Solution-Based Synthesis of Crystalline Silicon from Liquid Silane through Laser and Chemical Annealing

Iyer, Ganjigunte R.  S.; Hobbie, Erik K.; Guruvenket, Srinivasan; Hoey, Justin M.; Anderson, Kenneth J.; Lovaasen, John; Gette, Cody; Schulz, Douglas L.; Swenson, Orven F.; Elangovan, Arumugasamy; Boudjouk, P.

doi:10.1021/am300334p

Title: Solution-Based Synthesis of Crystalline Silicon from Liquid Silane through Laser and Chemical Annealing

Journal Article · Wed May 23 00:00:00 EDT 2012 · ACS Applied Materials and Interfaces

DOI: https://doi.org/10.1021/am300334p · OSTI ID:1046826

Iyer, Ganjigunte R. S. ^[1]; Hobbie, Erik K.; Guruvenket, Srinivasan; Hoey, Justin M.; Anderson, Kenneth J.; Lovaasen, John; Gette, Cody; Schulz, Douglas L.; Swenson, Orven F.; Elangovan, Arumugasamy; Boudjouk, P.

North Dakota State University

We report a solution process for the synthesis of crystalline silicon from the liquid silane precursor cyclohexasilane (Si₆H₁₂). Polysilane films were crystallized through thermal and laser annealing, with plasma hydrogenation at atmospheric pressure generating further structural changes in the films. The evolution from amorphous to microcrystalline is characterized using scanning electron microscopy (SEM), atomic force microscopy (AFM), Raman spectroscopy and impedance spectroscopy. A four-decade enhancement in the electrical conductivity is attributed to a disorder-order transition in a bonded Si network. Lastly, our results demonstrate a potentially attractive approach that employs a solution process coupled with ambient post-processing to produce crystalline silicon thin films.

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Research Organization:: North Dakota State Univ., Fargo, ND (United States)

Sponsoring Organization:: USDOE Office of Energy Efficiency and Renewable Energy (EERE)

Grant/Contract Number:: FG36-08GO88160

OSTI ID:: 1046826

Report Number(s):: DOE/GO/88160--44

Journal Information:: ACS Applied Materials and Interfaces, Journal Name: ACS Applied Materials and Interfaces Journal Issue: 5 Vol. 4; ISSN 1944-8244

Publisher:: American Chemical SocietyCopyright Statement

Country of Publication:: United States

Language:: English

References (63)

