer in the Gaseous Electronics Conference reference reactor
journal, October 1993
- Overzet, Lawrence J.; Hopkins, Michael B.
- Journal of Applied Physics, Vol. 74, Issue 7
A study of the accuracy of various Langmuir probe theories
journal, October 1994
- Sudit, Isaac D.; Woods, R. Claude
- Journal of Applied Physics, Vol. 76, Issue 8
RF compensated probes for high-density discharges
journal, May 1994
- Sudit, I. D.; Chen, F. F.
- Plasma Sources Science and Technology, Vol. 3, Issue 2
Probe measurements of the space potential in a radio frequency discharge
journal, October 1990
- Godyak, V. A.; Piejak, R. B.
- Journal of Applied Physics, Vol. 68, Issue 7
Measurement of electron energy distribution in low-pressure RF discharges
journal, March 1992
- Godyak, V. A.; Piejak, R. B.; Alexandrovich, B. M.
- Plasma Sources Science and Technology, Vol. 1, Issue 1
Works referencing / citing this record:
Laser-induced fluorescence diagnostics of the cross-field discharge of Hall thrusters
journal, November 2012
- Mazouffre, Stéphane
- Plasma Sources Science and Technology, Vol. 22, Issue 1
Metastables as a probe for low-temperature plasma characteristics in argon
journal, March 2019
- Makabe, Toshiaki
- Journal of Physics D: Applied Physics, Vol. 52, Issue 21