Search Menu
DOE PAGES title logo U.S. Department of Energy
Office of Scientific and Technical Information
Search Scholarly Publications

Title: Quantitative phase retrieval with arbitrary pupil and illumination

Journal Article · · Optics Express
 [1];  [2];  [1];  [1]
  1. Univ. of California, Berkeley, CA (United States)
  2. Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
+ Show Author Affiliations

We present a general algorithm for combining measurements taken under various illumination and imaging conditions to quantitatively extract the amplitude and phase of an object wave. The algorithm uses the weak object transfer function, which incorporates arbitrary pupil functions and partially coherent illumination. The approach is extended beyond the weak object regime using an iterative algorithm. Finally, we demonstrate the method on measurements of Extreme Ultraviolet Lithography (EUV) multilayer mask defects taken in an EUV zone plate microscope with both a standard zone plate lens and a zone plate implementing Zernike phase contrast.

Research Organization:
Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)
Sponsoring Organization:
USDOE Office of Science (SC); USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22). Materials Sciences & Engineering Division
Grant/Contract Number:
AC02-05CH11231
OSTI ID:
1253994
Alternate ID(s):
OSTI ID: 1466689
Journal Information:
Optics Express, Vol. 23, Issue 20; ISSN 1094-4087
Publisher:
Optical Society of America (OSA)Copyright Statement
Country of Publication:
United States
Language:
English
Citation Metrics:
Cited by: 18 works
Citation information provided by
Web of Science

References (27)

Printability of native blank defects and programmed defects and their stack structures conference October 2011
Repair of natural EUV reticle defects conference October 2011
Challenging defect repair techniques for maximizing mask repair yield conference October 2009
Deterministic phase retrieval: a Green’s function solution journal January 1983
Phase retrieval algorithms: a comparison journal January 1982
Spatial light interference microscopy (SLIM) journal January 2011
Phase retrieval by means of a spatial light modulator in the Fourier domain of an imaging system journal January 2010
Differential phase contrast in scanning optical microscopy journal January 1984
Wide-field, high-resolution Fourier ptychographic microscopy journal July 2013
Quantitative differential phase contrast imaging in an LED array microscope journal January 2015
Phase from chromatic aberrations journal January 2010
Iterative blind deconvolution algorithm applied to phase retrieval journal January 1990
Joint estimation of object and aberrations by using phase diversity journal January 1992
Diversity selection for phase-diverse phase retrieval journal January 2003
Phase and amplitude imaging from noisy images by Kalman filtering journal January 2011
The transport of intensity equation for optical path length recovery using partially coherent illumination journal January 2013
Spatial incoherence in phase retrieval based on focus variation journal August 2006
Holotomography: Quantitative phase tomography with micrometer resolution using hard synchrotron radiation x rays journal November 1999
Defocused transfer function for a partially coherent microscope and application to phase retrieval journal January 2004
Mixed transfer function and transport of intensity approach for phase retrieval in the Fresnel region journal January 2007
Optical phase retrieval by use of first Born- and Rytov-type approximations journal January 2004
Quantitative phase restoration by direct inversion using the optical transfer function journal January 2011
Recovering effective amplitude and phase roughness of EUV masks conference September 2013
Commissioning an EUV mask microscope for lithography generations reaching 8 nm conference April 2013
Single-element objective lens for soft x-ray differential interference contrast microscopy journal January 2006
Phase contrast, a new method for the microscopic observation of transparent objects journal July 1942
Phase-enhanced defect sensitivity for EUV mask inspection conference October 2014

Cited By (7)

Isotropic differential phase contrast microscopy for quantitative phase bio-imaging journal May 2018
3D differential phase contrast microscopy journal January 2016
Motion-resolved quantitative phase imaging journal January 2018
Quantitative phase imaging and complex field reconstruction by pupil modulation differential phase contrast journal January 2016
Single-exposure quantitative phase imaging in color-coded LED microscopy journal January 2017
Quantitative differential phase contrast (DPC) microscopy with computational aberration correction journal January 2018
Single-shot quantitative phase microscopy with color-multiplexed differential phase contrast (cDPC) journal February 2017

Similar Records

Related Subjects

97 MATHEMATICS AND COMPUTING
computational imaging
phase retrieval
Im-age reconstruction techniques