Cr/B4C multilayer mirrors: Study of interfaces and X-ray reflectance
Abstract
We present an experimental study of the effect of layer interfaces on the x-ray reflectance in Cr/B 4 C multilayer interference coatings with layer thicknesses ranging from 0.7 nm to 5.4 nm. The multilayers were deposited by magnetron sputtering and by ion beam sputtering. Grazing incidence x-ray reflectometry, soft x-ray reflectometry, and transmission electron microscopy reveal asymmetric multilayer structures with a larger B 4 C-on-Cr interface, which we modeled with a 1-1.5 nm thick interfacial layer. Reflectance measurements in the vicinity of the Cr L 2,3 absorption edge demonstrate fine structure that is not predicted by simulations using the currently tabulated refractive index (optical constants) values for Cr.
- Authors:
-
- Univ. Paris-Saclay, Palaiseau Cedex (France). Inst. of Optics and Charles Fabry Lab.
- Univ. Paris-Saclay, Palaiseau Cedex (France). Inst. of Optics and Charles Fabry Lab.; Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
- Synchrotron SOLEIL, Gif sur Yvette Cedex (France)
- Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States). Center for X-ray Optics
- Publication Date:
- Research Org.:
- Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States); Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)
- Sponsoring Org.:
- USDOE; French National Research Agency (ANR); EAG Lab., San Diego, CA (United States)
- OSTI Identifier:
- 1260484
- Alternate Identifier(s):
- OSTI ID: 1243148; OSTI ID: 1440923
- Report Number(s):
- LLNL-JRNL-680905
Journal ID: ISSN 0021-8979; JAPIAU
- Grant/Contract Number:
- AC52-07NA27344; ANR-11-EQPX-0029; ANR-10-LABX-0039; AC03-76F00098; AC02-05CH11231
- Resource Type:
- Accepted Manuscript
- Journal Name:
- Journal of Applied Physics
- Additional Journal Information:
- Journal Volume: 119; Journal Issue: 12; Journal ID: ISSN 0021-8979
- Publisher:
- American Institute of Physics (AIP)
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 74 ATOMIC AND MOLECULAR PHYSICS; 36 MATERIALS SCIENCE; 71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; Multilayers; Photons; Transmission electron microscopy; Mirrors; Optical constants; Chemical interdiffusion; Ion beam assisted deposition; Sputter deposition; Computer modeling; Soft X-rays
Citation Formats
Burcklen, C., Soufli, R., Dennetiere, D., Polack, F., Capitanio, B., Gullikson, E., Meltchakov, E., Thomasset, M., Jerome, A., de Rossi, S., and Delmotte, F. Cr/B4C multilayer mirrors: Study of interfaces and X-ray reflectance. United States: N. p., 2016.
Web. doi:10.1063/1.4944723.
Burcklen, C., Soufli, R., Dennetiere, D., Polack, F., Capitanio, B., Gullikson, E., Meltchakov, E., Thomasset, M., Jerome, A., de Rossi, S., & Delmotte, F. Cr/B4C multilayer mirrors: Study of interfaces and X-ray reflectance. United States. https://doi.org/10.1063/1.4944723
Burcklen, C., Soufli, R., Dennetiere, D., Polack, F., Capitanio, B., Gullikson, E., Meltchakov, E., Thomasset, M., Jerome, A., de Rossi, S., and Delmotte, F. Thu .
"Cr/B4C multilayer mirrors: Study of interfaces and X-ray reflectance". United States. https://doi.org/10.1063/1.4944723. https://www.osti.gov/servlets/purl/1260484.
@article{osti_1260484,
title = {Cr/B4C multilayer mirrors: Study of interfaces and X-ray reflectance},
author = {Burcklen, C. and Soufli, R. and Dennetiere, D. and Polack, F. and Capitanio, B. and Gullikson, E. and Meltchakov, E. and Thomasset, M. and Jerome, A. and de Rossi, S. and Delmotte, F.},
abstractNote = {We present an experimental study of the effect of layer interfaces on the x-ray reflectance in Cr/B 4 C multilayer interference coatings with layer thicknesses ranging from 0.7 nm to 5.4 nm. The multilayers were deposited by magnetron sputtering and by ion beam sputtering. Grazing incidence x-ray reflectometry, soft x-ray reflectometry, and transmission electron microscopy reveal asymmetric multilayer structures with a larger B 4 C-on-Cr interface, which we modeled with a 1-1.5 nm thick interfacial layer. Reflectance measurements in the vicinity of the Cr L 2,3 absorption edge demonstrate fine structure that is not predicted by simulations using the currently tabulated refractive index (optical constants) values for Cr.},
doi = {10.1063/1.4944723},
journal = {Journal of Applied Physics},
number = 12,
volume = 119,
place = {United States},
year = {Thu Mar 24 00:00:00 EDT 2016},
month = {Thu Mar 24 00:00:00 EDT 2016}
}
Web of Science
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