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Title: Cr/B4C multilayer mirrors: Study of interfaces and X-ray reflectance

Here, we present an experimental study of the effect of layer interfaces on the x-ray reflectance in Cr/B4C multilayer interference coatings with layer thicknesses ranging from 0.7 nm to 5.4 nm. The multilayers were deposited by magnetron sputtering and by ion beam sputtering. Grazing incidence x-ray reflectometry, soft x-ray reflectometry, and transmission electron microscopy reveal asymmetric multilayer structures with a larger B4C-on-Cr interface, which we modeled with a 1–1.5 nm thick interfacial layer. Reflectance measurements in the vicinity of the Cr L2,3 absorption edge demonstrate fine structure that is not predicted by simulations using the currently tabulated refractive index (optical constants) values for Cr.
 [1] ;  [2] ;  [3] ;  [1] ;  [4] ;  [4] ;  [4] ;  [4] ;  [1] ;  [1] ;  [1]
  1. Univ. Paris-Saclay, Palaiseau Cedex (France)
  2. Univ. Paris-Saclay, Palaiseau Cedex (France); Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
  3. Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
  4. Synchrotron SOLEIL, Gif sur Yvette Cedex (France)
Publication Date:
Report Number(s):
Journal ID: ISSN 0021-8979; JAPIAU
Grant/Contract Number:
AC52-07NA27344; AC03-76F00098
Accepted Manuscript
Journal Name:
Journal of Applied Physics
Additional Journal Information:
Journal Volume: 119; Journal Issue: 12; Journal ID: ISSN 0021-8979
American Institute of Physics (AIP)
Research Org:
Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
Sponsoring Org:
Country of Publication:
United States
74 ATOMIC AND MOLECULAR PHYSICS; 36 MATERIALS SCIENCE; 71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; multilayers; sputter deposition; transmission electron microscopy; optical constants; computer modeling
OSTI Identifier:
Alternate Identifier(s):
OSTI ID: 1243148