Abstract
Multicomponent ion beam enhanced deposition was used to synthesize (TiCr) N films. The films were characterized by AES, TEM and XRD methods. The electrochemical property and mechanics property of the films were measured. The experimental results show that the multicomponent ion beam enhanced deposition has stronger potential of new material development than physical vapour deposition.
Tao, Zhang;
Tonghe, Zhang;
Huixing, Zhang;
Benkun, Ma;
[1]
Guoqing, Li;
Zexiang, Gong
[2]
- Beijing Normal Univ. (China). Inst. of Low Energy Nuclear Physics
- Dalian Univ. of Technology (China). Three Beam Laboratory
Citation Formats
Tao, Zhang, Tonghe, Zhang, Huixing, Zhang, Benkun, Ma, Guoqing, Li, and Zexiang, Gong.
Applications of multicomponent ion beam enhanced deposition in new film material.
China: N. p.,
1997.
Web.
Tao, Zhang, Tonghe, Zhang, Huixing, Zhang, Benkun, Ma, Guoqing, Li, & Zexiang, Gong.
Applications of multicomponent ion beam enhanced deposition in new film material.
China.
Tao, Zhang, Tonghe, Zhang, Huixing, Zhang, Benkun, Ma, Guoqing, Li, and Zexiang, Gong.
1997.
"Applications of multicomponent ion beam enhanced deposition in new film material."
China.
@misc{etde_558573,
title = {Applications of multicomponent ion beam enhanced deposition in new film material}
author = {Tao, Zhang, Tonghe, Zhang, Huixing, Zhang, Benkun, Ma, Guoqing, Li, and Zexiang, Gong}
abstractNote = {Multicomponent ion beam enhanced deposition was used to synthesize (TiCr) N films. The films were characterized by AES, TEM and XRD methods. The electrochemical property and mechanics property of the films were measured. The experimental results show that the multicomponent ion beam enhanced deposition has stronger potential of new material development than physical vapour deposition.}
journal = []
issue = {3}
volume = {14}
journal type = {AC}
place = {China}
year = {1997}
month = {Sep}
}
title = {Applications of multicomponent ion beam enhanced deposition in new film material}
author = {Tao, Zhang, Tonghe, Zhang, Huixing, Zhang, Benkun, Ma, Guoqing, Li, and Zexiang, Gong}
abstractNote = {Multicomponent ion beam enhanced deposition was used to synthesize (TiCr) N films. The films were characterized by AES, TEM and XRD methods. The electrochemical property and mechanics property of the films were measured. The experimental results show that the multicomponent ion beam enhanced deposition has stronger potential of new material development than physical vapour deposition.}
journal = []
issue = {3}
volume = {14}
journal type = {AC}
place = {China}
year = {1997}
month = {Sep}
}