Atomic Layer Deposition of Metal Sulfide Materials

Dasgupta, Neil P.; Meng, Xiangbo; Elam, Jeffrey W.; Martinson, Alex B. F.

doi:10.1021/ar500360d

Title: Atomic Layer Deposition of Metal Sulfide Materials

Journal Article · Sun Jan 11 23:00:00 EST 2015 · Accounts of Chemical Research

DOI: https://doi.org/10.1021/ar500360d · OSTI ID:1168427

Dasgupta, Neil P. ^[1]; Meng, Xiangbo ^[2]; Elam, Jeffrey W. ^[2]; Martinson, Alex B. F. ^[3]

Department of Mechanical Engineering, University of Michigan, Ann Arbor, Michigan 41809, United States
Energy Systems Division, Argonne National Laboratory, Argonne, Illinois 60439, United States
Materials Science Division, Argonne National Laboratory, Argonne, Illinois 60439, United States

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Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES)

OSTI ID:: 1168427

Journal Information:: Accounts of Chemical Research, Journal Name: Accounts of Chemical Research Journal Issue: 2 Vol. 48; ISSN 0001-4842

Publisher:: American Chemical SocietyCopyright Statement

Country of Publication:: United States

Language:: English

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