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Title: Hexagonal boron nitride nanomechanical resonators with spatially visualized motion

Atomic layers of hexagonal boron nitride (h-BN) crystal are excellent candidates for structural materials as enabling ultrathin, two-dimensional (2D) nanoelectromechanical systems (NEMS) due to the outstanding mechanical properties and very wide bandgap (5.9 eV) of h-BN. In this work, we report the experimental demonstration of h-BN 2D nanomechanical resonators vibrating at high and very high frequencies (from ~ 5 to ~ 70 MHz), and investigations of the elastic properties of h-BN by measuring the multimode resonant behavior of these devices. First, we demonstrate a dry-transferred doubly clamped h-BN membrane with ~ 6.7 nm thickness, the thinnest h-BN resonator known to date. In addition, we fabricate circular drumhead h-BN resonators with thicknesses ranging from ~ 9 to 292 nm, from which we measure up to eight resonance modes in the range of ~ 18 to 35 MHz. Combining measurements and modeling of the rich multimode resonances, we resolve h-BN’s elastic behavior, including the transition from membrane to disk regime, with built-in tension ranging from 0.02 to 2 N m -1. The Young’s modulus of h-BN is determined to be EY≈392 GPa from the measured resonances. The ultrasensitive measurements further reveal subtle structural characteristics and mechanical properties of the suspended h-BN diaphragms,more » including anisotropic built-in tension and bulging, thus suggesting guidelines on how these effects can be exploited for engineering multimode resonant functions in 2D NEMS transducers.« less
Authors:
 [1] ;  [1] ;  [1]
  1. Case Western Reserve Univ., Cleveland, OH (United States)
Publication Date:
Grant/Contract Number:
EE0006719
Type:
Accepted Manuscript
Journal Name:
Microsystems & Nanoengineering
Additional Journal Information:
Journal Volume: 3; Journal ID: ISSN 2055-7434
Research Org:
Case Western Reserve Univ., Cleveland, OH (United States)
Sponsoring Org:
USDOE Office of Energy Efficiency and Renewable Energy (EERE)
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; 42 ENGINEERING; Hexagonal boron nitride (h-BN); multimode resonances; nanoelectromechanical systems (NEMS); resonators; spatial mapping; Young’s modulus
OSTI Identifier:
1425389

Zheng, Xu-Qian, Lee, Jaesung, and Feng, Philip X. -L.. Hexagonal boron nitride nanomechanical resonators with spatially visualized motion. United States: N. p., Web. doi:10.1038/micronano.2017.38.
Zheng, Xu-Qian, Lee, Jaesung, & Feng, Philip X. -L.. Hexagonal boron nitride nanomechanical resonators with spatially visualized motion. United States. doi:10.1038/micronano.2017.38.
Zheng, Xu-Qian, Lee, Jaesung, and Feng, Philip X. -L.. 2017. "Hexagonal boron nitride nanomechanical resonators with spatially visualized motion". United States. doi:10.1038/micronano.2017.38. https://www.osti.gov/servlets/purl/1425389.
@article{osti_1425389,
title = {Hexagonal boron nitride nanomechanical resonators with spatially visualized motion},
author = {Zheng, Xu-Qian and Lee, Jaesung and Feng, Philip X. -L.},
abstractNote = {Atomic layers of hexagonal boron nitride (h-BN) crystal are excellent candidates for structural materials as enabling ultrathin, two-dimensional (2D) nanoelectromechanical systems (NEMS) due to the outstanding mechanical properties and very wide bandgap (5.9 eV) of h-BN. In this work, we report the experimental demonstration of h-BN 2D nanomechanical resonators vibrating at high and very high frequencies (from ~ 5 to ~ 70 MHz), and investigations of the elastic properties of h-BN by measuring the multimode resonant behavior of these devices. First, we demonstrate a dry-transferred doubly clamped h-BN membrane with ~ 6.7 nm thickness, the thinnest h-BN resonator known to date. In addition, we fabricate circular drumhead h-BN resonators with thicknesses ranging from ~ 9 to 292 nm, from which we measure up to eight resonance modes in the range of ~ 18 to 35 MHz. Combining measurements and modeling of the rich multimode resonances, we resolve h-BN’s elastic behavior, including the transition from membrane to disk regime, with built-in tension ranging from 0.02 to 2 N m-1. The Young’s modulus of h-BN is determined to be EY≈392 GPa from the measured resonances. The ultrasensitive measurements further reveal subtle structural characteristics and mechanical properties of the suspended h-BN diaphragms, including anisotropic built-in tension and bulging, thus suggesting guidelines on how these effects can be exploited for engineering multimode resonant functions in 2D NEMS transducers.},
doi = {10.1038/micronano.2017.38},
journal = {Microsystems & Nanoengineering},
number = ,
volume = 3,
place = {United States},
year = {2017},
month = {7}
}

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