Title: Ultrafast optical technique for the characterization of altered materials

Abstract

Disclosed herein is a method and a system for non-destructively examining a semiconductor sample (30) having at least one localized region underlying a surface (30a) through into which a selected chemical species has been implanted or diffused. A first step induces at least one transient time-varying change in optical constants of the sample at a location at or near to a surface of the sample. A second step measures a response of the sample to an optical probe beam, either pulsed or continuous wave, at least during a time that the optical constants are varying. A third step associates the measured response with at least one of chemical species concentration, chemical species type, implant energy, a presence or absence of an introduced chemical species region at the location, and a presence or absence of implant-related damage. The method and apparatus in accordance with this invention can be employed in conjunction with a measurement of one or more of the following effects arising from a time-dependent change in the optical constants of the sample due to the application of at least one pump pulse: (a) a change in reflected intensity; (b) a change in transmitted intensity; (c) a change in amore » polarization state of the reflected and/or transmitted light; (d) a change in the optical phase of the reflected and/or transmitted light; (e) a change in direction of the reflected and/or transmitted light; and (f) a change in optical path length between the sample's surface and a detector. « less

Inventors:

Maris, Humphrey J ^[1]

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1. Barrington, RI

Issue Date:

Tue Jan 06 00:00:00 EST 1998

Research Org.:

Brown Univ., Providence, RI (United States)

OSTI Identifier:

871314

Patent Number(s):

5706094

Assignee:

Brown University Research Foundation (Providence, RI)

Patent Classifications (CPCs):

G - PHYSICS G01 - MEASURING G01N - INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES

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G - PHYSICS G01 - MEASURING G01N - INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES

G01N21/1717 - {with a modulation of one or more physical properties of the sample during the optical investigation, e.g. electro-reflectance}

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DOE Contract Number:  

FG02-86ER45267

Resource Type:

Patent

Country of Publication:

United States

Language:

English

Subject:

ultrafast; optical; technique; characterization; altered; materials; disclosed; method; non-destructively; examining; semiconductor; sample; 30; localized; region; underlying; surface; 30a; selected; chemical; species; implanted; diffused; step; induces; transient; time-varying; change; constants; location; near; measures; response; probe; beam; pulsed; continuous; wave; time; varying; third; associates; measured; concentration; type; implant; energy; presence; absence; introduced; implant-related; damage; apparatus; accordance; employed; conjunction; measurement; following; effects; arising; time-dependent; due; application; pump; pulse; reflected; intensity; transmitted; polarization; light; phase; direction; path; length; detector; optical constants; transmitted light; third step; optical phase; continuous wave; probe beam; pump pulse; path length; optical path; chemical species; optical probe; transmitted intensity; chemical specie; localized region; selected chemical; semiconductor sample; optical technique; measured response; /356/