Relationship between electrical properties and crystallization of indium oxide thin films using ex-situ grazing-incidence wide-angle x-ray scattering
Abstract
Grazing-incidence, wide-angle x-ray scattering measurements were conducted on indium oxide thin films grown on silica substrates via pulsed laser deposition. Growth temperatures (TG) in this study ranged from -50 °C to 600 °C, in order to investigate the thermal effects on the film structure and its spatial homogeneity, as well as their relationship to electrical properties. Films grown below room temperature were amorphous, while films prepared at TG = 25 °C and above crystallized in the cubic bixbyite structure, and their crystalline fraction increased with deposition temperature. The electrical conductivity (σ) and electrical mobility (μ) were strongly enhanced at low deposition temperatures. For TG = 25 °C and 50 °C, a strong < 100 > preferred orientation (texture) occurred, but it decreased as the deposition temperature, and consequential crystallinity, increased. Higher variations in texture coefficients and in lattice parameters were measured at the film surface compared to the interior of the film, indicating strong microstructural gradients. At low crystallinity, the in-plane lattice spacing expanded, while the out-of-plane spacing contracted, and those values merged at TG = 400 °C, where high μ was measured. This directional difference in lattice spacing, or deviatoric strain, was linear as a function of both depositionmore »
- Authors:
-
- DePaul Univ., Chicago, IL (United States)
- Argonne National Lab. (ANL), Argonne, IL (United States)
- Northwestern Univ., Evanston, IL (United States)
- Publication Date:
- Research Org.:
- Argonne National Laboratory (ANL), Argonne, IL (United States)
- Sponsoring Org.:
- National Science Foundation (NSF); DePaul University; USDOE Office of Science (SC), Basic Energy Sciences (BES)
- OSTI Identifier:
- 1377891
- Alternate Identifier(s):
- OSTI ID: 1361906
- Grant/Contract Number:
- AC02-06CH11357
- Resource Type:
- Accepted Manuscript
- Journal Name:
- Journal of Applied Physics
- Additional Journal Information:
- Journal Volume: 121; Journal Issue: 20; Journal ID: ISSN 0021-8979
- Publisher:
- American Institute of Physics (AIP)
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE
Citation Formats
González, G. B., Okasinski, J. S., Buchholz, D. B., Boesso, J., Almer, J. D., Zeng, L., Bedzyk, M. J., and Chang, R. P. H. Relationship between electrical properties and crystallization of indium oxide thin films using ex-situ grazing-incidence wide-angle x-ray scattering. United States: N. p., 2017.
Web. doi:10.1063/1.4984054.
González, G. B., Okasinski, J. S., Buchholz, D. B., Boesso, J., Almer, J. D., Zeng, L., Bedzyk, M. J., & Chang, R. P. H. Relationship between electrical properties and crystallization of indium oxide thin films using ex-situ grazing-incidence wide-angle x-ray scattering. United States. https://doi.org/10.1063/1.4984054
González, G. B., Okasinski, J. S., Buchholz, D. B., Boesso, J., Almer, J. D., Zeng, L., Bedzyk, M. J., and Chang, R. P. H. Thu .
"Relationship between electrical properties and crystallization of indium oxide thin films using ex-situ grazing-incidence wide-angle x-ray scattering". United States. https://doi.org/10.1063/1.4984054. https://www.osti.gov/servlets/purl/1377891.
