Synthesis of Mo{sub 2}N and Mo{sub 2-x}Ti{sub x}N thin films by ion beam enhanced deposition method and their structure and properties Bangzhi, Liu; Guoqing, Li; Zongxin, Mu; Jialiang, Zhang; Yan, Cui [The Key Natinal Laboratory for Materials Surface Modification, Dalian Univ. of Technology, Dalian (China)]; Wong, N B; Aoron, H [City Uiversity of Hong Kong (China)] 75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; CORROSION RESISTANCE; DEPOSITION; ION BEAMS; MICROSTRUCTURE; MOLYBDENUM NITRIDES; NITROGEN IONS; THIN FILMS; TITANIUM IONS; TRANSMISSION ELECTRON MICROSCOPY; X-RAY DIFFRACTION Some Mo{sub 2}N and Mo{sub 2-x}Ti{sub x}N films were synthesized by N ion beam enhanced deposition and synchronized N-Ti ion beams enhanced deposition methods respectively. The microstructure of the films was determined to be of {gamma}-Mo{sub 2}N phase by the X-ray diffraction and transmission electron diffraction experiments. The scratch tests demonstrated that the metal ion beam could effectively improve adhesion of the films. The scratch critical loading of the Mo{sub 2-x}Ti{sub x}N film was measured to be about 3000 gf, which is about twice as large as that of the Mo{sub 2}N film. The corrosion resistance of the films was analyzed by the anode polarizing tests. The corrosion-self voltage and corrosion-self current of the Mo{sub 2}N film and the Mo{sub 2-x}Ti{sub x}N film in a 0.5 mol/L H{sub 2}SO{sub 4} solution were found to be 32 mV, 0.5 {mu}A/cm{sup 2} and 166 mV, 0.26 {mu}A/cm{sup 2} respectively. These results indicated that the corrosion resistance of the Mo{sub 2-x}Ti{sub x}N film was much better than that of the Mo{sub 2}N film. China 2000-07-01 Chinese Journal Article Journal Name: Nuclear Techniques; Journal Volume: 23; Journal Issue: 7; Other Information: PBD: Jul 2000 Medium: X; Size: page(s) 483-487 https://doi.org/ [] 7 23 Journal ID: ISSN 0253-3219; NUTEDL; TRN: CN0102129040322 INIS; EDB-01:078763 2010-12-30 20186153