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Title: Cr/B4C multilayer mirrors: Study of interfaces and X-ray reflectance

Abstract

We present an experimental study of the effect of layer interfaces on the x-ray reflectance in Cr/B 4 C multilayer interference coatings with layer thicknesses ranging from 0.7 nm to 5.4 nm. The multilayers were deposited by magnetron sputtering and by ion beam sputtering. Grazing incidence x-ray reflectometry, soft x-ray reflectometry, and transmission electron microscopy reveal asymmetric multilayer structures with a larger B 4 C-on-Cr interface, which we modeled with a 1-1.5 nm thick interfacial layer. Reflectance measurements in the vicinity of the Cr L 2,3 absorption edge demonstrate fine structure that is not predicted by simulations using the currently tabulated refractive index (optical constants) values for Cr.

Authors:
 [1];  [2];  [3];  [3];  [3];  [4];  [1];  [3];  [1];  [1];  [1]
  1. Univ. Paris-Saclay, Palaiseau Cedex (France). Inst. of Optics and Charles Fabry Lab.
  2. Univ. Paris-Saclay, Palaiseau Cedex (France). Inst. of Optics and Charles Fabry Lab.; Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
  3. Synchrotron SOLEIL, Gif sur Yvette Cedex (France)
  4. Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States). Center for X-ray Optics
Publication Date:
Research Org.:
Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States); Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)
Sponsoring Org.:
USDOE; French National Research Agency (ANR); EAG Lab., San Diego, CA (United States)
OSTI Identifier:
1260484
Alternate Identifier(s):
OSTI ID: 1243148; OSTI ID: 1440923
Report Number(s):
LLNL-JRNL-680905
Journal ID: ISSN 0021-8979; JAPIAU
Grant/Contract Number:  
AC52-07NA27344; ANR-11-EQPX-0029; ANR-10-LABX-0039; AC03-76F00098; AC02-05CH11231
Resource Type:
Accepted Manuscript
Journal Name:
Journal of Applied Physics
Additional Journal Information:
Journal Volume: 119; Journal Issue: 12; Journal ID: ISSN 0021-8979
Publisher:
American Institute of Physics (AIP)
Country of Publication:
United States
Language:
English
Subject:
74 ATOMIC AND MOLECULAR PHYSICS; 36 MATERIALS SCIENCE; 71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; Multilayers; Photons; Transmission electron microscopy; Mirrors; Optical constants; Chemical interdiffusion; Ion beam assisted deposition; Sputter deposition; Computer modeling; Soft X-rays

Citation Formats

Burcklen, C., Soufli, R., Dennetiere, D., Polack, F., Capitanio, B., Gullikson, E., Meltchakov, E., Thomasset, M., Jerome, A., de Rossi, S., and Delmotte, F. Cr/B4C multilayer mirrors: Study of interfaces and X-ray reflectance. United States: N. p., 2016. Web. doi:10.1063/1.4944723.
Burcklen, C., Soufli, R., Dennetiere, D., Polack, F., Capitanio, B., Gullikson, E., Meltchakov, E., Thomasset, M., Jerome, A., de Rossi, S., & Delmotte, F. Cr/B4C multilayer mirrors: Study of interfaces and X-ray reflectance. United States. https://doi.org/10.1063/1.4944723
Burcklen, C., Soufli, R., Dennetiere, D., Polack, F., Capitanio, B., Gullikson, E., Meltchakov, E., Thomasset, M., Jerome, A., de Rossi, S., and Delmotte, F. Thu . "Cr/B4C multilayer mirrors: Study of interfaces and X-ray reflectance". United States. https://doi.org/10.1063/1.4944723. https://www.osti.gov/servlets/purl/1260484.
@article{osti_1260484,
title = {Cr/B4C multilayer mirrors: Study of interfaces and X-ray reflectance},
author = {Burcklen, C. and Soufli, R. and Dennetiere, D. and Polack, F. and Capitanio, B. and Gullikson, E. and Meltchakov, E. and Thomasset, M. and Jerome, A. and de Rossi, S. and Delmotte, F.},
abstractNote = {We present an experimental study of the effect of layer interfaces on the x-ray reflectance in Cr/B 4 C multilayer interference coatings with layer thicknesses ranging from 0.7 nm to 5.4 nm. The multilayers were deposited by magnetron sputtering and by ion beam sputtering. Grazing incidence x-ray reflectometry, soft x-ray reflectometry, and transmission electron microscopy reveal asymmetric multilayer structures with a larger B 4 C-on-Cr interface, which we modeled with a 1-1.5 nm thick interfacial layer. Reflectance measurements in the vicinity of the Cr L 2,3 absorption edge demonstrate fine structure that is not predicted by simulations using the currently tabulated refractive index (optical constants) values for Cr.},
doi = {10.1063/1.4944723},
journal = {Journal of Applied Physics},
number = 12,
volume = 119,
place = {United States},
year = {Thu Mar 24 00:00:00 EDT 2016},
month = {Thu Mar 24 00:00:00 EDT 2016}
}