@article{osti_1377891,
title = {Relationship between electrical properties and crystallization of indium oxide thin films using ex-situ grazing-incidence wide-angle x-ray scattering},
author = {González, G. B. and Okasinski, J. S. and Buchholz, D. B. and Boesso, J. and Almer, J. D. and Zeng, L. and Bedzyk, M. J. and Chang, R. P. H.},
abstractNote = {Grazing-incidence, wide-angle x-ray scattering measurements were conducted on indium oxide thin films grown on silica substrates via pulsed laser deposition. Growth temperatures (TG) in this study ranged from -50 °C to 600 °C, in order to investigate the thermal effects on the film structure and its spatial homogeneity, as well as their relationship to electrical properties. Films grown below room temperature were amorphous, while films prepared at TG = 25 °C and above crystallized in the cubic bixbyite structure, and their crystalline fraction increased with deposition temperature. The electrical conductivity (σ) and electrical mobility (μ) were strongly enhanced at low deposition temperatures. For TG = 25 °C and 50 °C, a strong < 100 > preferred orientation (texture) occurred, but it decreased as the deposition temperature, and consequential crystallinity, increased. Higher variations in texture coefficients and in lattice parameters were measured at the film surface compared to the interior of the film, indicating strong microstructural gradients. At low crystallinity, the in-plane lattice spacing expanded, while the out-of-plane spacing contracted, and those values merged at TG = 400 °C, where high μ was measured. This directional difference in lattice spacing, or deviatoric strain, was linear as a function of both deposition temperature and the degree of crystallinity. The crystalline sample with TG = 100 °C had the lowest mobility, as well as film diffraction peaks which split into doublets. The deviatoric strains from these doublet peaks differ by a factor of four, supporting the presence of both a microstructure and strain gradient in this film. More isotropic films exhibit larger l values, indicating that the microstructure directly correlates with electrical properties. Lastly, these results provide valuable insights that can help to improve the desirable properties of indium oxide, as well as other transparent conducting oxides.},
doi = {10.1063/1.4984054},
journal = {Journal of Applied Physics},
number = 20,
volume = 121,
place = {United States},
year = {Thu May 25 00:00:00 EDT 2017},
month = {Thu May 25 00:00:00 EDT 2017}
}
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Works referenced in this record:
Transparent Conducting Oxides for Photovoltaics
journal, March 2007
- Fortunato, Elvira; Ginley, David; Hosono, Hideo
- MRS Bulletin, Vol. 32, Issue 03, p. 242-247
Modulation of electron transportation in amorphous and polycrystalline indium–zinc-oxide films grown by pulse laser deposition
journal, September 2015
- Yan, X. Z.; Man, X.; Ma, J. G.
- Journal of Non-Crystalline Solids, Vol. 423-424
Electrical and band-gap properties of amorphous zinc–indium–tin oxide thin films
journal, February 2012
- Buchholz, D. B.; Proffit, D. E.; Wisser, M. D.
- Progress in Natural Science: Materials International, Vol. 22, Issue 1
The electromagnetic interference shielding effect of indium–zinc oxide/silver alloy multilayered thin films
journal, February 2005
- Kim, Won Mok; Young Ku, Dae; Lee, In-kyu
- Thin Solid Films, Vol. 473, Issue 2
Differences between amorphous indium oxide thin films
journal, October 2013
- Buchholz, D. Bruce; Zeng, Li; Bedzyk, Michael J.
- Progress in Natural Science: Materials International, Vol. 23, Issue 5
Deposition of indium tin oxide films on polycarbonate substrates by radio-frequency magnetron sputtering
journal, April 1997
- Wu, Wen-Fa; Chiou, Bi-Shiou
- Thin Solid Films, Vol. 298, Issue 1-2
Strongly Anisotropic Thermal Conductivity of Free-Standing Reduced Graphene Oxide Films Annealed at High Temperature
journal, June 2015
- Renteria, Jackie D.; Ramirez, Sylvester; Malekpour, Hoda
- Advanced Functional Materials, Vol. 25, Issue 29
Structural and Physical Property Studies of Amorphous Zn-In-Sn-O Thin Films
journal, August 2012
- Proffit, Diana E.; Ma, Qing; Buchholz, Donald B.
- Journal of the American Ceramic Society, Vol. 95, Issue 11
Gigahertz Acoustic Vibrations of Elastically Anisotropic Indium–Tin-Oxide Nanorod Arrays
journal, August 2016
- Guo, Peijun; Schaller, Richard D.; Ocola, Leonidas E.
- Nano Letters, Vol. 16, Issue 9
Electrical and structural properties of indium tin oxide films prepared by pulsed laser deposition
journal, February 2002
- Izumi, Hirokazu; Adurodija, Frederick O.; Kaneyoshi, Takahiro
- Journal of Applied Physics, Vol. 91, Issue 3
GSAS-II : the genesis of a modern open-source all purpose crystallography software package
journal, March 2013
- Toby, Brian H.; Von Dreele, Robert B.
- Journal of Applied Crystallography, Vol. 46, Issue 2
The Structure and Properties of Amorphous Indium Oxide
journal, September 2014
- Buchholz, D. Bruce; Ma, Qing; Alducin, Diego
- Chemistry of Materials, Vol. 26, Issue 18
Refinement of the crystal structure of In 2 O 3 at two wavelengths
journal, November 1966
- Marezio, M.
