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Title: Size effects on the thermal conductivity of amorphous silicon thin films

Abstract

In this study, we investigate thickness-limited size effects on the thermal conductivity of amorphous silicon thin films ranging from 3 to 1636 nm grown via sputter deposition. While exhibiting a constant value up to ~100 nm, the thermal conductivity increases with film thickness thereafter. The thickness dependence we demonstrate is ascribed to boundary scattering of long wavelength vibrations and an interplay between the energy transfer associated with propagating modes (propagons) and nonpropagating modes (diffusons). A crossover from propagon to diffuson modes is deduced to occur at a frequency of ~1.8 THz via simple analytical arguments. These results provide empirical evidence of size effects on the thermal conductivity of amorphous silicon and systematic experimental insight into the nature of vibrational thermal transport in amorphous solids.

Authors:
;  [1];  [1];  [2];  [2];  [1];  [2];  [1];  [1];  [1]
  1. Univ. of Virginia, Charlottesville, VA (United States)
  2. Univ. of New Mexico, Albuquerque, NM (United States)
Publication Date:
Research Org.:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Org.:
USDOE National Nuclear Security Administration (NNSA)
OSTI Identifier:
1251626
Alternate Identifier(s):
OSTI ID: 1245039
Report Number(s):
SAND-2015-6735J
Journal ID: ISSN 2469-9950; PRBMDO; 598864
Grant/Contract Number:  
AC04-94AL85000
Resource Type:
Accepted Manuscript
Journal Name:
Physical Review B
Additional Journal Information:
Journal Volume: 93; Journal Issue: 14; Journal ID: ISSN 2469-9950
Publisher:
American Physical Society (APS)
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE

Citation Formats

Thomas Edwin Beechem, Braun, Jeffrey L., Baker, Christopher H., Elahi, Miraz, Artyushkova, Kateryna, Norris, Pamela M., Leseman, Zayd Chad, Gaskins, John T., Hopkins, Patrick E., and Giri, Ashutosh. Size effects on the thermal conductivity of amorphous silicon thin films. United States: N. p., 2016. Web. doi:10.1103/PhysRevB.93.140201.
Thomas Edwin Beechem, Braun, Jeffrey L., Baker, Christopher H., Elahi, Miraz, Artyushkova, Kateryna, Norris, Pamela M., Leseman, Zayd Chad, Gaskins, John T., Hopkins, Patrick E., & Giri, Ashutosh. Size effects on the thermal conductivity of amorphous silicon thin films. United States. https://doi.org/10.1103/PhysRevB.93.140201
Thomas Edwin Beechem, Braun, Jeffrey L., Baker, Christopher H., Elahi, Miraz, Artyushkova, Kateryna, Norris, Pamela M., Leseman, Zayd Chad, Gaskins, John T., Hopkins, Patrick E., and Giri, Ashutosh. Fri . "Size effects on the thermal conductivity of amorphous silicon thin films". United States. https://doi.org/10.1103/PhysRevB.93.140201. https://www.osti.gov/servlets/purl/1251626.
@article{osti_1251626,
title = {Size effects on the thermal conductivity of amorphous silicon thin films},
author = {Thomas Edwin Beechem and Braun, Jeffrey L. and Baker, Christopher H. and Elahi, Miraz and Artyushkova, Kateryna and Norris, Pamela M. and Leseman, Zayd Chad and Gaskins, John T. and Hopkins, Patrick E. and Giri, Ashutosh},
abstractNote = {In this study, we investigate thickness-limited size effects on the thermal conductivity of amorphous silicon thin films ranging from 3 to 1636 nm grown via sputter deposition. While exhibiting a constant value up to ~100 nm, the thermal conductivity increases with film thickness thereafter. The thickness dependence we demonstrate is ascribed to boundary scattering of long wavelength vibrations and an interplay between the energy transfer associated with propagating modes (propagons) and nonpropagating modes (diffusons). A crossover from propagon to diffuson modes is deduced to occur at a frequency of ~1.8 THz via simple analytical arguments. These results provide empirical evidence of size effects on the thermal conductivity of amorphous silicon and systematic experimental insight into the nature of vibrational thermal transport in amorphous solids.},
doi = {10.1103/PhysRevB.93.140201},
journal = {Physical Review B},
number = 14,
volume = 93,
place = {United States},
year = {Fri Apr 01 00:00:00 EDT 2016},
month = {Fri Apr 01 00:00:00 EDT 2016}
}

