Abstract
Some Mo{sub 2}N and Mo{sub 2-x}Ti{sub x}N films were synthesized by N ion beam enhanced deposition and synchronized N-Ti ion beams enhanced deposition methods respectively. The microstructure of the films was determined to be of {gamma}-Mo{sub 2}N phase by the X-ray diffraction and transmission electron diffraction experiments. The scratch tests demonstrated that the metal ion beam could effectively improve adhesion of the films. The scratch critical loading of the Mo{sub 2-x}Ti{sub x}N film was measured to be about 3000 gf, which is about twice as large as that of the Mo{sub 2}N film. The corrosion resistance of the films was analyzed by the anode polarizing tests. The corrosion-self voltage and corrosion-self current of the Mo{sub 2}N film and the Mo{sub 2-x}Ti{sub x}N film in a 0.5 mol/L H{sub 2}SO{sub 4} solution were found to be 32 mV, 0.5 {mu}A/cm{sup 2} and 166 mV, 0.26 {mu}A/cm{sup 2} respectively. These results indicated that the corrosion resistance of the Mo{sub 2-x}Ti{sub x}N film was much better than that of the Mo{sub 2}N film.
Bangzhi, Liu;
Guoqing, Li;
Zongxin, Mu;
Jialiang, Zhang;
Yan, Cui;
[1]
Wong, N B;
Aoron, H
[2]
- The Key Natinal Laboratory for Materials Surface Modification, Dalian Univ. of Technology, Dalian (China)
- City Uiversity of Hong Kong (China)
Citation Formats
Bangzhi, Liu, Guoqing, Li, Zongxin, Mu, Jialiang, Zhang, Yan, Cui, Wong, N B, and Aoron, H.
Synthesis of Mo{sub 2}N and Mo{sub 2-x}Ti{sub x}N thin films by ion beam enhanced deposition method and their structure and properties.
China: N. p.,
2000.
Web.
Bangzhi, Liu, Guoqing, Li, Zongxin, Mu, Jialiang, Zhang, Yan, Cui, Wong, N B, & Aoron, H.
Synthesis of Mo{sub 2}N and Mo{sub 2-x}Ti{sub x}N thin films by ion beam enhanced deposition method and their structure and properties.
China.
Bangzhi, Liu, Guoqing, Li, Zongxin, Mu, Jialiang, Zhang, Yan, Cui, Wong, N B, and Aoron, H.
2000.
"Synthesis of Mo{sub 2}N and Mo{sub 2-x}Ti{sub x}N thin films by ion beam enhanced deposition method and their structure and properties."
China.
@misc{etde_20186153,
title = {Synthesis of Mo{sub 2}N and Mo{sub 2-x}Ti{sub x}N thin films by ion beam enhanced deposition method and their structure and properties}
author = {Bangzhi, Liu, Guoqing, Li, Zongxin, Mu, Jialiang, Zhang, Yan, Cui, Wong, N B, and Aoron, H}
abstractNote = {Some Mo{sub 2}N and Mo{sub 2-x}Ti{sub x}N films were synthesized by N ion beam enhanced deposition and synchronized N-Ti ion beams enhanced deposition methods respectively. The microstructure of the films was determined to be of {gamma}-Mo{sub 2}N phase by the X-ray diffraction and transmission electron diffraction experiments. The scratch tests demonstrated that the metal ion beam could effectively improve adhesion of the films. The scratch critical loading of the Mo{sub 2-x}Ti{sub x}N film was measured to be about 3000 gf, which is about twice as large as that of the Mo{sub 2}N film. The corrosion resistance of the films was analyzed by the anode polarizing tests. The corrosion-self voltage and corrosion-self current of the Mo{sub 2}N film and the Mo{sub 2-x}Ti{sub x}N film in a 0.5 mol/L H{sub 2}SO{sub 4} solution were found to be 32 mV, 0.5 {mu}A/cm{sup 2} and 166 mV, 0.26 {mu}A/cm{sup 2} respectively. These results indicated that the corrosion resistance of the Mo{sub 2-x}Ti{sub x}N film was much better than that of the Mo{sub 2}N film.}
journal = []
issue = {7}
volume = {23}
journal type = {AC}
place = {China}
year = {2000}
month = {Jul}
}
title = {Synthesis of Mo{sub 2}N and Mo{sub 2-x}Ti{sub x}N thin films by ion beam enhanced deposition method and their structure and properties}
author = {Bangzhi, Liu, Guoqing, Li, Zongxin, Mu, Jialiang, Zhang, Yan, Cui, Wong, N B, and Aoron, H}
abstractNote = {Some Mo{sub 2}N and Mo{sub 2-x}Ti{sub x}N films were synthesized by N ion beam enhanced deposition and synchronized N-Ti ion beams enhanced deposition methods respectively. The microstructure of the films was determined to be of {gamma}-Mo{sub 2}N phase by the X-ray diffraction and transmission electron diffraction experiments. The scratch tests demonstrated that the metal ion beam could effectively improve adhesion of the films. The scratch critical loading of the Mo{sub 2-x}Ti{sub x}N film was measured to be about 3000 gf, which is about twice as large as that of the Mo{sub 2}N film. The corrosion resistance of the films was analyzed by the anode polarizing tests. The corrosion-self voltage and corrosion-self current of the Mo{sub 2}N film and the Mo{sub 2-x}Ti{sub x}N film in a 0.5 mol/L H{sub 2}SO{sub 4} solution were found to be 32 mV, 0.5 {mu}A/cm{sup 2} and 166 mV, 0.26 {mu}A/cm{sup 2} respectively. These results indicated that the corrosion resistance of the Mo{sub 2-x}Ti{sub x}N film was much better than that of the Mo{sub 2}N film.}
journal = []
issue = {7}
volume = {23}
journal type = {AC}
place = {China}
year = {2000}
month = {Jul}
}