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Title: Evaluation of Porous Silicon Oxide on Silicon Microcantilevers for Sensitive Detection of Gaseous HF

Abstract

Sensitive detection of harmful chemicals in industrial applications is pertinent to safety. In this paper, we demonstrate the use of a sensitive silicon microcantilever (MC) system with a porous silicon oxide layer deposited on the active side of the MCs that have been mechanically manipulated to increase sensitivity. Included is the evaluation of porous silicon oxide present on different geometries of MCs and exposed to varying concentrations of hydrogen fluoride in humid air. Finally, profilometry and the signal generated by the stress-induced porous silicon oxide (PSO) coating and bending of the MC were used as methods of evaluation.

Authors:
ORCiD logo [1];  [1];  [2];  [3]
+ Show Author Affiliations
  1. Univ. of Tennessee, Knoxville, TN (United States). Dept. of Chemistry
  2. Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States). Center for Nanophase Materials Sciences
  3. Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States). Engineering Technology Division
Publication Date:
Research Org.:
Univ. of Tennessee, Knoxville, TN (United States); Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)
Sponsoring Org.:
USDOE Laboratory Directed Research and Development (LDRD) Program; USDOE Office of Science (SC), Basic Energy Sciences (BES); USDOE National Nuclear Security Administration (NNSA), Office of Defense Nuclear Nonproliferation
OSTI Identifier:
1376472
Grant/Contract Number:  
AC05-00OR22725
Resource Type:
Accepted Manuscript
Journal Name:
Analytical Chemistry
Additional Journal Information:
Journal Volume: 89; Journal Issue: 11; Journal ID: ISSN 0003-2700
Publisher:
American Chemical Society (ACS)
Country of Publication:
United States
Language:
English
Subject:
37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY

Citation Formats

Wallace, Ryan A., Sepaniak, Michael J., Lavrik, Nickolay V., and Datskos, Panos G. Evaluation of Porous Silicon Oxide on Silicon Microcantilevers for Sensitive Detection of Gaseous HF. United States: N. p., 2017. Web. doi:10.1021/acs.analchem.7b01375.
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Wallace, Ryan A., Sepaniak, Michael J., Lavrik, Nickolay V., & Datskos, Panos G. Evaluation of Porous Silicon Oxide on Silicon Microcantilevers for Sensitive Detection of Gaseous HF. United States. https://doi.org/10.1021/acs.analchem.7b01375
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Wallace, Ryan A., Sepaniak, Michael J., Lavrik, Nickolay V., and Datskos, Panos G. Wed . "Evaluation of Porous Silicon Oxide on Silicon Microcantilevers for Sensitive Detection of Gaseous HF". United States. https://doi.org/10.1021/acs.analchem.7b01375. https://www.osti.gov/servlets/purl/1376472.
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@article{osti_1376472,
title = {Evaluation of Porous Silicon Oxide on Silicon Microcantilevers for Sensitive Detection of Gaseous HF},
author = {Wallace, Ryan A. and Sepaniak, Michael J. and Lavrik, Nickolay V. and Datskos, Panos G.},
abstractNote = {Sensitive detection of harmful chemicals in industrial applications is pertinent to safety. In this paper, we demonstrate the use of a sensitive silicon microcantilever (MC) system with a porous silicon oxide layer deposited on the active side of the MCs that have been mechanically manipulated to increase sensitivity. Included is the evaluation of porous silicon oxide present on different geometries of MCs and exposed to varying concentrations of hydrogen fluoride in humid air. Finally, profilometry and the signal generated by the stress-induced porous silicon oxide (PSO) coating and bending of the MC were used as methods of evaluation.},
doi = {10.1021/acs.analchem.7b01375},
journal = {Analytical Chemistry},
number = 11,
volume = 89,
place = {United States},
year = {Wed May 10 00:00:00 EDT 2017},
month = {Wed May 10 00:00:00 EDT 2017}
}
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Journal Article:
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https://doi.org/10.1021/acs.analchem.7b01375
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    Works referencing / citing this record:

    New insights into the structure–performance relationships of mesoporous materials in analytical science
    journal, January 2018

    • Wang, Jie; Ma, Qinqin; Wang, Yingqian
    • Chemical Society Reviews, Vol. 47, Issue 23
    • DOI: 10.1039/c8cs00658j
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