Ultraviolet photosensitivity of sulfur-doped micro- and nano-crystalline diamond

Mendoza, Frank; Makarov, Vladimir; Hidalgo, Arturo; Weiner, Brad; Morell, Gerardo

doi:10.1063/1.3590153

Title: Ultraviolet photosensitivity of sulfur-doped micro- and nano-crystalline diamond

Journal Article · Mon Jun 06 00:00:00 EDT 2011 · Journal of Applied Physics

DOI: https://doi.org/10.1063/1.3590153 · OSTI ID:1076497

Mendoza, Frank ^[1]; Makarov, Vladimir ^[1]; Hidalgo, Arturo ^[1]; Weiner, Brad ^[2]; Morell, Gerardo ^[1]

Univ. of Puerto Rico, San Juan, PR (United States). Inst. for Functional Nanomaterials and Dept. of Physics
Univ. of Puerto Rico, San Juan, PR (United States). Inst. for Functional Nanomaterials and Dept. of Chemistry

The room-temperature photosensitivity of sulfur-doped micro- (MCD), submicro- (SMCD) and nano- (NCD) crystalline diamond films synthesized by hot-filament chemical vapor deposition was studied. The structure and composition of these diamond materials were characterized by Raman spectroscopy, scanning electron microscopy and X-ray diffraction. The UV sensitivity and response time were studied for the three types of diamond materials using a steady state broad UV excitation source and two pulsed UV laser radiations. It was found that they have high sensitivity in the UV region, as high as 10⁹ sec^-1mV^-1 range, linear response in a broad spectral range below 320 nm, photocurrents around ~10^-5 A, and short response time better than 100 ns, which is independent of fluency intensity. A phenomenological model was applied to help understand the role of defects and dopant concentration on the materials’ photosensitivity.

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Research Organization:: University of Puerto Rico, San Juan, PR (United States)

Sponsoring Organization:: USDOE SC Office of Biological and Environmental Research (SC-23)

Grant/Contract Number:: FG02-08ER46526

OSTI ID:: 1076497

Journal Information:: Journal of Applied Physics, Journal Name: Journal of Applied Physics Journal Issue: 11 Vol. 109; ISSN 0021-8979

Publisher:: American Institute of Physics (AIP)Copyright Statement

Country of Publication:: United States

Language:: English

References (64)

