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Title: Condenser optic with sacrificial reflective surface

Abstract

Employing collector optics that have a sacrificial reflective surface can significantly prolong the useful life of the collector optics and the overall performance of the condenser in which the collector optics are incorporated. The collector optics are normally subject to erosion by debris from laser plasma source of radiation. The presence of an upper sacrificial reflective surface over the underlying reflective surface effectively increases the life of the optics while relaxing the constraints on the radiation source. Spatial and temporally varying reflectivity that results from the use of the sacrificial reflective surface can be accommodated by proper condenser design.

Inventors:
; ;
Issue Date:
Research Org.:
Sandia National Lab. (SNL-CA), Livermore, CA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1175848
Patent Number(s):
7081992
Application Number:
10/760,118
Assignee:
EUV LLC (Santa Clara, CA)
Patent Classifications (CPCs):
Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10S - TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
G - PHYSICS G03 - PHOTOGRAPHY G03F - PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
47 OTHER INSTRUMENTATION

Citation Formats

Tichenor, Daniel A., Kubiak, Glenn D., and Lee, Sang Hun. Condenser optic with sacrificial reflective surface. United States: N. p., 2006. Web.
Tichenor, Daniel A., Kubiak, Glenn D., & Lee, Sang Hun. Condenser optic with sacrificial reflective surface. United States.
Tichenor, Daniel A., Kubiak, Glenn D., and Lee, Sang Hun. Tue . "Condenser optic with sacrificial reflective surface". United States. https://www.osti.gov/servlets/purl/1175848.
@article{osti_1175848,
title = {Condenser optic with sacrificial reflective surface},
author = {Tichenor, Daniel A. and Kubiak, Glenn D. and Lee, Sang Hun},
abstractNote = {Employing collector optics that have a sacrificial reflective surface can significantly prolong the useful life of the collector optics and the overall performance of the condenser in which the collector optics are incorporated. The collector optics are normally subject to erosion by debris from laser plasma source of radiation. The presence of an upper sacrificial reflective surface over the underlying reflective surface effectively increases the life of the optics while relaxing the constraints on the radiation source. Spatial and temporally varying reflectivity that results from the use of the sacrificial reflective surface can be accommodated by proper condenser design.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2006},
month = {7}
}

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Works referenced in this record:

Publications and patents in nanotechnology
journal, January 2003