Tunneling Spectroscopy of Superconducting MoN and NbTiN Grown by Atomic Layer Deposition.

Groll, Nickolas; Klug, Jeffrey A.; Cao, Chaoyue; Altin, Serdar; Claus, Helmut; Becker, Nicholas G.; Zasadzinski, John; Pellin, Mike; Proslier, Thomas

doi:10.1063/1.4867880

Title: Tunneling Spectroscopy of Superconducting MoN and NbTiN Grown by Atomic Layer Deposition.

Journal Article · Mon Mar 03 00:00:00 UTC 2014 · Applied Physics Letters

DOI: https://doi.org/10.1063/1.4867880 · OSTI ID:1357490

Groll, Nickolas ^[1]; Klug, Jeffrey A. ^[1]; Cao, Chaoyue ^[2]; Altin, Serdar ^[3]; Claus, Helmut ^[1]; Becker, Nicholas G. ^[2]; Zasadzinski, John ^[2]; Pellin, Mike ^[1]; Proslier, Thomas ^[1]

Argonne National Lab. (ANL), Argonne, IL (United States)
Argonne National Lab. (ANL), Argonne, IL (United States); Illinois Inst. of Technology, Chicago, IL (United States)
Inonu Univ., Malatya (Turkey)

A tunneling spectroscopy study is presented of superconducting MoN and Nbo.8Tio.2N thin films grown by atomic layer deposition (ALD). The films exhibited a superconducting gap of 2meV and 2.4meV, respectively, with a corresponding critical temperature of 11.5K and 13.4 K, among the highest reported Tc values achieved by the ALD technique.Tunnel junctions were obtained using a mechanical contact method with a Au tip. While the native oxides of these films provided poor tunnel barriers, high quality tunnel junctions with low zero bias conductance (below rvl0%) were obtained using an artificial tunnel barrier of Ah03 on the film's surface grown ex situ by ALD. We find a large critical current density on the order of 4 x 106Ncm2 at T =0.8Tc for a 60 run MoN film and demonstrate conformal coating capabilities of ALD onto high aspect ratio geometries. These results suggest that the ALD technique offers significant promise for thin film superconducting device applications.

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Research Organization:: Argonne National Lab. (ANL), Argonne, IL (United States)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22)

Grant/Contract Number:: AC02-06CH11357

OSTI ID:: 1357490

Journal Information:: Applied Physics Letters, Journal Name: Applied Physics Letters Journal Issue: 9 Vol. 104; ISSN 0003-6951

Publisher:: American Institute of Physics (AIP)Copyright Statement

Country of Publication:: United States

Language:: English

References (19)