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Works referenced in this record:

Survey of Ti-, B-, and Y-based soft x-ray–extreme ultraviolet multilayer mirrors for the 2- to 12-nm wavelength region
journal, January 1996

  • Montcalm, Claude; Kearney, Patrick A.; Slaughter, J. M.
  • Applied Optics, Vol. 35, Issue 25
  • DOI: 10.1364/AO.35.005134

Thermal stability studies of short period Sc/Cr and Sc/B 4 C/Cr multilayers
journal, January 2014

  • Prasciolu, Mauro; Leontowich, Adam F. G.; Beyerlein, Kenneth R.
  • Applied Optics, Vol. 53, Issue 10
  • DOI: 10.1364/AO.53.002126

Normal-incidence reflectance of optimized W/B_4C x-ray multilayers in the range 14 nm < λ < 24 nm
journal, January 2002

  • Windt, David L.; Gullikson, Eric M.; Walton, Christopher C.
  • Optics Letters, Vol. 27, Issue 24
  • DOI: 10.1364/OL.27.002212

High-resolution, high-flux, user friendly VLS beamline at the ALS for the 50–1300eV energy region
journal, May 1998

  • Underwood, J. H.; Gullikson, E. M.
  • Journal of Electron Spectroscopy and Related Phenomena, Vol. 92, Issue 1-3
  • DOI: 10.1016/S0368-2048(98)00134-0

Development and calibration of mirrors and gratings for the soft x-ray materials science beamline at the Linac Coherent Light Source free-electron laser
journal, January 2012

  • Soufli, Regina; Fernández-Perea, Mónica; Baker, Sherry L.
  • Applied Optics, Vol. 51, Issue 12
  • DOI: 10.1364/AO.51.002118

X-Ray Interactions: Photoabsorption, Scattering, Transmission, and Reflection at E = 50-30,000 eV, Z = 1-92
journal, July 1993

  • Henke, B. L.; Gullikson, E. M.; Davis, J. C.
  • Atomic Data and Nuclear Data Tables, Vol. 54, Issue 2, p. 181-342
  • DOI: 10.1006/adnd.1993.1013

IMD—Software for modeling the optical properties of multilayer films
journal, January 1998


Development of Al-based multilayer optics for EUV
journal, October 2009


Ion beam sputtered aluminum based multilayer mirrors for extreme ultraviolet solar imaging
journal, February 2014


X-ray study of state-of-the-art small d-spacing W/B4C multilayers
journal, October 1991


1-40-keV fixed-exit monochromator for a wafer mapping TXRF facility
conference, December 1998

  • Comin, Fabio; Apostolo, G.; Freund, Andreas K.
  • SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, SPIE Proceedings
  • DOI: 10.1117/12.332505

Recent developments in EUV reflectometry at the Advanced Light Source
conference, August 2001

  • Gullikson, Eric M.; Mrowka, Stanley; Kaufmann, Benjamin B.
  • 26th Annual International Symposium on Microlithography, SPIE Proceedings
  • DOI: 10.1117/12.436712

Optical constants of magnetron-sputtered boron carbide thin films from photoabsorption data in the range 30 to 770 eV
journal, January 2008

  • Soufli, Regina; Aquila, Andrew L.; Salmassi, Farhad
  • Applied Optics, Vol. 47, Issue 25
  • DOI: 10.1364/AO.47.004633

Multilayer optics for XUV spectral region: technology fabrication and applications
journal, January 2003

  • Andreev, S.; Akhsakhalyan, A.; Bibishkin, M.
  • Open Physics, Vol. 1, Issue 1
  • DOI: 10.2478/BF02475561

Technical Report: Metrology and Test Beamline at SOLEIL
journal, August 2006


Ultrathin metal/light material multilayer films: Thermodynamics and microstructure
journal, April 2002


Fabrication, structure and reflectivity of and multilayers for hard X-ray
journal, July 1995