- Acta Crystallographica, Vol. 20, Issue 6
Surface studies of crystalline and amorphous Zn–In–Sn–O transparent conducting oxides
journal, June 2012
- Proffit, Diana E.; Harvey, Steven P.; Klein, Andreas
- Thin Solid Films, Vol. 520, Issue 17
Effects of stress on the structure of indium-tin-oxide thin films grown by pulsed laser deposition
journal, January 2001
- Adurodija, F. O.; Izumi, H.; Ishihara, T.
- Journal of Materials Science: Materials in Electronics, Vol. 12, Issue 1, p. 57-61
Amorphous oxide TFT and their applications in electrophoretic displays
journal, August 2008
- Ito, Manabu; Kon, Masato; Miyazaki, Chihiro
- physica status solidi (a), Vol. 205, Issue 8
Effect of substrate on the structural and optical properties of chemical-bath-deposited CdS films
journal, November 1996
- Bhattacharyya, D.; Carter, M. J.
- Thin Solid Films, Vol. 288, Issue 1-2
Investigation of diffusion and crystallization processes in thin ITO films by temperature and time resolved grazing incidence X-ray diffractometry
journal, August 2003
- Quaas, M.; Steffen, H.; Hippler, R.
- Surface Science, Vol. 540, Issue 2-3
Electrical and optical properties of amorphous indium oxide
journal, July 1990
- Bellingham, J. R.; Phillips, W. A.; Adkins, C. J.
- Journal of Physics: Condensed Matter, Vol. 2, Issue 28
Highly conducting indium tin oxide films grown by ultraviolet-assisted pulsed laser deposition at low temperatures
journal, April 2004
- Craciun, V.; Craciun, D.; Wang, X.
- Thin Solid Films, Vol. 453-454
Improving the flexibility of large-area transparent conductive oxide electrodes on polymer substrates for flexible organic light emitting diodes by introducing surface roughness
journal, December 2013
- Kim, Jung-Hoon; Park, Jin-Woo
- Organic Electronics, Vol. 14, Issue 12
Transparent Conducting Oxides
journal, August 2000
- Ginley, David S.; Bright, Clark
- MRS Bulletin, Vol. 25, Issue 8
Study on In–Zn–Sn–O and In–Sn–Zn–O films deposited on PET substrate by magnetron co-sputtering system
journal, August 2008
- Lee, D. Y.; Lee, J. R.; Lee, G. H.
- Surface and Coatings Technology, Vol. 202, Issue 22-23
The Remarkable Thermal Stability of Amorphous In-Zn-O Transparent Conductors
journal, October 2008
- Taylor, Matthew P.; Readey, Dennis W.; van Hest, Maikel F. A. M.
- Advanced Functional Materials, Vol. 18, Issue 20
Transparent conductors—A status review
journal, April 1983
- Chopra, K. L.; Major, S.; Pandya, D. K.
- Thin Solid Films, Vol. 102, Issue 1
Two-dimensional detector software: From real detector to idealised image or two-theta scan
journal, January 1996
- Hammersley, A. P.; Svensson, S. O.; Hanfland, M.
- High Pressure Research, Vol. 14, Issue 4-6, p. 235-248
Thermal Conductivity Comparison of Indium Gallium Zinc Oxide Thin Films: Dependence on Temperature, Crystallinity, and Porosity
journal, March 2016
- Cui, Boya; Zeng, Li; Keane, Denis
- The Journal of Physical Chemistry C, Vol. 120, Issue 14
Defect structure studies of bulk and nano-indium-tin oxide
journal, October 2004
- González, G. B.; Mason, T. O.; Quintana, J. P.
- Journal of Applied Physics, Vol. 96, Issue 7
Microstructure of Low-Resistivity Tin-Doped Indium Oxide Films Deposited at $\bf 150\sim 200^{\circ}C$
journal, February 1995
- Yi, Choong Hoon; Shigesato, Yuzo; Yasui, Itaru
- Japanese Journal of Applied Physics, Vol. 34, Issue Part 2, No. 2B
Thermoelectric properties of Ge/Si heterostructures: A combined theoretical and experimental study: Thermoelectric properties of Ge/Si heterostructures
journal, November 2015
- Fiedler, Gregor; Nausner, Lukas; Hu, Yang
- physica status solidi (a), Vol. 213, Issue 3