skip to main content


Title: Fabrication and efficiency measurement of a Mo/C/Si/C three material system multilayer Laue lens

In this letter we report on the manufacturing of a multilayer Laue lens (MLL) consisting of a multilayer stack with three materials: molybdenum and silicon as absorber and spacer layer, respectively, and carbon as transition layers. The design has four layers per period: Mo/C/Si/C. It yields 6000 zones, and provides an aperture of 50 μm. This allows the MLL structure to accept a large portion of the coherent part of the beam and achieving a small spot size. The MLL deposition was made by magnetron sputtering at the Fraunhofer IWS, the sectioning was done by laser cutting and subsequent focused ion beam milling to a thickness that provides a good efficiency for a photon energy of 12 keV. The diffraction efficiency as a function of the tilting angle has been measured at beamline 1-BM of the Advanced Photon Source. An efficiency of almost 40% has been achieved. This shows that the material system performs well compared to MLLs made of two-materials and that it is in an excellent agreement with the numerically calculated efficiency for a comparable molybdenum/silicon bilayer system lens. Here, we conclude that the three material system offers high efficiencies and is advantageous for stress reduction in MLLs.
ORCiD logo [1] ;  [2] ; ORCiD logo [3] ;  [1] ;  [1] ;  [1] ;  [1] ;  [2]
  1. Fraunhofer IWS Dresden, Dresden (Germany)
  2. Argonne National Lab. (ANL), Argonne, IL (United States)
  3. Leibniz-Institut fur Polymerforschung Dresden e.V., Dresden (Germany)
Publication Date:
Grant/Contract Number:
Accepted Manuscript
Journal Name:
Applied Physics Letters
Additional Journal Information:
Journal Volume: 110; Journal Issue: 11; Journal ID: ISSN 0003-6951
American Institute of Physics (AIP)
Research Org:
Argonne National Lab. (ANL), Argonne, IL (United States)
Sponsoring Org:
USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22)
Country of Publication:
United States
OSTI Identifier:
Alternate Identifier(s):
OSTI ID: 1348039