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Equilibrium attractive properties of a class of multistep Runge–Kutta methods Xiao, Aiguo; Tang, Yifa Applied Mathematics and Computation, Vol. 173, Issue 2 https://doi.org/10.1016/j.amc.2005.04.034	journal	February 2006
Highly sensitive UV photodetectors fabricated using high-quality single-crystalline CVD diamond films Teraji, Tokuyuki; Yoshizaki, Satoshi; Wada, Hideki Diamond and Related Materials, Vol. 13, Issue 4-8 https://doi.org/10.1016/j.diamond.2004.01.031	journal	April 2004
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Diamond microstrip detector for deep UV imaging Ciancaglioni, I.; Spaziani, F.; Rossi, M. C. Diamond and Related Materials, Vol. 14, Issue 3-7 https://doi.org/10.1016/j.diamond.2005.01.037	journal	March 2005
Concept for diamond 3-D integrated UV sensor Kaiser, A.; Kueck, D.; Benkart, P. Diamond and Related Materials, Vol. 15, Issue 11-12 https://doi.org/10.1016/j.diamond.2006.07.012	journal	November 2006
Photoconductive properties of lightly N-doped single crystal CVD diamond films Secroun, A.; Tallaire, A.; Achard, J. Diamond and Related Materials, Vol. 16, Issue 4-7 https://doi.org/10.1016/j.diamond.2006.12.052	journal	April 2007
Mechanism of photoconductivity gain for p-diamond Schottky photodiode Koide, Yasuo; Liao, Meiyong Diamond and Related Materials, Vol. 16, Issue 4-7 https://doi.org/10.1016/j.diamond.2007.01.010	journal	April 2007
Photocurrent study of electronic defects in nanocrystalline diamond Remes, Z.; Kromka, A.; Potmesil, J. Diamond and Related Materials, Vol. 17, Issue 7-10 https://doi.org/10.1016/j.diamond.2008.02.017	journal	July 2008
Extreme UV photodetectors based on CVD single crystal diamond in a p-type/intrinsic/metal configuration Almaviva, S.; Marinelli, Marco; Milani, E. Diamond and Related Materials, Vol. 18, Issue 1 https://doi.org/10.1016/j.diamond.2008.10.034	journal	January 2009
Hall effect of photocurrent in CVD diamond film Kubo, Takehito; Nomura, Yukio; Murayama, Kazuro Diamond and Related Materials, Vol. 18, Issue 5-8 https://doi.org/10.1016/j.diamond.2009.02.001	journal	May 2009
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Diamond photodetectors for next generation 157-nm deep-UV photolithography tools Whitfield, Michael D.; Lansley, Stuart P.; Gaudin, Olivier Diamond and Related Materials, Vol. 10, Issue 3-7 https://doi.org/10.1016/s0925-9635(00)00518-5	journal	March 2001
Diamond photoconductors: operational lifetime and radiation hardness under deep-UV excimer laser irradiation Whitfield, Michael D.; Lansley, Stuart P.; Gaudin, Olivier Diamond and Related Materials, Vol. 10, Issue 3-7 https://doi.org/10.1016/s0925-9635(00)00574-4	journal	March 2001
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Extreme sensitivity displayed by single crystal diamond deep ultraviolet photoconductive devices Bevilacqua, Mose; Jackman, Richard B. Applied Physics Letters, Vol. 95, Issue 24 https://doi.org/10.1063/1.3273378	journal	December 2009
Polycrystalline diamond film UV detectors for excimer lasers Ralchenko, V. G.; Savel'ev, A. V.; Konov, Vitalii I. Quantum Electronics, Vol. 36, Issue 6 https://doi.org/10.1070/qe2006v036n06abeh013211	journal	June 2006
New developments on diamond photodetector for VUV solar observations BenMoussa, A.; Soltani, A.; Haenen, K. Semiconductor Science and Technology, Vol. 23, Issue 3 https://doi.org/10.1088/0268-1242/23/3/035026	journal	February 2008
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Diamond sensors: the dawn of a new era? Bogue, Robert Sensor Review, Vol. 27, Issue 4 https://doi.org/10.1108/02602280710821416	journal	September 2007
Effects of a nanocomposite carbon buffer layer on the field emission properties of multiwall carbon nanotubes and nanofibers grown by hot filament chemical vapor deposition Uppireddi, Kishore; González-Berríos, Adolfo; Piazza, Fabrice Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 24, Issue 2 https://doi.org/10.1116/1.2174026	journal	January 2006
Semiconductor ultraviolet detectors Razeghi, Manijeh; Rogalski, Antoni Photonics West '96, SPIE Proceedings https://doi.org/10.1117/12.237695	conference	April 1996
Kinetic Theory of Ionization and Electron Capture by a Charged Impurity in a Semiconductor Kagan, V. D. Physics of the Solid State, Vol. 47, Issue 2 https://doi.org/10.1134/1.1866396	journal	January 2005
Diamond Sensors Durable for Continuously Monitoring Intense Vacuum Ultraviolet Radiation Hayashi, Kazushi; Tachibana, Takeshi; Kawakami, Nobuyuki Japanese Journal of Applied Physics, Vol. 44, Issue 10 https://doi.org/10.1143/jjap.44.7301	journal	October 2005