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Cited by: 85 works
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Works referenced in this record:

From the Casimir Limit to Phononic Crystals: 20 Years of Phonon Transport Studies Using Silicon-on-Insulator Technology
journal, May 2013

  • Marconnet, Amy M.; Asheghi, Mehdi; Goodson, Kenneth E.
  • Journal of Heat Transfer, Vol. 135, Issue 6
  • DOI: 10.1115/1.4023577

Thermal conductivity of individual silicon nanowires
journal, October 2003

  • Li, Deyu; Wu, Yiying; Kim, Philip
  • Applied Physics Letters, Vol. 83, Issue 14, p. 2934-2936
  • DOI: 10.1063/1.1616981

Length Dependent Thermal Conductivity Measurements Yield Phonon Mean Free Path Spectra in Nanostructures
journal, March 2015

  • Zhang, Hang; Hua, Chengyun; Ding, Ding
  • Scientific Reports, Vol. 5, Issue 1
  • DOI: 10.1038/srep09121

Diffusons, locons and propagons: Character of atomie yibrations in amorphous Si
journal, November 1999

  • Allen, Philip B.; Feldman, Joseph L.; Fabian, Jaroslav
  • Philosophical Magazine B, Vol. 79, Issue 11-12
  • DOI: 10.1080/13642819908223054

Thermal conductivity accumulation in amorphous silica and amorphous silicon
journal, April 2014


Numerical study of low-frequency vibrations in amorphous silicon
journal, February 1999

  • Feldman, Joseph L.; Allen, Philip B.; Bickham, Scott R.
  • Physical Review B, Vol. 59, Issue 5
  • DOI: 10.1103/PhysRevB.59.3551

Heat transport by long mean free path vibrations in amorphous silicon nitride near room temperature
journal, June 2013


Experimental Investigation of Size Effects on the Thermal Conductivity of Silicon-Germanium Alloy Thin Films
journal, November 2012


Frequency dependence of the thermal conductivity of semiconductor alloys
journal, August 2007


Predicting the thermal conductivity of inorganic and polymeric glasses: The role of anharmonicity
journal, February 2009

  • Shenogin, Sergei; Bodapati, Arun; Keblinski, Pawel
  • Journal of Applied Physics, Vol. 105, Issue 3
  • DOI: 10.1063/1.3073954

Advances in Studying Phonon Mean Free Path Dependent Contributions to Thermal Conductivity
journal, May 2015

  • Regner, Keith T.; Freedman, Justin P.; Malen, Jonathan A.
  • Nanoscale and Microscale Thermophysical Engineering, Vol. 19, Issue 3
  • DOI: 10.1080/15567265.2015.1045640

Analysis of heat flow in layered structures for time-domain thermoreflectance
journal, December 2004

  • Cahill, David G.
  • Review of Scientific Instruments, Vol. 75, Issue 12
  • DOI: 10.1063/1.1819431

Broadband phonon mean free path contributions to thermal conductivity measured using frequency domain thermoreflectance
journal, March 2013

  • Regner, Keith T.; Sellan, Daniel P.; Su, Zonghui
  • Nature Communications, Vol. 4, Issue 1
  • DOI: 10.1038/ncomms2630

High Thermal Conductivity of a Hydrogenated Amorphous Silicon Film
journal, January 2009


Thermal conductance of metal–diamond interfaces at high pressure
journal, March 2015

