Charge exchange molecular ion source
Abstract
Ions, particularly molecular ions with multiple dopant nucleons per ion, are produced by charge exchange. An ion source contains a minimum of two regions separated by a physical barrier and utilizes charge exchange to enhance production of a desired ion species. The essential elements are a plasma chamber for production of ions of a first species, a physical separator, and a charge transfer chamber where ions of the first species from the plasma chamber undergo charge exchange or transfer with the reactant atom or molecules to produce ions of a second species. Molecular ions may be produced which are useful for ion implantation.
- Inventors:
- Issue Date:
- Research Org.:
- Univ. of California, Oakland, CA (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1174352
- Patent Number(s):
- 6573510
- Application Number:
- 09/596,828
- Assignee:
- The Regents of the University of California (Oakland, CA)
- Patent Classifications (CPCs):
-
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- DOE Contract Number:
- AC03-76SF00098
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 43 PARTICLE ACCELERATORS
Citation Formats
Vella, Michael C. Charge exchange molecular ion source. United States: N. p., 2003.
Web.
Vella, Michael C. Charge exchange molecular ion source. United States.
Vella, Michael C. Tue .
"Charge exchange molecular ion source". United States. https://www.osti.gov/servlets/purl/1174352.
@article{osti_1174352,
title = {Charge exchange molecular ion source},
author = {Vella, Michael C.},
abstractNote = {Ions, particularly molecular ions with multiple dopant nucleons per ion, are produced by charge exchange. An ion source contains a minimum of two regions separated by a physical barrier and utilizes charge exchange to enhance production of a desired ion species. The essential elements are a plasma chamber for production of ions of a first species, a physical separator, and a charge transfer chamber where ions of the first species from the plasma chamber undergo charge exchange or transfer with the reactant atom or molecules to produce ions of a second species. Molecular ions may be produced which are useful for ion implantation.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Jun 03 00:00:00 EDT 2003},
month = {Tue Jun 03 00:00:00 EDT 2003}
}
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