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Pentaphenylcyclopentasilan und Derivate Hengge, E.; Marketz, H. Monatshefte f�r Chemie, Vol. 101, Issue 2 https://doi.org/10.1007/bf00910241	journal	January 1970
Laser crystallization of amorphous silicon films investigated by Raman spectroscopy and atomic force microscopy Jin, Jing; Yuan, Zhijun; Huang, Lu Applied Surface Science, Vol. 256, Issue 11 https://doi.org/10.1016/j.apsusc.2009.12.052	journal	March 2010
Printed silicon as diode and FET materials – Preliminary results Han, Sijin; Dai, Xuliang; Loy, Phillip Journal of Non-Crystalline Solids, Vol. 354, Issue 19-25, p. 2623-2626 https://doi.org/10.1016/j.jnoncrysol.2007.10.090	journal	May 2008
Improvement of amorphous silicon n-i-p solar cells by incorporating double-layer hydrogenated nanocrystalline silicon structure Liu, Shiyong; Zeng, Xiangbo; Peng, Wenbo Journal of Non-Crystalline Solids, Vol. 357, Issue 1 https://doi.org/10.1016/j.jnoncrysol.2010.10.001	journal	January 2011
Structural, electrical and photovoltaic characterization of Si nanocrystals embedded SiC matrix and Si nanocrystals/c-Si heterojunction devices Song, Dengyuan; Cho, Eun-Chel; Conibeer, Gavin Solar Energy Materials and Solar Cells, Vol. 92, Issue 4 https://doi.org/10.1016/j.solmat.2007.11.002	journal	April 2008
Fourier-transform infrared spectroscopic studies of pristine polysilanes as precursor molecules for the solution deposition of amorphous silicon thin-films Kim, Soo; Lee, Chun-Young; Jin, Michael H. -C. Solar Energy Materials and Solar Cells, Vol. 100 https://doi.org/10.1016/j.solmat.2011.04.023	journal	May 2012
Effect of hydrogen plasma treatment on the surface morphology, microstructure and electronic transport properties of nc-Si:H Dutta, P.; Paul, S.; Galipeau, D. Thin Solid Films, Vol. 518, Issue 23 https://doi.org/10.1016/j.tsf.2010.06.037	journal	September 2010
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Amine-Promoted Disproportionation and Redistribution of Trichlorosilane: Formation of Tetradecachlorocyclohexasilane Dianion ¹ Choi, Seok-Bong; Kim, Beon-Kyu; Boudjouk, Philip Journal of the American Chemical Society, Vol. 123, Issue 33 https://doi.org/10.1021/ja002831a	journal	August 2001
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High-mobility ultrathin semiconducting films prepared by spin coating Mitzi, David B.; Kosbar, Laura L.; Murray, Conal E. Nature, Vol. 428, Issue 6980, p. 299-303 https://doi.org/10.1038/nature02389	journal	March 2004
Solution-processed silicon films and transistors Shimoda, Tatsuya; Matsuki, Yasuo; Furusawa, Masahiro Nature, Vol. 440, Issue 7085 https://doi.org/10.1038/nature04613	journal	April 2006
Rapid, low-temperature synthesis of nc-Si in high-density, non-equilibrium plasmas: enabling nanocrystallinity at very low hydrogen dilution Cheng, Qijin; Xu, Shuyan; Ostrikov, Kostya (Ken) Journal of Materials Chemistry, Vol. 19, Issue 29 https://doi.org/10.1039/b904227j	journal	January 2009
Thermal transformation of solvent-processable organosilicon compounds into inorganic silicone-based thin films Kim, Sieun; Han, Tai-Hoon; Jung, Hyun-chul Journal of Materials Chemistry, Vol. 21, Issue 9 https://doi.org/10.1039/c0jm02093a	journal	January 2011
Evolution of structure, morphology, and reactivity of hydrogenated amorphous silicon film surfaces grown by molecular-dynamics simulation Ramalingam, Shyam; Sriraman, Saravanapriyan; Aydil, Eray S. Applied Physics Letters, Vol. 78, Issue 18 https://doi.org/10.1063/1.1367298	journal	April 2001
Stress in undoped and doped laser crystallized poly-Si Lengsfeld, P.; Nickel, N. H.; Genzel, Ch. Journal of Applied Physics, Vol. 91, Issue 11 https://doi.org/10.1063/1.1476083	journal	June 2002
Hydrogen structures and the optoelectronic properties in transition films from amorphous to microcrystalline silicon prepared by hot-wire chemical vapor deposition Han, Daxing; Wang, Keda; Owens, Jessica M. Journal of Applied Physics, Vol. 93, Issue 7 https://doi.org/10.1063/1.1555680	journal	April 2003
Growth and characterization of hydrogenated amorphous silicon thin films from SiH2 radical precursor: Atomic-scale analysis Sriraman, Saravanapriyan; Aydil, Eray S.; Maroudas, Dimitrios Journal of Applied Physics, Vol. 95, Issue 4 https://doi.org/10.1063/1.1636512	journal	February 2004
Raman spectroscopy of strain in subwavelength microelectronic devices Bonera, Emiliano; Fanciulli, Marco; Mariani, Marcello Applied Physics Letters, Vol. 87, Issue 11 https://doi.org/10.1063/1.2045545	journal	September 2005
