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Title: Quantitative phase retrieval with arbitrary pupil and illumination

Abstract

We present a general algorithm for combining measurements taken under various illumination and imaging conditions to quantitatively extract the amplitude and phase of an object wave. The algorithm uses the weak object transfer function, which incorporates arbitrary pupil functions and partially coherent illumination. The approach is extended beyond the weak object regime using an iterative algorithm. Finally, we demonstrate the method on measurements of Extreme Ultraviolet Lithography (EUV) multilayer mask defects taken in an EUV zone plate microscope with both a standard zone plate lens and a zone plate implementing Zernike phase contrast.

Authors:
 [1];  [2];  [1];  [1]
  1. Univ. of California, Berkeley, CA (United States)
  2. Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
Publication Date:
Research Org.:
Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
Sponsoring Org.:
USDOE Office of Science (SC); USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22). Materials Sciences & Engineering Division
OSTI Identifier:
1253994
Alternate Identifier(s):
OSTI ID: 1466689
Grant/Contract Number:  
AC02-05CH11231
Resource Type:
Accepted Manuscript
Journal Name:
Optics Express
Additional Journal Information:
Journal Volume: 23; Journal Issue: 20; Journal ID: ISSN 1094-4087
Publisher:
Optical Society of America (OSA)
Country of Publication:
United States
Language:
English
Subject:
97 MATHEMATICS AND COMPUTING; computational imaging; phase retrieval; Im-age reconstruction techniques

Citation Formats

Claus, Rene A., Naulleau, Patrick P., Neureuther, Andrew R., and Waller, Laura. Quantitative phase retrieval with arbitrary pupil and illumination. United States: N. p., 2015. Web. doi:10.1364/OE.23.026672.
Claus, Rene A., Naulleau, Patrick P., Neureuther, Andrew R., & Waller, Laura. Quantitative phase retrieval with arbitrary pupil and illumination. United States. doi:10.1364/OE.23.026672.
Claus, Rene A., Naulleau, Patrick P., Neureuther, Andrew R., and Waller, Laura. Fri . "Quantitative phase retrieval with arbitrary pupil and illumination". United States. doi:10.1364/OE.23.026672. https://www.osti.gov/servlets/purl/1253994.
@article{osti_1253994,
title = {Quantitative phase retrieval with arbitrary pupil and illumination},
author = {Claus, Rene A. and Naulleau, Patrick P. and Neureuther, Andrew R. and Waller, Laura},
abstractNote = {We present a general algorithm for combining measurements taken under various illumination and imaging conditions to quantitatively extract the amplitude and phase of an object wave. The algorithm uses the weak object transfer function, which incorporates arbitrary pupil functions and partially coherent illumination. The approach is extended beyond the weak object regime using an iterative algorithm. Finally, we demonstrate the method on measurements of Extreme Ultraviolet Lithography (EUV) multilayer mask defects taken in an EUV zone plate microscope with both a standard zone plate lens and a zone plate implementing Zernike phase contrast.},
doi = {10.1364/OE.23.026672},
journal = {Optics Express},
number = 20,
volume = 23,
place = {United States},
year = {2015},
month = {10}
}

Journal Article:
Free Publicly Available Full Text
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Cited by: 8 works
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Works referenced in this record:

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    Works referencing / citing this record:

    Quantitative differential phase contrast (DPC) microscopy with computational aberration correction
    journal, January 2018

    • Chen, Michael; Phillips, Zachary F.; Waller, Laura
    • Optics Express, Vol. 26, Issue 25
    • DOI: 10.1364/oe.26.032888