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Title: Nanometer resolution optical coherence tomography using broad bandwidth XUV and soft x-ray radiation

Abstract

Optical coherence tomography (OCT) is a non-invasive technique for cross-sectional imaging. It is particularly advantageous for applications where conventional microscopy is not able to image deeper layers of samples in a reasonable time, e.g. in fast moving, deeper lying structures. However, at infrared and optical wavelengths, which are commonly used, the axial resolution of OCT is limited to about 1 μm, even if the bandwidth of the light covers a wide spectral range. Here, we present extreme ultraviolet coherence tomography (XCT) and thus introduce a new technique for non-invasive cross-sectional imaging of nanometer structures. XCT exploits the nanometerscale coherence lengths corresponding to the spectral transmission windows of, e.g., silicon samples. The axial resolution of coherence tomography is thus improved from micrometers to a few nanometers. Tomographic imaging with an axial resolution better than 18 nm is demonstrated for layer-type nanostructures buried in a silicon substrate. Using wavelengths in the water transmission window, nanometer-scale layers of platinum are retrieved with a resolution better than 8 nm. As a result, XCT as a nondestructive method for sub-surface tomographic imaging holds promise for several applications in semiconductor metrology and imaging in the water window.

Authors:
 [1];  [2];  [3];  [3];  [1];  [3];  [4];  [4];  [5];  [6];  [1];  [1]
+ Show Author Affiliations
  1. Friedrich-Schiller-Univ. Jena, Jena (Germany); Helmholtz-Institute Jena, Jena (Germany)
  2. Friedrich-Schiller-Univ. Jena, Jena (Germany); SLAC National Accelerator Lab., Menlo Park, CA (United States)
  3. Friedrich-Schiller-Univ. Jena, Jena (Germany)
  4. Deutsches Elektronen-Synchrotron (DESY), Hamburg (Germany)
  5. National Research Council of Canada, Ottawa, ON (Canada); Ben-Gurion Univ., Beer-Sheva (Israel)
  6. National Research Council of Canada, Ottawa, ON (Canada)
Publication Date:
Research Org.:
SLAC National Accelerator Lab., Menlo Park, CA (United States)
Sponsoring Org.:
USDOE Office of Science (SC)
OSTI Identifier:
1240088
Grant/Contract Number:  
AC03-76SF00515
Resource Type:
Accepted Manuscript
Journal Name:
Scientific Reports
Additional Journal Information:
Journal Volume: 6; Journal ID: ISSN 2045-2322
Publisher:
Nature Publishing Group
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; imaging and sensing; microscopy; X-rays

Citation Formats

Fuchs, Silvio, Rödel, Christian, Blinne, Alexander, Zastrau, Ulf, Wünsche, Martin, Hilbert, Vinzenz, Glaser, Leif, Viefhaus, Jens, Frumker, Eugene, Corkum, Paul, Förster, Eckhart, and Paulus, Gerhard G. Nanometer resolution optical coherence tomography using broad bandwidth XUV and soft x-ray radiation. United States: N. p., 2016. Web. doi:10.1038/srep20658.
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Fuchs, Silvio, Rödel, Christian, Blinne, Alexander, Zastrau, Ulf, Wünsche, Martin, Hilbert, Vinzenz, Glaser, Leif, Viefhaus, Jens, Frumker, Eugene, Corkum, Paul, Förster, Eckhart, & Paulus, Gerhard G. Nanometer resolution optical coherence tomography using broad bandwidth XUV and soft x-ray radiation. United States. doi:10.1038/srep20658.
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Fuchs, Silvio, Rödel, Christian, Blinne, Alexander, Zastrau, Ulf, Wünsche, Martin, Hilbert, Vinzenz, Glaser, Leif, Viefhaus, Jens, Frumker, Eugene, Corkum, Paul, Förster, Eckhart, and Paulus, Gerhard G. Wed . "Nanometer resolution optical coherence tomography using broad bandwidth XUV and soft x-ray radiation". United States. doi:10.1038/srep20658. https://www.osti.gov/servlets/purl/1240088.
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@article{osti_1240088,
title = {Nanometer resolution optical coherence tomography using broad bandwidth XUV and soft x-ray radiation},
author = {Fuchs, Silvio and Rödel, Christian and Blinne, Alexander and Zastrau, Ulf and Wünsche, Martin and Hilbert, Vinzenz and Glaser, Leif and Viefhaus, Jens and Frumker, Eugene and Corkum, Paul and Förster, Eckhart and Paulus, Gerhard G.},
abstractNote = {Optical coherence tomography (OCT) is a non-invasive technique for cross-sectional imaging. It is particularly advantageous for applications where conventional microscopy is not able to image deeper layers of samples in a reasonable time, e.g. in fast moving, deeper lying structures. However, at infrared and optical wavelengths, which are commonly used, the axial resolution of OCT is limited to about 1 μm, even if the bandwidth of the light covers a wide spectral range. Here, we present extreme ultraviolet coherence tomography (XCT) and thus introduce a new technique for non-invasive cross-sectional imaging of nanometer structures. XCT exploits the nanometerscale coherence lengths corresponding to the spectral transmission windows of, e.g., silicon samples. The axial resolution of coherence tomography is thus improved from micrometers to a few nanometers. Tomographic imaging with an axial resolution better than 18 nm is demonstrated for layer-type nanostructures buried in a silicon substrate. Using wavelengths in the water transmission window, nanometer-scale layers of platinum are retrieved with a resolution better than 8 nm. As a result, XCT as a nondestructive method for sub-surface tomographic imaging holds promise for several applications in semiconductor metrology and imaging in the water window.},
doi = {10.1038/srep20658},
journal = {Scientific Reports},
number = ,
volume = 6,
place = {United States},
year = {2016},
month = {2}
}
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DOI:  10.1038/srep20658
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    Works referencing / citing this record:

    A high resolution extreme ultraviolet spectrometer system optimized for harmonic spectroscopy and XUV beam analysis
    journal, February 2019

    • Wünsche, Martin; Fuchs, Silvio; Weber, Thomas
    • Review of Scientific Instruments, Vol. 90, Issue 2
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