Abstract
TiN{sub x} and TiC{sub y} coatings were deposited by physical vapour deposition (PVD) under different process conditions. The coatings were studied by particle induced X-Ray emission (PIXE) and Rutherford backscattering spectroscopy (RBS) with a low energy (300 keV) ion beam. The layer thicknesses from the PIXE and the RBS analyses are in good agreement. Correlations were found between the chemical composition of the TiN{sub x} and TiC{sub y} layers and the partial pressures of N{sub 2} and C{sub 2}H{sub 2} (C{sub 3}H{sub 8}), respectively. (orig.).
Lorenz, M;
Frank, W;
[1]
Haessler, R
[2]
- Akademie der Wissenschaften, Leipzig (Germany, F.R.). Zentralinstitut fuer Isotopen- und Strahlenforschung
- VEB FORON Kombinat Haushaltgeraete, Chemnitz (Germany, F.R.)
Citation Formats
Lorenz, M, Frank, W, and Haessler, R.
Thickness and composition of TiN sub x and TiC sub y coatings determined by low energy ion beams. Bestimmung der Dicke und der Zusammensetzung von TiN sub x - und TiC sub y -Schichten mittels niederenergetischer Ionenstrahlen.
Germany: N. p.,
1990.
Web.
Lorenz, M, Frank, W, & Haessler, R.
Thickness and composition of TiN sub x and TiC sub y coatings determined by low energy ion beams. Bestimmung der Dicke und der Zusammensetzung von TiN sub x - und TiC sub y -Schichten mittels niederenergetischer Ionenstrahlen.
Germany.
Lorenz, M, Frank, W, and Haessler, R.
1990.
"Thickness and composition of TiN sub x and TiC sub y coatings determined by low energy ion beams. Bestimmung der Dicke und der Zusammensetzung von TiN sub x - und TiC sub y -Schichten mittels niederenergetischer Ionenstrahlen."
Germany.
@misc{etde_6105765,
title = {Thickness and composition of TiN sub x and TiC sub y coatings determined by low energy ion beams. Bestimmung der Dicke und der Zusammensetzung von TiN sub x - und TiC sub y -Schichten mittels niederenergetischer Ionenstrahlen}
author = {Lorenz, M, Frank, W, and Haessler, R}
abstractNote = {TiN{sub x} and TiC{sub y} coatings were deposited by physical vapour deposition (PVD) under different process conditions. The coatings were studied by particle induced X-Ray emission (PIXE) and Rutherford backscattering spectroscopy (RBS) with a low energy (300 keV) ion beam. The layer thicknesses from the PIXE and the RBS analyses are in good agreement. Correlations were found between the chemical composition of the TiN{sub x} and TiC{sub y} layers and the partial pressures of N{sub 2} and C{sub 2}H{sub 2} (C{sub 3}H{sub 8}), respectively. (orig.).}
journal = []
volume = {26:10}
journal type = {AC}
place = {Germany}
year = {1990}
month = {Jan}
}
title = {Thickness and composition of TiN sub x and TiC sub y coatings determined by low energy ion beams. Bestimmung der Dicke und der Zusammensetzung von TiN sub x - und TiC sub y -Schichten mittels niederenergetischer Ionenstrahlen}
author = {Lorenz, M, Frank, W, and Haessler, R}
abstractNote = {TiN{sub x} and TiC{sub y} coatings were deposited by physical vapour deposition (PVD) under different process conditions. The coatings were studied by particle induced X-Ray emission (PIXE) and Rutherford backscattering spectroscopy (RBS) with a low energy (300 keV) ion beam. The layer thicknesses from the PIXE and the RBS analyses are in good agreement. Correlations were found between the chemical composition of the TiN{sub x} and TiC{sub y} layers and the partial pressures of N{sub 2} and C{sub 2}H{sub 2} (C{sub 3}H{sub 8}), respectively. (orig.).}
journal = []
volume = {26:10}
journal type = {AC}
place = {Germany}
year = {1990}
month = {Jan}
}