  • Hohensee, Gregory T.; Wilson, R. B.; Cahill, David G.
  • Nature Communications, Vol. 6, Issue 1
  • DOI: 10.1038/ncomms7578

Interpretation of thermoreflectance measurements with a two-temperature model including non-surface heat deposition
journal, December 2015

  • Regner, K. T.; Wei, L. C.; Malen, J. A.
  • Journal of Applied Physics, Vol. 118, Issue 23
  • DOI: 10.1063/1.4937995

Nonlocal theory for heat transport at high frequencies
journal, November 2014


Thermal conductivity and interface thermal resistance of Si film on Si substrate determined by photothermal displacement interferometry
journal, September 1992

  • Kuo, B. S. W.; Li, J. C. M.; Schmid, A. W.
  • Applied Physics A Solids and Surfaces, Vol. 55, Issue 3
  • DOI: 10.1007/BF00348399

Thermal conductivity of a -Si:H thin films
journal, September 1994


Thermal Conductivity of Amorphous Silicon
journal, May 1996

  • Wada, Hiroshi; Kamijoh, Takeshi
  • Japanese Journal of Applied Physics, Vol. 35, Issue Part 2, No. 5B
  • DOI: 10.1143/JJAP.35.L648

Thermal conductivity of amorphous silicon thin films
journal, June 2002

  • Moon, Seungjae; Hatano, Mutsuko; Lee, Minghong
  • International Journal of Heat and Mass Transfer, Vol. 45, Issue 12
  • DOI: 10.1016/S0017-9310(01)00347-7

Thermal Conductivity and Specific Heat of Thin-Film Amorphous Silicon
journal, February 2006


Anomalously high thermal conductivity of amorphous Si deposited by hot-wire chemical vapor deposition
journal, March 2010


Heat transport in amorphous silicon: Interplay between morphology and disorder
journal, April 2011

  • He, Yuping; Donadio, Davide; Galli, Giulia
  • Applied Physics Letters, Vol. 98, Issue 14
  • DOI: 10.1063/1.3574366

Lower limit to the thermal conductivity of disordered crystals
journal, September 1992

  • Cahill, David G.; Watson, S. K.; Pohl, R. O.
  • Physical Review B, Vol. 46, Issue 10, p. 6131-6140
  • DOI: 10.1103/PhysRevB.46.6131

Coherent Phonon Generation and Detection by Picosecond Light Pulses
journal, September 1984


Surface generation and detection of phonons by picosecond light pulses
journal, September 1986


Pump-Probe Thermoreflectance
journal, January 2013


Criteria for Cross-Plane Dominated Thermal Transport in Multilayer Thin Film Systems During Modulated Laser Heating
journal, May 2010

  • Hopkins, Patrick E.; Serrano, Justin R.; Phinney, Leslie M.
  • Journal of Heat Transfer, Vol. 132, Issue 8
  • DOI: 10.1115/1.4000993

Thermal conductivity measurements via time-domain thermoreflectance for the characterization of radiation induced damage
journal, May 2015

  • Cheaito, Ramez; Gorham, Caroline S.; Misra, Amit
  • Journal of Materials Research, Vol. 30, Issue 9
  • DOI: 10.1557/jmr.2015.11

Heat transport in thin dielectric films
journal, March 1997

  • Lee, S. -M.; Cahill, David G.
  • Journal of Applied Physics, Vol. 81, Issue 6
  • DOI: 10.1063/1.363923

Measurement of thermal conductivity of silicon dioxide thin films using a 3ω method
journal, January 2002

  • Yamane, Tsuneyuki; Nagai, Naoto; Katayama, Shin-ichiro
  • Journal of Applied Physics, Vol. 91, Issue 12
  • DOI: 10.1063/1.1481958

Role of Low-Energy Phonons in Thermal Conduction
journal, August 1954


Model for Lattice Thermal Conductivity at Low Temperatures
journal, February 1959


Analysis of Lattice Thermal Conductivity
journal, December 1963


Thermal Conductivity and Phonon Scattering by Magnetic Impurities in CdTe
journal, January 1964