Direct Measurement of 185 nm Radiation from Low-Pressure Mercury Lamps Using Diamond-Based Vacuum Ultraviolet Sensors Suzuki, Fumio; Ono, Ken-ichiro; Sakai, Kazuhiro Japanese Journal of Applied Physics, Vol. 45, Issue 8A https://doi.org/10.1143/jjap.45.6484	journal	August 2006
Synthesis and characterization of sulfur-incorporated microcrystalline diamond and nanocrystalline carbon thin films by hot filament chemical vapor deposition Gupta, S.; Weiner, B. R.; Morell, G. Journal of Materials Research, Vol. 18, Issue 2 https://doi.org/10.1557/jmr.2003.0047	journal	February 2003
Measurement of Vacuum Ultraviolet Radiation with Diamond Photo Sensors Uchida, Koji; Ishihara, Hideaki; Nippashi, Kenji Journal of Light & Visual Environment, Vol. 28, Issue 2 https://doi.org/10.2150/jlve.28.97	journal	January 2004
Thin film diamond UV photodetectors: photodiodes compared with photoconductive devices for highly selective wavelength response Whitfield, Michael D.; McKeag, Robert D.; Pang, Lisa Y. S. Diamond and Related Materials, Vol. 5, Issue 6-8 https://doi.org/10.1016/0925-9635(95)00419-X	journal	May 1996
Diamond photodetectors for next generation 157-nm deep-UV photolithography tools Whitfield, Michael D.; Lansley, Stuart P.; Gaudin, Olivier Diamond and Related Materials, Vol. 10, Issue 3-7 https://doi.org/10.1016/S0925-9635(00)00518-5	journal	March 2001
Diamond photoconductors: operational lifetime and radiation hardness under deep-UV excimer laser irradiation Whitfield, Michael D.; Lansley, Stuart P.; Gaudin, Olivier Diamond and Related Materials, Vol. 10, Issue 3-7 https://doi.org/10.1016/S0925-9635(00)00574-4	journal	March 2001
Temporal response of UV sensors made of highly oriented diamond films by 193 and 313 nm laser pulses Hayashi, K. Diamond and Related Materials, Vol. 10, Issue 9-10 https://doi.org/10.1016/S0925-9635(01)00451-4	journal	September 2001
n-Type doping of diamond by sulfur and phosphorus Gheeraert, E.; Casanova, N.; Tajani, A. Diamond and Related Materials, Vol. 11, Issue 3-6 https://doi.org/10.1016/S0925-9635(01)00683-5	journal	March 2002
Diamond UV photodetectors: Sensitivity and speed for visible blind applications McKeag, Robert D.; Jackman, Richard B. Diamond and Related Materials, Vol. 7, Issue 2-5 https://doi.org/10.1016/S0925-9635(97)00274-4	journal	February 1998
Equilibrium attractive properties of a class of multistep Runge–Kutta methods Xiao, Aiguo; Tang, Yifa Applied Mathematics and Computation, Vol. 173, Issue 2 https://doi.org/10.1016/j.amc.2005.04.034	journal	February 2006
Highly sensitive UV photodetectors fabricated using high-quality single-crystalline CVD diamond films Teraji, Tokuyuki; Yoshizaki, Satoshi; Wada, Hideki Diamond and Related Materials, Vol. 13, Issue 4-8 https://doi.org/10.1016/j.diamond.2004.01.031	journal	April 2004
Metal/Diamond/Vacuum-type photodetectors in the ultraviolet band Rossi, M. C.; Spaziani, F.; Conte, G. Diamond and Related Materials, Vol. 14, Issue 3-7 https://doi.org/10.1016/j.diamond.2004.12.048	journal	March 2005
Diamond microstrip detector for deep UV imaging Ciancaglioni, I.; Spaziani, F.; Rossi, M. C. Diamond and Related Materials, Vol. 14, Issue 3-7 https://doi.org/10.1016/j.diamond.2005.01.037	journal	March 2005
Concept for diamond 3-D integrated UV sensor Kaiser, A.; Kueck, D.; Benkart, P. Diamond and Related Materials, Vol. 15, Issue 11-12 https://doi.org/10.1016/j.diamond.2006.07.012	journal	November 2006
Photoconductive properties of lightly N-doped single crystal CVD diamond films Secroun, A.; Tallaire, A.; Achard, J. Diamond and Related Materials, Vol. 16, Issue 4-7 https://doi.org/10.1016/j.diamond.2006.12.052	journal	April 2007
Mechanism of photoconductivity gain for p-diamond Schottky photodiode Koide, Yasuo; Liao, Meiyong Diamond and Related Materials, Vol. 16, Issue 4-7 https://doi.org/10.1016/j.diamond.2007.01.010	journal	April 2007
Photocurrent study of electronic defects in nanocrystalline diamond Remes, Z.; Kromka, A.; Potmesil, J. Diamond and Related Materials, Vol. 17, Issue 7-10 https://doi.org/10.1016/j.diamond.2008.02.017	journal	July 2008
Extreme UV photodetectors based on CVD single crystal diamond in a p-type/intrinsic/metal configuration Almaviva, S.; Marinelli, Marco; Milani, E. Diamond and Related Materials, Vol. 18, Issue 1 https://doi.org/10.1016/j.diamond.2008.10.034	journal	January 2009
Hall effect of photocurrent in CVD diamond film Kubo, Takehito; Nomura, Yukio; Murayama, Kazuro Diamond and Related Materials, Vol. 18, Issue 5-8 https://doi.org/10.1016/j.diamond.2009.02.001	journal	May 2009
