Etching process for improving the strength of a laser-machined silicon-based ceramic article
Abstract
A process for improving the strength of laser-machined articles formed of a silicon-based ceramic material such as silicon nitride, in which the laser-machined surface is immersed in an etching solution of hydrofluoric acid and nitric acid for a duration sufficient to remove substantially all of a silicon film residue on the surface but insufficient to allow the solution to unduly attack the grain boundaries of the underlying silicon nitride substrate. This effectively removes the silicon film as a source of cracks that otherwise could propagate downwardly into the silicon nitride substrate and significantly reduce its strength.
- Inventors:
-
- Palos Verdes, CA
- Covina, CA
- Issue Date:
- Research Org.:
- Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)
- OSTI Identifier:
- 867862
- Patent Number(s):
- 5022957
- Assignee:
- University of Southern California (Los Angeles, CA)
- Patent Classifications (CPCs):
-
C - CHEMISTRY C04 - CEMENTS C04B - LIME, MAGNESIA
- DOE Contract Number:
- AC05-84OR21400
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- etching; process; improving; strength; laser-machined; silicon-based; ceramic; article; articles; formed; material; silicon; nitride; surface; immersed; solution; hydrofluoric; acid; nitric; duration; sufficient; remove; substantially; film; residue; insufficient; allow; unduly; attack; grain; boundaries; underlying; substrate; effectively; removes; source; cracks; otherwise; propagate; downwardly; significantly; reduce; significantly reduce; silicon film; hydrofluoric acid; remove substantially; ceramic article; etching process; ceramic material; grain boundaries; silicon nitride; nitric acid; effectively removes; articles formed; based ceramic; silicon-based ceramic; move substantially; ceramic mater; machined surface; effectively remove; /216/65/134/252/
Citation Formats
Copley, Stephen M, Tao, Hongyi, and Todd-Copley, Judith A. Etching process for improving the strength of a laser-machined silicon-based ceramic article. United States: N. p., 1991.
Web.
Copley, Stephen M, Tao, Hongyi, & Todd-Copley, Judith A. Etching process for improving the strength of a laser-machined silicon-based ceramic article. United States.
Copley, Stephen M, Tao, Hongyi, and Todd-Copley, Judith A. Tue .
"Etching process for improving the strength of a laser-machined silicon-based ceramic article". United States. https://www.osti.gov/servlets/purl/867862.
@article{osti_867862,
title = {Etching process for improving the strength of a laser-machined silicon-based ceramic article},
author = {Copley, Stephen M and Tao, Hongyi and Todd-Copley, Judith A},
abstractNote = {A process for improving the strength of laser-machined articles formed of a silicon-based ceramic material such as silicon nitride, in which the laser-machined surface is immersed in an etching solution of hydrofluoric acid and nitric acid for a duration sufficient to remove substantially all of a silicon film residue on the surface but insufficient to allow the solution to unduly attack the grain boundaries of the underlying silicon nitride substrate. This effectively removes the silicon film as a source of cracks that otherwise could propagate downwardly into the silicon nitride substrate and significantly reduce its strength.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Jan 01 00:00:00 EST 1991},
month = {Tue Jan 01 00:00:00 EST 1991}
}
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