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Title: Nucleation and Growth of Crystalline Grains in RF-Sputtered TiO 2 Films

Abstract

Amorphous TiO 2 thin films were radio frequency sputtered onto siliconmonoxide and carbon support films on molybdenum transmission electron microscope (TEM) grids and observed during in situ annealing in a TEM heating stage at 250 ∘ C. The evolution of crystallization is consistent with a classical model of homogeneous nucleation and isotropic grain growth. The two-dimensional grain morphology of the TEM foil allowed straightforward recognition of amorphous and crystallized regions of the films, for measurement of crystalline volume fraction and grain number density. By assuming that the kinetic parameters remain constant beyond the onset of crystallization, the final average grain size was computed, using an analytical extrapolation to the fully crystallized state. Electron diffraction reveals a predominance of the anatase crystallographic phase.

Authors:
 [1];  [2];  [3];  [3]
+ Show Author Affiliations
  1. Physics Department, South Dakota School of Mines & Technology, Rapid City, SD 57701, USA
  2. Nanoscience and Nanoengineering Department, South Dakota School of Mines & Technology, Rapid City, SD 57701, USA
  3. Electrical Engineering Department, South Dakota State University, Brookings, SD 57007, USA
Publication Date:
Sponsoring Org.:
USDOE
OSTI Identifier:
1198252
Grant/Contract Number:  
DOE DE-FG02-08ER64624
Resource Type:
Published Article
Journal Name:
Research Letters in Nanotechnology
Additional Journal Information:
Journal Name: Research Letters in Nanotechnology Journal Volume: 2009; Journal ID: ISSN 1687-6849
Publisher:
Hindawi Publishing Corporation
Country of Publication:
Country unknown/Code not available
Language:
English

Citation Formats

Johnson, J. C., Ahrenkiel, S. P., Dutta, P., and Bommisetty, V. R. Nucleation and Growth of Crystalline Grains in RF-Sputtered TiO 2 Films. Country unknown/Code not available: N. p., 2009. Web. doi:10.1155/2009/280797.
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Johnson, J. C., Ahrenkiel, S. P., Dutta, P., & Bommisetty, V. R. Nucleation and Growth of Crystalline Grains in RF-Sputtered TiO 2 Films. Country unknown/Code not available. https://doi.org/10.1155/2009/280797
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Johnson, J. C., Ahrenkiel, S. P., Dutta, P., and Bommisetty, V. R. Thu . "Nucleation and Growth of Crystalline Grains in RF-Sputtered TiO 2 Films". Country unknown/Code not available. https://doi.org/10.1155/2009/280797.
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@article{osti_1198252,
title = {Nucleation and Growth of Crystalline Grains in RF-Sputtered TiO 2 Films},
author = {Johnson, J. C. and Ahrenkiel, S. P. and Dutta, P. and Bommisetty, V. R.},
abstractNote = {Amorphous TiO 2 thin films were radio frequency sputtered onto siliconmonoxide and carbon support films on molybdenum transmission electron microscope (TEM) grids and observed during in situ annealing in a TEM heating stage at 250 ∘ C. The evolution of crystallization is consistent with a classical model of homogeneous nucleation and isotropic grain growth. The two-dimensional grain morphology of the TEM foil allowed straightforward recognition of amorphous and crystallized regions of the films, for measurement of crystalline volume fraction and grain number density. By assuming that the kinetic parameters remain constant beyond the onset of crystallization, the final average grain size was computed, using an analytical extrapolation to the fully crystallized state. Electron diffraction reveals a predominance of the anatase crystallographic phase.},
doi = {10.1155/2009/280797},
journal = {Research Letters in Nanotechnology},
number = ,
volume = 2009,
place = {Country unknown/Code not available},
year = {Thu Jan 01 00:00:00 EST 2009},
month = {Thu Jan 01 00:00:00 EST 2009}
}
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Journal Article:
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Publisher's Version of Record
https://doi.org/10.1155/2009/280797
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Works referenced in this record:

Kinetics of Crystallization and Crystal Growth of Nanocrystalline Anatase in Nanometer-Sized Amorphous Titania
journal, October 2002

  • Zhang, Hengzhong; Banfield, Jillian F.
  • Chemistry of Materials, Vol. 14, Issue 10
  • DOI: 10.1021/cm020072k

Electronic and optical properties of anatase TiO 2
journal, March 2000

Recrystallization of amorphized polycrystalline silicon films on SiO 2 : Temperature dependence of the crystallization parameters
journal, September 1987

  • Iverson, R. B.; Reif, R.
  • Journal of Applied Physics, Vol. 62, Issue 5
  • DOI: 10.1063/1.339591

Local electron beam induced reduction and crystallization of amorphous titania films
journal, July 2006

  • Kern, Philippe; Jäggi, Christian; Utke, Ivo
  • Applied Physics Letters, Vol. 89, Issue 2
  • DOI: 10.1063/1.2219398

Electronic and optical properties of three phases of titanium dioxide: Rutile, anatase, and brookite
journal, May 1995

Investigations of TiO2 films deposited by different techniques
journal, March 1991

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