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Title: Cr/B4C multilayer mirrors: Study of interfaces and X-ray reflectance

Journal Article · · Journal of Applied Physics
DOI: https://doi.org/10.1063/1.4944723 · OSTI ID:1260484
 [1];  [2];  [3];  [3];  [3];  [4];  [1];  [3];  [1];  [1];  [1]
  1. Univ. Paris-Saclay, Palaiseau Cedex (France). Inst. of Optics and Charles Fabry Lab.
  2. Univ. Paris-Saclay, Palaiseau Cedex (France). Inst. of Optics and Charles Fabry Lab.; Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
  3. Synchrotron SOLEIL, Gif sur Yvette Cedex (France)
  4. Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States). Center for X-ray Optics
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Here, we present an experimental study of the effect of layer interfaces on the x-ray reflectance in Cr/B4C multilayer interference coatings with layer thicknesses ranging from 0.7 nm to 5.4 nm. The multilayers were deposited by magnetron sputtering and by ion beam sputtering. Grazing incidence x-ray reflectometry, soft x-ray reflectometry, and transmission electron microscopy reveal asymmetric multilayer structures with a larger B4C-on-Cr interface, which we modeled with a 1–1.5 nm thick interfacial layer. Reflectance measurements in the vicinity of the Cr L2,3 absorption edge demonstrate fine structure that is not predicted by simulations using the currently tabulated refractive index (optical constants) values for Cr.

Research Organization:
Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States); Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)
Sponsoring Organization:
USDOE; French National Research Agency (ANR)
Grant/Contract Number:
AC52-07NA27344; AC02-05CH11231
OSTI ID:
1260484
Report Number(s):
LLNL--JRNL--680905
Journal Information:
Journal of Applied Physics, Journal Name: Journal of Applied Physics Journal Issue: 12 Vol. 119; ISSN JAPIAU; ISSN 0021-8979
Publisher:
American Institute of Physics (AIP)Copyright Statement
Country of Publication:
United States
Language:
English

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Cited By (5)

Kossel interferences of proton-induced X-ray emission lines in periodic multilayers text January 2016
Optical performance of W/B 4 C multilayer mirror in the soft x-ray region journal March 2018
Soft x-ray optical constants of sputtered chromium thin films with improved accuracy in the L and M absorption edge regions journal July 2018
Grating metrology for X-ray and V-UV synchrotron beamlines at SOLEIL journal February 2019
Soft X-ray spectral analysis of laser produced molybdenum plasmas using the fundamental and second harmonics of a Nd:YAG laser journal January 2019

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Related Subjects

36 MATERIALS SCIENCE
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
74 ATOMIC AND MOLECULAR PHYSICS
Chemical interdiffusion
Computer modeling
Ion beam assisted deposition
Mirrors
Multilayers
Optical constants
Photons
Soft X-rays
Sputter deposition
Transmission electron microscopy