Quantitative phase retrieval with arbitrary pupil and illumination

Journal Article · Fri Oct 02 04:00:00 UTC 2015 · Optics Express

DOI: https://doi.org/10.1364/OE.23.026672 · OSTI ID:1253994

Claus, Rene A. ^[1]; Naulleau, Patrick P. ^[2]; Neureuther, Andrew R. ^[1]; Waller, Laura ^[1]

---

1. Univ. of California, Berkeley, CA (United States)
2. Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)

We present a general algorithm for combining measurements taken under various illumination and imaging conditions to quantitatively extract the amplitude and phase of an object wave. The algorithm uses the weak object transfer function, which incorporates arbitrary pupil functions and partially coherent illumination. The approach is extended beyond the weak object regime using an iterative algorithm. Finally, we demonstrate the method on measurements of Extreme Ultraviolet Lithography (EUV) multilayer mask defects taken in an EUV zone plate microscope with both a standard zone plate lens and a zone plate implementing Zernike phase contrast.

• Research Organization: Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)
• Sponsoring Organization: USDOE Office of Science (SC)
• Grant/Contract Number: AC02-05CH11231
• OSTI ID: 1253994
• Journal Information: Optics Express, Journal Name: Optics Express Journal Issue: 20 Vol. 23; ISSN 1094-4087; ISSN OPEXFF
• Publisher: Optical Society of America (OSA)Copyright Statement
• Country of Publication: United States
• Language: English