Hydrogen-induced crystallization of amorphous silicon thin films. I. Simulation and analysis of film postgrowth treatment with H2 plasmas Sriraman, Saravanapriyan; Valipa, Mayur S.; Aydil, Eray S. Journal of Applied Physics, Vol. 100, Issue 5 https://doi.org/10.1063/1.2229426	journal	September 2006
Surface reaction probability of film‐producing radicals in silane glow discharges Doughty, D. A.; Doyle, J. R.; Lin, G. H. Journal of Applied Physics, Vol. 67, Issue 10 https://doi.org/10.1063/1.345188	journal	May 1990
Structural analysis of undoped microcrystalline silicon thin films deposited by PECVD technique Mukhopadhyay, Sumita; Das, Chandan; Ray, Swati Journal of Physics D: Applied Physics, Vol. 37, Issue 13 https://doi.org/10.1088/0022-3727/37/13/003	journal	June 2004
Micro-Raman spectroscopy to study local mechanical stress in silicon integrated circuits Wolf, Ingrid De Semiconductor Science and Technology, Vol. 11, Issue 2 https://doi.org/10.1088/0268-1242/11/2/001	journal	February 1996
A Liquid-Solution-Phase Synthesis of Crystalline Silicon Heath, J. R. Science, Vol. 258, Issue 5085 https://doi.org/10.1126/science.258.5085.1131	journal	November 1992
Low-Temperature Crystallization of Amorphous Silicon by Atmospheric-Pressure Plasma Treatment in H ₂ /He or H ₂ /Ar Mixture Ohmi, Hiromasa; Kakiuchi, Hiroaki; Nishijima, Kenichi Japanese Journal of Applied Physics, Vol. 45, Issue 10B https://doi.org/10.1143/jjap.45.8488	journal	October 2006
Device Physics of Solution-Processed Organic Field-Effect Transistors Sirringhaus, H. Advanced Materials, Vol. 17, Issue 20, p. 2411-2425 https://doi.org/10.1002/adma.200501152	journal	October 2005
High-Efficiency Solar Cell with Earth-Abundant Liquid-Processed Absorber Todorov, Teodor K.; Reuter, Kathleen B.; Mitzi, David B. Advanced Materials, Vol. 22, Issue 20, p. E156-E159 https://doi.org/10.1002/adma.200904155	journal	May 2010
Cyclopentasilane, the First Unsubstituted Cyclic Silicon Hydride Hengge, Edwin; Bauer, G�nther Angewandte Chemie International Edition in English, Vol. 12, Issue 4 https://doi.org/10.1002/anie.197303161	journal	April 1973
Solution processed ZnO - Challenges in processing and performance on flexible substrates: Solution processed ZnO Hoffmann, Rudolf C.; Dilfer, Stefan; Issanin, Alexander physica status solidi (a), Vol. 207, Issue 7 https://doi.org/10.1002/pssa.200983749	journal	May 2010
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Pentaphenylcyclopentasilan und Derivate Hengge, E.; Marketz, H. Monatshefte f�r Chemie, Vol. 101, Issue 2 https://doi.org/10.1007/BF00910241	journal	January 1970
Darstllung und Eigenschaften von Cyclopentasilan Hengge, Edwin; Bauer, G�nther Monatshefte f�r Chemie, Vol. 106, Issue 2 https://doi.org/10.1007/BF01150532	journal	January 1975
Laser crystallization of amorphous silicon films investigated by Raman spectroscopy and atomic force microscopy Jin, Jing; Yuan, Zhijun; Huang, Lu Applied Surface Science, Vol. 256, Issue 11 https://doi.org/10.1016/j.apsusc.2009.12.052	journal	March 2010
Printed silicon as diode and FET materials – Preliminary results Han, Sijin; Dai, Xuliang; Loy, Phillip Journal of Non-Crystalline Solids, Vol. 354, Issue 19-25, p. 2623-2626 https://doi.org/10.1016/j.jnoncrysol.2007.10.090	journal	May 2008
Improvement of amorphous silicon n-i-p solar cells by incorporating double-layer hydrogenated nanocrystalline silicon structure Liu, Shiyong; Zeng, Xiangbo; Peng, Wenbo Journal of Non-Crystalline Solids, Vol. 357, Issue 1 https://doi.org/10.1016/j.jnoncrysol.2010.10.001	journal	January 2011
Structural, electrical and photovoltaic characterization of Si nanocrystals embedded SiC matrix and Si nanocrystals/c-Si heterojunction devices Song, Dengyuan; Cho, Eun-Chel; Conibeer, Gavin Solar Energy Materials and Solar Cells, Vol. 92, Issue 4 https://doi.org/10.1016/j.solmat.2007.11.002	journal	April 2008
Fourier-transform infrared spectroscopic studies of pristine polysilanes as precursor molecules for the solution deposition of amorphous silicon thin-films Kim, Soo; Lee, Chun-Young; Jin, Michael H. -C. Solar Energy Materials and Solar Cells, Vol. 100 https://doi.org/10.1016/j.solmat.2011.04.023	journal	May 2012
Effect of hydrogen plasma treatment on the surface morphology, microstructure and electronic transport properties of nc-Si:H Dutta, P.; Paul, S.; Galipeau, D. Thin Solid Films, Vol. 518, Issue 23 https://doi.org/10.1016/j.tsf.2010.06.037	journal	September 2010
Homocyclic Silanes Hengge, Edwin.; Janoschek, Rudolf. Chemical Reviews, Vol. 95, Issue 5 https://doi.org/10.1021/cr00037a016	journal	July 1995
