Etching process for improving the strength of a laser-machined silicon-based ceramic article
Abstract
A process is disclosed for improving the strength of laser-machined articles formed of a silicon-based ceramic material such as silicon nitride, in which the laser-machined surface is immersed in an etching solution of hydrofluoric acid and nitric acid for a duration sufficient to remove substantially all of a silicon film residue on the surface but insufficient to allow the solution to unduly attack the grain boundaries of the underlying silicon nitride substrate. This effectively removes the silicon film as a source of cracks that otherwise could propagate downwardly into the silicon nitride substrate and significantly reduce its strength. 1 figure.
- Inventors:
- Issue Date:
- OSTI Identifier:
- 7029064
- Patent Number(s):
- 5022957
- Application Number:
- PPN: US 7-414906
- Assignee:
- University of Southern California, Los Angeles, CA (United States)
- DOE Contract Number:
- AC05-84OR21400
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 29 Sep 1989
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE; SILICON NITRIDES; ETCHING; CRACK PROPAGATION; MECHANICAL PROPERTIES; REMOVAL; NITRIDES; NITROGEN COMPOUNDS; PNICTIDES; SILICON COMPOUNDS; SURFACE FINISHING; 360201* - Ceramics, Cermets, & Refractories- Preparation & Fabrication
Citation Formats
Copley, S M, Tao, H, and Todd-Copley, J A. Etching process for improving the strength of a laser-machined silicon-based ceramic article. United States: N. p., 1991.
Web.
Copley, S M, Tao, H, & Todd-Copley, J A. Etching process for improving the strength of a laser-machined silicon-based ceramic article. United States.
Copley, S M, Tao, H, and Todd-Copley, J A. Tue .
"Etching process for improving the strength of a laser-machined silicon-based ceramic article". United States.
@article{osti_7029064,
title = {Etching process for improving the strength of a laser-machined silicon-based ceramic article},
author = {Copley, S M and Tao, H and Todd-Copley, J A},
abstractNote = {A process is disclosed for improving the strength of laser-machined articles formed of a silicon-based ceramic material such as silicon nitride, in which the laser-machined surface is immersed in an etching solution of hydrofluoric acid and nitric acid for a duration sufficient to remove substantially all of a silicon film residue on the surface but insufficient to allow the solution to unduly attack the grain boundaries of the underlying silicon nitride substrate. This effectively removes the silicon film as a source of cracks that otherwise could propagate downwardly into the silicon nitride substrate and significantly reduce its strength. 1 figure.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1991},
month = {6}
}
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