Precision controlled atomic resolution scanning transmission electron microscopy using spiral scan pathways

Sang, Xiahan; Lupini, Andrew R.; Ding, Jilai; Kalinin, Sergei V.; Jesse, Stephen; Unocic, Raymond R.

doi:10.1038/srep43585

Title: Precision controlled atomic resolution scanning transmission electron microscopy using spiral scan pathways

Journal Article · Tue Mar 07 23:00:00 EST 2017 · Scientific Reports

DOI: https://doi.org/10.1038/srep43585 · OSTI ID:1394477

Sang, Xiahan ^[1]; Lupini, Andrew R. ^[2]; Ding, Jilai ^[3]; Kalinin, Sergei V. ^[1]; Jesse, Stephen ^[1]; Unocic, Raymond R. ^[1]

Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States). Center for Nanophase Materials Sciences. Inst. for Functional Imaging of Materials
Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States). Inst. for Functional Imaging of Materials. Materials Science and Technology Division
Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States). Center for Nanophase Materials Sciences

Atomic-resolution imaging in an aberration-corrected scanning transmission electron microscope (STEM) can enable direct correlation between atomic structure and materials functionality. The fast and precise control of the STEM probe is, however, challenging because the true beam location deviates from the assigned location depending on the properties of the deflectors. To reduce these deviations, i.e. image distortions, we use spiral scanning paths, allowing precise control of a sub-Å sized electron probe within an aberration-corrected STEM. Although spiral scanning avoids the sudden changes in the beam location (fly-back distortion) present in conventional raster scans, it is not distortion-free. “Archimedean” spirals, with a constant angular frequency within each scan, are used to determine the characteristic response at different frequencies. We then show that such characteristic functions can be used to correct image distortions present in more complicated constant linear velocity spirals, where the frequency varies within each scan. Through the combined application of constant linear velocity scanning and beam path corrections, spiral scan images are shown to exhibit less scan distortion than conventional raster scan images. The methodology presented here will be useful for in situ STEM imaging at higher temporal resolution and for imaging beam sensitive materials.

View Accepted Manuscript (DOE)

Cite

Export

Save

Research Organization:: Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22); ORNL Laboratory Directed Research and Development (LDRD) Program

Grant/Contract Number:: AC05-00OR22725

OSTI ID:: 1394477

Journal Information:: Scientific Reports, Journal Name: Scientific Reports Vol. 7; ISSN 2045-2322

Publisher:: Nature Publishing GroupCopyright Statement

Country of Publication:: United States

Language:: English

References (37)

