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Title: Formation of nickel germanides from Ni layers with thickness below 10 nm

Authors:
; ;  [1] ; ; ; ; ; ; ;
  1. Department of Physics and Astronomy, Uppsala University, SE-75120 Uppsala, Sweden
Publication Date:
Grant/Contract Number:
AC02-98CH10886
Type:
Publisher's Accepted Manuscript
Journal Name:
Journal of Vacuum Science and Technology. B, Nanotechnology and Microelectronics
Additional Journal Information:
Journal Name: Journal of Vacuum Science and Technology. B, Nanotechnology and Microelectronics Journal Volume: 35 Journal Issue: 2; Journal ID: ISSN 2166-2746
Publisher:
American Vacuum Society
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
OSTI Identifier:
1348865

Jablonka, Lukas, Kubart, Tomas, Primetzhofer, Daniel, Abedin, Ahmad, Hellström, Per-Erik, Östling, Mikael, Jordan-Sweet, Jean, Lavoie, Christian, Zhang, Shi-Li, and Zhang, Zhen. Formation of nickel germanides from Ni layers with thickness below 10 nm. United States: N. p., Web. doi:10.1116/1.4975152.
Jablonka, Lukas, Kubart, Tomas, Primetzhofer, Daniel, Abedin, Ahmad, Hellström, Per-Erik, Östling, Mikael, Jordan-Sweet, Jean, Lavoie, Christian, Zhang, Shi-Li, & Zhang, Zhen. Formation of nickel germanides from Ni layers with thickness below 10 nm. United States. doi:10.1116/1.4975152.
Jablonka, Lukas, Kubart, Tomas, Primetzhofer, Daniel, Abedin, Ahmad, Hellström, Per-Erik, Östling, Mikael, Jordan-Sweet, Jean, Lavoie, Christian, Zhang, Shi-Li, and Zhang, Zhen. 2017. "Formation of nickel germanides from Ni layers with thickness below 10 nm". United States. doi:10.1116/1.4975152.
@article{osti_1348865,
title = {Formation of nickel germanides from Ni layers with thickness below 10 nm},
author = {Jablonka, Lukas and Kubart, Tomas and Primetzhofer, Daniel and Abedin, Ahmad and Hellström, Per-Erik and Östling, Mikael and Jordan-Sweet, Jean and Lavoie, Christian and Zhang, Shi-Li and Zhang, Zhen},
abstractNote = {},
doi = {10.1116/1.4975152},
journal = {Journal of Vacuum Science and Technology. B, Nanotechnology and Microelectronics},
number = 2,
volume = 35,
place = {United States},
year = {2017},
month = {3}
}