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ETDEWEB   /       /    Ceramic film synthesis with highly energetic ions. Pt. 1. Titanium nitride. Keramikschichtsynthese mit hochenergetischen Ionen. T. 1. Titannitrid

Ceramic film synthesis with highly energetic ions. Pt. 1. Titanium nitride. Keramikschichtsynthese mit hochenergetischen Ionen. T. 1. Titannitrid

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Abstract

This report deals with the properties of titanium nitride and their dependence on process parameters, the titanium nitride having been obtained via titanium deposition accompanied by irradiation with nitrogen ions. (orig.).
Authors:
Ensinger, W [1] 
  1. Heidelberg Univ. (Germany, F.R.). Inst. fuer Physikalische Chemie
Publication Date:
Sep 01, 1990
Product Type:
Journal Article
Reference Number:
DE-90-010686; EDB-90-172480
Resource Relation:
Journal Name: CFI (Ceramic Forum International/Berichte der DKG); (Germany, F.R.); Journal Volume: 67:9
Subject:
36 MATERIALS SCIENCE; TITANIUM NITRIDES; ENERGY BEAM DEPOSITION FILMS; SYNTHESIS; ADHESION; AUGER ELECTRON SPECTROSCOPY; CHEMICAL COMPOSITION; ENERGY BEAM DEPOSITION; ION BEAMS; KNOOP HARDNESS; LAYERS; NITROGEN IONS; PHASE STUDIES; X-RAY DIFFRACTION; BEAMS; CHARGED PARTICLES; COATINGS; COHERENT SCATTERING; DEPOSITION; DIFFRACTION; ELECTRON SPECTROSCOPY; FILMS; IONS; NITRIDES; NITROGEN COMPOUNDS; PNICTIDES; SCATTERING; SPECTROSCOPY; SURFACE COATING; TITANIUM COMPOUNDS; TRANSITION ELEMENT COMPOUNDS; 360201* - Ceramics, Cermets, & Refractories- Preparation & Fabrication; 360203 - Ceramics, Cermets, & Refractories- Mechanical Properties
OSTI ID:
6430302
Country of Origin:
Germany
Language:
German; English
Other Identifying Numbers:
Journal ID: ISSN 0173-9913; CODEN: CCFDD
Submitting Site:
DE
Size:
Pages: 374-386
Announcement Date:
Dec 01, 1990

Journal Article:

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Citation Formats

Ensinger, W. Ceramic film synthesis with highly energetic ions. Pt. 1. Titanium nitride. Keramikschichtsynthese mit hochenergetischen Ionen. T. 1. Titannitrid. Germany: N. p., 1990. Web.
Ensinger, W. Ceramic film synthesis with highly energetic ions. Pt. 1. Titanium nitride. Keramikschichtsynthese mit hochenergetischen Ionen. T. 1. Titannitrid. Germany.
Ensinger, W. 1990. "Ceramic film synthesis with highly energetic ions. Pt. 1. Titanium nitride. Keramikschichtsynthese mit hochenergetischen Ionen. T. 1. Titannitrid." Germany.
@misc{etde_6430302,
title = {Ceramic film synthesis with highly energetic ions. Pt. 1. Titanium nitride. Keramikschichtsynthese mit hochenergetischen Ionen. T. 1. Titannitrid}
 author = {Ensinger, W}
 abstractNote = {This report deals with the properties of titanium nitride and their dependence on process parameters, the titanium nitride having been obtained via titanium deposition accompanied by irradiation with nitrogen ions. (orig.).}
 journal = []
 volume = {67:9}
 journal type = {AC}
 place = {Germany}
 year = {1990}
 month = {Sep}
 }