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Title: A modular reactor design for in situ synchrotron x-ray investigation of atomic layer deposition processes

Abstract

Synchrotron characterization techniques provide some of the most powerful tools for the study of film structure and chemistry. The brilliance and tunability of the Advanced Photon Source allow access to scattering and spectroscopic techniques unavailable with in-house laboratory setups and provide the opportunity to probe various atomic layer deposition (ALD) processes in situ starting at the very first deposition cycle. In this work, we present the design and implementation of a portable ALD instrument which possesses a modular reactor scheme that enables simple experimental switchover between various beamlines and characterization techniques. We present in situ results for (1) X-ray surface scattering and reflectivity measurements of epitaxial ZnO ALD on sapphire, (2) grazing-incidence small angle scattering of MnO nucleation on silicon, and (3) grazing-incidence X-ray absorption spectroscopy of nucleation-regime Er 2O 3 ALD on amorphous ALD alumina and single crystalline sapphire.

Authors:
 [1];  [2];  [1]; ORCiD logo [3];  [4]; ORCiD logo [4];  [1];  [3];  [5];  [1]
  1. Argonne National Lab. (ANL), Argonne, IL (United States). Materials Science Division
  2. Argonne National Lab. (ANL), Argonne, IL (United States). Materials Science Division; Illinois Inst. of Technology, Chicago, IL (United States). Dept. of Chemistry
  3. Argonne National Lab. (ANL), Argonne, IL (United States). Energy Systems Division
  4. Argonne National Lab. (ANL), Argonne, IL (United States). X-Ray Science Division
  5. Illinois Inst. of Technology, Chicago, IL (United States). Dept. of Chemistry; Argonne National Lab. (ANL), Argonne, IL (United States). Chemical Science and Engineering Division
Publication Date:
Research Org.:
Energy Frontier Research Centers (EFRC), Washington D.C. (United States). Argonne-Northwestern Solar Energy Research Center (ANSER)
Sponsoring Org.:
USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22)
OSTI Identifier:
1370820
Alternate Identifier(s):
OSTI ID: 1224877
Grant/Contract Number:  
SC0001059; AC02-06CH11357
Resource Type:
Accepted Manuscript
Journal Name:
Review of Scientific Instruments
Additional Journal Information:
Journal Volume: 86; Journal Issue: 11; Related Information: ANSER partners with Northwestern University (lead); Argonne National Laboratory; University of Chicago; University of Illinois, Urbana-Champaign; Yale University; Journal ID: ISSN 0034-6748
Publisher:
American Institute of Physics (AIP)
Country of Publication:
United States
Language:
English
Subject:
catalysis (homogeneous); catalysis (heterogeneous); solar (photovoltaic); solar (fuels); photosynthesis (natural and artificial); bio-inspired; hydrogen and fuel cells; electrodes - solar; defects; charge transport; spin dynamics; membrane; materials and chemistry by design; optics; synthesis (novel materials); synthesis (self-assembly)

Citation Formats

Klug, Jeffrey A., Weimer, Matthew S., Emery, Jonathan D., Yanguas-Gil, Angel, Seifert, Sönke, Schlepütz, Christian M., Martinson, Alex B. F., Elam, Jeffrey W., Hock, Adam S., and Proslier, Thomas. A modular reactor design for in situ synchrotron x-ray investigation of atomic layer deposition processes. United States: N. p., 2015. Web. doi:10.1063/1.4934807.
Klug, Jeffrey A., Weimer, Matthew S., Emery, Jonathan D., Yanguas-Gil, Angel, Seifert, Sönke, Schlepütz, Christian M., Martinson, Alex B. F., Elam, Jeffrey W., Hock, Adam S., & Proslier, Thomas. A modular reactor design for in situ synchrotron x-ray investigation of atomic layer deposition processes. United States. doi:10.1063/1.4934807.
Klug, Jeffrey A., Weimer, Matthew S., Emery, Jonathan D., Yanguas-Gil, Angel, Seifert, Sönke, Schlepütz, Christian M., Martinson, Alex B. F., Elam, Jeffrey W., Hock, Adam S., and Proslier, Thomas. Mon . "A modular reactor design for in situ synchrotron x-ray investigation of atomic layer deposition processes". United States. doi:10.1063/1.4934807. https://www.osti.gov/servlets/purl/1370820.
@article{osti_1370820,
title = {A modular reactor design for in situ synchrotron x-ray investigation of atomic layer deposition processes},
author = {Klug, Jeffrey A. and Weimer, Matthew S. and Emery, Jonathan D. and Yanguas-Gil, Angel and Seifert, Sönke and Schlepütz, Christian M. and Martinson, Alex B. F. and Elam, Jeffrey W. and Hock, Adam S. and Proslier, Thomas},
abstractNote = {Synchrotron characterization techniques provide some of the most powerful tools for the study of film structure and chemistry. The brilliance and tunability of the Advanced Photon Source allow access to scattering and spectroscopic techniques unavailable with in-house laboratory setups and provide the opportunity to probe various atomic layer deposition (ALD) processes in situ starting at the very first deposition cycle. In this work, we present the design and implementation of a portable ALD instrument which possesses a modular reactor scheme that enables simple experimental switchover between various beamlines and characterization techniques. We present in situ results for (1) X-ray surface scattering and reflectivity measurements of epitaxial ZnO ALD on sapphire, (2) grazing-incidence small angle scattering of MnO nucleation on silicon, and (3) grazing-incidence X-ray absorption spectroscopy of nucleation-regime Er2O3 ALD on amorphous ALD alumina and single crystalline sapphire.},
doi = {10.1063/1.4934807},
journal = {Review of Scientific Instruments},
number = 11,
volume = 86,
place = {United States},
year = {2015},
month = {11}
}

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