Nitrides of titanium, niobium, tantalum and molybdenum grown as thin films by the atomic layer epitaxy method Hiltunen, L.; Leskelä, M.; Mäkelä, M. Thin Solid Films, Vol. 166 https://doi.org/10.1016/0040-6090(88)90375-6	journal	December 1988
Point contact tunnelling apparatus with temperature and magnetic field control Ozyuzer, L.; Zasadzinski, J. F.; Gray, K. E. Cryogenics, Vol. 38, Issue 9 https://doi.org/10.1016/S0011-2275(98)00060-5	journal	September 1998
Superconducting molybdenum nitride epitaxial thin films deposited on MgO and α-Al2O3 substrates by molecular beam epitaxy Inumaru, Kei; Baba, Kazuya; Yamanaka, Shoji Applied Surface Science, Vol. 253, Issue 5 https://doi.org/10.1016/j.apsusc.2006.06.024	journal	December 2006
Synthesis and characterisation of hexagonal molybdenum nitrides Ganin, Alexey Yu.; Kienle, Lorenz; Vajenine, Grigori V. Journal of Solid State Chemistry, Vol. 179, Issue 8 https://doi.org/10.1016/j.jssc.2006.05.025	journal	August 2006
Low-Temperature Al₂O₃ Atomic Layer Deposition Groner, M. D.; Fabreguette, F. H.; Elam, J. W. Chemistry of Materials, Vol. 16, Issue 4, p. 639-645 https://doi.org/10.1021/cm0304546	journal	February 2004
Epitaxial Superconducting δ-MoN Films Grown by a Chemical Solution Method Zhang, Yingying; Haberkorn, Nestor; Ronning, Filip Journal of the American Chemical Society, Vol. 133, Issue 51 https://doi.org/10.1021/ja208868k	journal	December 2011
Atomic Layer Deposition and Superconducting Properties of NbSi Films Proslier, Thomas; Klug, Jeffrey A.; Elam, Jeffrey W. The Journal of Physical Chemistry C, Vol. 115, Issue 19 https://doi.org/10.1021/jp201873b	journal	April 2011
Viscous flow reactor with quartz crystal microbalance for thin film growth by atomic layer deposition Elam, J. W.; Groner, M. D.; George, S. M. Review of Scientific Instruments, Vol. 73, Issue 8, p. 2981-2987 https://doi.org/10.1063/1.1490410	journal	August 2002
Surface chemistry of atomic layer deposition: A case study for the trimethylaluminum/water process Puurunen, Riikka L. Journal of Applied Physics, Vol. 97, Issue 12, Article No. 121301 https://doi.org/10.1063/1.1940727	journal	June 2005
Improvement and protection of niobium surface superconductivity by atomic layer deposition and heat treatment Proslier, T.; Zasadzinski, J.; Moore, J. Applied Physics Letters, Vol. 93, Issue 19 https://doi.org/10.1063/1.2995996	journal	November 2008
Properties of NbN thin films deposited on ambient temperature substrates Bacon, D. D.; English, A. T.; Nakahara, S. Journal of Applied Physics, Vol. 54, Issue 11 https://doi.org/10.1063/1.331881	journal	November 1983
High T _c superconducting NbN films deposited at room temperature Thakoor, S.; Lamb, J. L.; Thakoor, A. P. Journal of Applied Physics, Vol. 58, Issue 12 https://doi.org/10.1063/1.336235	journal	December 1985
Superconductive tunneling into NbN deposited near room temperature van Dover, R. B.; Bacon, D. D.; Sinclair, W. Robert Applied Physics Letters, Vol. 41, Issue 8 https://doi.org/10.1063/1.93670	journal	October 1982
Superconducting tunneling study of vanadium Zasadzinski, J.; Burnell, D. M.; Wolf, E. L. Physical Review B, Vol. 25, Issue 3 https://doi.org/10.1103/PhysRevB.25.1622	journal	February 1982
Superconductivity of B1 -MoN films annealed under high pressure Ihara, H.; Hirabayashi, M.; Senzaki, K. Physical Review B, Vol. 32, Issue 3 https://doi.org/10.1103/PhysRevB.32.1816	journal	August 1985
Critical current across grain boundaries in melt-textured YBa 2 Cu 3 O 7 − δ rings Claus, H.; Welp, U.; Zheng, H. Physical Review B, Vol. 64, Issue 14 https://doi.org/10.1103/PhysRevB.64.144507	journal	September 2001
Structural distortion and suppression of superconductivity in stoichiometric B 1 − MoN epitaxial thin films Inumaru, Kei; Baba, Kazuya; Yamanaka, Shoji Physical Review B, Vol. 73, Issue 5 https://doi.org/10.1103/PhysRevB.73.052504	journal	February 2006
Direct Measurement of Quasiparticle-Lifetime Broadening in a Strong-Coupled Superconductor Dynes, R. C.; Narayanamurti, V.; Garno, J. P. Physical Review Letters, Vol. 41, Issue 21 https://doi.org/10.1103/PhysRevLett.41.1509	journal	November 1978
Superconducting transition metal nitride films for THz SIS mixers Iosad, N. N.; Roddatis, V. V.; Polyakov, S. N. IEEE Transactions on Appiled Superconductivity, Vol. 11, Issue 1 https://doi.org/10.1109/77.919900	journal	March 2001

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