Precision controlled atomic resolution scanning transmission electron microscopy using spiral scan pathways
Abstract
Atomic-resolution imaging in an aberration-corrected scanning transmission electron microscope (STEM) can enable direct correlation between atomic structure and materials functionality. The fast and precise control of the STEM probe is, however, challenging because the true beam location deviates from the assigned location depending on the properties of the deflectors. To reduce these deviations, i.e. image distortions, we use spiral scanning paths, allowing precise control of a sub-Å sized electron probe within an aberration-corrected STEM. Although spiral scanning avoids the sudden changes in the beam location (fly-back distortion) present in conventional raster scans, it is not distortion-free. “Archimedean” spirals, with a constant angular frequency within each scan, are used to determine the characteristic response at different frequencies. We then show that such characteristic functions can be used to correct image distortions present in more complicated constant linear velocity spirals, where the frequency varies within each scan. Through the combined application of constant linear velocity scanning and beam path corrections, spiral scan images are shown to exhibit less scan distortion than conventional raster scan images. The methodology presented here will be useful for in situ STEM imaging at higher temporal resolution and for imaging beam sensitive materials.
- Authors:
-
- Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States). Center for Nanophase Materials Sciences. Inst. for Functional Imaging of Materials
- Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States). Inst. for Functional Imaging of Materials. Materials Science and Technology Division
- Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States). Center for Nanophase Materials Sciences
- Publication Date:
- Research Org.:
- Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)
- Sponsoring Org.:
- USDOE Office of Science (SC), Basic Energy Sciences (BES); ORNL Laboratory Directed Research and Development (LDRD) Program
- OSTI Identifier:
- 1394477
- Grant/Contract Number:
- AC05-00OR22725
- Resource Type:
- Accepted Manuscript
- Journal Name:
- Scientific Reports
- Additional Journal Information:
- Journal Volume: 7; Journal ID: ISSN 2045-2322
- Publisher:
- Nature Publishing Group
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 47 OTHER INSTRUMENTATION; transmission electron microscopy
Citation Formats
Sang, Xiahan, Lupini, Andrew R., Ding, Jilai, Kalinin, Sergei V., Jesse, Stephen, and Unocic, Raymond R. Precision controlled atomic resolution scanning transmission electron microscopy using spiral scan pathways. United States: N. p., 2017.
Web. doi:10.1038/srep43585.
Sang, Xiahan, Lupini, Andrew R., Ding, Jilai, Kalinin, Sergei V., Jesse, Stephen, & Unocic, Raymond R. Precision controlled atomic resolution scanning transmission electron microscopy using spiral scan pathways. United States. https://doi.org/10.1038/srep43585
Sang, Xiahan, Lupini, Andrew R., Ding, Jilai, Kalinin, Sergei V., Jesse, Stephen, and Unocic, Raymond R. Wed .
"Precision controlled atomic resolution scanning transmission electron microscopy using spiral scan pathways". United States. https://doi.org/10.1038/srep43585. https://www.osti.gov/servlets/purl/1394477.
@article{osti_1394477,
title = {Precision controlled atomic resolution scanning transmission electron microscopy using spiral scan pathways},
author = {Sang, Xiahan and Lupini, Andrew R. and Ding, Jilai and Kalinin, Sergei V. and Jesse, Stephen and Unocic, Raymond R.},
abstractNote = {Atomic-resolution imaging in an aberration-corrected scanning transmission electron microscope (STEM) can enable direct correlation between atomic structure and materials functionality. The fast and precise control of the STEM probe is, however, challenging because the true beam location deviates from the assigned location depending on the properties of the deflectors. To reduce these deviations, i.e. image distortions, we use spiral scanning paths, allowing precise control of a sub-Å sized electron probe within an aberration-corrected STEM. Although spiral scanning avoids the sudden changes in the beam location (fly-back distortion) present in conventional raster scans, it is not distortion-free. “Archimedean” spirals, with a constant angular frequency within each scan, are used to determine the characteristic response at different frequencies. We then show that such characteristic functions can be used to correct image distortions present in more complicated constant linear velocity spirals, where the frequency varies within each scan. Through the combined application of constant linear velocity scanning and beam path corrections, spiral scan images are shown to exhibit less scan distortion than conventional raster scan images. The methodology presented here will be useful for in situ STEM imaging at higher temporal resolution and for imaging beam sensitive materials.},
doi = {10.1038/srep43585},
journal = {Scientific Reports},
number = ,
volume = 7,
place = {United States},
year = {Wed Mar 08 00:00:00 EST 2017},
month = {Wed Mar 08 00:00:00 EST 2017}
}
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Works referenced in this record:
Atomic-Level Sculpting of Crystalline Oxides: Toward Bulk Nanofabrication with Single Atomic Plane Precision
journal, October 2015
- Jesse, Stephen; He, Qian; Lupini, Andrew R.