Characterization of homoepitaxial diamond for ionizing radiation detectors Donato, M. G.; Faggio, G.; Messina, G. Journal of Non-Crystalline Solids, Vol. 352, Issue 23-25 https://doi.org/10.1016/j.jnoncrysol.2006.02.067	journal	July 2006
Performance of diamond detectors for VUV applications BenMoussa, A.; Theissen, A.; Scholze, F. Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 568, Issue 1 https://doi.org/10.1016/j.nima.2006.06.007	journal	November 2006
Nitrogen-doped ultrananocrystalline carbon: Response to small amplitude AC signals Feliciangeli, M. C.; Rossi, M. C.; Conte, G. Physica E: Low-dimensional Systems and Nanostructures, Vol. 40, Issue 7 https://doi.org/10.1016/j.physe.2007.10.059	journal	May 2008
Deep UV pulsed laser monitoring by CVD diamond sensors Mazzeo, Giovanni; Salvatori, Stefano; Rossi, Maria Cristina Sensors and Actuators A: Physical, Vol. 113, Issue 3 https://doi.org/10.1016/j.sna.2004.01.008	journal	August 2004
Extreme sensitivity displayed by single crystal diamond deep ultraviolet photoconductive devices Bevilacqua, Mose; Jackman, Richard B. Applied Physics Letters, Vol. 95, Issue 24 https://doi.org/10.1063/1.3273378	journal	December 2009
Semiconductor ultraviolet detectors Razeghi, M.; Rogalski, A. Journal of Applied Physics, Vol. 79, Issue 10 https://doi.org/10.1063/1.362677	journal	May 1996
Polycrystalline diamond film UV detectors for excimer lasers Ralchenko, V. G.; Savel'ev, A. V.; Konov, Vitalii I. Quantum Electronics, Vol. 36, Issue 6 https://doi.org/10.1070/QE2006v036n06ABEH013211	journal	June 2006
New developments on diamond photodetector for VUV solar observations BenMoussa, A.; Soltani, A.; Haenen, K. Semiconductor Science and Technology, Vol. 23, Issue 3 https://doi.org/10.1088/0268-1242/23/3/035026	journal	February 2008
Diamond film ultraviolet detectors with different diamond grain size Tang, K.; Wang, L. J.; Huang, J. Journal of Physics: Conference Series, Vol. 152 https://doi.org/10.1088/1742-6596/152/1/012015	journal	March 2009
Diamond sensors: the dawn of a new era? Bogue, Robert Sensor Review, Vol. 27, Issue 4 https://doi.org/10.1108/02602280710821416	journal	September 2007
Effects of a nanocomposite carbon buffer layer on the field emission properties of multiwall carbon nanotubes and nanofibers grown by hot filament chemical vapor deposition Uppireddi, Kishore; González-Berríos, Adolfo; Piazza, Fabrice Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 24, Issue 2 https://doi.org/10.1116/1.2174026	journal	January 2006
Kinetic Theory of Ionization and Electron Capture by a Charged Impurity in a Semiconductor Kagan, V. D. Physics of the Solid State, Vol. 47, Issue 2 https://doi.org/10.1134/1.1866396	journal	January 2005
Diamond Sensors Durable for Continuously Monitoring Intense Vacuum Ultraviolet Radiation Hayashi, Kazushi; Tachibana, Takeshi; Kawakami, Nobuyuki Japanese Journal of Applied Physics, Vol. 44, Issue 10 https://doi.org/10.1143/JJAP.44.7301	journal	October 2005
Direct Measurement of 185 nm Radiation from Low-Pressure Mercury Lamps Using Diamond-Based Vacuum Ultraviolet Sensors Suzuki, Fumio; Ono, Ken-ichiro; Sakai, Kazuhiro Japanese Journal of Applied Physics, Vol. 45, Issue 8A https://doi.org/10.1143/JJAP.45.6484	journal	August 2006
Synthesis and characterization of sulfur-incorporated microcrystalline diamond and nanocrystalline carbon thin films by hot filament chemical vapor deposition Gupta, S.; Weiner, B. R.; Morell, G. Journal of Materials Research, Vol. 18, Issue 2 https://doi.org/10.1557/JMR.2003.0047	journal	February 2003
Measurement of Vacuum Ultraviolet Radiation with Diamond Photo Sensors Uchida, Koji; Ishihara, Hideaki; Nippashi, Kenji Journal of Light & Visual Environment, Vol. 28, Issue 2 https://doi.org/10.2150/jlve.28.97	journal	January 2004

Cited By (5)

High-Performance and Self-Powered Deep UV Photodetectors Based on High Quality 2D Boron Nitride Nanosheets Aldalbahi, Ali; Rivera, Manuel; Rahaman, Mostafizur Nanomaterials, Vol. 7, Issue 12 https://doi.org/10.3390/nano7120454	journal	December 2017
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High-Performance and Self-Powered Deep UV Photodetectors Based on High Quality 2D Boron Nitride Nanosheets Aldalbahi, Ali; Rivera, Manuel; Rahaman, Mostafizur Nanomaterials, Vol. 7, Issue 12 https://doi.org/10.3390/nano7120454	journal	December 2017
A Comprehensive Review of Semiconductor Ultraviolet Photodetectors: From Thin Film to One-Dimensional Nanostructures Sang, Liwen; Liao, Meiyong; Sumiya, Masatomo Sensors, Vol. 13, Issue 8 https://doi.org/10.3390/s130810482	journal	August 2013

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