Design and fabrication of X-ray non-periodic multilayer mirrors: Apodization and shaping of their spectral response
journal, July 2012

  • Bridou, F.; Delmotte, F.; Troussel, Ph.
  • Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 680
  • DOI: 10.1016/j.nima.2012.04.002

High-efficiency B_4C/Mo_2C alternate multilayer grating for monochromators in the photon energy range from 07 to 34  keV
journal, January 2014

  • Choueikani, Fadi; Lagarde, Bruno; Delmotte, Franck
  • Optics Letters, Vol. 39, Issue 7
  • DOI: 10.1364/OL.39.002141

Comparative study of carbon and boron carbide spacing layers inside soft x-ray mirrors
conference, January 1991

  • Boher, Pierre; Houdy, Philippe; Kaikati, P.
  • San Diego '90, 8-13 July, SPIE Proceedings
  • DOI: 10.1117/12.23312

Characterization of Mo/B4C multilayers
journal, December 1991


Multilayer mirror for x rays below 190  eV
journal, January 2001

  • Michaelsen, C.; Wiesmann, J.; Bormann, R.
  • Optics Letters, Vol. 26, Issue 11
  • DOI: 10.1364/OL.26.000792

Si/B_4C narrow-bandpass mirrors for the extreme ultraviolet
journal, January 1994

  • Slaughter, J. M.; Watts, R. N.; Falco, Charles M.
  • Optics Letters, Vol. 19, Issue 21
  • DOI: 10.1364/OL.19.001786

Status of small d-spacing x-ray multilayers development at Osmic
conference, December 2002

  • Platonov, Yuriy Y.; Gomez, Luis; Broadway, David
  • International Symposium on Optical Science and Technology, SPIE Proceedings
  • DOI: 10.1117/12.451345

Spectral properties of La/B - based multilayer mirrors near the boron K absorption edge
journal, January 2012

  • Makhotkin, Igor A.; Zoethout, Erwin; Louis, Eric
  • Optics Express, Vol. 20, Issue 11
  • DOI: 10.1364/OE.20.011778

Normal-incidence x-ray mirror for 7 nm
journal, January 1991

  • Stearns, D. G.; Vernon, S. P.; Rosen, R. S.
  • Optics Letters, Vol. 16, Issue 16
  • DOI: 10.1364/OL.16.001283

High performance La/B 4 C multilayer mirrors with barrier layers for the next generation lithography
journal, January 2013

  • Chkhalo, N. I.; Künstner, S.; Polkovnikov, V. N.
  • Applied Physics Letters, Vol. 102, Issue 1
  • DOI: 10.1063/1.4774298

Study of normal incidence of three-component multilayer mirrors in the range 20–40 nm
journal, January 2005

  • Gautier, Julien; Delmotte, Franck; Roulliay, Marc
  • Applied Optics, Vol. 44, Issue 3
  • DOI: 10.1364/AO.44.000384

Multilayer x-ray optics for energies E > 8 keV and their application in x-ray analysis
conference, November 2000

  • Dietsch, Reiner; Braun, Stefan; Holz, Thomas
  • International Symposium on Optical Science and Technology, SPIE Proceedings
  • DOI: 10.1117/12.405887

Works referencing / citing this record:

Grating metrology for X-ray and V-UV synchrotron beamlines at SOLEIL
journal, February 2019

  • Thomasset, M.; Dvorak, J.; Brochet, S.
  • Review of Scientific Instruments, Vol. 90, Issue 2
  • DOI: 10.1063/1.5055284

Soft x-ray optical constants of sputtered chromium thin films with improved accuracy in the L and M absorption edge regions
journal, July 2018

  • Delmotte, Franck; Meyer-Ilse, Julia; Salmassi, Farhad
  • Journal of Applied Physics, Vol. 124, Issue 3
  • DOI: 10.1063/1.5027488

Kossel interferences of proton-induced X-ray emission lines in periodic multilayers
text, January 2016


Soft X-ray spectral analysis of laser produced molybdenum plasmas using the fundamental and second harmonics of a Nd:YAG laser
journal, January 2019

  • Lokasani, Ragava; Kawasaki, Hiromu; Shimada, Yuta
  • Optics Express, Vol. 27, Issue 23
  • DOI: 10.1364/oe.27.033351

Optical performance of W/B 4 C multilayer mirror in the soft x-ray region
journal, March 2018

  • Pradhan, P. C.; Majhi, A.; Nayak, M.
  • Journal of Applied Physics, Vol. 123, Issue 9
  • DOI: 10.1063/1.5018266