skip to main content
DOE Patents title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Condenser optic with sacrificial reflective surface

Abstract

Employing collector optics that has a sacrificial reflective surface can significantly prolong the useful life of the collector optics and the overall performance of the condenser in which the collector optics are incorporated. The collector optics is normally subject to erosion by debris from laser plasma source of radiation. The presence of an upper sacrificial reflective surface over the underlying reflective surface effectively increases the life of the optics while relaxing the constraints on the radiation source. Spatial and temporally varying reflectivity that results from the use of the sacrificial reflective surface can be accommodated by proper condenser design.

Inventors:
 [1];  [2];  [3]
  1. Castro Valley, CA
  2. Livermore, CA
  3. Sunnyvale, CA
Issue Date:
Research Org.:
Sandia National Lab. (SNL-CA), Livermore, CA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
913247
Patent Number(s):
7239443
Application Number:
11/479,340
Assignee:
EUV LLC (Santa Clara, CA)
Patent Classifications (CPCs):
Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10S - TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
G - PHYSICS G03 - PHOTOGRAPHY G03F - PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
47 OTHER INSTRUMENTATION

Citation Formats

Tichenor, Daniel A, Kubiak, Glenn D, and Lee, Sung Hun. Condenser optic with sacrificial reflective surface. United States: N. p., 2007. Web.
Tichenor, Daniel A, Kubiak, Glenn D, & Lee, Sung Hun. Condenser optic with sacrificial reflective surface. United States.
Tichenor, Daniel A, Kubiak, Glenn D, and Lee, Sung Hun. Tue . "Condenser optic with sacrificial reflective surface". United States. https://www.osti.gov/servlets/purl/913247.
@article{osti_913247,
title = {Condenser optic with sacrificial reflective surface},
author = {Tichenor, Daniel A and Kubiak, Glenn D and Lee, Sung Hun},
abstractNote = {Employing collector optics that has a sacrificial reflective surface can significantly prolong the useful life of the collector optics and the overall performance of the condenser in which the collector optics are incorporated. The collector optics is normally subject to erosion by debris from laser plasma source of radiation. The presence of an upper sacrificial reflective surface over the underlying reflective surface effectively increases the life of the optics while relaxing the constraints on the radiation source. Spatial and temporally varying reflectivity that results from the use of the sacrificial reflective surface can be accommodated by proper condenser design.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2007},
month = {7}
}

Patent:

Save / Share:

Works referenced in this record:

Use of molecular oxygen to reduce EUV-induced carbon contamination of optics
conference, August 2001

  • Malinowski, Michael E.; Grunow, Philip A.; Steinhaus, Chip
  • 26th Annual International Symposium on Microlithography, SPIE Proceedings
  • https://doi.org/10.1117/12.436677

Care and conditioning of optical surfaces for SRS beamlines
conference, January 1988


Improved theoretical reflectivities of extreme ultraviolet mirrors
conference, July 2000


Design of multilayer extreme-ultraviolet mirrors for enhanced reflectivity
journal, January 2000