Condenser optic with sacrificial reflective surface
Abstract
Employing collector optics that have a sacrificial reflective surface can significantly prolong the useful life of the collector optics and the overall performance of the condenser in which the collector optics are incorporated. The collector optics are normally subject to erosion by debris from laser plasma source of radiation. The presence of an upper sacrificial reflective surface over the underlying reflective surface effectively increases the life of the optics while relaxing the constraints on the radiation source. Spatial and temporally varying reflectivity that results from the use of the sacrificial reflective surface can be accommodated by proper condenser design.
- Inventors:
- Issue Date:
- Research Org.:
- Sandia National Lab. (SNL-CA), Livermore, CA (United States); EUV LLC, Santa Clara, CA (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1175848
- Patent Number(s):
- 7081992
- Application Number:
- 10/760,118
- Assignee:
- EUV LLC (Santa Clara, CA)
- Patent Classifications (CPCs):
-
G - PHYSICS G03 - PHOTOGRAPHY G03F - PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES
Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10S - TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- DOE Contract Number:
- AC04-94AL85000
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 2004 Jan 16
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 47 OTHER INSTRUMENTATION
Citation Formats
Tichenor, Daniel A., Kubiak, Glenn D., and Lee, Sang Hun. Condenser optic with sacrificial reflective surface. United States: N. p., 2006.
Web.
Tichenor, Daniel A., Kubiak, Glenn D., & Lee, Sang Hun. Condenser optic with sacrificial reflective surface. United States.
Tichenor, Daniel A., Kubiak, Glenn D., and Lee, Sang Hun. Tue .
"Condenser optic with sacrificial reflective surface". United States. https://www.osti.gov/servlets/purl/1175848.
@article{osti_1175848,
title = {Condenser optic with sacrificial reflective surface},
author = {Tichenor, Daniel A. and Kubiak, Glenn D. and Lee, Sang Hun},
abstractNote = {Employing collector optics that have a sacrificial reflective surface can significantly prolong the useful life of the collector optics and the overall performance of the condenser in which the collector optics are incorporated. The collector optics are normally subject to erosion by debris from laser plasma source of radiation. The presence of an upper sacrificial reflective surface over the underlying reflective surface effectively increases the life of the optics while relaxing the constraints on the radiation source. Spatial and temporally varying reflectivity that results from the use of the sacrificial reflective surface can be accommodated by proper condenser design.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Jul 25 00:00:00 EDT 2006},
month = {Tue Jul 25 00:00:00 EDT 2006}
}
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Works referenced in this record:
Publications and patents in nanotechnology
journal, January 2003
- Hullmann, Angela; Meyer, Martin
- Scientometrics, Vol. 58, Issue 3