- Small, Vol. 11, Issue 44
Atom-by-atom structural and chemical analysis by annular dark-field electron microscopy
journal, March 2010
- Krivanek, Ondrej L.; Chisholm, Matthew F.; Nicolosi, Valeria
- Nature, Vol. 464, Issue 7288
Correcting nonlinear drift distortion of scanning probe and scanning transmission electron microscopies from image pairs with orthogonal scan directions
journal, March 2016
- Ophus, Colin; Ciston, Jim; Nelson, Chris T.
- Ultramicroscopy, Vol. 162
Accurate Nanoscale Crystallography in Real-Space Using Scanning Transmission Electron Microscopy
journal, July 2015
- Dycus, J. Houston; Harris, Joshua S.; Sang, Xiahan
- Microscopy and Microanalysis, Vol. 21, Issue 4
Revolving scanning transmission electron microscopy: Correcting sample drift distortion without prior knowledge
journal, March 2014
- Sang, Xiahan; LeBeau, James M.
- Ultramicroscopy, Vol. 138
High-resolution Z-contrast imaging of crystals
journal, August 1991
- Pennycook, S. J.; Jesson, D. E.
- Ultramicroscopy, Vol. 37, Issue 1-4
Two-Dimensional Mapping of Chemical Information at Atomic Resolution
journal, August 2007
- Bosman, M.; Keast, V. J.; García-Muñoz, J. L.
- Physical Review Letters, Vol. 99, Issue 8
Atomic-resolution chemical mapping using energy-dispersive x-ray spectroscopy
journal, March 2010
- D’Alfonso, A. J.; Freitag, B.; Klenov, D.
- Physical Review B, Vol. 81, Issue 10
Self-manifestation and universal correction of image distortion in scanning tunneling microscopy with spiral scan
journal, July 2010
- Wang, Junting; Wang, Jihui; Hou, Yubin
- Review of Scientific Instruments, Vol. 81, Issue 7
Bubble and Pattern Formation in Liquid Induced by an Electron Beam
journal, December 2013
- Grogan, Joseph M.; Schneider, Nicholas M.; Ross, Frances M.
- Nano Letters, Vol. 14, Issue 1
Atomic-Scale Chemical Imaging of Composition and Bonding by Aberration-Corrected Microscopy
journal, February 2008
- Muller, D. A.; Kourkoutis, L. F.; Murfitt, M.
- Science, Vol. 319, Issue 5866
High-resolution low-dose scanning transmission electron microscopy
journal, November 2009
- Buban, J. P.; Ramasse, Q.; Gipson, B.
- Journal of Electron Microscopy, Vol. 59, Issue 2
Identifying and Correcting Scan Noise and Drift in the Scanning Transmission Electron Microscope
journal, May 2013
- Jones, Lewys; Nellist, Peter D.
- Microscopy and Microanalysis, Vol. 19, Issue 4
Atom Column Indexing: Atomic Resolution Image Analysis Through a Matrix Representation
journal, November 2014
- Sang, Xiahan; Oni, Adedapo A.; LeBeau, James M.
- Microscopy and Microanalysis, Vol. 20, Issue 6
Implementing an accurate and rapid sparse sampling approach for low-dose atomic resolution STEM imaging
journal, October 2016
- Kovarik, L.; Stevens, A.; Liyu, A.
- Applied Physics Letters, Vol. 109, Issue 16
Optimizing the environment for sub-0.2 nm scanning transmission electron microscopy
journal, May 2001
- Muller, A.; Grazul, J.
- Microscopy, Vol. 50, Issue 3
Picometre-precision analysis of scanning transmission electron microscopy images of platinum nanocatalysts
journal, June 2014
- Yankovich, Andrew B.; Berkels, Benjamin; Dahmen, W.
