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Title: Ultrafast optical technique for the characterization of altered materials

Abstract

Disclosed herein is a method and a system for non-destructively examining a semiconductor sample (30) having at least one localized region underlying a surface (30a) through into which a selected chemical species has been implanted or diffused. A first step induces at least one transient time-varying change in optical constants of the sample at a location at or near to a surface of the sample. A second step measures a response of the sample to an optical probe beam, either pulsed or continuous wave, at least during a time that the optical constants are varying. A third step associates the measured response with at least one of chemical species concentration, chemical species type, implant energy, a presence or absence of an introduced chemical species region at the location, and a presence or absence of implant-related damage. The method and apparatus in accordance with this invention can be employed in conjunction with a measurement of one or more of the following effects arising from a time-dependent change in the optical constants of the sample due to the application of at least one pump pulse: (a) a change in reflected intensity; (b) a change in transmitted intensity; (c) a change in amore » polarization state of the reflected and/or transmitted light; (d) a change in the optical phase of the reflected and/or transmitted light; (e) a change in direction of the reflected and/or transmitted light; and (f) a change in optical path length between the sample's surface and a detector.« less

Inventors:
 [1]
  1. Barrington, RI
Issue Date:
Research Org.:
Brown Univ., Providence, RI (United States)
OSTI Identifier:
871314
Patent Number(s):
5706094
Assignee:
Brown University Research Foundation (Providence, RI)
Patent Classifications (CPCs):
G - PHYSICS G01 - MEASURING G01N - INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
DOE Contract Number:  
FG02-86ER45267
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
ultrafast; optical; technique; characterization; altered; materials; disclosed; method; non-destructively; examining; semiconductor; sample; 30; localized; region; underlying; surface; 30a; selected; chemical; species; implanted; diffused; step; induces; transient; time-varying; change; constants; location; near; measures; response; probe; beam; pulsed; continuous; wave; time; varying; third; associates; measured; concentration; type; implant; energy; presence; absence; introduced; implant-related; damage; apparatus; accordance; employed; conjunction; measurement; following; effects; arising; time-dependent; due; application; pump; pulse; reflected; intensity; transmitted; polarization; light; phase; direction; path; length; detector; optical constants; transmitted light; third step; optical phase; continuous wave; probe beam; pump pulse; path length; optical path; chemical species; optical probe; transmitted intensity; chemical specie; localized region; selected chemical; semiconductor sample; optical technique; measured response; /356/

Citation Formats

Maris, Humphrey J. Ultrafast optical technique for the characterization of altered materials. United States: N. p., 1998. Web.
Maris, Humphrey J. Ultrafast optical technique for the characterization of altered materials. United States.
Maris, Humphrey J. Tue . "Ultrafast optical technique for the characterization of altered materials". United States. https://www.osti.gov/servlets/purl/871314.
@article{osti_871314,
title = {Ultrafast optical technique for the characterization of altered materials},
author = {Maris, Humphrey J},
abstractNote = {Disclosed herein is a method and a system for non-destructively examining a semiconductor sample (30) having at least one localized region underlying a surface (30a) through into which a selected chemical species has been implanted or diffused. A first step induces at least one transient time-varying change in optical constants of the sample at a location at or near to a surface of the sample. A second step measures a response of the sample to an optical probe beam, either pulsed or continuous wave, at least during a time that the optical constants are varying. A third step associates the measured response with at least one of chemical species concentration, chemical species type, implant energy, a presence or absence of an introduced chemical species region at the location, and a presence or absence of implant-related damage. The method and apparatus in accordance with this invention can be employed in conjunction with a measurement of one or more of the following effects arising from a time-dependent change in the optical constants of the sample due to the application of at least one pump pulse: (a) a change in reflected intensity; (b) a change in transmitted intensity; (c) a change in a polarization state of the reflected and/or transmitted light; (d) a change in the optical phase of the reflected and/or transmitted light; (e) a change in direction of the reflected and/or transmitted light; and (f) a change in optical path length between the sample's surface and a detector.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1998},
month = {1}
}

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Works referenced in this record:

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