Thickness and composition of TiN sub x and TiC sub y coatings determined by low energy ion beams. Bestimmung der Dicke und der Zusammensetzung von TiN sub x - und TiC sub y -Schichten mittels niederenergetischer Ionenstrahlen Lorenz, M; Frank, W [Akademie der Wissenschaften, Leipzig (Germany, F.R.). Zentralinstitut fuer Isotopen- und Strahlenforschung]; Haessler, R [VEB FORON Kombinat Haushaltgeraete, Chemnitz (Germany, F.R.)] 37 INORGANIC, ORGANIC, PHYSICAL AND ANALYTICAL CHEMISTRY; TITANIUM CARBIDES; STOICHIOMETRY; THICKNESS; TITANIUM NITRIDES; BACKSCATTERING; ION BEAMS; KEV RANGE 100-1000; PHYSICAL VAPOR DEPOSITION; PIXE ANALYSIS; RUTHERFORD SCATTERING; THIN FILMS; BEAMS; CARBIDES; CARBON COMPOUNDS; CHEMICAL ANALYSIS; DEPOSITION; DIMENSIONS; ELASTIC SCATTERING; ENERGY RANGE; FILMS; KEV RANGE; NITRIDES; NITROGEN COMPOUNDS; NONDESTRUCTIVE ANALYSIS; PNICTIDES; SCATTERING; SURFACE COATING; TITANIUM COMPOUNDS; TRANSITION ELEMENT COMPOUNDS; X-RAY EMISSION ANALYSIS; 400101* - Activation, Nuclear Reaction, Radiometric & Radiochemical Procedures TiN{sub x} and TiC{sub y} coatings were deposited by physical vapour deposition (PVD) under different process conditions. The coatings were studied by particle induced X-Ray emission (PIXE) and Rutherford backscattering spectroscopy (RBS) with a low energy (300 keV) ion beam. The layer thicknesses from the PIXE and the RBS analyses are in good agreement. Correlations were found between the chemical composition of the TiN{sub x} and TiC{sub y} layers and the partial pressures of N{sub 2} and C{sub 2}H{sub 2} (C{sub 3}H{sub 8}), respectively. (orig.). Germany 1990-01-01 German Journal Article Journal Name: Isotopenpraxis; (German Democratic Republic); Journal Volume: 26:10 Medium: X; Size: Pages: 485-488 https://doi.org/ [] 26:10 Journal ID: ISSN 0021-1915; CODEN: IPRXA DEN; DEN-91-003123; EDB-91-052518 2010-12-30 6105765