- Nature Communications, Vol. 5, Issue 1
Direct observation of charge mediated lattice distortions in complex oxide solid solutions
journal, February 2015
- Sang, Xiahan; Grimley, Everett D.; Niu, Changning
- Applied Physics Letters, Vol. 106, Issue 6
Direct-write liquid phase transformations with a scanning transmission electron microscope
journal, January 2016
- Unocic, Raymond R.; Lupini, Andrew R.; Borisevich, Albina Y.
- Nanoscale, Vol. 8, Issue 34
Direct Observation of Dopant Atom Diffusion in a Bulk Semiconductor Crystal Enhanced by a Large Size Mismatch
journal, October 2014
- Ishikawa, Ryo; Mishra, Rohan; Lupini, Andrew R.
- Physical Review Letters, Vol. 113, Issue 15
Smart Align—a new tool for robust non-rigid registration of scanning microscope data
journal, July 2015
- Jones, Lewys; Yang, Hao; Pennycook, Timothy J.
- Advanced Structural and Chemical Imaging, Vol. 1, Issue 1
Sub-ångstrom resolution using aberration corrected electron optics
journal, August 2002
- Batson, P. E.; Dellby, N.; Krivanek, O. L.
- Nature, Vol. 418, Issue 6898
Imaging atomic-level random walk of a point defect in graphene
journal, May 2014
- Kotakoski, Jani; Mangler, Clemens; Meyer, Jannik C.
- Nature Communications, Vol. 5, Issue 1
Dynamic scan control in STEM: spiral scans
journal, June 2016
- Sang, Xiahan; Lupini, Andrew R.; Unocic, Raymond R.
- Advanced Structural and Chemical Imaging, Vol. 2, Issue 1
Spiral-scan Atomic Force Microscopy: A constant linear velocity approach
conference, August 2010
- Mahmood, Iskandar A.; Moheimani, S. O. Reza
- 2010 IEEE 10th Conference on Nanotechnology (IEEE-NANO), 10th IEEE International Conference on Nanotechnology
Directing Matter: Toward Atomic-Scale 3D Nanofabrication
journal, May 2016
- Jesse, Stephen; Borisevich, Albina Y.; Fowlkes, Jason D.
- ACS Nano, Vol. 10, Issue 6
Atomic-Level Sculpting of Crystalline Oxides: Toward Bulk Nanofabrication with Single Atomic Plane Precision
journal, October 2015
- Jesse, Stephen; He, Qian; Lupini, Andrew R.
- Small, Vol. 11, Issue 44
Directing Matter: Toward Atomic-Scale 3D Nanofabrication
journal, May 2016
- Jesse, Stephen; Borisevich, Albina Y.; Fowlkes, Jason D.
- ACS Nano, Vol. 10, Issue 6
Atom-by-atom structural and chemical analysis by annular dark-field electron microscopy
journal, March 2010
- Krivanek, Ondrej L.; Chisholm, Matthew F.; Nicolosi, Valeria
- Nature, Vol. 464, Issue 7288
Picometre-precision analysis of scanning transmission electron microscopy images of platinum nanocatalysts
journal, June 2014
- Yankovich, Andrew B.; Berkels, Benjamin; Dahmen, W.
- Nature Communications, Vol. 5, Issue 1
Optimizing the environment for sub-0.2 nm scanning transmission electron microscopy
journal, May 2001
- Muller, A.; Grazul, J.
- Microscopy, Vol. 50, Issue 3
Imaging Atomic-Level Random Walk of a Point Defect in Graphene
text, January 2014
- Kotakoski, Jani; Mangler, Clemens; Meyer, Jannik C.
- arXiv
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journal, January 2019
- Li, Wenwu; Yu, Jiale; Wen, Jiajun
- Journal of Materials Chemistry A, Vol. 7, Issue 28
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journal, February 2020
- Prabhakara, V.; Jannis, D.; Béché, A.
- Semiconductor Science and Technology, Vol. 35, Issue 3
Correcting the linear and nonlinear distortions for atomically resolved STEM spectrum and diffraction imaging
journal, January 2018
- Wang, Yi; Suyolcu, Y. Eren; Salzberger, Ute
- Microscopy, Vol. 67, Issue suppl_1