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Title: Formation of nickel germanides from Ni layers with thickness below 10 nm

Authors:
; ;  [1] ; ; ; ; ; ; ;
  1. Department of Physics and Astronomy, Uppsala University, SE-75120 Uppsala, Sweden
Publication Date:
Grant/Contract Number:
AC02-98CH10886
Type:
Publisher's Accepted Manuscript
Journal Name:
Journal of Vacuum Science and Technology. B, Nanotechnology and Microelectronics
Additional Journal Information:
Journal Volume: 35; Journal Issue: 2; Related Information: CHORUS Timestamp: 2018-02-14 18:29:44; Journal ID: ISSN 2166-2746
Publisher:
American Vacuum Society
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
OSTI Identifier:
1348865