Ceramic film synthesis with highly energetic ions. Pt. 1. Titanium nitride. Keramikschichtsynthese mit hochenergetischen Ionen. T. 1. Titannitrid Ensinger, W [Heidelberg Univ. (Germany, F.R.). Inst. fuer Physikalische Chemie] 36 MATERIALS SCIENCE; TITANIUM NITRIDES; ENERGY BEAM DEPOSITION FILMS; SYNTHESIS; ADHESION; AUGER ELECTRON SPECTROSCOPY; CHEMICAL COMPOSITION; ENERGY BEAM DEPOSITION; ION BEAMS; KNOOP HARDNESS; LAYERS; NITROGEN IONS; PHASE STUDIES; X-RAY DIFFRACTION; BEAMS; CHARGED PARTICLES; COATINGS; COHERENT SCATTERING; DEPOSITION; DIFFRACTION; ELECTRON SPECTROSCOPY; FILMS; IONS; NITRIDES; NITROGEN COMPOUNDS; PNICTIDES; SCATTERING; SPECTROSCOPY; SURFACE COATING; TITANIUM COMPOUNDS; TRANSITION ELEMENT COMPOUNDS; 360201* - Ceramics, Cermets, & Refractories- Preparation & Fabrication; 360203 - Ceramics, Cermets, & Refractories- Mechanical Properties This report deals with the properties of titanium nitride and their dependence on process parameters, the titanium nitride having been obtained via titanium deposition accompanied by irradiation with nitrogen ions. (orig.). Germany 1990-09-01 German; English Journal Article Journal Name: CFI (Ceramic Forum International/Berichte der DKG); (Germany, F.R.); Journal Volume: 67:9 Medium: X; Size: Pages: 374-386 https://doi.org/ [] 67:9 Journal ID: ISSN 0173-9913; CODEN: CCFDD DE; DE-90-010686; EDB-90-172480 2010-12-30 6430302