Electron and Ambipolar Transport in Organic Field-Effect Transistors Zaumseil, Jana; Sirringhaus, Henning Chemical Reviews, Vol. 107, Issue 4, p. 1296-1323 https://doi.org/10.1021/cr0501543	journal	April 2007
Amine-Promoted Disproportionation and Redistribution of Trichlorosilane: Formation of Tetradecachlorocyclohexasilane Dianion ¹ Choi, Seok-Bong; Kim, Beon-Kyu; Boudjouk, Philip Journal of the American Chemical Society, Vol. 123, Issue 33 https://doi.org/10.1021/ja002831a	journal	August 2001
Mechanism of hydrogen-induced crystallization of amorphous silicon Sriraman, Saravanapriyan; Agarwal, Sumit; Aydil, Eray S. Nature, Vol. 418, Issue 6893 https://doi.org/10.1038/nature00866	journal	July 2002
High-mobility ultrathin semiconducting films prepared by spin coating Mitzi, David B.; Kosbar, Laura L.; Murray, Conal E. Nature, Vol. 428, Issue 6980, p. 299-303 https://doi.org/10.1038/nature02389	journal	March 2004
Solution-processed silicon films and transistors Shimoda, Tatsuya; Matsuki, Yasuo; Furusawa, Masahiro Nature, Vol. 440, Issue 7085 https://doi.org/10.1038/nature04613	journal	April 2006
Rapid, low-temperature synthesis of nc-Si in high-density, non-equilibrium plasmas: enabling nanocrystallinity at very low hydrogen dilution Cheng, Qijin; Xu, Shuyan; Ostrikov, Kostya (Ken) Journal of Materials Chemistry, Vol. 19, Issue 29 https://doi.org/10.1039/b904227j	journal	January 2009
Thermal transformation of solvent-processable organosilicon compounds into inorganic silicone-based thin films Kim, Sieun; Han, Tai-Hoon; Jung, Hyun-chul Journal of Materials Chemistry, Vol. 21, Issue 9 https://doi.org/10.1039/c0jm02093a	journal	January 2011
Evolution of structure, morphology, and reactivity of hydrogenated amorphous silicon film surfaces grown by molecular-dynamics simulation Ramalingam, Shyam; Sriraman, Saravanapriyan; Aydil, Eray S. Applied Physics Letters, Vol. 78, Issue 18 https://doi.org/10.1063/1.1367298	journal	April 2001
Stress in undoped and doped laser crystallized poly-Si Lengsfeld, P.; Nickel, N. H.; Genzel, Ch. Journal of Applied Physics, Vol. 91, Issue 11 https://doi.org/10.1063/1.1476083	journal	June 2002
Hydrogen structures and the optoelectronic properties in transition films from amorphous to microcrystalline silicon prepared by hot-wire chemical vapor deposition Han, Daxing; Wang, Keda; Owens, Jessica M. Journal of Applied Physics, Vol. 93, Issue 7 https://doi.org/10.1063/1.1555680	journal	April 2003
Growth and characterization of hydrogenated amorphous silicon thin films from SiH2 radical precursor: Atomic-scale analysis Sriraman, Saravanapriyan; Aydil, Eray S.; Maroudas, Dimitrios Journal of Applied Physics, Vol. 95, Issue 4 https://doi.org/10.1063/1.1636512	journal	February 2004
Raman spectroscopy of strain in subwavelength microelectronic devices Bonera, Emiliano; Fanciulli, Marco; Mariani, Marcello Applied Physics Letters, Vol. 87, Issue 11 https://doi.org/10.1063/1.2045545	journal	September 2005
Hydrogen-induced crystallization of amorphous silicon thin films. I. Simulation and analysis of film postgrowth treatment with H2 plasmas Sriraman, Saravanapriyan; Valipa, Mayur S.; Aydil, Eray S. Journal of Applied Physics, Vol. 100, Issue 5 https://doi.org/10.1063/1.2229426	journal	September 2006
Surface reaction probability of film‐producing radicals in silane glow discharges Doughty, D. A.; Doyle, J. R.; Lin, G. H. Journal of Applied Physics, Vol. 67, Issue 10 https://doi.org/10.1063/1.345188	journal	May 1990
Structural analysis of undoped microcrystalline silicon thin films deposited by PECVD technique Mukhopadhyay, Sumita; Das, Chandan; Ray, Swati Journal of Physics D: Applied Physics, Vol. 37, Issue 13 https://doi.org/10.1088/0022-3727/37/13/003	journal	June 2004
Micro-Raman spectroscopy to study local mechanical stress in silicon integrated circuits Wolf, Ingrid De Semiconductor Science and Technology, Vol. 11, Issue 2 https://doi.org/10.1088/0268-1242/11/2/001	journal	February 1996
A Liquid-Solution-Phase Synthesis of Crystalline Silicon Heath, J. R. Science, Vol. 258, Issue 5085 https://doi.org/10.1126/science.258.5085.1131	journal	November 1992
Low-Temperature Crystallization of Amorphous Silicon by Atmospheric-Pressure Plasma Treatment in H ₂ /He or H ₂ /Ar Mixture Ohmi, Hiromasa; Kakiuchi, Hiroaki; Nishijima, Kenichi Japanese Journal of Applied Physics, Vol. 45, Issue 10B https://doi.org/10.1143/JJAP.45.8488	journal	October 2006

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