Atomic-Level Sculpting of Crystalline Oxides: Toward Bulk Nanofabrication with Single Atomic Plane Precision Jesse, Stephen; He, Qian; Lupini, Andrew R. Small, Vol. 11, Issue 44 https://doi.org/10.1002/smll.201502048	journal	October 2015
Scanning Transmission Electron Microscopy Pennycook, Stephen J.; Nellist, Peter D. https://doi.org/10.1007/978-1-4419-7200-2	book	January 2011
Identifying and Correcting Scan Noise and Drift in the Scanning Transmission Electron Microscope Jones, Lewys; Nellist, Peter D. Microscopy and Microanalysis, Vol. 19, Issue 4 https://doi.org/10.1017/s1431927613001402	journal	May 2013
Atom Column Indexing: Atomic Resolution Image Analysis Through a Matrix Representation Sang, Xiahan; Oni, Adedapo A.; LeBeau, James M. Microscopy and Microanalysis, Vol. 20, Issue 6 https://doi.org/10.1017/s1431927614013506	journal	November 2014
Directing Matter: Toward Atomic-Scale 3D Nanofabrication Jesse, Stephen; Borisevich, Albina Y.; Fowlkes, Jason D. ACS Nano, Vol. 10, Issue 6 https://doi.org/10.1021/acsnano.6b02489	journal	May 2016
Atom-by-atom structural and chemical analysis by annular dark-field electron microscopy Krivanek, Ondrej L.; Chisholm, Matthew F.; Nicolosi, Valeria Nature, Vol. 464, Issue 7288 https://doi.org/10.1038/nature08879	journal	March 2010
Picometre-precision analysis of scanning transmission electron microscopy images of platinum nanocatalysts Yankovich, Andrew B.; Berkels, Benjamin; Dahmen, W. Nature Communications, Vol. 5, Issue 1 https://doi.org/10.1038/ncomms5155	journal	June 2014
Direct-write liquid phase transformations with a scanning transmission electron microscope Unocic, Raymond R.; Lupini, Andrew R.; Borisevich, Albina Y. Nanoscale, Vol. 8, Issue 34 https://doi.org/10.1039/c6nr04994j	journal	January 2016
Optimizing the environment for sub-0.2 nm scanning transmission electron microscopy Muller, A.; Grazul, J. Microscopy, Vol. 50, Issue 3 https://doi.org/10.1093/jmicro/50.3.219	journal	May 2001
Imaging Atomic-Level Random Walk of a Point Defect in Graphene Kotakoski, Jani; Mangler, Clemens; Meyer, Jannik C. arXiv https://doi.org/10.48550/arxiv.1404.7434	text	January 2014
Atomic-Level Sculpting of Crystalline Oxides: Toward Bulk Nanofabrication with Single Atomic Plane Precision Jesse, Stephen; He, Qian; Lupini, Andrew R. Small, Vol. 11, Issue 44 https://doi.org/10.1002/smll.201502048	journal	October 2015
Scanning Transmission Electron Microscopy Pennycook, Stephen J.; Nellist, Peter D. https://doi.org/10.1007/978-1-4419-7200-2	book	January 2011
High-resolution Z-contrast imaging of crystals Pennycook, S. J.; Jesson, D. E. Ultramicroscopy, Vol. 37, Issue 1-4 https://doi.org/10.1016/0304-3991(91)90004-P	journal	August 1991
Revolving scanning transmission electron microscopy: Correcting sample drift distortion without prior knowledge Sang, Xiahan; LeBeau, James M. Ultramicroscopy, Vol. 138 https://doi.org/10.1016/j.ultramic.2013.12.004	journal	March 2014
Correcting nonlinear drift distortion of scanning probe and scanning transmission electron microscopies from image pairs with orthogonal scan directions Ophus, Colin; Ciston, Jim; Nelson, Chris T. Ultramicroscopy, Vol. 162 https://doi.org/10.1016/j.ultramic.2015.12.002	journal	March 2016
Identifying and Correcting Scan Noise and Drift in the Scanning Transmission Electron Microscope Jones, Lewys; Nellist, Peter D. Microscopy and Microanalysis, Vol. 19, Issue 4 https://doi.org/10.1017/S1431927613001402	journal	May 2013
Atom Column Indexing: Atomic Resolution Image Analysis Through a Matrix Representation Sang, Xiahan; Oni, Adedapo A.; LeBeau, James M. Microscopy and Microanalysis, Vol. 20, Issue 6 https://doi.org/10.1017/S1431927614013506	journal	November 2014
Accurate Nanoscale Crystallography in Real-Space Using Scanning Transmission Electron Microscopy Dycus, J. Houston; Harris, Joshua S.; Sang, Xiahan Microscopy and Microanalysis, Vol. 21, Issue 4 https://doi.org/10.1017/S1431927615013732	journal	July 2015
Directing Matter: Toward Atomic-Scale 3D Nanofabrication Jesse, Stephen; Borisevich, Albina Y.; Fowlkes, Jason D. ACS Nano, Vol. 10, Issue 6 https://doi.org/10.1021/acsnano.6b02489	journal	May 2016
Bubble and Pattern Formation in Liquid Induced by an Electron Beam Grogan, Joseph M.; Schneider, Nicholas M.; Ross, Frances M. Nano Letters, Vol. 14, Issue 1 https://doi.org/10.1021/nl404169a	journal	December 2013
Sub-ångstrom resolution using aberration corrected electron optics Batson, P. E.; Dellby, N.; Krivanek, O. L. Nature, Vol. 418, Issue 6898 https://doi.org/10.1038/nature00972	journal	August 2002
Atom-by-atom structural and chemical analysis by annular dark-field electron microscopy Krivanek, Ondrej L.; Chisholm, Matthew F.; Nicolosi, Valeria Nature, Vol. 464, Issue 7288 https://doi.org/10.1038/nature08879	journal	March 2010
Imaging atomic-level random walk of a point defect in graphene Kotakoski, Jani; Mangler, Clemens; Meyer, Jannik C. Nature Communications, Vol. 5, Issue 1 https://doi.org/10.1038/ncomms4991	journal	May 2014
Picometre-precision analysis of scanning transmission electron microscopy images of platinum nanocatalysts Yankovich, Andrew B.; Berkels, Benjamin; Dahmen, W. Nature Communications, Vol. 5, Issue 1 https://doi.org/10.1038/ncomms5155	journal	June 2014
Direct-write liquid phase transformations with a scanning transmission electron microscope Unocic, Raymond R.; Lupini, Andrew R.; Borisevich, Albina Y. Nanoscale, Vol. 8, Issue 34 https://doi.org/10.1039/C6NR04994J	journal	January 2016
Self-manifestation and universal correction of image distortion in scanning tunneling microscopy with spiral scan Wang, Junting; Wang, Jihui; Hou, Yubin Review of Scientific Instruments, Vol. 81, Issue 7 https://doi.org/10.1063/1.3449322	journal	July 2010
Direct observation of charge mediated lattice distortions in complex oxide solid solutions Sang, Xiahan; Grimley, Everett D.; Niu, Changning Applied Physics Letters, Vol. 106, Issue 6 https://doi.org/10.1063/1.4908124	journal	February 2015
Implementing an accurate and rapid sparse sampling approach for low-dose atomic resolution STEM imaging Kovarik, L.; Stevens, A.; Liyu, A. Applied Physics Letters, Vol. 109, Issue 16 https://doi.org/10.1063/1.4965720	journal	October 2016
Optimizing the environment for sub-0.2 nm scanning transmission electron microscopy Muller, A.; Grazul, J. Microscopy, Vol. 50, Issue 3 https://doi.org/10.1093/jmicro/50.3.219	journal	May 2001
High-resolution low-dose scanning transmission electron microscopy Buban, J. P.; Ramasse, Q.; Gipson, B. Journal of Electron Microscopy, Vol. 59, Issue 2 https://doi.org/10.1093/jmicro/dfp052	journal	November 2009
Atomic-resolution chemical mapping using energy-dispersive x-ray spectroscopy D’Alfonso, A. J.; Freitag, B.; Klenov, D. Physical Review B, Vol. 81, Issue 10 https://doi.org/10.1103/PhysRevB.81.100101	journal	March 2010
Direct Observation of Dopant Atom Diffusion in a Bulk Semiconductor Crystal Enhanced by a Large Size Mismatch Ishikawa, Ryo; Mishra, Rohan; Lupini, Andrew R. Physical Review Letters, Vol. 113, Issue 15 https://doi.org/10.1103/PhysRevLett.113.155501	journal	October 2014
Two-Dimensional Mapping of Chemical Information at Atomic Resolution Bosman, M.; Keast, V. J.; García-Muñoz, J. L. Physical Review Letters, Vol. 99, Issue 8 https://doi.org/10.1103/PhysRevLett.99.086102	journal	August 2007
Spiral-scan Atomic Force Microscopy: A constant linear velocity approach Mahmood, Iskandar A.; Moheimani, S. O. Reza 2010 IEEE 10th Conference on Nanotechnology (IEEE-NANO), 10th IEEE International Conference on Nanotechnology https://doi.org/10.1109/NANO.2010.5698063	conference	August 2010
Atomic-Scale Chemical Imaging of Composition and Bonding by Aberration-Corrected Microscopy Muller, D. A.; Kourkoutis, L. F.; Murfitt, M. Science, Vol. 319, Issue 5866 https://doi.org/10.1126/science.1148820	journal	February 2008
Smart Align—a new tool for robust non-rigid registration of scanning microscope data Jones, Lewys; Yang, Hao; Pennycook, Timothy J. Advanced Structural and Chemical Imaging, Vol. 1, Issue 1 https://doi.org/10.1186/s40679-015-0008-4	journal	July 2015
Dynamic scan control in STEM: spiral scans Sang, Xiahan; Lupini, Andrew R.; Unocic, Raymond R. Advanced Structural and Chemical Imaging, Vol. 2, Issue 1 https://doi.org/10.1186/s40679-016-0020-3	journal	June 2016

