Nanoscale temperature mapping in operating microelectronic devices

Mecklenburg, Matthew; Hubbard, William A.; White, E. R.; Dhall, Rohan; Cronin, Stephen B.; Aloni, Shaul; Regan, B. C.

doi:10.1126/science.aaa2433

Title: Nanoscale temperature mapping in operating microelectronic devices

Journal Article · Thu Feb 05 04:00:00 UTC 2015 · Science

DOI: https://doi.org/10.1126/science.aaa2433 · OSTI ID:1253993

Mecklenburg, Matthew ^[1]; Hubbard, William A. ^[2]; White, E. R. ^[2]; Dhall, Rohan ^[3]; Cronin, Stephen B. ^[3]; Aloni, Shaul ^[4]; Regan, B. C. ^[2]

Univ. of Southern California, Los Angeles, CA (United States). Center for Electron Microscopy and Microanalysis
Univ. of California, Los Angeles, CA (United States)
Univ. of Southern California, Los Angeles, CA (United States). Dept. of Electrical Engineering
Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)

We report that modern microelectronic devices have nanoscale features that dissipate power nonuniformly, but fundamental physical limits frustrate efforts to detect the resulting temperature gradients. Contact thermometers disturb the temperature of a small system, while radiation thermometers struggle to beat the diffraction limit. Exploiting the same physics as Fahrenheit’s glass-bulb thermometer, we mapped the thermal expansion of Joule-heated, 80-nanometer-thick aluminum wires by precisely measuring changes in density. With a scanning transmission electron microscope (STEM) and electron energy loss spectroscopy (EELS), we quantified the local density via the energy of aluminum’s bulk plasmon. Rescaling density to temperature yields maps with a statistical precision of 3 kelvin/hertz^₋1/2, an accuracy of 10%, and nanometer-scale resolution. Lastly, many common metals and semiconductors have sufficiently sharp plasmon resonances to serve as their own thermometers.

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Research Organization:: Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22)

Grant/Contract Number:: AC02-05CH11231

OSTI ID:: 1253993

Journal Information:: Science, Journal Name: Science Journal Issue: 6222 Vol. 347; ISSN 0036-8075

Publisher:: AAASCopyright Statement

Country of Publication:: United States

Language:: English

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