Size-dependent model for thin film and nanowire thermal conductivity
journal, September 2011

  • McGaughey, Alan J. H.; Landry, Eric S.; Sellan, Daniel P.
  • Applied Physics Letters, Vol. 99, Issue 13
  • DOI: 10.1063/1.3644163

Works referencing / citing this record:

Thermal Conductivity of Amorphous Materials
journal, August 2019

  • Zhou, Wu‐Xing; Cheng, Yuan; Chen, Ke‐Qiu
  • Advanced Functional Materials, Vol. 30, Issue 8
  • DOI: 10.1002/adfm.201903829

Interfacial Defect Vibrations Enhance Thermal Transport in Amorphous Multilayers with Ultrahigh Thermal Boundary Conductance
journal, September 2018

  • Giri, Ashutosh; King, Sean W.; Lanford, William A.
  • Advanced Materials, Vol. 30, Issue 44
  • DOI: 10.1002/adma.201804097

Long-distance spin transport in a disordered magnetic insulator
journal, July 2017

  • Wesenberg, Devin; Liu, Tao; Balzar, Davor
  • Nature Physics, Vol. 13, Issue 10
  • DOI: 10.1038/nphys4175

Probing thermal transport across amorphous region embedded in a single crystalline silicon nanowire
journal, January 2020


The influence of titanium adhesion layer oxygen stoichiometry on thermal boundary conductance at gold contacts
journal, April 2018

  • Olson, David H.; Freedy, Keren M.; McDonnell, Stephen J.
  • Applied Physics Letters, Vol. 112, Issue 17
  • DOI: 10.1063/1.5022371

Electron-beam enhanced creep deformation of amorphous silicon nano-cantilever
journal, September 2019

  • Hirakata, Hiroyuki; Konishi, Kenta; Kondo, Toshiyuki
  • Journal of Applied Physics, Vol. 126, Issue 10
  • DOI: 10.1063/1.5116663

Spatially resolved thermoreflectance techniques for thermal conductivity measurements from the nanoscale to the mesoscale
journal, October 2019

  • Olson, David H.; Braun, Jeffrey L.; Hopkins, Patrick E.
  • Journal of Applied Physics, Vol. 126, Issue 15
  • DOI: 10.1063/1.5120310

Effects of medium range order on propagon thermal conductivity in amorphous silicon
journal, January 2020

  • Hashemi, Amirreza; Babaei, Hasan; Lee, Sangyeop
  • Journal of Applied Physics, Vol. 127, Issue 4
  • DOI: 10.1063/1.5124821

Thermal properties of carbon nitride toward use as an electrode in phase change memory devices
journal, January 2020

  • Aryana, K.; Gaskins, J. T.; Nag, J.
  • Applied Physics Letters, Vol. 116, Issue 4
  • DOI: 10.1063/1.5134075

Thermal Transport in Disordered Materials
journal, November 2018

  • DeAngelis, Freddy; Muraleedharan, Murali Gopal; Moon, Jaeyun
  • Nanoscale and Microscale Thermophysical Engineering, Vol. 23, Issue 2
  • DOI: 10.1080/15567265.2018.1519004

Localization of vibrational modes leads to reduced thermal conductivity of amorphous heterostructures
journal, May 2018


Diffuson-driven ultralow thermal conductivity in amorphous N b 2 O 5 thin films
journal, February 2019


Boron anomaly in the thermal conductivity of lithium borate glasses
journal, July 2019


On the Steady-State Temperature Rise During Laser Heating of Multilayer Thin Films in Optical Pump–Probe Techniques
journal, February 2018

  • Braun, Jeffrey L.; Szwejkowski, Chester J.; Giri, Ashutosh
  • Journal of Heat Transfer, Vol. 140, Issue 5
  • DOI: 10.1115/1.4038713

Propagating elastic vibrations dominate thermal conduction in amorphous silicon
text, January 2017