Cited By (5)

Advances and Applications of Atomic-Resolution Scanning Transmission Electron Microscopy Liu, Jingyue (Jimmy) Microscopy and Microanalysis, Vol. 27, Issue 5 https://doi.org/10.1017/s1431927621012125	journal	August 2021
Correcting the linear and nonlinear distortions for atomically resolved STEM spectrum and diffraction imaging Wang, Yi; Suyolcu, Y. Eren; Salzberger, Ute Microscopy, Vol. 67, Issue suppl_1 https://doi.org/10.1093/jmicro/dfy002	journal	January 2018
Advances in Electron Microscopy with Deep Learning Ede, Jeffrey M. arXiv https://doi.org/10.48550/arxiv.2101.01178	text	January 2021
An amorphous Zn–P/graphite composite with chemical bonding for ultra-reversible lithium storage Li, Wenwu; Yu, Jiale; Wen, Jiajun Journal of Materials Chemistry A, Vol. 7, Issue 28 https://doi.org/10.1039/c9ta01431d	journal	January 2019
Strain measurement in semiconductor FinFET devices using a novel moiré demodulation technique Prabhakara, V.; Jannis, D.; Béché, A. Semiconductor Science and Technology, Vol. 35, Issue 3 https://doi.org/10.1088/1361-6641/ab5da2	journal	February 2020

Similar Records

Dynamic scan control in STEM: spiral scans

Journal Article · Mon Jun 13 00:00:00 EDT 2016 · Advanced Structural and Chemical Imaging · OSTI ID:1256773

Sang, Xiahan; Lupini, Andrew R.; Unocic, Raymond R.; +6 more

Design of Electrostatic Aberration Correctors for Scanning Transmission Electron Microscopy

Journal Article · Wed Oct 18 00:00:00 EDT 2023 · Microscopy and Microanalysis · OSTI ID:2202904

Ribet, Stephanie M.; Zeltmann, Steven E.; Bustillo, Karen C.; +6 more

Direct-write liquid phase transformations with a scanning transmission electron microscope

Journal Article · Wed Aug 03 00:00:00 EDT 2016 · Nanoscale · OSTI ID:1333640

Unocic, Raymond R.; Lupini, Andrew R.; Borisevich, Albina Y.; +3 more

Related Subjects

47 OTHER INSTRUMENTATION
transmission electron microscopy

Title: Precision controlled atomic resolution scanning transmission electron microscopy using spiral scan pathways

Citation Formats

References (37)

Cited By (5)

Similar Records

Related Subjects